Water replenishing device for PVD (Physical Vapor Deposition) equipment

Abstract

The utility model relates to the technical field of water replenishing devices for coating equipment, in particular to a water replenishing device for PVD (Physical Vapor Deposition) equipment, which is characterized in that a tank body heater is arranged on a water storage tank, one end of a water replenishing pipeline is connected to the top of the water storage tank, the other end of the water replenishing pipeline is connected to the PVD equipment, and a pipeline heater is arranged on the water replenishing pipeline; the water supplementing pipeline is provided with a flow controller, switch control valves are arranged on the portions, located on the two adjacent sides of the flow controller, of the water supplementing pipeline, when the sensor detects that the humidity in the PVD equipment is lower than a set value, the switch control valves are opened, and the flow controller monitors and controls the supplementing flow in real time. And automatic and accurate water replenishing of the PVD equipment is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating equipment water replenishing device technical field especially relates to a water replenishing device for PVD equipment. BACKGROUND

[0002] PVD (Physical Vapor Deposition, physical vapor deposition) is a kind of technology that material is converted from solid or liquid into gas state under vacuum environment, then is deposited on the surface of substrate to form thin film, the existing PVD equipment needs to control certain humidity range, in the prior art, when the humidity in PVD equipment is detected to be lower than set value, steam is pumped into water replenishing pipeline, and steam is replenished into PVD process chamber through water replenishing pipeline, however, the precision of existing water replenishing may not be accurate enough, leading to deviation of replenishment amount in process, affecting deposition effect and product quality, and the degree of automation is low, more manual intervention and monitoring are needed, manpower cost and the risk of operation error are increased, response speed is slow, for the demand of rapid change in process, the response speed of water replenishing device can not keep up with in time, leading to deviation of process condition. SUMMARY

[0003] Therefore, the utility model provides a water replenishing device for PVD equipment to solve the problems of poor water replenishing precision, degree of automation and response speed of the water replenishing device of existing PVD equipment.

[0004] In order to achieve the above purpose, the utility model provides a water replenishing device for PVD equipment, which is connected to the water replenishing pipeline of PVD equipment, and further comprises:

[0005] The water storage tank is used for storing liquid for water replenishment, and a tank heater is arranged on the water storage tank to heat the liquid; one end of the water replenishing pipeline is connected to the top of the water storage tank, and the other end is connected to the PVD equipment;

[0006] A pipeline heater is arranged on the water replenishing pipeline to keep the liquid in the water replenishing pipeline in steam state; a flow controller is arranged on the water replenishing pipeline to control the steam flow replenished into the PVD equipment; and a switch control valve is arranged on the water replenishing pipeline at the adjacent two sides of the flow controller to control the on-off of the water replenishing pipeline.

[0007] Preferably, a vacuum pump is connected to the outside of the water storage tank to extract air in the water storage tank.

[0008] Preferably, a vacuum gauge is connected to the outside of the water storage tank to monitor the vacuum degree in the water storage tank.

[0009] Preferably, a vacuum angle valve is connected between the water storage tank and the vacuum pump.

[0010] Preferably, a tank cover is connected to the top end of the water storage tank.

[0011] Preferably, the inner top end of the water storage tank is provided with a through opening communicated with the water supplement pipeline, and a sealing plate is slidably connected to the inner top end of the water storage tank, and one end of the sealing plate is connected with the tank cover through a connecting rope, and when the tank cover is turned open, the connecting rope is pulled to pull the sealing plate to slide to a position closing the through opening.

[0012] Preferably, a reset mechanism is arranged on the inner top end of the water storage tank at a side adjacent to the sealing plate, and when the tank cover is turned closed and the vacuum degree of the water storage tank is higher than a preset value, the reset mechanism is triggered to drive the sealing plate to slide back to a state of being in communication with the through opening.

[0013] Preferably, the reset mechanism is an electromagnet for magnetically attracting the sealing plate.

[0014] The beneficial effects of the utility model are as follows: the tank heater is arranged on the water storage tank, one end of the water supplement pipeline is connected to the top of the water storage tank, the other end is connected to the PVD equipment, the pipeline heater is arranged on the water supplement pipeline to keep the liquid in the water supplement pipeline in a vapor state, the flow controller is arranged on the water supplement pipeline, the on-off control valves are arranged on the water supplement pipeline at two sides adjacent to the flow controller, when the sensor detects that the humidity in the PVD equipment is lower than the set value, the on-off control valves are opened, and the flow into the water supplement pipeline is monitored and controlled in real time by the flow controller, during the water supplement process, the sensor continuously monitors the change of the water vapor value in the chamber, when the set water vapor value is reached, the control valve is closed, and the water supplement is stopped, and the whole process is realized through accurate control and feedback adjustment to achieve automatic and accurate water supplement for the PVD equipment. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0016] Figure 1 It is a whole structure schematic view of the utility model;

[0017] Figure 2 It is a structure schematic view of the tank cover when the water supplement pipeline is normally used for water supplement;

[0018] Figure 3 It is a structure schematic view of the tank cover when the tank cover is turned open;

[0019] Figure 4 It is a structure schematic view of the tank cover when the tank cover is turned closed and the sealing plate has not been reset immediately.

[0020] In the drawings, the marks are:

[0021] 1, water supply pipe; 2, water storage tank; 3, flow controller; 4, on-off control valve; 5, vacuum pump; 6, vacuum gauge; 7, vacuum angle valve; 8, tank cover; 9, through hole; 10, sealing plate; 11, connecting rope; 12, reset mechanism. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below with specific examples.

[0023] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present application should be understood as the common meaning understood by those skilled in the art to which the present application belongs. The "first", "second" and similar words used in the present application do not represent any order, quantity or importance, but are only used to distinguish different components. "Include" or "contain" and similar words mean that the elements or objects before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connected" or "connected" and similar words are not limited to physical or mechanical connection, but can include electrical connection, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to represent relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0024] As shown in Figure 1 A water replenishing device for a PVD device, comprising a water supply pipe 1 connected to the PVD device, and a water storage tank 2 for storing liquid for water replenishing, wherein the water storage tank 2 is provided with a tank heater for heating the liquid, one end of the water supply pipe 1 is connected to the top of the water storage tank 2, and the other end is connected to the PVD device, the water supply pipe 1 is provided with a pipe heater to keep the liquid in the water supply pipe 1 in a vapor state, the water supply pipe 1 is provided with a flow controller 3 for controlling the flow of vapor replenished into the PVD device, and on-off control valves 4 are provided on the water supply pipe 1 adjacent to both sides of the flow controller 3 for controlling the on-off of the water supply pipe 1.

[0025] The utility model discloses a water replenishing device based on the current PVD equipment, and is connected with the water replenishing pipeline 1 on the PVD equipment, further comprises the water storage tank 2, specifically, the water storage tank 2 can be made of corrosion -resistant material, is used for storing the liquid quality of water replenishing, is equipped with the box heater on the water storage tank 2, is used for heating liquid quality, one end of water replenishing pipeline 1 is connected with the top of water storage tank 2, the other end is connected with the PVD equipment, is equipped with pipeline heater on water replenishing pipeline 1, to make the liquid quality in water replenishing pipeline 1 keep vapor state, wherein, the box heater, pipeline heater can all adopt the current conventional heating band equipment, and when heating reaches the preset value, can automatically stop heating, to accurately control temperature, is equipped with flow controller 3 on water replenishing pipeline 1, specifically, flow controller 3 can adopt the current conventional gas mass flow controller (MFC), customizes 50Sccm range, accuracy ± 1%, fast response, can timely adjust the water replenishing amount according to the process demand, is used for controlling the vapor flow of supplementing into the PVD equipment, is equipped with switch control valve 4 on the adjacent two sides of flow controller 3 on water replenishing pipeline 1, specifically, switch control valve 4 can adopt the current conventional solenoid valve parts, is used for controlling the on-off of water replenishing pipeline 1, when the sensor detects that the humidity in the PVD equipment is lower than the set value, opens switch control valve 4, and the supplementing flow is monitored and controlled in real time by flow controller 3, in the water replenishing process, the sensor continuously monitors the change of water vapor value in the chamber, when reaching the set water vapor value, the control valve is closed, and the water replenishing is stopped. The whole process is realized through accurate control and feedback regulation, and automatic and accurate water replenishing of the PVD equipment is realized.

[0026] Wherein, the water pump can be arranged in the water storage tank 2, the water pump is started, the liquid quality in the water storage tank 2 is pumped into the water replenishing pipeline 1 through the connecting pipe, and steam is formed, the steam can also be directly heated in the water storage tank 2 to form steam, and flow through the water replenishing pipeline 1 and then supplement into the process chamber of the PVD equipment, the water storage tank 2 is installed close to the process chamber of the PVD equipment, the path of the steam to the process chamber is reduced, the heating device is added on the conveying pipeline, the steam in the pipeline is ensured not to liquefy, and the chamber can be sufficiently replenished, the electromagnetic valve is installed at the front end and the rear end of the flow controller 3, the electromagnetic valve is automatically opened when the set condition is reached, the water vapor in the chamber is ensured to be timely replenished, and the water replenishing head can be designed in a special structure, liquid quality can be uniformly sprayed in the PVD process area, and the effect and uniformity of water replenishing are improved, the electromagnetic valve is in a normal-off state when not replenishing water, impurities in the water storage tank 2 or the PVD equipment are avoided from entering the MFC, and blockage and pollution are caused.

[0027] In the embodiment of the utility model, as shown in Figure 1 The outer side of the water storage tank 2 is connected with the vacuum pump 5, air in the water storage tank 2 is drawn out, and impurities are avoided from mixing into the liquid quality to cause blockage and pollution.

[0028] In the embodiment of the utility model, as shown in Figure 1As shown, the outer side of the water storage tank 2 is connected with a vacuum gauge 6 for monitoring the vacuum degree in the water storage tank 2.

[0029] In the embodiment of the utility model, as shown in Figure 1 As shown, the water storage tank 2 is connected with a vacuum angle valve 7 between the vacuum pump 5 for controlling the opening and closing of the evacuation pipeline.

[0030] In the embodiment of the utility model, as shown in Figure 1 、 Figure 2 As shown, the top end of the water storage tank 2 is connected with a tank cover 8, which can be opened for overhauling and maintaining the water storage tank 2 and replenishing liquid in the water storage tank 2.

[0031] In the embodiment of the utility model, as shown in Figure 2 As shown, the top end of the water storage tank 2 is provided with a through port 9 communicated with the water replenishing pipeline 1, and the top end of the water storage tank 2 is slidably connected with a sealing plate 10, and one end of the sealing plate 10 is connected with a connecting rope 11 between the tank cover 8, so that when the tank cover 8 is turned open, as shown in Figure 3 The connecting rope 11 is pulled and the sealing plate 10 is pulled through the connecting rope 11 to make the sealing plate 10 slide to the position closing the through port 9, so that the sealing plate 10 closes the through port 9 when the tank cover 8 is opened for overhauling and maintaining or replenishing liquid, thereby avoiding the exposed water storage tank 2 from blocking and polluting the impurities of the water replenishing pipeline 1, and when the water is normally replenished, as shown in Figure 2 The sealing plate 10 is reset to the state of guiding the through port 9, and specifically, elastic components such as springs can be used to pull the sealing plate 10 to reset to guide the through port 9, but there is a problem that when the tank cover 8 is closed again, the sealing plate 10 is immediately reset and the air in the water storage tank 2 is not completely evacuated by the vacuum pump 5.

[0032] In the embodiment of the utility model, as shown in Figure 2 As shown, the top end of the water storage tank 2 is provided with a reset mechanism 12 on the side adjacent to the sealing plate 10, and when the tank cover 8 is turned off and the vacuum degree in the water storage tank 2 is higher than the preset value, the reset mechanism 12 is triggered to drive the sealing plate 10 to slide and reset, so that the through port 9 is in the state of being guided, thereby avoiding the problem that when the tank cover 8 is closed again, the sealing plate 10 is immediately reset and the air in the water storage tank 2 is not completely evacuated by the vacuum pump 5.

[0033] Specifically, the reset mechanism 12 can use existing conventional electromagnets and the like, and the electromagnet is electrically connected with the vacuum gauge 6, and when the tank cover 8 is turned off, as shown in Figure 4 The connecting rope 11 is relaxed, but the sealing plate 10 will not be immediately reset, but only when the air in the water storage tank 2 is completely evacuated by the vacuum pump 5, that is, when the vacuum gauge 6 monitors that the vacuum degree in the water storage tank 2 is higher than the preset value, the electromagnet is triggered to be electrified and magnetically adsorbed to the sealing plate 10, as shown in Figure 2 So that the sealing plate 10 is transversely reset and opens the through port 9.

[0034] If a water pump is arranged in the water storage tank 2, and the connecting pipe is connected to the water pump and pumped into the water supplementing pipe 1 to form steam, a switch valve can be arranged at the connecting pipe access opening 9, and the sealing plate 10 corresponds to the handle of the switch valve, that is, the same effect is achieved.

[0035] It should be understood by those of ordinary skill in the art that the above discussion of any of the embodiments is merely exemplary and is not intended to suggest that the scope of the present application is limited to these examples; the above embodiments or technical features in different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes of different aspects of the present application as described above, which are not provided in detail for the sake of brevity.

Claims

1. A water replenishing device for a PVD apparatus, comprising a water replenishing conduit (1) connected to the PVD apparatus, characterized in that, Also include: Water storage tank (2) for storing liquid water, the water storage tank (2) is provided with tank heater, for heating liquid, the water supply pipeline (1) one end is connected to the top of water storage tank (2), the other end is connected to the PVD device; The water supply pipeline (1) is provided with pipeline heater, so that the liquid in the water supply pipeline (1) is kept in vapor state, the water supply pipeline (1) is provided with flow controller (3), for controlling the steam flow into the PVD device, the water supply pipeline (1) is provided with switch control valve (4) on both sides of flow controller (3), for controlling the water supply pipeline (1) on-off.

2. A water replenishment device for a PVD apparatus according to claim 1, wherein The outer side of the water storage tank (2) is connected with vacuum pump (5), for extracting air in the water storage tank (2).

3. A water replenishment device for a PVD apparatus according to claim 2, wherein The outer side of the water storage tank (2) is connected with vacuum gauge (6), for monitoring the vacuum degree in the water storage tank (2).

4. The water replenishment device for a PVD apparatus according to claim 2, wherein The water storage tank (2) and vacuum pump (5) are connected with vacuum angle valve (7).

5. The water replenishing device for a PVD apparatus according to claim 1, wherein The top of the water storage tank (2) is connected with tank cover (8).

6. A water replenishment device for a PVD apparatus according to claim 5, wherein The top of the water storage tank (2) is provided with through hole (9) communicated with water supply pipeline (1), the top of the water storage tank (2) is slidably connected with sealing plate (10), one end of the sealing plate (10) and the tank cover (8) are connected with connecting rope (11), when the tank cover (8) is turned open, the connecting rope (11) is pulled, and the sealing plate (10) is pulled through the connecting rope (11), so that the sealing plate (10) slides to the position of closing the through hole (9).

7. A water replenishment device for a PVD apparatus according to claim 6, wherein The top of the water storage tank (2) is provided with reset mechanism (12) on the adjacent side of the sealing plate (10), when the tank cover (8) is turned off and the vacuum degree in the water storage tank (2) is higher than the preset value, the reset mechanism (12) is triggered to drive the sealing plate (10) to slide reset, so that the through hole (9) is in the state of conduction.

8. A water replenishment device for a PVD apparatus according to claim 7, wherein The reset mechanism (12) is electromagnet, for magnetic adsorption sealing plate (10).

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