Heat preservation device for silane gas circuit

Abstract

The utility model relates to the technical field of heat preservation devices, in particular to a heat preservation device for a silane gas circuit, heat exchange between silane in a pipeline and outside gas is isolated through vacuum in an inner cavity, the temperature of the silane is maintained, a supporting column penetrates through the inner cavity to connect the inner wall and the outer wall of an inner pipe, a heat bridge is formed, and the heat preservation effect is achieved. A channel is provided for heat exchange between silane and outside air, heat preservation of the silane is not facilitated, the first heat preservation layer is completely wrapped by the second heat preservation layer, the heat bridge is isolated from the outside, heat exchange between the silane and the outside through the heat bridge is prevented, and the heat preservation effect on the silane is further enhanced; the ring body and the ring body cavity are lengthened and flattened, the contact face between the ring body and the outer wall of the inner pipe head and the contact face between the ring body and the inner wall of the inner pipe tail are increased, the sealing performance of the sealing ring is improved, silane is prevented from leaking from a gap between the inner pipe head and the inner pipe tail and polluting the environment, air in the ring body cavity is extruded to generate counter-acting force on the ring body, the ring body protrudes outwards, and the sealing performance of the ring body is maintained.

Description

TECHNICAL FIELD

[0001] The utility model relates to a heat preservation device technical field, especially for a kind of heat preservation device for silane gas path. BACKGROUND

[0002] Silane is the compound of silicon and hydrogen, is the general term of a series of compounds, including methyl silane (Si H4), ethyl silane (Si 2H6) and some higher silicon hydrogen compound, general formula is Si nH2n+2. Among them, methyl silane is most common, sometimes methyl silane is also simply called silane, is a colorless toxic gas with stink at normal temperature and pressure.d-185 (liquid) 0.68;About-200 ℃ solidification, melting point-185 ℃, boiling point-112 ℃.Stable at normal temperature, completely decomposed into silicon and hydrogen when heated to 400 ℃.Flammable, explosive, explosive combustion occurs in air or halogen gas.Reacts with CC14 and metal halide.Slowly decomposes in water, almost insoluble in ethanol, diethyl ether, benzene, chloroform and carbon tetrachloride, etc., silane is the silicon source of single crystal silicon, polycrystalline silicon epitaxial wafer and silicon dioxide, silicon nitride, phosphor silicon glass, etc. Chemical vapor deposition process in semiconductor industry, and is widely used in the production and development of solar cells, silicon copying machine drum, photoelectric sensor, optical fiber and special glass, etc., silane is also the silicon source of manufacturing silicon-carbon negative electrode material, which can be decomposed into silicon-carbon negative electrode material with good structure and performance after high-temperature calcination.

[0003] Silane needs to maintain constant temperature when using, but the traditional silane gas path heat preservation device will appear thermal bridge phenomenon, so that the silane in the device exchanges heat with the outside, reduces the heat preservation effect. UTILITY MODEL CONTENTS

[0004] The main purpose of the utility model is to provide a kind of heat preservation device for silane gas path, to solve the problem that the traditional silane gas path heat preservation device appears thermal bridge phenomenon in the related technology, so that the silane in the device exchanges heat with the outside, reduces the heat preservation effect.

[0005] In order to achieve the above-mentioned purpose, according to one aspect of the utility model, a kind of heat preservation device for silane gas path is provided, including: pipe body, the pipe body includes protective shell and heat preservation layer, the protective shell is wrapped up heat preservation layer, prevents outside object from destroying heat preservation layer, the heat preservation layer includes first heat preservation layer and second heat preservation layer, the first heat preservation layer is located inside second heat preservation layer, provides first isolation barrier for silane, the second heat preservation layer insulates the thermal bridge of first heat preservation layer, provides second isolation barrier for silane;

[0006] Fixed block, the fixed block is fixedly arranged at the front and back ends of pipe body, the fixed block is equipped with a plurality of threaded holes, bolt passes through threaded hole and connects the pipe body at two ends.

[0007] Further, the first heat preservation layer comprises an inner tube, an inner tube head, a sealing ring and an inner tube tail, the inner tube provides a pipeline for silane gas, and the sealing ring increases the sealing performance between the inner tube head and the inner tube tail.

[0008] Further, the inner tube head is in the shape of a circular truncated cone and is fixed at one end of the inner tube, the diameter of the end of the inner tube head connected with the inner tube is larger than that of the other end, and the inner tube head connects the two ends of the inner tube when the inner tube head is inserted into the inner tube tail.

[0009] Further, the inner tube comprises an inner cavity and a support column, the inner cavity is in a vacuum state and prevents the silane in the inner tube from exchanging heat with the outside.

[0010] Further, the support column is arranged in the inner cavity and is fixedly connected with the inner and outer walls of the inner tube at two ends, thereby providing support force for the inner and outer walls of the first heat preservation layer and forming a heat bridge.

[0011] Further, the sealing ring comprises a ring body and a ring body cavity, a plurality of ring body cavities are arranged in the ring body, and the deformation ability of the sealing ring is increased.

[0012] Further, the second heat preservation layer is arranged between the protective shell and the first heat preservation layer, thereby strengthening the heat preservation effect of the pipe body.

[0013] Compared with the prior art, the utility model has the following beneficial effects: the vacuum in the inner cavity prevents the silane in the pipeline from exchanging heat with outside gas, thereby maintaining the temperature of the silane, but the support column connects the inner and outer walls of the inner tube and forms a heat bridge, thereby providing a channel for the silane to exchange heat with outside air, which is not conducive to the heat preservation of the silane, and the second heat preservation layer completely wraps the first heat preservation layer, thereby isolating the heat bridge from the outside, preventing the silane from exchanging heat with the outside through the heat bridge and further strengthening the heat preservation effect of the silane; the ring body and the ring body cavity are elongated and flattened, thereby increasing the contact surface of the ring body and the outer wall of the inner tube head and the inner wall of the inner tube tail, improving the sealing performance of the sealing ring, preventing the silane from leaking from the gap between the inner tube head and the inner tube tail and polluting the environment, and the air in the ring body cavity generates a reaction force on the ring body after being extruded, so that the ring body bulges outward, thereby maintaining the sealing performance of the ring body. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a whole schematic view of the utility model;

[0015] Figure 2 It is a schematic view of the internal structure of the utility model;

[0016] Figure 3 It is a schematic view of the heat preservation group structure of the utility model;

[0017] Figure 4 It is a schematic view of the first heat preservation layer structure of the utility model;

[0018] Figure 5 It is the cross section structure schematic view of the sealing ring of the utility model.

[0019] Illustration:

[0020] 1, the pipe body;

[0021] 2, the fixed block;

[0022] 3, the first heat preservation layer; 31, the inner tube; 32, the inner tube head; 33, the sealing ring; 34, the inner tube tail; 311, the inner cavity; 312, the support column; 331, the ring body; 332, the ring body cavity;

[0023] 4, the second heat preservation layer;

[0024] 5, the protective shell. DETAILED DESCRIPTION

[0025] In order to further illustrate the technical means and effects adopted by the utility model to achieve the predetermined utility model purposes, the specific embodiments, structures, features and effects according to the utility model are described in detail as follows in combination with the drawings and preferred embodiments.

[0026] Please refer to Figures 1 to 5 The embodiment provides a heat preservation device for a silane gas circuit, which comprises a pipe body 1, the pipe body 1 has two forms of straight pipes and elbow pipes, the pipe body 1 comprises a protective shell 5 and a heat preservation layer, the protective shell 5 wraps the heat preservation layer to prevent external objects from damaging the heat preservation layer, the heat preservation layer comprises a first heat preservation layer 3 and a second heat preservation layer 4, the first heat preservation layer 3 is arranged inside the second heat preservation layer 4 and provides a first isolation barrier for silane, the second heat preservation layer 4 is made of polystyrene foam plastic, has small density, light mass, good water absorption and closed pores, can effectively prevent heat exchange between objects on both sides and improve heat preservation effect, and the second heat preservation layer 4 insulates the thermal bridge of the first heat preservation layer 3 and provides a second isolation barrier for silane.

[0027] The fixed block 2 is fixedly arranged at the front end and the rear end of the pipe body 1, the fixed block 2 is provided with a plurality of threaded holes penetrating through the fixed block 2, bolts pass through the threaded holes to connect the two pipe bodies 1, and the straight pipes and the elbow pipes are connected according to needs, so that the gas conveying demand is met.

[0028] The first heat preservation layer 3 comprises an inner tube 31, an inner tube head 32, a sealing ring 33 and an inner tube tail 34, the inner tube 31 provides a pipeline for silane gas, the silane gas flows through the inner tube 31, the sealing ring 33 increases the sealing property between the inner tube head 32 and the inner tube tail 34, prevents gas leakage at the joint and pollutes the environment.

[0029] The inner tube head 32 is in the shape of a circular truncated cone and is fixed at one end of the inner tube 31. The diameter of the end of the inner tube head 32 connected to the inner tube 31 is larger than the diameter of the other end, so that the inner tube head 32 can be completely inserted into the inner tube tail 34, improving the sealing performance of the interface. When the inner tube head 32 is inserted into the inner tube tail 34, the two ends of the inner tube 31 are connected.

[0030] The inner tube 31 comprises an inner cavity 311 and a support column 312. The inner cavity 311 is in a vacuum state. The negative pressure of the inner cavity 311 causes the inner and outer walls of the inner tube 31 to be squeezed in the middle, preventing the silane in the inner tube 31 from exchanging heat with the outside, and enhancing the heat preservation effect of the tube body 1.

[0031] The support column 312 is arranged inside the inner cavity 311. The two ends of the support column 312 are fixedly connected to the inner and outer walls of the inner tube 31, respectively. The support column 312 lifts the inner and outer walls of the inner tube 31, providing support for the inner and outer walls of the inner tube 31, preventing the inner tube 31 from deforming, reducing the thickness of the inner cavity 311, reducing the heat preservation effect of the first heat preservation layer 3, and forming a heat bridge.

[0032] The sealing ring 33 comprises a ring body 331 and a ring body cavity 332. The ring body 331 is made of high-elastic rubber. The ring body 331 is provided with a plurality of ring body cavities 332. When the inner tube head 32 is inserted into the inner tube tail 34, the two are pressed against each other, causing the sealing ring 33 to deform and fill the gap between the inner tube head 32 and the inner tube tail 34, increasing the deformation ability of the sealing ring 33.

[0033] The second heat preservation layer 4 is located between the protective shell 5 and the first heat preservation layer 3, isolating the heat bridge from the outside and enhancing the heat preservation effect of the tube body 1.

[0034] The inner pipe head 32 is inserted into the inner pipe tail 34, the screw holes of the fixed blocks 2 are aligned with each other, the inner pipe head 32 is completely inserted into the inner pipe tail 34, the sealing ring 33 is deformed by extrusion, the friction between the outer wall of the inner pipe head 32 and the inner wall of the inner pipe tail 34 is reduced, the insertion of the inner pipe head 32 is facilitated, the working strength of workers is reduced, the ring body 331 and the ring body cavity 332 are stretched and flattened, the contact area between the outer wall of the inner pipe head 32 and the inner wall of the inner pipe tail 34 is increased, the sealing property of the sealing ring 33 is improved, the leakage of silane from the gap between the inner pipe head 32 and the inner pipe tail 34 is prevented, the environment is not polluted, the air in the ring body cavity 332 is extruded to generate a reaction force on the ring body 331, the ring body 331 is bulged outward, and the sealing property of the ring body 331 is maintained; after the inner pipe head 32 is completely inserted into the inner pipe tail 34, the bolts are inserted into the screw holes of the fixed blocks 2 and are tightened, the two pipe bodies 1 are fixed together, the bent pipe and the straight pipe are connected according to requirements, until the connected pipeline meets the requirements, the external silane is introduced into the first inner pipe tail 34, under the action of the pressure difference, the silane gas flows forward along the pipeline, the silane in the pipeline generates a greater pressure on the inner wall of the first heat preservation layer 3, so that the inner wall of the first heat preservation layer 3 has a tendency to expand outward, the supporting column 312 prevents the outward expansion of the inner wall of the first heat preservation layer 3, and the stability of the inner wall of the first heat preservation layer 3 is maintained; the vacuum in the inner cavity 311 isolates the silane in the pipeline from the external gas to exchange heat, and the temperature of the silane is maintained, but the supporting column 312 penetrates through the inner cavity 311 to connect the inner and outer walls of the inner pipe 31, a heat bridge is formed, a channel is provided for the silane to exchange heat with the external air, which is not conducive to the heat preservation of the silane, and the second heat preservation layer 4 completely wraps the first heat preservation layer 3, isolates the heat bridge from the external environment, prevents the silane from exchanging heat with the external environment through the heat bridge, and further enhances the heat preservation effect of the silane, so as to provide a stable silicon source for the silicon-carbon negative electrode material and improve the quality of the finished silicon-carbon negative electrode material.

[0035] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the preferred embodiment of the present application has been disclosed, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above-mentioned technical content without departing from the technical solution of the present application, and equivalent embodiments with equivalent changes and modifications are equivalent. Any modification, equivalent change and modification of the above-mentioned embodiments according to the technical essence of the present application are still within the scope of the technical solution of the present application.

Claims

1. A heat retaining device for a silane gas line, characterized by, The utility model relates to a kind of pipe body (1), the pipe body (1) includes protective shell (5) and heat preservation layer, the protective shell (5) is wrapped up heat preservation layer, prevent outside object to destroy heat preservation layer, the heat preservation layer includes first heat preservation layer (3) and second heat preservation layer (4), the first heat preservation layer (3) is located inside second heat preservation layer (4), provides first isolation barrier for silane, the second heat preservation layer (4) insulates the thermal bridge of first heat preservation layer (3), provides second isolation barrier for silane; Fixed block (2), the fixed block (2) is fixedly arranged at the front and back of pipe body (1), the fixed block (2) is equipped with a plurality of through screw holes, bolt passes through screw hole and connects two end pipe body (1). The first heat preservation layer (3) includes inner tube (31), inner tube head (32), sealing ring (33) and inner tube tail (34), the inner tube (31) provides pipeline for silane gas, the sealing ring (33) increases the sealing between inner tube head (32) and inner tube tail (34).

2. The heat retaining device for a silane gas line according to claim 1, wherein The inner tube head (32) is circular truncated cone, and is fixedly arranged at one end of the inner tube (31), the diameter of the one end of the inner tube head (32) connected with the inner tube (31) is greater than the diameter of the other end, and the inner tube head (32) is inserted into the inner tube tail (34), to connect the two ends of the inner tube (31).

3. A heat retaining device for a silane gas line according to claim 2, wherein The inner tube (31) includes inner cavity (311) and support column (312), the inner cavity (311) is in vacuum state, to prevent silane in the inner tube (31) from exchanging heat with the outside world.

4. The heat retaining device for a silane gas line according to claim 2, wherein The support column (312) is arranged inside the inner cavity (311), and the two ends of the support column (312) are fixedly connected with the inner and outer walls of the inner tube (31), to provide support force for the inner and outer walls of the first heat preservation layer (3), and form a thermal bridge.

5. A heat retaining device for a silane gas line according to claim 4, wherein The sealing ring (33) includes ring body (331) and ring body cavity (332), the ring body (331) is provided with a plurality of ring body cavities (332) inside, to increase the deformation capacity of the sealing ring (33).

6. The heat retaining device for a silane gas line according to claim 2, wherein The second heat preservation layer (4) is located between the protective shell (5) and the first heat preservation layer (3), to strengthen the heat preservation effect of the pipe body (1).

7. The heat retaining device for a silane gas line of claim 1, wherein, ​

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