Purification furnace

Abstract

The utility model discloses a purification furnace, the purification furnace comprises a cavity structure, the cavity structure is used for placing a reaction material, the cavity structure comprises an inner frame, an outer frame, an air inlet disc, an air outlet disc and a plurality of separators, the inner frame forms a ventilation space in a surrounding manner, and a material space for placing the reaction material is formed between the outer frame and the inner frame in a surrounding manner; the air inlet disc is located below the inner frame and the outer frame, the air outlet disc is located above the inner frame and the outer frame, the air outlet disc is connected with the inner frame and the outer frame, the separators are used for separating material space, each separator is located between the inner frame and the outer frame, and each separator is connected with the inner frame and the outer frame. The air outlet disc and the air inlet disc are each provided with a first ventilation hole communicating with the ventilation space, the inner frame is provided with a second ventilation hole communicating with the ventilation space and the material space, and the air inlet disc is provided with a third ventilation hole communicating with the material space. Through the arrangement, the material purification efficiency of the purification furnace can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of material purification, in particular to a purification furnace. BACKGROUND

[0002] The purification furnace is a device for purifying materials, commonly used in semiconductor, metal and chemical industries. Its main function is to remove impurities in the material by high-temperature heating to improve purity.

[0003] The purification furnace usually includes a vacuum purification furnace and an atmosphere purification furnace. In the atmosphere purification furnace, the material can be heated in reaction with process gas in an inert gas environment to achieve the effect of material purification. The inert gas can prevent the material from oxidizing with air, thereby improving the purity of the material. The atmosphere purification furnace is usually composed of a reaction chamber, an air inlet and an air outlet. The reaction chamber is used to place the material, the air inlet is used for the inlet of the process gas, and the air outlet is used for the outlet of the process gas. However, the reaction chamber in the prior art is usually a single chamber. In order to avoid mixing of different types of materials, only a single shape type of material can be placed in the reaction chamber, and different shapes of multiple materials cannot be placed, thereby reducing the material purification efficiency of the purification furnace.

[0004] Therefore, how to improve the purification efficiency of the purification furnace is a technical problem that needs to be solved by those skilled in the art. CONTENT OF THE INVENTION

[0005] In order to solve the problems of the prior art, the purpose of the present application is to provide a purification furnace with high purification efficiency.

[0006] In order to achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows:

[0007] A purification furnace, the purification furnace includes a cavity structure, the cavity structure is used for placing reaction material, the cavity structure includes an inner frame, an outer frame, an air inlet disc, an air outlet disc and a plurality of partition pieces. The inner frame surrounds a ventilation space, the outer frame is arranged around the inner frame, and the material space for placing the reaction material is formed between the outer frame and the inner frame. The air inlet disc is located below the inner frame and the outer frame, and the air inlet disc is connected to the inner frame and the outer frame. The air outlet disc is located above the inner frame and the outer frame, and the air outlet disc is connected to the inner frame and the outer frame. The partition piece is used to separate the material space, each partition piece is located between the inner frame and the outer frame, and each partition piece is connected to the inner frame and the outer frame. The air outlet disc and the air inlet disc are provided with first ventilation holes communicating with the ventilation space, the inner frame is provided with second ventilation holes communicating with the ventilation space and the material space, and the air inlet disc is provided with third ventilation holes communicating with the material space.

[0008] Further, along the up-down direction of the purification furnace, the air inlet disc has a first air inlet part overlapping the air passage space and a second air inlet part overlapping the material space, and the air outlet disc has an air outlet part overlapping the air passage space. The first air passage holes are uniformly arranged in the first air inlet part and the air outlet part; and the third air passage holes are uniformly arranged in the second air inlet part.

[0009] Further, the partition piece is uniformly provided with fourth air passage holes.

[0010] Further, the cavity structure comprises a middle air disc for separating the material space, the middle air disc is located between the air inlet disc and the air outlet disc and is perpendicular to the up-down direction of the purification furnace, and the middle air disc is located between the inner frame and the outer frame and connects the inner frame and the outer frame. The middle air disc is provided with fifth air passage holes, and the fifth air passage holes communicate the material spaces on the upper and lower sides of the middle air disc.

[0011] Further, the outer frame comprises a plurality of outer support pieces and a plurality of outer support columns. Each outer support column extends along the up-down direction of the purification furnace, and an outer support piece is arranged between adjacent two outer support columns. The inner frame comprises a plurality of inner support pieces and a plurality of inner support columns. Each inner support column extends along the up-down direction of the purification furnace, and an inner support piece is arranged between adjacent two inner support columns.

[0012] Further, each outer support column is formed with a first mounting slot with a notch facing the inner frame, each inner support column is formed with a second mounting slot with a notch facing the outer frame, and each partition piece is clamped with one first mounting slot and one corresponding second mounting slot.

[0013] Further, each outer support piece comprises an outer upper plate and an outer lower plate, the outer upper plate and the outer lower plate are connected with adjacent two outer support columns, each inner support piece comprises an inner upper plate and an inner lower plate, the inner upper plate and the inner lower plate are connected with adjacent two inner support columns, a first fixing slot is formed between the outer upper plate and the outer lower plate, a second fixing slot is formed between the inner upper plate and the inner lower plate, and the cavity structure comprises a middle air disc for separating the material space, the middle air disc is clamped with one first fixing slot and one corresponding second fixing slot.

[0014] Further, the inner upper plate and the inner lower plate are both provided with second air passage holes.

[0015] Further, the outer support column and the outer support piece are fixedly connected by bolts, and the inner support column and the inner support piece are fixedly connected by bolts.

[0016] Further, the air inlet disc is formed with a first annular protrusion, and the outer frame and the inner frame abut the two sides of the first annular protrusion respectively; and the air outlet disc is formed with a second annular protrusion, and the outer frame and the inner frame abut the two sides of the second annular protrusion respectively.

[0017] The purification furnace can separate the material space into multiple chambers through the partition, different chambers can place different shapes of materials, can avoid mixing of different types of materials, so that different shapes of materials can be purified at the same time, thereby improving the purification efficiency of the purification furnace. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 The overall structure schematic diagram of the cavity structure provided by the embodiment of the application is shown.

[0019] Figure 2 The cross-sectional view of the cavity structure provided by the embodiment of the application is shown.

[0020] Figure 3 The Figure 2 The enlarged schematic view at A in FIG. 1 is shown.

[0021] Figure 4 The Figure 2 The enlarged schematic view at B in FIG. 1 is shown. DETAILED DESCRIPTION

[0022] In order to make the personnel in the art better understand the scheme of the application, the technical scheme in the specific embodiment of the application will be clearly and completely described below in combination with the drawings in the embodiment of the application.

[0023] It should be noted that the "first", "second", and similar words used in the specification and claims of the application do not represent any order, quantity, or importance, but are only used to distinguish different components. Similarly, "one" or "a" and similar words do not represent a quantity limit, but represent the existence of at least one. "Multiple" or "several" represents at least two. Unless otherwise indicated, "before", "after", "left", "right", "below", and / or "above" and similar words are only for ease of description, and are not limited to a position or a spatial orientation. "Include" or "contain" and similar words mean that the elements or objects appearing before "include" or "contain" cover the elements or objects listed after "include" or "contain" and their equivalents, and do not exclude other elements or objects. "Connected" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0024] The singular forms "a", "said" and "the" used in the specification and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein means and includes any or all possible combinations of one or more associated listed items.

[0025] In order to clearly illustrate the technical scheme of the application, the following terms are defined as follows: A1: The first chamberFigure 1 The upper and lower are shown.

[0026] As Figure 1 and Figure 2 As shown in the drawings, the present application provides a purification furnace, which comprises a cavity structure 100 for placing reaction materials. Specifically, the cavity structure 100 comprises an inner frame 11, an outer frame 12, an air inlet disc 13, an air outlet disc 14 and a plurality of partitions 15. Among them, the inner frame 11 is surrounded to form an air passage space 101 for the passage of process gas in the cavity structure 100. The outer frame 12 is arranged around the inner frame 11, and the material space 102 is formed around the inner frame 11 and the outer frame 12. The material space 102 is used for placing reaction materials.

[0027] More specifically, along the up-down direction of the cavity structure 100, the air inlet disc 13 is located below the inner frame 11 and the outer frame 12, so that the air inlet disc 13 can support the inner frame 11 and the outer frame 12, and the air inlet disc 13 is connected to the inner frame 11 and the outer frame 12. The air outlet disc 14 is located above the inner frame 11 and the outer frame 12, the inner frame 11 and the outer frame 12 can support the air outlet disc 14, and the air outlet disc 14 is connected to the inner frame 11 and the outer frame 12. The partitions 15 are used to separate the material space 102, and each partition 15 is located between the inner frame 11 and the outer frame 12, and each partition 15 is connected to the inner frame 11 and the outer frame 12. In this way, the material space 102 can be divided into a plurality of chambers 1021 by the partitions 15, so that different shapes of materials can be placed in different chambers 1021, thereby avoiding mixing of different shapes of materials, and facilitating simultaneous purification reaction of different shapes of materials, to improve the material purification efficiency of the purification furnace.

[0028] Secondly, different types of materials that can react with the same process gas can also be placed in different chambers 1021, so that the purification furnace can simultaneously purify different shapes and sizes of materials, further improving the purification efficiency of the purification furnace.

[0029] In addition, different process gases can also be introduced into different chambers 1021, so that the materials corresponding to the process gases can be placed in the chambers 1021 for purification reaction, further improving the purification efficiency of the purification furnace.

[0030] More specifically, the air outlet disc 14 and the air inlet disc 13 are provided with first air holes 16 communicating with the air passage space 101, the inner frame 11 is provided with second air holes 17 communicating with the air passage space 101 and the material space 102, and the air inlet disc 13 is provided with third air holes 18 communicating with the material space 102.

[0031] In the embodiment, along the up-down direction of the cavity structure 100, the process gas enters into the ventilation space 101 from the first ventilation holes 16 on the gas inlet disc 13, and then enters into the material space 102 through the second ventilation holes 17 on the inner frame 11. Meanwhile, the process gas can also enter into the material space 102 through the third ventilation holes 18, so that the process gas can react with the material in the material space 102. After the reaction is completed, the process gas in the material space 102 enters into the ventilation space 101 through the second ventilation holes 17 on the inner frame 11, and then is discharged from the second ventilation holes 17 on the gas outlet disc 14, so as to realize the purification process of the material.

[0032] In the embodiment, the first ventilation holes 16 are uniformly arranged on the gas inlet disc 13 and the gas outlet disc 14 respectively, the second ventilation holes 17 are uniformly arranged on the inner frame 11, and the third ventilation holes 18 are uniformly arranged on the gas inlet disc 13. In this way, the process gas can uniformly enter into the material space 102 from the gas inlet disc 13, so as to improve the uniformity of the process gas in the material space 102, thereby avoiding that the process gas is not uniformly distributed in the material space 102 and the process gas is not fully reacted with the material, so as to avoid that the material needs to be purified twice due to insufficient purification of the material, and further improve the material purification efficiency of the purification furnace.

[0033] As an embodiment, along the up-down direction of the purification furnace, the gas inlet disc 13 has a first gas inlet part 131 which overlaps with the ventilation space 101 and a second gas inlet part 132 which overlaps with the material space 102, and the gas outlet disc 14 has a gas outlet part 141 which overlaps with the ventilation space 101. In the present application, the up-down direction of the purification furnace is the up-down direction of the cavity structure 100.

[0034] In the embodiment, the second gas inlet part 132 is arranged around the first gas inlet part 131, so as to avoid that the first gas inlet part 131 and the second gas inlet part 132 cross and overlap each other, thereby facilitating the gas inlet and gas outlet of the gas inlet disc 13.

[0035] Specifically, the first ventilation holes 16 are uniformly arranged on the first gas inlet part 131 and the gas outlet part 141. In this way, the uniformity of the process gas entering into the ventilation space 101 from the first ventilation holes 16 on the gas inlet disc 13 can be improved, and the uniformity of the process gas which has completed the reaction in the ventilation space 101 being discharged from the first ventilation holes 16 on the gas outlet disc 14 can also be improved, so as to improve the uniformity of the process gas in the material space 102.

[0036] More specifically, the third ventilation holes 18 are uniformly arranged on the second gas inlet part 132. In this way, the uniformity of the process gas entering into the material space 102 from the third ventilation holes 18 on the gas inlet disc 13 can be improved, and the uniformity of the process gas in the material space 102 can be further improved.

[0037] As an implementation, the partition 15 is uniformly provided with a fourth vent hole (not shown in the figure). In this way, the process gas in the two chambers 1021 adjacent to the partition 15 can flow through the fourth vent hole. Under the premise that the same process gas is introduced into the two chambers 1021 adjacent to the partition 15, the flow of the process gas in the above-mentioned two chambers 1021 can be adjusted through the fourth vent hole, thereby improving the uniformity of the process gas concentration in the above-mentioned two chambers 1021.

[0038] It should be noted that the fourth vent hole can also not be provided on the partition 15, so that the partition 15 only has the function of separating the material space 102. At this time, the process gas will not flow from the partition 15 to each other, so that different chambers 1021 can be introduced into different process gases, thereby being able to carry out purification reactions on different materials corresponding to different process gases, so as to further improve the material purification efficiency of the purification furnace. Therefore, the present application does not limit whether the fourth vent hole is provided on the partition 15.

[0039] As shown in Figure 1 As an implementation, the cavity structure 100 includes a middle gas disc 19 for separating the material space 102. Specifically, the middle gas disc 19 is located between the gas inlet disc 13 and the gas outlet disc 14, and the middle gas disc 19 is perpendicular to the up-down direction of the purification furnace, and the middle gas disc 19 is located between the inner frame 11 and the outer frame 12, and the middle gas disc 19 connects the inner frame 11 and the outer frame 12. In this way, the material space 102 can be further divided by the middle gas disc 19 to further increase the number of chambers 1021, so as to be able to increase the types of materials of different shapes and different purities contained in the cavity structure 100, and further improve the material purification efficiency of the purification furnace.

[0040] In the present embodiment, the middle gas disc 19 is provided with a fifth vent hole 191, and the fifth vent hole 191 communicates the material spaces 102 on the upper and lower sides of the middle gas disc 19. In this way, along the up-down direction of the cavity structure 100, the fifth vent hole 191 can communicate the chambers 1021 on the upper and lower sides of the middle gas disc 19, which is conducive to the flow of the process gas at the middle gas disc 19, so as to avoid that the process gas in the chamber 1021 located above the middle gas disc 19 is too low to cause incomplete reaction of the process gas with the material in the chamber, thereby improving the material purification efficiency of the purification furnace.

[0041] As an implementation, the outer frame 12 comprises a plurality of outer support members 121 and a plurality of outer support columns 122. Specifically, each of the outer support columns 122 extends along the up-down direction of the purification furnace, and one of the outer support members 121 is mounted between two adjacent outer support columns 122. In this way, the outer support members 121 are supported by the outer support columns 122, and the outer support members 121 surround the inner frame 11 to form the material space 102, so that the material performs the purification reaction in the cavity structure 100.

[0042] The inner frame 11 comprises a plurality of inner support members 111 and a plurality of inner support columns 112. Specifically, each of the inner support columns 112 extends along the up-down direction of the purification furnace, and one of the inner support members 111 is mounted between two adjacent inner support columns 112. In this way, the inner support members 111 are supported by the inner support columns 112, and the inner support members 111 surround the ventilation space 101, so that the process gas is ventilated in the cavity structure 100 through the ventilation space 101.

[0043] As an implementation, each of the outer support columns 122 is formed with a first mounting slot 1221, and the opening of the first mounting slot 1221 is arranged towards the inner frame 11. Each of the inner support columns 112 is formed with a second mounting slot 1121, and the opening of the second mounting slot 1121 is arranged towards the outer frame 12. Specifically, each of the partition members 15 is clamped with one of the first mounting slots 1221 and one of the second mounting slots 1121. In this way, the assembly process of the partition members 15 in the cavity structure 100 can be simplified, and the assembly efficiency of the cavity structure 100 can be improved. Moreover, the partition members 15 can be disassembled according to the size of the material, so as to avoid the interference of the partition members 15 with the placement of the material in the material space 102, thereby improving the adaptability of the purification furnace to materials of different sizes.

[0044] It should be noted that, in the present application, the outer frame 12 and the inner frame 11 are both substantially ring-shaped structures, and the outer frame 12 and the inner frame 11 are coaxially arranged. Each of the inner support columns 112 corresponds to one of the outer support columns 122 along the radial direction of the outer frame 12, so that each of the partition members 15 can be clamped with one of the first mounting slots 1221 and one of the second mounting slots 1121.

[0045] As shown in FIG. 1, the cavity structure 100 comprises an outer frame 12 and an inner frame 11. The outer frame 12 and the inner frame 11 are coaxially arranged, and the inner frame 11 is arranged in the outer frame 12. The outer frame 12 and the inner frame 11 are both substantially ring-shaped structures, and the outer frame 12 surrounds the inner frame 11. Figure 2As shown, as an embodiment, each outer support 121 comprises an outer upper plate 1211 and an outer lower plate 1212, both of which are connected with two adjacent outer struts 122, and each inner support 111 comprises an inner upper plate 1111 and an inner lower plate 1112, both of which are connected with two adjacent inner struts 112. Specifically, a first fixing groove 1213 is formed between the outer upper plate 1211 and the outer lower plate 1212, and the opening of the first fixing groove 1213 is arranged towards the inner frame 11. A second fixing groove 1113 is formed between the inner upper plate 1111 and the inner lower plate 1112, and the opening of the second fixing groove 1113 is arranged towards the outer frame 12. More specifically, each middle gas disc 19 is clamped with one first fixing groove 1213 and one corresponding second fixing groove 1113. In this way, the outer support 121, the inner support 111 and the middle gas disc 19 are in a splicing structure, so as to reduce the production cost of the cavity structure 100. In addition, the disassembly and assembly convenience of the cavity structure 100 can also be improved.

[0046] In the embodiment, along the radial direction of the inner frame 11, each first fixing groove 1213 corresponds to one second fixing groove 1113, so that each middle gas disc 19 is fixed with one first fixing groove 1213 and one second fixing groove 1113 at the same time.

[0047] As an embodiment, the inner upper plate 1111 and the inner lower plate 1112 are both provided with a second air hole 17. In this way, the chambers 1021 on the upper and lower sides of the middle gas disc 19 can both communicate with the air space 101, so as to facilitate the flow of process gas in the chambers 1021 on the upper and lower sides of the middle gas disc 19.

[0048] As shown in Figure 3 and Figure 4 As an embodiment, the outer struts 122 and the outer supports 121 are fixedly connected by bolts, and the inner struts 112 and the inner supports 111 are fixedly connected by bolts. In this way, the connection stability between the outer struts 122 and the outer supports 121 and the connection stability between the inner struts 112 and the inner supports 111 can be improved by the bolts, so as to improve the overall structural strength of the cavity structure 100.

[0049] As an embodiment, the gas inlet disc 13 is formed with a first annular protrusion 133, and the outer frame 12 and the inner frame 11 abut on both sides of the first annular protrusion 133, respectively. In this way, the positions of the outer frame 12 and the inner frame 11 on the gas inlet disc 13 can be limited by the first annular protrusion 133, so as to improve the structural stability of the cavity structure 100.

[0050] Specifically, the air outlet disc 14 is formed with a second annular protrusion 142, and the outer frame 12 and the inner frame 11 abut on two sides of the second annular protrusion 142, respectively. In this way, the positions of the outer frame 12 and the inner frame 11 on the air outlet disc 14 can be limited by the second annular protrusion 142, so as to further improve the structural stability of the cavity structure 100.

[0051] It should be understood that, for those skilled in the art, improvements or changes can be made according to the above description, and all these improvements and changes shall belong to the protection scope of the claims attached to this application.

Claims

1. A purification furnace, characterized in that, the purification furnace comprises a cavity structure for placing a reaction material, the cavity structure comprising: an inner frame, the inner frame being surrounded by a ventilation space; an outer frame, the outer frame being arranged around the inner frame, a material space for placing a reaction material being surrounded between the outer frame and the inner frame; an air inlet disc, the air inlet disc being located below the inner frame and the outer frame, the air inlet disc connecting the inner frame and the outer frame; an air outlet disc, the air outlet disc being located above the inner frame and the outer frame, the air outlet disc connecting the inner frame and the outer frame; a plurality of partitions for partitioning the material space, each of the partitions being located between the inner frame and the outer frame, each of the partitions connecting the inner frame and the outer frame; the air outlet disc and the air inlet disc are each provided with a first ventilation hole communicating with the ventilation space, the inner frame is provided with a second ventilation hole communicating between the ventilation space and the material space, and the air inlet disc is provided with a third ventilation hole communicating with the material space. 2.The purification furnace according to claim 1, characterized in that, in the up-down direction of the purification furnace, the air inlet disc has a first air inlet part overlapping with the ventilation space and a second air inlet part overlapping with the material space, and the air outlet disc has an air outlet part overlapping with the ventilation space; the first ventilation holes are uniformly provided in the first air inlet part and the air outlet part; the third ventilation holes are uniformly provided in the second air inlet part. 3.The purification furnace according to claim 1 or 2, characterized in that, the partitions are uniformly provided with fourth ventilation holes. 4.The purification furnace according to claim 1 or 2, characterized in that, the cavity structure comprises a middle air disc for partitioning the material space, the middle air disc being located between the air inlet disc and the air outlet disc and being perpendicular to the up-down direction of the purification furnace, and the middle air disc being located between the inner frame and the outer frame, the middle air disc connecting the inner frame and the outer frame; the middle air disc is provided with a fifth ventilation hole, the fifth ventilation hole communicating the material spaces on both sides of the middle air disc. 5.The purification furnace according to claim 1 or 2, characterized in that, the outer frame comprises: a plurality of outer support members; a plurality of outer support columns, each of the outer support columns extending in the up-down direction of the purification furnace, and one of the outer support members being mounted between two adjacent outer support columns; the inner frame comprises: a plurality of inner support members; a plurality of inner support columns, each of the inner support columns extending in the up-down direction of the purification furnace, and one of the inner support members being mounted between two adjacent inner support columns. 6.The purification furnace according to claim 5, characterized in that, each of the outer support columns is formed with a first mounting slot with a notch facing the inner frame, each of the inner support columns is formed with a second mounting slot with a notch facing the outer frame, and each of the partitions is clamped with one of the first mounting slots and a corresponding one of the second mounting slots. 7.The purification furnace according to claim 5, characterized in that, Each of the outer support members comprises an outer upper plate and an outer lower plate, both of which are connected with two adjacent outer struts, each of the inner support members comprises an inner upper plate and an inner lower plate, both of which are connected with two adjacent inner struts, a first fixing groove is formed between the outer upper plate and the outer lower plate, a second fixing groove is formed between the inner upper plate and the inner lower plate, the cavity structure comprises a middle air disc for separating the material space, the middle air disc is clamped with one of the first fixing grooves and a corresponding one of the second fixing grooves.

8. The purification furnace according to claim 7, characterized in that, the second air holes are formed on the inner upper plate and the inner lower plate.

9. The purification furnace according to claim 7, characterized in that, the outer struts and the outer support members are fixedly connected by bolts, and the inner struts and the inner support members are fixedly connected by bolts.

10. The purification furnace according to claim 1 or 2, characterized in that, the air inlet disc is formed with a first annular protrusion, and the outer frame and the inner frame abut against two sides of the first annular protrusion respectively; the air outlet disc is formed with a second annular protrusion, and the outer frame and the inner frame abut against two sides of the second annular protrusion respectively.

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