Rotary gas circuit structure and turntable feeding device

Abstract

The utility model relates to the technical field of semiconductor testing, and provides a rotary gas circuit structure and a turntable feeding device. The rotary gas circuit structure is provided with a central axis and comprises a fixed gas disc, a rotary gas disc and a fixed pressing seat, wherein the fixed gas disc is provided with a plurality of gas inlet channels which are arranged around the central axis at intervals; the rotary gas disc is provided with a plurality of gas outlet channels which are arranged around the central axis at intervals, and the rotary gas disc can rotate around the central axis relative to the fixed gas disc, so that one of the gas inlet channels and the gas outlet channels is selected to be communicated; the fixed pressing seat is arranged on the side, deviating from the rotary air disc, of the fixed air disc in the central axis direction, and the fixed pressing seat is elastically connected with the fixed air disc and used for pressing the fixed air disc to the rotary air disc. According to the rotary gas circuit structure, reliable connection of the fixed gas disc and the rotary gas disc is guaranteed, and abrasion between the fixed gas disc and the rotary gas disc is reduced; moreover, the structure is simple, the manufacturing cost and the occupied space are reduced, and integration with other structures is facilitated.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of semiconductor testing, in particular to a rotary air path structure and a rotary table feeding device. BACKGROUND

[0002] In semiconductor testing, a rotary table feeding device is usually used, which is provided with multiple stations, and a pneumatic element (such as a cylinder or a suction cup) may be needed for each station to perform a specific task. Therefore, a rotary air path is arranged in the rotary table feeding device to ensure that compressed air can be continuously and stably supplied to the pneumatic element of each station during the rotation of the rotary table.

[0003] In the related art, a gas slip ring is usually used to realize the rotary adsorption of a chip, but the gas slip ring has a high manufacturing cost and occupies a large space, which is not conducive to integrated arrangement with other structures. CONTENT OF THE UTILITY MODEL

[0004] Therefore, it is necessary to provide a rotary air path structure, which not only ensures reliable connection between a fixed air disc and a rotary air disc, reduces wear between the two, but also has a simple structure, reduces manufacturing cost and occupied space, and is conducive to integrated arrangement with other structures.

[0005] A rotary air path structure has a central axis and comprises a fixed air disc, a rotary air disc and a fixed pressure seat. The fixed air disc is provided with multiple air inlet channels arranged at intervals around the central axis. The rotary air disc is provided with multiple air outlet channels arranged at intervals around the central axis, and the rotary air disc can rotate relative to the fixed air disc around the central axis to selectively connect the multiple air inlet channels and the multiple air outlet channels. The fixed pressure seat is arranged on the side of the fixed air disc away from the rotary air disc along the central axis, and the fixed pressure seat is elastically connected to the fixed air disc to press the fixed air disc against the rotary air disc.

[0006] It can be understood that the multiple air inlet channels are used to connect a pneumatic source, and the multiple air outlet channels can be respectively connected to a gas terminal. Since the air inlet channels are arranged on the fixed air disc and the air outlet channels are arranged on the rotary air disc, the part connected to the pneumatic source can be fixed, the stability can be ensured, and the rotary air disc can rotate with the rotary table to ensure continuous air supply to each gas terminal and reduce the risk of pipeline winding. In this process, the fixed pressure seat is elastically connected to the fixed air disc to press the fixed air disc against the rotary air disc, which not only ensures reliable connection between the fixed air disc and the rotary air disc, reduces air leakage, but also reduces wear between the two, facilitates rotation of the rotary air disc. At the same time, such an arrangement has a simple structure, reduces manufacturing cost and occupied space, and is more conducive to integrated arrangement with other structures.

[0007] In some embodiments, the fixed pressing seat comprises a pressing disc and a plurality of elastic members, the plurality of elastic members are arranged at intervals around the central axis and abut between the pressing disc and the fixed air disc, and are used to apply a force to the fixed air disc to move closer to the rotating air disc.

[0008] In some embodiments, the fixed pressing seat further comprises a plurality of guide columns, the plurality of guide columns are arranged at intervals around the central axis and movably connected between the pressing disc and the fixed air disc.

[0009] In some embodiments, the plurality of guide columns and the plurality of elastic members are staggered and arranged at intervals around the central axis; and / or, one end of each guide column is fixed to the fixed air disc, and the other end is slidably connected to the pressing disc.

[0010] In some embodiments, the side of the fixed air disc facing the rotating air disc is provided with a pressing protrusion, the pressing protrusion is annularly arranged along the circumference of the fixed air disc and is pressed against the rotating air disc, and each air inlet channel penetrates the pressing protrusion.

[0011] In some embodiments, each air outlet channel has a first air inlet, the first air inlet is located on the side of the rotating air disc facing the fixed air disc, the rotating air disc is recessed with a first air groove at each first air inlet, and each first air groove is arranged in an arc shape around the central axis.

[0012] In some embodiments, each air inlet channel has a second air outlet, the second air outlet is arranged on the side of the fixed air disc facing the rotating air disc, the size of each second air outlet is smaller than the size of the first air groove, and the distance between any two adjacent second air outlets is greater than the distance between any two adjacent first air grooves.

[0013] In some embodiments, the fixed air disc is recessed with a second air groove at each second air outlet, each second air groove is arranged in an arc shape around the central axis, and the arc length of each second air groove is less than the arc length of each first air groove; or, the fixed air disc is provided with a circular hole at each second air outlet, and the diameter of the circular hole is smaller than the diameter of the air inlet channel.

[0014] In some embodiments, along the circumference of the rotating air disc, the distance between any two adjacent second air grooves is less than the arc length of the first air groove.

[0015] The application also provides a rotary table feeding device, comprising a rotary table structure, a plurality of operation terminals and the rotary air path structure, the rotary air path structure is arranged on the rotary table structure, the plurality of operation terminals are arranged along the circumference of the rotary table structure, and at least part of the operation terminals are respectively connected to an air outlet channel of the rotary air path structure. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0017] Figure 1 A schematic diagram of the rotary air path structure provided by an embodiment of the present application;

[0018] Figure 2 A first cross-sectional view of the rotary air path structure provided by an embodiment of the present application;

[0019] Figure 3 A second cross-sectional view of the rotary air path structure provided by an embodiment of the present application;

[0020] Figure 4 A partial cross-sectional view of the rotary air path structure provided by an embodiment of the present application;

[0021] Figure 5 A schematic diagram of the rotary air disc in the rotary air path structure provided by an embodiment of the present application;

[0022] Figure 6 A cross-sectional view of the rotary air disc in the rotary air path structure provided by an embodiment of the present application;

[0023] Figure 7 A schematic diagram of the fixed air disc in the rotary air path structure provided by an embodiment of the present application;

[0024] Figure 8 A cross-sectional view of the fixed air disc in the rotary air path structure provided by an embodiment of the present application;

[0025] Figure 9 A bottom view of the fixed air disc in the rotary air path structure provided by another embodiment of the present application;

[0026] Figure 10 A cross-sectional view of the fixed air disc in the rotary air path structure provided by another embodiment of the present application.

[0027] 10, fixed air disc; 11, press set protrusion; 20, rotating air disc; 30, fixed press seat; 31, press disc; 32, elastic member; 33, guide column; 34, guide bearing; 35, shaft part; 41, air inlet joint; 42, air outlet joint; 50, mounting base; 101, air inlet channel; 102, second air groove; 103, round hole; 104, first fixing hole; 105, first guide hole; 106, first sleeving hole; 201, air outlet channel; 202, first air groove; 203, second sleeving hole; 1011, air inlet section one; 1012, air inlet section two; 1013, second air inlet; 1014, second air outlet; 2011, air outlet section one; 2012, air outlet section two; 2013, first air inlet; 2014, first air outlet; 3101, second fixing hole; 3102, second guide hole. DETAILED DESCRIPTION

[0028] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application can be practiced without using some or all of these specific details, and that the present application is not limited to the specific embodiments disclosed below.

[0029] It should be noted that when a component is referred to as being "fixed" or "set" on another component, it can be directly on the other component or there can be a middle component. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or there can be a middle component. The terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar expressions used in the description of the present application are used for the purpose of illustration only and do not indicate the only orientation of the implementation.

[0030] In addition, the terms "first", "second", etc. are used only for the purpose of description and should not be understood as indicating or implying relative importance or a specific number of the technical features indicated. Therefore, the features defined as "first", "second", etc. can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0031] In the present application, unless specifically defined and limited otherwise, a first feature "on", "under", "above" or "over" a second feature can mean that the first feature is in direct contact with the second feature, or the first feature is in indirect contact with the second feature through an intermediate medium. Moreover, the first feature "on", "above" or "over" the second feature can mean that the first feature is directly above or obliquely above the second feature, or only means that the first feature is horizontally higher than the second feature. The first feature "under", "below" or "underneath" the second feature can mean that the first feature is directly below or obliquely below the second feature, or only means that the first feature is horizontally lower than the second feature.

[0032] Unless otherwise defined, all technical and scientific terms used in the present application have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terminology used in the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application. The use of the terms "and / or" in the present application includes any and all combinations of one or more of the associated listed items.

[0033] An embodiment of the present application provides a rotary table feeding device for chip feeding in semiconductor testing, comprising a rotary table structure, a plurality of operation terminals and a rotary air path structure. The plurality of operation terminals are arranged at intervals along the circumference of the rotary table structure, and each operation terminal can be used to perform picking, positioning and other operations in the chip feeding process. The rotary air path structure is arranged on the rotary table structure and is provided with a plurality of air outlet channels arranged at intervals along the circumference of the rotary table structure. At least part of the operation terminals are respectively connected to one air outlet channel in the rotary air path structure to meet the execution operation of the pneumatic element in the corresponding operation terminal. For example, when picking a chip, a vacuum adsorption method can be used. At this time, the operation terminal needs to be connected to one air outlet channel in the rotary air path structure.

[0034] Since the feeding position and the incoming position of the rotary table feeding device are usually determined during feeding, at least one of the plurality of operation terminals is a picking terminal for picking a chip at the incoming position, and then the rotary table structure is rotated to move to the feeding position to realize feeding. Therefore, if a traditional fixed air path is used, the air pipe will be wound with the rotation of the rotary table structure, which will affect the normal operation of the rotary table feeding device. Therefore, in the present embodiment, the rotary air path structure is arranged to meet the rotary gas supply, which can better adapt to the rotation of the rotary table structure, avoid air pipe knotting, winding and even pulling, damage, etc., and improve the safety and reliability of use. In addition, the arrangement of the rotary air path structure facilitates the timely and accurate response of the pneumatic element in the corresponding plurality of operation terminals during the rotation of the rotary table structure, thereby improving the efficiency.

[0035] However, in the related art, in order to meet the rotation of the gas supply with the rotation of the rotating air path structure of the rotating disc structure, a gas slip ring is usually used. However, the design and manufacture of the gas slip ring requires precise technology and high-quality materials, resulting in high overall manufacturing cost, especially for gas slip rings with high channel number or special material, the cost is higher. At the same time, the gas slip ring needs to be provided with various sealing structures, such as sealing rings, sealing gaskets and the like, the assembly of these sealing structures will inevitably increase the size of the gas slip ring, resulting in a large overall volume; and, part of the gas slip ring needs to consider the flow control problem while transmitting the gas, which results in the need to integrate the structure for flow control and the electrical signal transmission structure for controlling the structure, the integration of these structures will increase the size of the gas slip ring, and further result in a large occupied space.

[0036] To this end, the rotating air path structure provided by another embodiment of the present application can meet the rotation of the gas supply without using a gas slip ring, the overall structure is simple, easy to manufacture, and is not limited by precise technology and materials, thereby reducing the manufacturing cost; and without the need to integrate various sealing structures, flow control structures and electrical signal transmission structures, the overall structure is more simplified, the structure is more compact, the overall size is reduced, thereby reducing the occupied space, and being more conducive to integrated assembly with other structures.

[0037] The rotating air path structure is described in detail below.

[0038] Please refer to Figures 1 to 3 , for example, the rotating air path structure has a central axis (for example, Z axis) and includes a fixed gas disc 10 and a rotating gas disc 20, the fixed gas disc 10 is provided with a plurality of gas inlet channels 101 arranged at intervals around the central axis, and the rotating gas disc 20 is provided with a plurality of gas outlet channels 201 arranged at intervals around the central axis. The rotating gas disc 20 can be connected with the rotating part in the rotating disc structure and rotates around the Z axis under the action of the rotation thereof, so as to selectively connect the plurality of gas inlet channels 101 and the plurality of gas outlet channels 201. The fixed gas disc 10 can be connected with the fixed part in the rotating disc structure to ensure the assembly stability and facilitate the connection with the gas source.

[0039] It can be understood that, since the air inlet channel 101 is arranged on the fixed air disc 10, that is, the fixed air disc 10 needs to be connected to the air supply source for realizing air supply, the air supply source and the fixed air disc 10 can be communicated by using the air inlet joint 41 and the air inlet pipe. Therefore, it is necessary to ensure that the fixed air disc 10 will not rotate with the rotating part of the rotating disc mechanism, to ensure the stability of the connection at the air inlet, and to reduce the problems such as line winding. In actual use, a flow divider can also be connected between the air supply source and the plurality of air inlet channels 101 of the fixed air disc 10 to perform flow division. At the same time, since the plurality of air outlet channels 201 of the rotating air disc 20 correspond to the pneumatic elements of one operating terminal respectively, the rotating air disc 20 needs to rotate with the rotating part of the rotating disc mechanism to adapt to the rotation of the corresponding operating terminal and continuous air supply, and to reduce the pipe winding.

[0040] Please continue to refer to Figures 1 to 3 Further, the rotating air path structure further comprises a fixed pressing seat 30 arranged on the side of the fixed air disc 10 away from the rotating air disc 20 along the Z axis, and the fixed pressing seat 30 is elastically connected with the fixed air disc 10 for pressing the fixed air disc 10 on the rotating air disc 20. That is, due to the elastic connection between the fixed pressing seat 30 and the fixed air disc 10, the fixed air disc 10 can be elastically pressed on the rotating air disc 20, that is, on the basis of ensuring the pressing cooperation between the two, the fixed air disc 10 also has a certain floating trend along the Z axis.

[0041] That is, the pressing cooperation between the fixed air disc 10 and the rotating air disc 20 is used to ensure the sealing between the two and reduce the risk of air leakage; and such a setting does not need to specially add a sealing structure between the fixed air disc 10 and the rotating air disc 20, which simplifies the structure, reduces the overall structure size, and further reduces the occupied space during assembly, which is more conducive to integrated assembly with other structures. Moreover, the elastic floating of the fixed air disc 10 can avoid the complete abutment of the fixed air disc 10 and the rotating air disc 20 to limit the rotation of the rotating air disc 20, thereby reducing the wear between the two and facilitating the rotation of the rotating air disc 20 to ensure the rotating air supply. In addition, since no structure for flow control needs to be arranged on the air inlet channel 101 and the air outlet channel 201, no structure for electrical signal transmission needs to be integrated, which further simplifies the structure and reduces the overall structure size.

[0042] Please continue to refer to Figures 1 to 3Optionally, the fixed pressing base 30 comprises a pressing disc 31 and a plurality of elastic members 32, the plurality of elastic members 32 are arranged at intervals around the Z axis and abut between the pressing disc 31 and the fixed air disc 10, and each elastic member 32 is used for applying an action force to the fixed air disc 10 to move close to the rotating air disc 20. It can be understood that the pressing disc 31 is arranged to be adapted to the size of the fixed air disc 10, so as to ensure that there is sufficient connecting area between the two, thereby improving the connection reliability. On this basis, the plurality of elastic members 32 are arranged to realize the elastic connection between the pressing disc 31 and the fixed air disc 10, and the plurality of elastic members 32 can disperse the stress, thereby further improving the connection reliability.

[0043] As shown in Figures 1 to 4 the actual use, a plurality of first fixing holes 104 can be recessed on the side of the fixed air disc 10 facing the pressing disc 31 and moving close to the rotating air disc 20, and a plurality of second fixing holes 3101 can be recessed on the side of the pressing disc 31 facing away from the fixed air disc 10, the plurality of first fixing holes 104 and the plurality of second fixing holes 3101 are arranged at intervals around the Z axis, and each first fixing hole 104 and each second fixing hole 3101 correspond one by one and are correspondingly installed with one elastic member 32. The axial direction of each elastic member 32 is along the Z axis, so that the axial ends of each elastic member 32 are correspondingly inserted into a first fixing hole 104 and a second fixing hole 3101, respectively, to meet the assembly. Of course, only the pressing disc 31 can be provided with the second fixing hole 3101, or only the fixed air disc 10 can be provided with the first fixing hole 104, as long as the reliable assembly of each elastic member 32 is met, which is only used as an example here.

[0044] In this embodiment, due to the assembly mode of each elastic member 32, each elastic member 32 can meet the elastic floating on the Z axis, and each elastic member 32 also has a certain flexibility in the horizontal direction, thereby further reducing the wear between the fixed air disc 10 and the rotating air disc 20.

[0045] Further, the fixed pressing base 30 further comprises a plurality of guide columns 33, the plurality of guide columns 33 are arranged at intervals around the Z axis and are movably connected between the pressing disc 31 and the fixed air disc 10. It can be understood that, due to the elastic connection between the pressing disc 31 and the fixed air disc 10 through the elastic member 32, the fixed air disc 10 has elastic floating along the Z axis, so that the guide columns 33 can guide the floating of the fixed air disc 10, thereby reducing the horizontal deviation between the fixed air disc 10 and the rotating air disc 20 as much as possible. Moreover, due to the interval arrangement of the plurality of guide columns 33, the stress is more uniform, so that the fixed air disc 10 can float synchronously at all places in the circumferential direction, thereby reducing the skew amount of the fixed air disc 10, further ensuring the sealing between the fixed air disc 10 and the rotating air disc 20, and increasing the stability and guiding accuracy.

[0046] In actual assembly, each guide column 33 is fixed to the side of the fixed gas disc 10 away from the rotating gas disc 20, and the pressure plate 31 is provided with a plurality of second guide holes 3102 arranged at intervals around the Z axis, each guide column 33 is respectively inserted into a second guide hole 3102, and is connected to the pressure plate 31 through a guide bearing 34, so as to realize the sliding connection of each guide column 33 and the pressure plate 31. Each guide column 33 can move in the corresponding second guide hole 3102 with the elastic floating of the fixed gas disc 10, so as to improve the guiding effect and reduce the wear by cooperating with the guide bearing 34.

[0047] Of course, the side of the fixed gas disc 10 away from the rotating gas disc 20 is also provided with a plurality of first guide holes 105, each guide column 33 is correspondingly inserted into a first fixed hole 104, so as to increase the connection area of the guide column 33 and the fixed gas disc 10 and improve the connection reliability.

[0048] As shown in Figure 1 In some specific embodiments, a plurality of guide columns 33 and a plurality of elastic members 32 are staggered and spaced around the central axis. Such arrangement can ensure that each guide column 33 and each elastic member 32 are independent of each other and do not interfere with each other, which is beneficial for independent installation and replacement, simplifying the maintenance work; and it is also helpful to disperse stress and reduce assembly wear, thereby prolonging the service life. In addition, the cooperation of the plurality of guide columns 33 and the plurality of elastic members 32 improves the redundancy of the rotating gas path structure, so that even if some elastic members 32 or guide columns 33 fail, the use of the rotating gas path structure is less affected, improving safety.

[0049] Further, the elastic member 32 is a spring, for example, a compression spring. The elastic member 32 is provided with four, and the guide column 33 is also provided with four. It can be understood that the number of elastic members 32 and guide columns 33 should not be too much, if it is too much, the holes on the fixed gas disc 10 and the pressure plate 31 are increased, which is easy to weaken the structural strength of the two; of course, the number of elastic members 32 and guide columns 33 should not be too small, if it is too small, the stress is too concentrated, and if it fails, it will have a great impact, and even cause the rotating gas path structure to be unable to be used normally. Alternatively, the number of elastic members 32 and guide columns 33 can be three, five, six, etc. In actual use, the number can be adjusted according to the size of the pressure plate 31 and the fixed gas disc 10, which is only used as an example here.

[0050] As shown in Figures 1 to 3As shown, in some embodiments, the pressure disc 31 is provided with a shaft portion 35 protruding from one side of the pressure disc 31 along the Z-axis direction, the fixed air disc 10 is provided with a first sleeving hole 106 for sleeving the shaft portion 35, and the rotating air disc 20 is provided with a second sleeving hole 203 for sleeving the shaft portion 35. The shaft portion 35 is provided with a through hole, which is beneficial to cooperate with the rotating disc structure. The rotating air disc 20 is further connected with a mounting base 50, the size of the mounting base 50 is greater than that of the rotating air disc 20, and the mounting base 50 can be used to connect the operation terminal described above. The mounting base 50 also sleeves the aforementioned shaft portion 35.

[0051] Please refer to Figure 4 , Figure 7 and Figure 8 , as some examples, the fixed air disc 10 is provided with a pressing protrusion 11 protruding from one side of the fixed air disc 10, the pressing protrusion 11 is annularly arranged along the circumferential direction of the fixed air disc 10 and is pressed against the rotating air disc 20, and each air inlet channel 101 penetrates the pressing protrusion 11. That is, by protruding the pressing protrusion 11 relative to the fixed air disc 10, when the pressing protrusion 11 is pressed against the rotating air disc 20, the contact area between the fixed air disc 10 and the rotating air disc 20 is reduced, thereby reducing wear. At the same time, the arrangement of the pressing protrusion 11 plays a restraining role on the communication space of the air inlet channel 101 and the air outlet channel 201 between the fixed air disc 10 and the rotating air disc 20, thereby reducing the range that needs to be sealed and facilitating better sealing.

[0052] Please refer to Figures 4 to 8 Optionally, each air outlet channel 201 has a first air inlet 2013 and a first air outlet 2014, each first air inlet 2013 is located on the side of the rotating air disc 20 facing the fixed air disc 10 to communicate with each air inlet channel 101. Each first air outlet 2014 is arranged on the outer circumferential surface of the rotating air disc 20, and the axis thereof extends along the radial direction of the rotating air disc 20, that is, the first air outlet 2014 and the first air inlet 2013 corresponding to the same air outlet channel 201 are arranged at an angle. Such an arrangement not only facilitates the cooperation between the rotating air disc 20 and the fixed air disc 10, but also facilitates the connection between the rotating air disc 20 and other pneumatic elements, thereby reducing assembly interference. Each first air outlet 2014 is provided with an air outlet connector 42. The air outlet channel 201 includes an air outlet first section 2011 and an air outlet second section 2012, which are in communication and arranged at an angle, the air outlet first section 2011 extends along the Z-axis direction and communicates with the air inlet channel 101 through the first air inlet 2013, and the air outlet second section 2012 extends along the radial direction and cooperates with the air outlet connector 42 through the first air outlet 2014. The air outlet connector 42 is connected to the pneumatic element in cooperation with the air outlet pipe.

[0053] Further, each of the air inlet channels 101 has a second air inlet 1013 and a second air outlet 1014. Each of the second air inlets 1013 is arranged on the outer circumferential surface of the fixed air disc 10, and the axis thereof is along the radial direction of the fixed air disc 10. Each of the second air outlets 1014 is arranged on the side of the fixed air disc 10 away from the pressure disc 31 along the Z-axis (or the side facing the rotating air disc 20 along the Z-axis). The second air inlet 1013 and the second air outlet 1014 are also arranged at an angle, which is beneficial for the connection of the pipeline with the gas supply source and reduces interference. An air inlet connector 41 is arranged at each of the second air inlets 1013. The air inlet channel 101 includes an air inlet first section 1011 and an air inlet second section 1012, which are connected and arranged at an angle. The air inlet first section 1011 extends along the radial direction and cooperates with the air inlet connector 41 through the second air inlet 1013. The air inlet second section 1012 extends along the Z-axis direction and cooperates with the air outlet channel 201 through the second air outlet 1014. The air inlet connector 41 cooperates with the air inlet pipe to be connected to the gas supply source.

[0054] Please continue to refer to Figures 4 to 8 Further, the rotating air disc 20 is concavely provided with a first air groove 202 at each of the first air inlets 2013, and each of the first air grooves 202 is arranged in an arc shape around the Z-axis.

[0055] It can be understood that the arrangement of the first air groove 202 is equivalent to forming an air cavity between the fixed air disc 10 and the rotating air disc 20 for gas flow. Such an arrangement is beneficial for increasing the area of the air inlet channel 101 at the first air inlet 2013, facilitating sufficient reception of the gas input from the air inlet channel 101 during rotation, and ensuring continuous gas supply. On the other hand, the arc-shaped first air groove 202 ensures uniform distribution of the gas flow along the circumferential direction of the rotating air disc 20, improving the aerodynamic efficiency and performance. In addition, the independent arrangement of each of the first air grooves 202 is equivalent to forming multiple independent air cavities between the fixed air disc 10 and the rotating air disc 20. When the vacuum of part of the air path is destroyed, it will not affect the vacuum negative pressure of the adjacent air path.

[0056] Further, the size of each of the second air outlets 1014 is smaller than the size of the first air groove 202. The first air groove 202 is used to form an air cavity to receive the gas flow response from the air inlet channel 101, so as to ensure that the size of the first air groove 202 is larger, which can accelerate the response speed of the gas flow to meet the demand for gas flow during rotation.

[0057] Further, the distance between any two adjacent second gas outlets 1014 is greater than the distance between any two adjacent first gas grooves 202. The circumferential dimension of the joint between the fixed gas disc 10 and the rotating gas disc 20 is the same, so such an arrangement can ensure that each first gas groove 202 has a large extension length along the rotating gas disc 20, so as to fully receive the airflow response from the air inlet channel 101 and ensure continuous air supply during rotation.

[0058] Referring to Figures 4 to 8 , as another example, the fixed gas disc 10 is concave at each second gas outlet 1014 and has a second gas groove 102, each second gas groove 102 is arranged in an arc around the Z-axis, and the arc length of each second gas groove 102 is less than the arc length of each first gas groove 202. That is, the use of the second gas groove 102 increases the airflow space of the fixed gas disc 10 at the second gas outlet 1014, thereby increasing the docking accuracy and docking area of the first gas groove 202, ensuring that the air inlet channel 101 and the air outlet channel 201 can be fully communicated during rotation. Moreover, the cooperation of the arc-shaped first gas groove 202 and the second gas groove 102 can reduce the pressure loss of the gas during action, further improving the response speed.

[0059] Further, along the circumference of the rotating gas disc 20, the distance between any two adjacent second gas grooves 102 is less than the arc length of the first gas groove 202. Such an arrangement ensures that there is always a second gas groove 102 in communication with the rotating gas disc 20 when it rotates to different angles, ensuring the continuity of the rotating air supply.

[0060] Referring to Figure 4 , Figure 5 , Figure 9 and Figure 10 Alternatively, the fixed gas disc 10 is provided with a circular hole 103 at each second gas outlet 1014, and the diameter of the circular hole 103 is less than the diameter of the air inlet channel 101. That is, the use of the circular hole 103 reduces the mating area of the air inlet channel 101 and the air outlet channel 201, so that during rotation of the rotating gas disc 20, each air outlet channel 201 and each air inlet channel 101 is in a short-term disconnected state; that is, the first gas groove 202 rotates to the area between any two adjacent circular holes 103, so that the first gas groove 202 is temporarily blocked by the fixed gas disc 10 until the rotating gas disc 20 rotates to the first gas groove 202 and the circular hole 103 downstream in the rotating direction. In this way, it can be used for intermittent air supply, saving energy and improving efficiency.

[0061] Any combination of the technical features in the above-described embodiments can be made, and for the sake of brevity, not all possible combinations are described, however, it is to be understood that the application embraces all such possible combinations.

[0062] The above-described embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A rotary gas circuit structure, characterized by, The application relates to a rotary valve with a central axis (Z) and comprising: a fixed gas disc (10) provided with a plurality of air inlet channels (101) arranged at intervals around the central axis (Z); a rotary gas disc (20) provided with a plurality of air outlet channels (201) arranged at intervals around the central axis (Z), the rotary gas disc (20) being capable of rotating relative to the fixed gas disc (10) around the central axis (Z) so as to selectively connect the plurality of air inlet channels (101) and the plurality of air outlet channels (201); a fixed pressing base (30) arranged on the side of the fixed gas disc (10) away from the rotary gas disc (20) along the central axis direction, the fixed pressing base (30) being elastically connected with the fixed gas disc (10) and used for pressing the fixed gas disc (10) against the rotary gas disc (20).

2. The rotary gas path structure according to claim 1, characterized by, The fixed pressing base (30) comprises a pressing disc (31) and a plurality of elastic members (32), the plurality of elastic members (32) are arranged at intervals around the central axis (Z) and abut between the pressing disc (31) and the fixed gas disc (10), and are used for applying an approaching force to the fixed gas disc (10) towards the rotary gas disc (20).

3. The rotary gas path structure according to claim 2, characterized by The fixed pressing base (30) further comprises a plurality of guide columns (33), the plurality of guide columns (33) are arranged at intervals around the central axis (Z) and are movably connected between the pressing disc (31) and the fixed gas disc (10).

4. The rotary gas circuit structure according to claim 3, characterized in that, The plurality of guide columns (33) and the plurality of elastic members (32) are staggered and arranged at intervals around the central axis (Z); and / or, one end of each guide column (33) is fixed to the fixed gas disc (10), and the other end is slidably connected to the pressing disc (31).

5. The rotary gas path structure according to claim 1, characterized by The side of the fixed gas disc (10) towards the rotary gas disc (20) is convexly provided with a pressing convex (11), the pressing convex (11) is annularly arranged along the circumferential direction of the fixed gas disc (10) and is pressed against the rotary gas disc (20), and each air inlet channel (101) penetrates through the pressing convex (11).

6. The rotary gas path structure according to any one of claims 1 to 5, characterized by, Each air outlet channel (201) has a first air inlet (2013) located on the side of the rotary gas disc (20) towards the fixed gas disc (10), the rotary gas disc (20) is concavely provided with a first air groove (202) at each first air inlet (2013), and each first air groove (202) is arranged in an arc shape around the central axis (Z).

7. The rotary gas circuit structure according to claim 6, characterized in that Each air inlet channel (101) has a second air outlet (1014) arranged on the side of the fixed gas disc (10) towards the rotary gas disc (20), the size of each second air outlet (1014) is smaller than the size of the first air groove (202), and the distance between any two adjacent second air outlets (1014) is greater than the distance between any two adjacent first air grooves (202).

8. The rotary gas circuit structure according to claim 7, characterized by The fixed air disc (10) is concave at each second air outlet (1014) with a second air groove (102), each second air groove (102) is arranged in an arc shape around the central axis (Z), and the arc length of each second air groove (102) is less than the arc length of each first air groove (202); or, The fixed air disc (10) is provided with a circular hole (103) at each second air outlet (1014), and the diameter of the circular hole (103) is smaller than the diameter of the air inlet channel (101).

9. The rotary gas circuit structure according to claim 8, characterized in that Along the circumference of the rotating air disc (20), the distance between any two adjacent second air grooves (102) is less than the arc length of the first air groove (202).

10. A carousel loading device, characterized by, The rotating air path structure of any one of claims 1 to 9, wherein the rotating air path structure is arranged on a rotating disc structure, and a plurality of operation terminals are arranged at intervals along the circumference of the rotating disc structure, and at least part of the operation terminals are respectively connected to an air outlet channel (201) of the rotating air path structure.

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