Purification device for producing ultra-pure arsine

Abstract

The utility model discloses a purification device for producing ultrapure arsine, and relates to the technical field of ultrapure arsine purification devices, the purification device comprises an arsine gas generation reaction kettle, the top end of one side of the arsine gas generation reaction kettle is communicated with a first gas transmission pipe, and the top end of one side of the first gas transmission pipe is communicated with a condenser. A material for producing arsine gas is placed in an arsine gas generation reaction kettle, arsine is generated through heating, gas enters a condenser through a first gas transmission pipe, the arsine gas can be cooled, water vapor can be condensed, entangled water vapor can be reduced, and the production efficiency of arsine is improved. Gas enters the first cold trap and the second cold trap to be further treated, through precise distillation in the first rectifying tower and the second rectifying tower, impurities in the gas are finally adsorbed through the adsorption box, ultra-pure gas is generated, and ultra-pure arsine gas can be collected through the gas storage tank.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of ultra -pure arsine purification, especially to a kind of purification device for producing ultra -pure arsine. BACKGROUND

[0002] High-purity arsine is widely used in n-type doping of epitaxial silicon, n-type diffusion in silicon, ion implantation, growth of gallium arsenide (GaAs) and phosphorus gallium arsenide (GaAsP) and compound semiconductors formed with III / V elements in semiconductor industry. Hydrogen arsenide is an important material for high-efficiency concentrated solar cells and semiconductor light-emitting components. The synthesis methods of arsine mainly include chemical method and electrolytic method, but unnecessary impurities will be produced regardless of which synthesis process, which cannot be directly used in electronic, aviation, military and other fields. Currently, the main purification methods of arsine include molecular sieve adsorption method and low-temperature rectification method, but there are many drawbacks in the process of large-scale production regardless of which method, such as low production efficiency, large product quality fluctuation and inability to produce ultra-pure products. In order to realize the production of ultra-pure arsine, we design a kind of purification device for producing ultra-pure arsine. SUMMARY

[0003] The purpose of the utility model is to provide a kind of purification device for producing ultra-pure arsine.

[0004] To solve the above technical problems, the utility model provides the following technical scheme: a kind of purification device for producing ultra-pure arsine, including arsine gas generation reaction kettle, the side top of the arsine gas generation reaction kettle is connected with first gas transmission pipe, the side top of the first gas transmission pipe is connected with condenser, the side bottom of the condenser is connected with condenser, the side top of the first gas transmission pipe is connected with first cold trap, the side top of the first cold trap is connected with second gas transmission pipe, the side top of the second gas transmission pipe is connected with second cold trap, the side bottom of the second cold trap is connected with second gas transmission pipe, the side top of the second gas transmission pipe is connected with first rectification tower, the side top of the first rectification tower is connected with third gas transmission pipe, the side top of the third gas transmission pipe is connected with second rectification tower, the side bottom of the second rectification tower is connected with fourth gas transmission pipe, the side top of the fourth gas transmission pipe is connected with adsorption box.

[0005] Preferably, the number of condensers is several, and the condensers are connected by the first gas transmission pipe, the condensers and the first cold trap are connected by the first gas transmission pipe, and the second cold trap and the first rectification tower are connected by the second gas transmission pipe.

[0006] Preferably, the side top of the adsorption box is connected with a collection pipe, and the side top of the collection pipe is connected with a gas storage tank.

[0007] Preferably, the top end of one side of the arsine gas generation reaction kettle is movably provided with a movable sealing cover, and the top end of one side surface of the movable sealing cover is fixedly connected with a cover auxiliary handle.

[0008] Preferably, the top end of one side of the arsine gas generation reaction kettle is movably provided with a movable sealing cover, and the top end of one side surface of the movable sealing cover is fixedly connected with a cover auxiliary handle.

[0009] Preferably, the top end of one side of the arsine gas generation reaction kettle is movably provided with a movable sealing cover, and the top end of one side surface of the movable sealing cover is fixedly connected with a cover auxiliary handle.

[0010] Compared with the related art, the purification device for producing ultra-pure arsine has the following beneficial effects:

[0011] 1. The purification device for producing ultra-pure arsine is provided with the arsine gas generation reaction kettle for placing the material for producing arsine gas, and the generation of arsine is realized through heating. The gas enters the inside of the condenser through the first gas transmission pipe, so that the cooling effect of the arsine gas is realized, and the water vapor is condensed to reduce the impurities. The gas enters the first cold trap and the second cold trap for further treatment. The precise distillation is realized in the first rectifying tower and the second rectifying tower, and the adsorption effect of the impurities of the gas is realized through the adsorption box, so that the ultra-pure gas is generated. The gas storage tank can collect the ultra-pure arsine gas.

[0012] 2. The purification device for producing ultra-pure arsine is provided with the movable sealing cover, so that the material in the arsine gas generation reaction kettle can be conveniently added, and the movable sealing cover can be used for directly sealing the arsine gas generation reaction kettle. The material in the arsine gas generation reaction kettle can be directly heated by the main control unit, so that the temperature is directly controlled, the constant temperature effect of the material reaction is improved, and the working efficiency of the device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a three-dimensional structure schematic view of the utility model;

[0014] Figure 2 It is a connection structure schematic view of the adsorption box and the gas storage tank of the utility model;

[0015] Figure 3 It is a device side view structure schematic view of the utility model;

[0016] Figure 4 The utility model discloses Figure 1 A place amplification structure schematic diagram of of the A.

[0017] Marked number: 1, arsine gas generation reaction kettle; 2, first gas transmission pipe; 3, condenser; 4, first cold trap; 5, second gas transmission pipe; 6, second cold trap; 7, first rectifying tower; 8, third gas transmission pipe; 9, second rectifying tower; 10, fourth gas transmission pipe; 11, adsorption box; 12, collecting pipe; 13, gas storage tank; 14, movable sealing cover; 15, cover auxiliary handle; 16, main control unit; 17, data display; 18, control setting disc. DETAILED DESCRIPTION

[0018] Example one:

[0019] Please see Figures 1-4 The utility model provides a kind of technical scheme: a kind of purification device for producing ultra-pure arsine, including arsine gas generation reaction kettle 1, the side top of arsine gas generation reaction kettle 1 is connected with first gas transmission pipe 2, the side top of first gas transmission pipe 2 is connected with condenser 3, the side bottom of condenser 3 is connected with condenser 3, the side top of first gas transmission pipe 2 is connected with first cold trap 4, the side top of first cold trap 4 is connected with second gas transmission pipe 5, the side top of second gas transmission pipe 5 is connected with second cold trap 6, the side bottom of second cold trap 6 is connected with second gas transmission pipe 5, the side top of second gas transmission pipe 5 is connected with first rectifying tower 7, the side top of first rectifying tower 7 is connected with third gas transmission pipe 8, the side top of third gas transmission pipe 8 is connected with second rectifying tower 9, the side bottom of second rectifying tower 9 is connected with fourth gas transmission pipe 10, the side top of fourth gas transmission pipe 10 is connected with adsorption box 11, the quantity of condenser 3 is several, several condensers 3 are connected by first gas transmission pipe 2, there is first gas transmission pipe 2 between condenser 3 and first cold trap 4, there is second gas transmission pipe 5 between second cold trap 6 and first rectifying tower 7, the side top of adsorption box 11 is connected with collecting pipe 12, the side top of collecting pipe 12 is connected with gas storage tank 13.

[0020] In the embodiment, by setting arsine gas generation reaction kettle 1 inside to place the material of producing arsine gas, the generation of arsine is realized by heating, the gas enters the inside of condenser 3 through first gas transmission pipe 2, first can the cooling effect of arsine gas, second can make water vapor condense, reduce the water vapor of intermingled, gas enters first cold trap 4 and second cold trap 6 to realize further processing, by the precise distillation in first rectifying tower 7 and second rectifying tower 9, finally through the adsorption effect of impurity of gas in adsorption box 11, realize the generation of ultra-pure gas, utilize gas storage tank 13 to can collect ultra-pure arsine gas.

[0021] Embodiment two:

[0022] Please refer to Figures 1-4 The utility model provides a technical scheme: a purification device for producing super-pure arsine, which comprises a movable sealing cover 14 movably installed at one side of the top end of the arsine gas generation reaction kettle 1, a cover auxiliary handle 15 fixedly connected to the top end of one side of the movable sealing cover 14, and the movable sealing cover 14 is movably connected to the arsine gas generation reaction kettle 1, a main controller 16 fixedly installed at the top end of one side of the arsine gas generation reaction kettle 1, a data display 17 fixedly installed at the top end of one side of the front of the main controller 16, a control setting disc 18 arranged at the bottom end of the front of the main controller 16, the main controller 16 penetrating through one side of the inside of the arsine gas generation reaction kettle 1, the main controller 16 extending into the inside of the arsine gas generation reaction kettle 1, and the arsine gas generation reaction kettle 1 and the main controller 16 are electrically connected.

[0023] In the embodiment, the movable sealing cover 14 is arranged to facilitate the addition of materials in the arsine gas generation reaction kettle 1, and the movable sealing cover 14 is used to directly seal the arsine gas generation reaction kettle 1, the main controller 16 can directly control the heating of the materials in the arsine gas generation reaction kettle 1, the direct control of the temperature is realized, the constant temperature effect of the material reaction is improved, and the working efficiency of the device is improved.

[0024] Working principle:

[0025] The materials for producing arsine gas are placed in the arsine gas generation reaction kettle 1, and the arsine gas is generated by heating. The gas enters the inside of the condenser 3 through the first gas transmission pipe 2. The first can cool the arsine gas, and the second can condense water vapor to reduce impurities. The gas enters the first cold trap 4 and the second cold trap 6 for further treatment. The gas is subjected to precise distillation in the first rectifying tower 7 and the second rectifying tower 9. Finally, the impurities in the gas are adsorbed in the adsorption box 11 to generate super-pure gas. The gas storage tank 13 can collect the super-pure arsine gas.

[0026] In the embodiment, the movable sealing cover 14 is arranged to facilitate the addition of materials in the arsine gas generation reaction kettle 1, and the movable sealing cover 14 is used to directly seal the arsine gas generation reaction kettle 1, the main controller 16 can directly control the heating of the materials in the arsine gas generation reaction kettle 1, the direct control of the temperature is realized, the constant temperature effect of the material reaction is improved, and the working efficiency of the device is improved.

Claims

1. A purification device for producing ultra-pure arsine, comprising an arsine gas generating reaction kettle (1), a first gas transmission pipe (2) is communicated with one side top end of the arsine gas generating reaction kettle (1), characterized in that: The side top end of the first gas transmission pipe (2) is communicated with a condenser (3), one side bottom end of the condenser (3) is communicated with a condenser (3), one side top end of the first gas transmission pipe (2) is communicated with a first cold trap (4), one side top end of the first cold trap (4) is communicated with a second gas transmission pipe (5), one side top end of the second gas transmission pipe (5) is communicated with a second cold trap (6), one side bottom end of the second cold trap (6) is communicated with a second gas transmission pipe (5), one side top end of the second gas transmission pipe (5) is communicated with a first rectifying tower (7), one side top end of the first rectifying tower (7) is communicated with a third gas transmission pipe (8), one side top end of the third gas transmission pipe (8) is communicated with a second rectifying tower (9), one side bottom end of the second rectifying tower (9) is communicated with a fourth gas transmission pipe (10), one side top end of the fourth gas transmission pipe (10) is communicated with an adsorption box (11).

2. A purification apparatus for producing ultrapure arsine according to claim 1, characterized in that, The number of the condenser (3) is several, the first gas transmission pipe (2) is communicated between the several condensers (3), the first gas transmission pipe (2) is communicated between the condenser (3) and the first cold trap (4), the second gas transmission pipe (5) is communicated between the second cold trap (6) and the first rectifying tower (7).

3. A purification apparatus for producing ultrapure arsine according to claim 1, characterized by One side top end of the adsorption box (11) is communicated with a collecting pipe (12), one side top end of the collecting pipe (12) is communicated with a gas storage tank (13).

4. The purification apparatus for producing ultrapure arsine according to claim 1, wherein The side top end of the arsine gas generation reaction kettle (1) is movably installed with a movable sealing cover (14), the top end of the movable sealing cover (14) is movably connected with a cover auxiliary handle (15), and the movable sealing cover (14) and the arsine gas generation reaction kettle (1) are movably connected.

5. A purification apparatus for producing ultrapure arsine according to claim 1, characterized by The side top end of the arsine gas generation reaction kettle (1) is movably installed with a main control unit (16), the front side top end of the main control unit (16) is movably installed with a data display (17), and the front bottom end of the main control unit (16) is provided with a control setting disc (18).

6. A purification apparatus for producing ultrapure arsine according to claim 5, characterized in that, The main control unit (16) penetrates the inside of the arsine gas generation reaction kettle (1), the main control unit (16) extends into the inside of the arsine gas generation reaction kettle (1), and the arsine gas generation reaction kettle (1) and the main control unit (16) are electrically connected.

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