Exhaust equipment of oxidation diffusion furnace

Abstract

The utility model discloses exhaust equipment of an oxidation diffusion furnace, which relates to the technical field of oxidation diffusion furnaces and comprises a filter box, an opening at the front end of the filter box is sealed by a fixed sealing plate, an air inlet is arranged in the middle of the sealing plate in a penetrating manner, the other end of the air inlet is connected with a butt joint seat, and a vent hood is movably mounted in the butt joint seat. A ventilation cover is arranged on the surface of the transmission belt, a positioning hole is formed in the upper portion of the ventilation cover, the ventilation cover and the butt joint base are fixed by inserting a plug pin into the positioning hole, a water tank is arranged at the bottom of the filter box, and the water tank is communicated with the interior of the filter box. Meanwhile, the transmission belt continuously rotates to be in contact with water in the water tank for cleaning, the transmission belt is effectively prevented from being blocked in the using process, meanwhile, the device is convenient to disassemble and assemble, and the ventilation hood is fixed to the exhaust port in advance and then connected with the butt joint base.

Description

TECHNICAL FIELD

[0001] The utility model relates to oxidation diffusion furnace technical field especially relates to a kind of oxidation diffusion furnace exhaust equipment. BACKGROUND

[0002] Oxidation diffusion furnace exhaust equipment is an important device in the field of semiconductor equipment technology, which is mainly used to collect, treat and discharge the waste gas generated by oxidation diffusion furnace during processing. These waste gases may contain harmful components, and if directly discharged into the air, it will have a negative impact on air quality and even harm human health. Therefore, the function of the exhaust equipment is not only to exhaust, but also to purify the waste gas.

[0003] A new type of oxidation diffusion furnace exhaust device (CN214914362U) can be referred to in the prior art. By setting the purification assembly, the first purification layer is connected with the second purification layer, and the waste gas generated during processing is purified by double layers. When discharged into the air, the quality of the air is greatly improved, harmful gases are prevented from entering the air to harm the health of others, and the practicality of the device is greatly increased.

[0004] In the prior art, the exhaust equipment usually includes a filter screen for impurity filtration and a purification assembly. The filter screen filters large-particle impurities. During use, the filter screen is prone to clogging, which requires regular cleaning or direct replacement of the filter screen, requiring a large amount of work. Moreover, today's exhaust equipment is directly fixed on the exhaust port of the furnace body, which is inconvenient to disassemble and maintain. Therefore, the present application designs an exhaust equipment that reduces clogging and is easy to disassemble. SUMMARY

[0005] The utility model aims at solving the shortcomings in the prior art and proposes an oxidation diffusion furnace exhaust equipment. The utility model filters and treats large-particle impurities in waste gas by opening air holes on the surface of the transmission belt. At the same time, the transmission belt is continuously rotating and contacting with water in the water tank for cleaning, effectively preventing clogging of the transmission belt during use. At the same time, the device is easy to disassemble and assemble. The air cover is pre-fixed at the exhaust port position, and then the air cover is connected with the docking seat.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0007] An oxidation diffusion furnace exhaust equipment, comprising: a filter box, the front end opening of the filter box is closed by a fixed sealing plate, a gas inlet is arranged in the middle of the sealing plate, the other end of the gas inlet is connected with a docking seat, a ventilation cover is movably installed in the inside of the docking seat, a positioning hole is formed in the upper side of the ventilation cover, the ventilation cover is fixed with the docking seat by inserting a latch into the positioning hole, a water tank is arranged at the bottom of the filter box, the water tank is communicated with the inside of the filter box, a transmission assembly is arranged in the space formed by the filter box and the water tank, and air holes are formed in the surface of the transmission belt for filtering impurities, and the bottom of the transmission belt is in constant contact with the water in the water tank.

[0008] The utility model further sets up that the gas inlet is installed with check valve, and the gas inlet direction is towards the filter box.

[0009] The utility model further sets up that the docking seat is communicated with the inside of the ventilation cover, and the docking seat is communicated with the gas inlet, and the fixed plate is integrally connected on the both sides of the ventilation cover, and the fixed plate is installed on the surface of the furnace body exhaust port.

[0010] The utility model further sets up that the transmission assembly further includes: two transmission cylinders rotatably connected to the inside of the transmission belt, anti-skid strips are annularly distributed on the surface of the transmission cylinder, radius slightly larger limit plates are integrally connected on the both sides of the transmission cylinder, and the transmission belt is limited between the two limit plates.

[0011] The utility model further sets up that the both ends of the filter box and the water tank are embedded with bearings, the transmission rods are fixed on the one side of the limit plate, and the transmission rods are fixed in the inner ring of the bearing.

[0012] The utility model further sets up that the left side of the filter box is fixedly installed with the driving motor through the support, and the output end of the driving motor is fixed with the transmission rod on the left side.

[0013] The utility model further sets up that the rear side of the filter box is connected with the adsorption tank, the rear side of the adsorption tank is connected with the purification tank, and the exhaust port is arranged on the rear side of the purification tank.

[0014] The utility model has the advantages that:

[0015] 1、The oxidation diffusion furnace exhaust equipment drives the upper transmission cylinder to rotate through the operation of the driving motor in the use process, further drives the lower transmission cylinder to rotate through the transmission belt, the transmission belt is tensioned by the two transmission cylinders, the exhaust gas is filtered through the air holes on the surface of the transmission belt when entering, the transmission belt is in contact with the water in the water tank in the process of continuous rotation, further cleans the impurities on the surface of the transmission belt, so that the transmission belt is not prone to blockage in the use process, and the workload is reduced without frequent cleaning.

[0016] 2、The oxidation diffusion furnace exhaust equipment is covered with the ventilation cover on the exhaust port of the furnace body during installation, and is pre-fixed on the surface of the exhaust port through two fixed plates, then the ventilation cover is inserted into the butt joint seat, and the latch is inserted into the positioning hole, so that the connection of the two is completed, and the installation and disassembly are convenient, and the traditional fixed exhaust equipment is replaced to facilitate subsequent maintenance. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 A whole structure schematic view of the oxidation diffusion furnace exhaust equipment is provided for the utility model;

[0018] Figure 2 A whole side structure schematic view of the oxidation diffusion furnace exhaust equipment is provided for the utility model;

[0019] Figure 3 A filter box structure schematic view of the oxidation diffusion furnace exhaust equipment is provided for the utility model;

[0020] Figure 4 A transmission assembly structure schematic view of the oxidation diffusion furnace exhaust equipment is provided for the utility model;

[0021] Figure 5 A butt joint seat and ventilation cover split structure schematic view of the oxidation diffusion furnace exhaust equipment is provided for the utility model.

[0022] In the figure: 1, filter box; 2, sealing plate; 3, butt joint seat; 4, ventilation cover; 5, water tank; 6, air inlet; 7, check valve; 8, adsorption box; 9, purification box; 10, exhaust port; 11, driving motor; 12, bearing; 13, transmission belt; 14, air hole; 15, transmission cylinder; 16, anti-skid strip; 17, limiting disc; 18, transmission rod; 19, fixed plate; 20, positioning hole; 21, latch. DETAILED DESCRIPTION

[0023] The technical scheme of the patent will be further described in detail in combination with specific implementation manners.

[0024] The embodiments of the patent will be described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the patent, and cannot be understood as a limitation on the patent.

[0025] In the description of the patent, it should be understood that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the patent and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the patent.

[0026] In the description of the patent, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "setting" should be understood broadly, for example, it can be fixedly connected, set, or detachably connected, set, or integrally connected, set. For those skilled in the art, the specific meaning of the above terms in the patent can be understood according to the specific circumstances.

[0027] Reference Figures 1-5 An oxidation diffusion furnace exhaust equipment, comprising: a filter box 1 for filtering large particle impurities in exhaust gas, a water tank 5 is arranged at the bottom of the filter box 1 and communicates with the inside of the filter box 1, and an adsorption box 8 is connected to the rear side of the filter box 1, the rear side of the adsorption box 8 is connected with a purification box 9, and an exhaust port 10 is arranged at the rear side of the purification box 9.

[0028] Specifically, the adsorption box 8 is mainly treated by the internal activated carbon plate, which can absorb harmful substances in the exhaust gas, and the purification box 9 is mainly treated by the internal ozone UV ultraviolet lamp, which uses a special high-energy high-ozone UV ultraviolet light beam to irradiate the exhaust gas, changes the molecular structure of the exhaust gas, and makes the molecular chain of organic or inorganic high-molecular waste gas compounds degrade and convert into low-molecular compounds under the irradiation of high-energy ultraviolet light beam.

[0029] Further, the clean air is discharged through the exhaust port 10 after multiple treatments.

[0030] Specifically, as shown in Figure 2 A gas inlet 6 is arranged at the front end of the filter box 1, and a one-way valve 7 is installed on the gas inlet 6, so that the exhaust gas can only enter and cannot backflow.

[0031] Moreover, a sealing plate 2 is integrally connected to the outside of the gas inlet 6, and the sealing plate 2 is fixed on the surface of the filter box 1, and the sealing plate 2 closes the front end opening of the filter box 1.

[0032] Specifically, refer to Figure 1 and Figure 5The air inlet 6 is connected with a docking seat 3, the air inlet 6, the docking seat 3 and the air cover 4 are communicated, the air cover 4 is integrally connected with the fixed plate 19 with a hole on both sides, and the air cover 4 is pre-fixed on the surface of the furnace exhaust port through the fixed plate 19.

[0033] Meanwhile, the positioning hole 20 is arranged above the air cover 4, and the same positioning hole 20 is arranged above the docking seat 3, when the air cover 4 is pre-fixed, the air cover 4 is inserted into the docking seat 3, so that the two positioning holes 20 are aligned, and then the pin 21 is connected into the positioning hole 20 to fix them.

[0034] Specifically, the filter box 1 is communicated with the water tank 5 at the bottom, and the transmission assembly is arranged in the space formed by the filter box 1 and the water tank 5.

[0035] As shown in the drawings, the transmission assembly comprises a transmission belt 13, two transmission cylinders 15 are rotatably connected to the inner side of the transmission belt 13, and a plurality of anti-skid strips 16 are arranged on the surface of the transmission cylinder 15 in a ring shape at equal intervals to improve the transmission friction. Figures 3-4

[0036] Further, the limiting disc 17 is integrally connected to both ends of the transmission cylinder 15, because the radius of the limiting disc 17 is greater than that of the transmission cylinder 15, the transmission belt 13 is limited between the two limiting discs 17, the transmission belt 13 is tensioned by the two transmission cylinders 15, and the transmission belt 13 is prevented from falling off by the two limiting discs 17.

[0037] Meanwhile, the transmission rod 18 is connected to one side of the limiting disc 17, as shown in the drawings, the bearing 12 is embeddedly fixed at both ends of the filter box 1 and the water tank 5, and the transmission rod 18 is fixed in the inner ring of the bearing 12, so that the rotating friction is reduced by the bearing 12. Figure 3

[0038] Further, the driving source of the transmission assembly is the driving motor 11, the driving motor 11 is fixed on the left side of the filter box 1 through the support, and the output end is fixed with the transmission rod 18 on the left side.

[0039] In this embodiment, the driving motor 11 drives the upper transmission cylinder 15 to rotate, the transmission belt 13 drives the lower transmission cylinder 15 to rotate, the transmission belt 13 filters the large particle impurities through the air holes 14 arranged on the surface, and the transmission belt 13 is cleaned by contacting with the water in the water tank 5 during the rotation process, so that the transmission belt 13 is not easy to be blocked.

[0040] Specifically, as shown in the drawings, the filter box 1 is communicated with the water tank 5 at the bottom, and the transmission assembly is arranged in the space formed by the filter box 1 and the water tank 5. Figure 3 ​​As shown, the water tank 5 is provided with a water inlet on the left upper side and a water outlet on the right lower side, and the water inlet and the water outlet are provided with valves.

[0041] It should be noted that the water tank 5 of the device is made of transparent material to facilitate understanding of the internal turbidity, and the transmission belt 13 is made of high-temperature resistant material to improve the service life.

[0042] Working principle: when using the utility model, the upper transmission cylinder 15 is driven to rotate by the driving motor 11 during use, and then the lower transmission cylinder 15 is driven to rotate by the transmission belt 13, the two transmission cylinders 15 tension the transmission belt 13, when the exhaust gas enters, it will be filtered through the air holes 14 on the surface of the transmission belt 13, and the transmission belt 13 will contact the water in the water tank 5 during continuous rotation, thereby cleaning the impurities on the surface of the transmission belt 13, so that the transmission belt is not easy to block during use, and frequent cleaning is not required to reduce the workload, during installation, the vent cap 4 covers the exhaust port of the furnace body, and is pre-fixed on the surface of the exhaust port 10 through the two fixed plates 19, then the vent cap 4 is inserted into the docking seat 3, and then the latch 21 is inserted into the positioning hole 20 to complete the connection of the two, this design is convenient for installation and disassembly, and replaces the traditional fixed exhaust equipment to facilitate subsequent maintenance.

[0043] The above is only a preferred specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. An oxidation diffusion furnace exhaust apparatus comprising: The utility model provides a filter box (1), its characterized in be, the front end opening of filter box (1) is closed through fixed sealing plate (2), and the middle part of fixed sealing plate (2) is provided with air inlet (6) through, and the other end of air inlet (6) is connected with docking seat (3), and the inside movable mounting of docking seat (3) is equipped with air breather (4), and the upper portion of air breather (4) is equipped with locating hole (20), and air breather (4) is fixed with docking seat (3) through the insertion of bolt (21) into locating hole (20), and water tank (5) is equipped at the bottom of filter box (1), and water tank (5) is communicated with the inside of filter box (1), and the space formed by filter box (1) and water tank (5) is provided with transmission assembly, and the surface of transmission belt (13) in transmission assembly is equipped with air hole (14) for filtering impurities, and the bottom of transmission belt (13) is in contact with water in water tank (5) continuously.

2. An oxidation diffusion furnace exhaust apparatus according to claim 1, characterized by The air inlet (6) is provided with a one-way valve (7), and the air inlet direction is towards the filter box (1).

3. An oxidation diffusion furnace exhaust apparatus according to claim 1, characterized by The docking seat (3) is communicated with the inside of the air breather (4), and the docking seat (3) is communicated with the air inlet (6), and the fixed plate (19) is integrally connected on both sides of the air breather (4), and the fixed plate (19) is installed on the surface of the furnace exhaust port.

4. An oxidation diffusion furnace exhaust apparatus according to claim 1, characterized by The transmission assembly further comprises: Two transmission cylinders (15) are rotatably connected to the inner side of the transmission belt (13), the surface of the transmission cylinder (15) is annularly distributed with anti-skid strips (16), and a limiting disc (17) with a slightly larger radius is integrally connected to both sides of the transmission cylinder (15), and the transmission belt (13) is limited between the two limiting discs (17).

5. An oxidation diffusion furnace exhaust apparatus according to claim 1, wherein Bearing (12) is embedded and fixed at both ends of the filter box (1) and the water tank (5), transmission rod (18) is fixed on one side of the limiting disc (17), and the transmission rod (18) is fixed in the inner ring of the bearing (12).

6. An oxidation diffusion furnace exhaust apparatus according to claim 1, wherein The drive motor (11) is fixedly installed on the left side of the filter box (1) through the support, and the output end of the drive motor (11) is fixed with the transmission rod (18) on the left side.

7. An oxidation diffusion furnace exhaust apparatus according to claim 1, wherein The filter box (1) is connected with the adsorption box (8) on the rear side, the adsorption box (8) is connected with the purification box (9) on the rear side, and the exhaust port (10) is arranged on the rear side of the purification box (9).

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