Irradiation experiment device of semiconductor device

Abstract

The utility model provides an irradiation experiment device of a semiconductor device, which comprises at least one bearing plate, a horizontal bearing and a bottom platform, the horizontal bearing comprises an inner ring and an outer ring rotationally connected with the inner ring, the outer ring is fixed, the inner ring can freely rotate, the upper side of the inner ring is coaxially connected with a rotating platform, and the rotating platform is connected with the bearing plate. The upper surface of the rotating platform is connected with a bearing plate, a mounting hole is formed in the bearing plate, a plurality of supporting columns are evenly arranged between the horizontal bearing and the bottom table so that the horizontal bearing and the bottom table can be kept parallel, and the lower surface of the rotating platform is connected with a first driving device so that the rotating platform can rotate. According to the utility model, the horizontal movement of the bearing plate and the rotation degree of the rotating platform are controlled through the single-chip microcomputer, and compared with a manual adjustment mode, the automatic control through the single-chip microcomputer not only reduces the consumption of human resources, but also can improve the refinement degree of an irradiation experiment, and has lower errors compared with manual operation.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of semiconductor device's irradiation experimental device, belong to aerospace detection equipment technical field. BACKGROUND

[0002] It is very necessary to evaluate the working condition of semiconductor device under radiation environment, especially in the field of aerospace. Because there are various cosmic rays in space environment, when the spacecraft performs space task, the semiconductor device on the spacecraft will be subjected to radiation of these cosmic rays, which may cause the semiconductor device to fail and affect the normal development of the entire space mission. Therefore, it is necessary to evaluate the anti-radiation capability of the semiconductor device used by the spacecraft in advance to ensure that the spacecraft maintains normal working condition under the space radiation environment.

[0003] It is an effective way to evaluate the anti-radiation capability of semiconductor device to use radiation source to irradiate semiconductor device under ground environment. When conducting irradiation experiment, in order to evaluate the influence of radiation in different directions on semiconductor device in real situation, the placement position of semiconductor device needs to be adjusted. For example: the front of the device is directed to the radiation source to evaluate the influence of vertical radiation on the device; the side of the device is directed to the radiation source to evaluate the influence of side radiation on the device; in order to test the influence of radiation on semiconductor device at different angles and different times, according to the existing radiation experiment method, the placement position of the device needs to be adjusted manually every time the radiation angle is changed. In addition, when another batch of semiconductor devices needs to be irradiated after the irradiation experiment of each batch of semiconductor devices is completed, the semiconductor devices need to be replaced manually. However, the above replacement process will bring a lot of additional time consumption, and since the experimental price of semiconductor irradiation experiment is charged by time and is expensive, the time consumed for device adjustment will also bring additional cost on economic level. SUMMARY

[0004] The utility model aims to provide a kind of semiconductor device's irradiation experimental device, through the design of rotating platform and receiving plate, the angle adjustment of irradiation experiment is carried out, reaches automatic test, reduces irradiation experimental time consumption, reduces the time cost, manpower cost and economic cost consumed by experiment.

[0005] To achieve the above-mentioned purpose / solve the above-mentioned technical problems, the utility model is realized by using the following technical scheme.

[0006] In one aspect, the utility model provides a kind of semiconductor device's irradiation experimental device, comprising: at least 1 receiving plate, horizontal bearing and bottom table, the horizontal bearing includes: inner ring and the outer ring rotationally connected with it, outer ring is fixed immovably, inner ring can be freely rotated, the coaxial connection rotating platform is connected on the inner ring upper side, the receiving plate is connected on the rotating platform upper surface, mounting hole is opened on the receiving plate, several support columns are evenly arranged between the horizontal bearing and bottom table, to make horizontal bearing and bottom table keep parallel arrangement, the first driving device is connected to the rotating platform lower surface, to make rotating platform rotate.

[0007] Further, the receiving plate is arranged on the rotating platform center or evenly distributed on the rotating platform upper surface, and the receiving plate can be arranged as required, to improve the detection quantity.

[0008] Further, the translation device is a ball screw mechanism, and the receiving plate is connected to the sliding block of the ball screw mechanism, so that the receiving plate is driven to slide in the horizontal direction, to realize the automatic movement of the device to be tested on the receiving plate in the horizontal direction.

[0009] Further, the receiving plate is a rectangular plate, and array mounting holes are formed on the rectangular plate, so that the complexity of installation can be reduced and the installation efficiency can be improved when the semiconductor device circuit board is installed.

[0010] Further, the first driving device comprises a driving motor, a driving gear and a driven gear, the bottom of the driving motor is connected to the bottom table, the output shaft of the driving motor is connected to the driving gear through a key connection mode, the driving gear is connected to the driven gear in meshing mode, and the upper surface of the driven gear is connected to the lower surface of the rotating platform.

[0011] Further, the transmission ratio of the driving gear and the driven gear is 7:1, the number of teeth of the driven gear is larger, and the number of teeth of the driving gear is smaller, so that the transmission structure of the small gear driving the large gear is used to realize the effect of reducing the rotation speed and increasing the output torque, thereby enhancing the control accuracy of the rotating platform and the load capacity of the rotating platform.

[0012] Further, mounting grooves are evenly formed on the lower surface of the outer ring and the upper surface of the bottom table, the upper end of the support column is connected to the mounting groove on the lower surface of the outer ring in plug-in mode, the lower end is connected to the mounting groove on the upper surface of the bottom table in plug-in mode, the mounting space between the outer ring and the bottom table is reserved through the support column, and the driving device is conveniently arranged.

[0013] Further, the utility model also comprises a base, the base and the bottom table are arranged in parallel, a plurality of adjusting columns are evenly connected between the base and the bottom table, the distance between the base and the bottom table is adjusted according to the size of the adjusting column, so that the height position of the receiving plate is adjusted.

[0014] Compared with the prior art, the utility model discloses have reached the beneficial effect: the utility model discloses the rotation platform adjustment radiation relative to the radiation incident angle of the device to be tested of design, to satisfy the irradiation experiment demand of multi -region, multi -time dimension under specific angle, realize the unattended experiment of multiple batches, compared to the mode of angle adjustment of manual, utilize the utility model can improve the degree of automation greatly, to improve the experimental efficiency of irradiation experiment, reduce the consumption of human resources and economic resources.

[0015] The utility model still sets up the translation device, can combine the rotation platform rotation angle control, to realize the more intelligent irradiation experiment test of semiconductor device, can realize the irradiation of semiconductor device under the different time scale under the fixed angle, the device can realize the unmanned irradiation experiment test of multiple time scale, multiple angles, multiple batches, through the method of singlechip control, its irradiation time accuracy (time accuracy, angle accuracy) also obtains the further promotion. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the structural schematic diagram of the utility model;

[0017] Figure 2 It is the lower visual angle schematic diagram of the utility model;

[0018] Figure 3 It is the overhead schematic diagram of the utility model;

[0019] Figure 4 It is the translation device structural schematic diagram. DETAILED DESCRIPTION

[0020] Need to explain is:

[0021] The utility model technical scheme is explained in detail below by the drawings and specific embodiment, should understand the embodiment of the utility model and the specific features in the embodiment of the utility model technical scheme are detailed explanation, and not the limitation of the utility model technical scheme, in the case where there is no conflict, the technical features in the embodiment of the utility model and the embodiment of the utility model can be combined.

[0022] The term "and / or", just one description association object association, can exist three kinds of relations, for example, A and / or B, can indicate: exist A alone, exist A and B simultaneously, exist B alone these three cases.In addition, character " / ", generally indicates that the preceding and following associated objects are one kind " or " relation. EMBODIMENT

[0023] As Figures 1-3The embodiment provides a semiconductor device irradiation experiment device, which comprises a receiving plate 1, a horizontal bearing and a base 14, the horizontal bearing comprises an inner ring 4 and an outer ring 5 rotationally connected with the inner ring 4, a rotating platform 12 is coaxially connected to the upper side of the inner ring 4, the upper surface of the rotating platform 12 is connected with the receiving plate 1, a mounting hole 2 is formed in the receiving plate 1, a plurality of support columns 13 are evenly arranged between the horizontal bearing and the base 14, so that the horizontal bearing and the base 14 are arranged in parallel, and a first driving device is connected to the lower surface of the rotating platform 12, so that the rotating platform 12 rotates.

[0024] The rotating platform 12 comprises an upper flat plate and a lower flat plate, the upper flat plate forms a table surface of the rotating platform, the lower flat plate forms a mounting surface of the first driving device, the upper flat plate and the lower flat plate jointly serve as a bearing protection cover, foreign matters in the environment can be prevented from entering the bearing, and the service life of the bearing is prolonged.

[0025] In the embodiment, three receiving plates 1 are arranged on the upper surface of the rotating platform 12, the three receiving plates 1 are evenly distributed and comprise a first vertical plate 101, a second vertical plate 102 and a third vertical plate 103, the three vertical plates are distributed in a triangular shape on the rotating platform 12, the installation angle between every two vertical plates is 60 degrees, and the whole has a regular triangular prism shape, so that three groups of semiconductor devices to be tested can be placed at the same time, and the experiment efficiency is improved.

[0026] A translation device 3 is arranged between the receiving plate 1 and the rotating platform 12, the translation device 3 is a ball screw mechanism, the receiving plate 1 is connected to a sliding block of the ball screw mechanism, as shown in the drawing, Figure 4 The translation device 3 comprises a second driving motor 304, a sliding block 305, a nut seat 306 and a ball screw 307, a power output shaft of the second driving motor 304 is fixedly connected with one end of the ball screw 307 through a shaft coupling, the sliding block 305 is fixedly connected with the nut seat 306 of the ball screw 307 through welding, the second driving motor 304 drives the ball screw 307 to rotate, so that the sliding block slides on a sliding rail, since the vertical plate is fixed on the sliding block 305, the device can drive the vertical plate to move in the horizontal direction, and the second driving motor 304 is controlled by a single-chip microcomputer 10 and a motor driver 11.

[0027] The receiving plate 1 is a rectangular plate, and array mounting holes 2 are formed on the rectangular plate, and the corners of the semiconductor device circuit board to be tested are provided with circular through holes, and the bolts are passed through the circular through holes on the semiconductor device to be tested and the circular mounting holes 2 on the vertical plate, and the gaskets are placed between the vertical plate and the semiconductor device circuit board, and then the nuts are used for fixing, so as to fix the semiconductor device circuit board to be tested on the vertical plate; the vertical plate provided in the embodiment is provided with twenty-eight mounting holes, which are evenly distributed on the whole vertical plate and form an array of seven rows and four columns, and the circuit boards with different sizes can find the circular through holes with appropriate positions on the vertical plate to realize the fixed connection with the vertical plate.

[0028] The first driving device comprises a driving motor 6, a driving gear 7 and a driven gear 8, the bottom of the driving motor 6 is connected to the base table 14, the output shaft of the driving motor 6 is connected to the driving gear 7 through a key connection mode, the driving gear 7 is connected to the driven gear 8 in a meshing mode, the upper surface of the driven gear 8 is connected to the lower surface of the rotating platform 12, and the base table 14 is further fixed with a single-chip microcomputer 10 and a motor driver 11 for controlling the rotation of the driving motor 6.

[0029] The transmission ratio of the driving gear 7 and the driven gear 8 is 7:1.

[0030] The lower surface of the outer ring 5 and the upper surface of the base table 14 are uniformly provided with mounting grooves, the upper end of the support column 13 is connected to the mounting groove in the lower surface of the outer ring 5 in a plug-in mode, and the lower end is connected to the mounting groove in the upper surface of the base table 14 in a plug-in mode.

[0031] The base 15 is further provided, the base 15 and the base table 14 are arranged in parallel, and a plurality of adjusting columns 9 are uniformly connected between the base 15 and the base table 14, which can adapt to different experimental environments and are provided with adjusting columns 9 with different sizes and heights to ensure that the overall height of the equipment can be flexibly adjusted.

[0032] Operation process: the first vertical plate 101, the second vertical plate 102 and the third vertical plate 103 are all installed on the translation device 3 of the rotating platform, the semiconductor devices to be tested are fixedly connected with each vertical plate, so that the irradiation experiments of three groups of semiconductor devices can be completed at one time, the vertical plates are moved in the horizontal direction by the single-chip microcomputer control moving device, the positions of the semiconductor devices to be tested in the horizontal direction are adjusted, and the semiconductor devices to be tested at different positions on the vertical plates can be automatically subjected to irradiation with different irradiation times to measure the anti-irradiation capability of the devices under different irradiation time scales.

[0033] When the irradiation experiment is performed, the required control program is burned in the single-chip microcomputer 10 according to the experimental requirements, the single-chip microcomputer sends a control signal to the motor driver 11, the motor driver 11 converts the control signal sent by the single-chip microcomputer into a motor control signal, so as to adjust the rotating speed and rotating direction of the driving motor 6, and finally make the whole rotating platform rotate, so as to ensure that the semiconductor devices to be tested on each flat plate can face the radiation source directly, that is, the test of three groups of semiconductor devices can be completed at one time.

[0034] The utility model discloses a rotating platform and translation device are designed, and the radiation incident angle of radiation relative to testing device and the displacement of device in horizontal direction can be programmed and adjusted through single-chip microcomputer control. To satisfy the irradiation experiment demand of multi -area, multi -time dimension under specific angle, realize the unattended experiment of multiple batches.

[0035] Compared with the mode that the irradiation experiment condition is changed once and then adjusted manually, the utility model can improve the automation degree and experimental efficiency of irradiation experiment, reduce the consumption of human resources and economic resources. In addition, compared with the method that the irradiation experiment condition parameter is changed manually, the adjustment precision on angle adjustment, time adjustment and position adjustment can be further improved through the method of single-chip microcomputer control, the error caused by manual adjustment is reduced, and the reliability and fine degree of irradiation experiment are improved

[0036] The embodiments of the utility model are described above in combination with the drawings, but the utility model is not limited to the above-mentioned specific implementation mode, and the above-mentioned specific implementation mode is only illustrative, not restrictive, and the person skilled in the art can make many forms under the inspiration of the utility model without departing from the purpose of the utility model and the scope protected by the claims, and these all belong to the protection of the utility model.

Claims

1. An irradiation test device for a semiconductor device, characterized by comprising: The utility model relates to a kind of rotary platform, including: At least 1 receiving plate (1), horizontal bearing and base (14), the horizontal bearing includes: inner ring (4) and the outer ring (5) rotationally connected with it, the upper side of the inner ring (4) coaxially connected rotating platform (12), the upper surface of the rotating platform (12) is connected with receiving plate (1), the mounting hole (2) is opened in the receiving plate, a plurality of support columns (13) are evenly arranged between the horizontal bearing and base (14), so that the horizontal bearing and base (14) are kept parallel arrangement, the lower surface of the rotating platform (12) is connected with first driving device, to make rotating platform (12) rotate.

2. The apparatus according to claim 1, wherein The receiving plate (1) is arranged in the center of the rotating platform (12) or evenly distributed on the upper surface of the rotating platform (12).

3. The apparatus according to claim 1, wherein Translation device (3) is arranged between the receiving plate (1) and the rotating platform (12), the translation device (3) is a ball screw mechanism, and the receiving plate (1) is connected to the sliding block of the ball screw mechanism.

4. The apparatus according to claim 1, wherein The receiving plate (1) is a rectangular plate, and an array mounting hole (2) is opened in the rectangular plate.

5. The apparatus according to claim 1, wherein The first driving device includes: driving motor (6), driving gear (7) and driven gear (8), the bottom of the driving motor (6) is connected to the base (14), the output shaft of the driving motor (6) is connected to the driving gear (7) by key connection, the driving gear (7) is engaged with the driven gear (8), and the upper surface of the driven gear (8) is connected to the lower surface of the rotating platform (12).

6. The apparatus according to claim 5, wherein The transmission ratio of the driving gear (7) and the driven gear (8) is 7:

1.

7. The apparatus according to claim 1, wherein The lower surface of the outer ring (5) and the upper surface of the base (14) are evenly provided with mounting grooves, the upper end of the support column (13) is inserted into the mounting groove of the lower surface of the outer ring (5), and the lower end is inserted into the mounting groove of the upper surface of the base (14).

8. The apparatus according to claim 1, wherein It also includes a base (15), the base (15) and the base (14) are arranged in parallel, and a plurality of adjusting columns (9) are evenly connected between the base (15) and the base (14).

Images