PECVD cavity capable of adjusting special gas shunting

Abstract

The utility model relates to the field of photovoltaic equipment, and discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) cavity capable of adjusting special gas shunting, which comprises an upper die cavity and a lower die cavity which are connected with each other. An electrode column, an integrated shunt, an adjusting assembly and a gas distribution plate are sequentially arranged in the upper die cavity from top to bottom. The electrode column is arranged at the upper end of the upper die cavity, a gas channel is formed in the electrode column, the gas distribution plate is located below the gas channel, and a gas uniformizing cavity is formed by the gas distribution plate and the inner wall of the upper die cavity. The integrated flow divider is arranged between the gas distribution plate and the gas channel in the mode that the height of the integrated flow divider can be adjusted up and down through the adjusting assembly, and the integrated flow divider is located under the gas channel. According to the utility model, the height-adjustable integrated flow divider is arranged between the gas channel and the gas distribution plate, so that the gas flow in the working area of the cavity is more uniform, the flow dividing direction of special gas can be adjusted by adjusting the height of the flow divider under the condition that the structure of the gas distribution plate is not disassembled, and the flow divider has the effects of convenience, adjustability and controllability.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic equipment, and in particular to a PECVD cavity with adjustable special gas diversion. Background Technology

[0002] Existing plate-type PECVD equipment typically employs an upper and lower mold cavity configuration. The upper mold cavity houses the electrodes, inlet pipes, and a gas distribution plate. Specialty gases enter the sealed space above the gas distribution plate directly through gas channels on the electrode pillars, and then pass through the gas distribution plate into the working areas of both mold cavities for plasma chemical deposition (PCD) coating. When the specialty gas flows in through the gas channels, the gas concentration is high at the outlet and low around the perimeter. Combined with the real-time suction of the lower cavity during the coating process, this leads to uneven airflow within the working area of ​​the chamber, affecting the uniformity of the coating. Furthermore, the high-frequency, high-pressure direct bombardment of the gas distribution plate by the specialty gas poses a risk of burning it through. The expensive gas distribution plate further increases production costs. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies and provide an adjustable special gas distribution PECVD chamber. It adopts an integrated distribution device with adjustable height, which can adjust the special gas distribution above the gas distribution plate according to different coating processes and the uniformity of coating on the product surface, without having to remove the gas distribution plate structure. It has the functions of being convenient, adjustable and controllable.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] This utility model discloses an adjustable special gas diversion PECVD cavity, comprising an upper mold cavity and a lower mold cavity connected to each other. The upper mold cavity contains, from top to bottom, an electrode post, an integrated flow divider, an adjustment assembly, and a gas distribution plate. The electrode post is located at the upper end of the upper mold cavity and has a gas channel. The gas distribution plate is located below the gas channel, forming a uniform gas distribution cavity with the inner wall of the upper mold cavity. The integrated flow divider is height-adjustable between the gas distribution plate and the gas channel via the adjustment assembly, and is located directly below the gas channel. The special gas enters the uniform gas distribution cavity through the gas channel, is first diverted by the integrated flow divider, and then reaches the gas distribution plate, which draws the special gas into the lower mold cavity.

[0006] Further, the integrated flow distributor comprises a flow distribution part, connecting ribs and a fixing part; the flow distribution part is located at the center of the flow distributor, and the flow distribution part is connected with the fixing part through the connecting ribs; a plurality of through exhaust grooves are formed between the adjacent connecting ribs, the fixing part and the edge of the flow distribution part; the flow distribution part is in the shape of a sharp cone with the top pointing upwards, and the top is located on the same plane as the upper surface of the connecting part; the special gas is blown to the flow distribution part through the gas passage; due to the shape of the flow distribution part, the gas spreads along the conical surface and flows to the exhaust grooves around, so that the coverage of the gas flow is increased, and the concentrated impact of the special gas on the gas distribution plate is avoided.

[0007] Further, the angle θ of the sharp cone of the flow distribution part is between 110 degrees and 150 degrees.

[0008] Further, the diameter D of the bottom surface of the flow distribution part is between 30 mm and 55 mm.

[0009] Further, the distance L between the top of the flow distribution part and the outlet of the gas passage is not less than 2 mm.

[0010] Further, a corrosion-resistant protective layer is arranged on the surface of the flow distribution part.

[0011] Further, a threaded hole is arranged on the periphery of the fixing part of the flow distributor; the adjusting assembly comprises a plurality of adjusting bolts; the threaded ends of the adjusting bolts are upward and are threadedly connected with the threaded holes on the fixing part, and the other ends are freely rotatably arranged on the gas distribution plate; the distance between the top of the flow distributor and the gas passage is adjusted by rotating the adjusting bolts.

[0012] Further, the adjusting bolts are connected with the gas distribution plate through bearings; the inner ring of the bearing is fixedly connected with the adjusting bolt, and the outer ring is fixedly connected with the gas distribution plate.

[0013] Further, a counterbore is arranged on the bottom of the gas distribution plate connected with the adjusting bolt, so that the bottom surface of the gas distribution plate is in a flat state.

[0014] Further, an insulator is arranged on the inner wall of the upper end of the upper mold cavity.

[0015] The utility model has the advantages that:

[0016] 1. The utility model sets the integrated flow distributor below the gas passage; when the special gas is injected from the gas passage, the special gas is dispersed into a plurality of gas streams after being distributed by the integrated flow distributor, so that the gas flow in the working area of the cavity is more uniform; meanwhile, the setting of the integrated flow distributor avoids that the gas distribution plate is directly impacted by the high-frequency and high-pressure special gas, and the risk that the gas distribution plate is impacted and burnt through can be avoided; only the integrated flow distributor needs to be replaced regularly, and the service life of the gas distribution plate is greatly increased.

[0017] 2. The height-adjustable integrated flow divider can adjust the special gas flow according to different film coating processes and product surface film coating uniformity, without removing the air distribution plate structure, and has the functions of convenient adjustment and control. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 is a schematic view of the cavity part structure of the present embodiment.

[0020] Figure 2 is a schematic view of the structure of the integrated flow divider.

[0021] Figure 3 is a schematic view of the structure of the integrated flow divider. Figure 2

[0022] Main component symbol explanation:

[0023] 100, upper die cavity, 200, lower die cavity;

[0024] 1, electrode column, 11, gas passage;

[0025] 2, insulator;

[0026] 3, air distribution plate, 31, counterbore;

[0027] 4, air uniformizing cavity;

[0028] 5, integrated flow divider, 51, flow dividing part, 52, connecting rib, 53, fixing part, 54, exhaust groove;

[0029] 6, adjusting assembly. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely in conjunction with the drawings of the specification. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0031] ​In the utility model, in not making opposite explanation case, the orientation word such as " upper, lower, left, right " used is usually understood in combination with the orientation shown in the attached drawing and actual application.

[0032] In addition, the terms "first", "second", "third", etc. are used only for descriptive purposes and should not be construed as indicating or implying relative importance or an indicated number of technical features. Therefore, the features defined as "first", "second", etc. can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0033] In the utility model, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature. It can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be that the first feature is directly above or obliquely above the second feature, or it only means that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or it only means that the horizontal height of the first feature is less than that of the second feature.

[0034] The endpoints of the ranges and any values disclosed herein are not limited to the precise values or the exact range, and these ranges should be interpreted as including values close to the ranges or values. For numerical ranges, the endpoints of each range, the endpoints of each range and individual point values between them, and individual point values between them can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed herein. Among them, the terms "optional" and "optional" mean that it can include or not include (or can have or not have).

[0035] As shown in Figure 1 The utility model discloses a kind of PECVD cavities of adjustable special gas shunt, it includes mutually connected upper die cavity 100 and lower die cavity 200. Upper die cavity 100 is sequentially provided with electrode column 1, insulator 2, integrated shunt 5, adjusting assembly 6, gas distribution plate 3 from top to bottom.

[0036] The electrode column 1 is arranged on the upper end of the upper mold cavity 100, and a gas passage 11 is arranged on the electrode column 1. The insulator 2 is arranged on the inner wall of the upper end of the upper mold cavity 100. The gas distribution plate 3 is located below the gas passage 11, and the gas distribution plate 3 and the inner wall of the upper mold cavity 100 form a uniform gas cavity 4. The integrated flow divider 5 is arranged between the gas distribution plate 3 and the gas passage 11 by adjusting the height of the adjusting assembly 6, and the integrated flow divider 5 is located directly below the gas passage 11. The special gas enters the uniform gas cavity through the gas passage 11, first passes through the integrated flow divider 5, and then reaches the gas distribution plate 3. The special gas is drawn into the lower mold cavity 200 through the gas distribution plate 3. When the special gas is injected from the gas passage 11, it first passes through the integrated flow divider 5, and then the special gas is dispersed into multiple gas streams and enters the gas distribution plate 3, so that the gas flow in the chamber working area is more uniform. At the same time, the arrangement of the integrated flow divider 5 avoids the risk of impact burnout caused by the direct impact of the special gas with high frequency and high pressure on the gas distribution plate 3. Only the integrated flow divider 5 needs to be replaced regularly, which greatly increases the service life of the gas distribution plate 3.

[0037] Specifically, as shown in Figure 2 、 Figure 3 , the integrated flow divider 5 includes a flow dividing part 51, a connecting rib 52, and a fixed part 53. The flow dividing part 51 is located at the center of the flow divider 5, and the flow dividing part 51 is connected to the fixed part 53 through the connecting rib 52. The upper surface of the connecting rib 52 is arranged in an arc shape. A plurality of through exhaust grooves 54 are formed between the adjacent connecting ribs 52 and the edges of the flow dividing part 51 and the fixed part 53. The flow dividing part 51 is in the shape of a sharp cone with the apex pointing upwards, and the apex is located in the same plane as the upper surface of the connecting part. The special gas is blown towards the flow dividing part 51 through the gas passage 11. Due to the shape of the flow dividing part 51, the gas spreads along the conical surface and flows into the exhaust grooves 54 around, thereby increasing the coverage of the gas flow and making the gas distribution more uniform, while also avoiding the concentrated impact of the special gas on the gas distribution plate 3.

[0038] The angle θ of the sharp cone of the flow dividing part 51 affects the speed of the gas flowing downward, and the diameter D of the bottom surface of the flow dividing part 51 affects the distance of the gas diffusion. In order to achieve better flow dividing effect, through uniform gas distribution design and pipeline variable aperture formula derivation, based on fluid mechanics theory, ANSYS CFX is applied to numerically simulate and analyze the gas distribution structure, and the variable diameter and equal diameter gas distribution pipeline outlet flow variation law and the substrate surface velocity distribution law under different electrode spacing of the reaction chamber are obtained. Combined with the chamber structure, the preferred size of the flow dividing part 51 is determined as follows: the angle θ of the sharp cone of the flow dividing part 51 is between 110 degrees and 150 degrees, the diameter D of the bottom surface of the flow dividing part 51 is between 30 mm and 55 mm, and the distance L between the apex of the flow dividing part 51 and the outlet of the gas passage 11 is not less than 2 mm.

[0039] In order to improve the service life of the integrated flow distributor 5, a corrosion-resistant protective layer is arranged on the surface of the flow distribution part 51, since the special gas contains corrosive chemical gas.

[0040] Specifically, the fixing part 53 of the flow distributor 5 is provided with threaded holes around. The adjusting assembly 6 is a plurality of adjusting bolts, the threaded ends of the adjusting bolts are upward and are screwed with the threaded holes on the fixing part 53, and the other ends are freely rotatably arranged on the gas distribution plate 3. Since the distance between the flow distributor 5 and the gas passage 11 can directly affect the uniform gas effect of the flow distributor 5, the height of the integrated flow distributor 5 is adjustable, the special gas flow distribution on the gas distribution plate 3 can be adjusted according to different film coating processes and product surface film coating uniformity, and the gas distribution plate 3 structure does not need to be removed, which is convenient to adjust and control.

[0041] The adjusting bolt is connected with the gas distribution plate 3 through a bearing, the inner ring of the bearing is fixedly connected with the adjusting bolt, and the outer ring is fixedly connected with the gas distribution plate 3, so that the adjusting bolt is freely rotatably arranged on the gas distribution plate 3.

[0042] In order to keep the bottom surface of the gas distribution plate 3 in a flat state, the bottom of the gas distribution plate 3 connected with the adjusting bolt is provided with a counterbore 31.

[0043] In summary, the utility model not only can make the airflow in the chamber working area more uniform, but also can adjust the special gas flow direction by adjusting the height of the flow distributor without removing the gas distribution plate structure, which is convenient to adjust and control.

[0044] The preferred embodiments of the utility model are described in detail above, but the utility model is not limited to this. Within the technical concept range of the utility model, the technical scheme of the utility model can be variously modified, including that various technical features are combined in any other suitable mode, and these simple modifications and combinations should also be regarded as the disclosed contents of the utility model, and all belong to the protection range of the utility model.

Claims

1. A PECVD chamber with adjustable gas split, comprising: The application relates to a die for manufacturing a battery, which comprises an upper die cavity and a lower die cavity connected with each other; an electrode column, an integrated flow divider, an adjusting assembly and a gas distribution plate are sequentially arranged in the upper die cavity from top to bottom; the electrode column is arranged at the upper end of the upper die cavity, a gas passage is arranged on the electrode column, the gas distribution plate is located below the gas passage, and the gas distribution plate and the inner wall of the upper die cavity form an air equalizing cavity; the integrated flow divider is arranged between the gas distribution plate and the gas passage through the adjusting assembly and can be adjusted in height, and the integrated flow divider is located directly below the gas passage.

2. The tunable species split PECVD chamber of claim 1, wherein: The integrated flow divider comprises a flow dividing part, connecting ribs and a fixing part; the flow dividing part is located at the center of the flow divider, the flow dividing part is connected with the fixing part through the connecting ribs, adjacent connecting ribs and the edges of the flow dividing part and the fixing part surround a plurality of through exhaust grooves; the flow dividing part is in the shape of a sharp cone with the top point upward, and the top point and the upper surface of the connecting part are located on the same plane.

3. The tunable species split PECVD chamber of claim 1, wherein: The sharp cone angle theta of the flow dividing part is between 110 degrees and 150 degrees.

4. The tunable species split PECVD chamber of claim 1, wherein: The bottom surface diameter D of the flow dividing part is between 30 mm and 55 mm.

5. The tunable species split PECVD chamber of claim 1, wherein: The distance L between the top point of the flow dividing part and the outlet of the gas passage is not less than 2 mm.

6. The tunable species split PECVD chamber of claim 1, wherein: An anticorrosion protective layer is arranged on the surface of the flow dividing part.

7. The tunable species split PECVD chamber of claim 1, wherein: The fixing part of the flow divider is provided with threaded holes around; the adjusting assembly is a plurality of adjusting bolts; the threaded ends of the adjusting bolts are upward and are threadedly connected with the threaded holes on the fixing part, and the other ends are freely rotatably arranged on the gas distribution plate.

8. The tunable species split PECVD chamber of claim 1, wherein: The adjusting bolts are connected with the gas distribution plate through bearings; the inner ring of the bearing is fixedly connected with the adjusting bolt, and the outer ring is fixedly connected with the gas distribution plate.

9. The tunable species split PECVD chamber of claim 1, wherein: The bottom of the gas distribution plate connected with the adjusting bolt is provided with a counterbore.

10. The tunable species split PECVD chamber of claim 1, wherein: An insulator is arranged on the inner wall of the upper end of the upper die cavity.

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