Cleaning jig for ultrathin products made of hard and brittle materials

Abstract

The utility model discloses a cleaning jig for ultrathin products made of hard and brittle materials, which comprises a square tube and arc-shaped connecting parts symmetrically connected to the lower end of the square tube, the square tube and the arc-shaped connecting parts are in tangent transition to form an arc surface, and a plurality of guide ribs distributed at equal intervals are arranged on the arc surface. The cleaning device can protect products, and the products can be damaged by impact of water flow, chemical cleaning fluid and the like in the cleaning process. The jig can fix a product, and the risk that the product is broken or scratched due to physical impact is reduced; the cleaning efficiency is improved, the jig can enable the product to be located at a specific position and angle, cleaning liquid can make better contact with all the surfaces of the product, packaging dirt and impurities can be fully cleaned away, and therefore the overall cleaning quality and efficiency are improved. The jig can be used for placing a plurality of products at the same time, so that the plurality of products can be cleaned in batches at the same time, the jig is suitable for a large-scale production cleaning process, and the production efficiency can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to cleaning jig technical field especially relates to a kind of hard brittle material ultra-thin product cleaning jig. BACKGROUND

[0002] Silicon wafer cleaning is an important link in semiconductor manufacturing process, aims at removing the pollutants on the surface of silicon wafer, ensures its clean, flat and defect-free, so as to improve the quality and reliability of silicon wafer. Cleaning method mainly includes chemical cleaning, physical cleaning and gas phase cleaning. Chemical cleaning uses chemical substances such as sodium hydroxide and pure water mixture; physical cleaning is carried out by mechanical force and magnetic force and other ways; gas phase cleaning is carried out under high temperature and vacuum condition; the silicon wafer cleaning of the prior art generally adopts open type, and is cleaned one by one, which is easy to produce physical impact on product, and the cleaning efficiency is low. SUMMARY

[0003] The utility model discloses a kind of hard brittle material ultra-thin product cleaning jigs to solve the shortcomings in prior art.

[0004] To achieve the above object, the utility model adopts the following technical scheme:

[0005] A kind of hard brittle material ultra-thin product cleaning jig, including square tube and the arc-shaped connecting portion being symmetrically connected at its lower end, square tube and arc-shaped connecting portion are tangent to each other and form cambered surface, the cambered surface is provided with several equidistant distribution guide ribs, the upper end of guide rib is connected with isolating head, isolating head is arc-shaped structure, and its free end is bent downward, the lower end of square tube is detachably provided with drainage structure.

[0006] Preferably, the upper end of the square tube is connected with symmetrically arranged mounting ears.

[0007] Preferably, the upper end of the square tube is provided with a notch in the parallel direction of the mounting ears.

[0008] Preferably, one side of the square tube is provided with a lateral port in the parallel direction of the mounting ears, and the other side is provided with a hanging ear.

[0009] Preferably, the lower end of the arc-shaped connecting portion is provided with a vertical plate, and the outer side of the vertical plate is vertically provided with a lower hanging plate.

[0010] Preferably, the drainage structure includes a drainage tray, and the upper end of the drainage tray is connected with symmetrically arranged upper hanging plates.

[0011] Compared with the prior art, the utility model has the advantages that:

[0012] 1. Protect the product, the impact of water flow, chemical cleaning solution during the cleaning process may damage the product. This jig can fix the product, reduce the risk of product breakage or scratch due to physical impact;

[0013] 2. Improve cleaning efficiency, the jig can make the product in a specific position and angle, so that the cleaning liquid can better contact the surfaces of the product, and the packaging dirt and impurities can be fully cleaned, thereby improving the overall quality and efficiency of cleaning;

[0014] 3. Facilitate batch cleaning of products, the jig can hold multiple products at the same time, so that multiple products can be batch cleaned at the same time, suitable for large-scale production cleaning process, which helps to improve production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more specifically and intuitively illustrate the technical solutions in the embodiments of the present application or the prior art, a brief introduction will be given below to the drawings needed to be used in the embodiments or prior art description.

[0016] Figure 1 Structure diagram of the present application Figure 1 ;

[0017] Figure 2 Structure diagram of the present application Figure 2 ;

[0018] Figure 3 Installation diagram of square tube and drainage tray of the present application.

[0019] In the figure: square tube 1, arc-shaped connecting part 2, mounting ear 3, notch 4, isolation head 5, guide rib 6, lateral port 7, vertical plate 8, lower hanging plate 9, hanging ear 10, drainage tray 11, upper hanging plate 12. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments.

[0021] Referring to Figures 1-3 , a hard and brittle material ultra-thin product cleaning jig, comprising a square tube 1 and an arc-shaped connecting part 2 symmetrically connected to the lower end thereof, the square tube 1 and the arc-shaped connecting part 2 are tangent to each other to form an arc surface, a plurality of equidistantly distributed guide ribs 6 are arranged on the arc surface, the upper end of the guide rib 6 is connected with an isolation head 5, the isolation head 5 is an arc-shaped structure, and the free end thereof is bent downward, and the lower end of the square tube 1 is detachably provided with a drainage structure.

[0022] The silicon wafer is put in the gap between the two adjacent arc-shaped connecting parts 2, the guide ribs 6 are arranged to limit the silicon wafer, the notches 4 are arranged to facilitate taking the silicon wafer, the lateral openings 7 facilitate observing the silicon wafer from the side and also facilitate cleaning the silicon wafer from the side, and after cleaning, the draining tray 11 is assembled by cooperating the lower hanging plate 9 and the upper hanging plate 12 to avoid draining water from dripping.

[0023] In the embodiment, the upper end of the square tube 1 is connected with symmetrically arranged mounting ears 3 for mounting auxiliary accessories.

[0024] In the embodiment, the upper end of the square tube 1 is arranged in parallel with the mounting ears 3 and is provided with notches 4, and the notches 4 are arranged to facilitate taking the silicon wafer.

[0025] In the embodiment, one side of the square tube 1 is arranged in parallel with the mounting ears 3 and is provided with lateral openings 7, and the other side is provided with hanging ears 10.

[0026] In the embodiment, the lower end of the arc-shaped connecting part 2 is provided with a vertical plate 8, and the outer side of the vertical plate 8 is vertically provided with a lower hanging plate 9, and the jig is placed on the ground to play a supporting role.

[0027] In the embodiment, the draining structure includes a draining tray 11, and the upper end of the draining tray 11 is connected with symmetrically arranged upper hanging plates 12, and the upper hanging plates 12 cooperate with the lower hanging plate 9 to install and fix the draining tray 11.

[0028] The jig has the following advantages for operation:

[0029] 1. Protecting the product, the impact of water flow and chemical cleaning liquid during the cleaning process may damage the product. The jig can fix the product to reduce the risk of product breakage or scratches caused by physical impact;

[0030] 2. Improving cleaning efficiency, the jig can place the product in a specific position and angle, allowing the cleaning liquid to better contact each surface of the product, so that the packaging dirt and impurities can be fully cleaned, thereby improving the overall quality and efficiency of cleaning;

[0031] 3. Facilitating batch cleaning of the product, the jig can simultaneously hold multiple products, so that multiple products can be simultaneously cleaned in batches, which is suitable for large-scale production and cleaning processes and helps to improve production efficiency.

[0032] The above is only a preferred specific implementation of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can make equivalent substitutions or changes within the technical range disclosed by the present application according to the technical scheme and concept of the present application, which should be covered within the protection scope of the present application.

Claims

1. A hard and brittle material ultra-thin product cleaning jig, comprising a square tube (1) and an arc-shaped connecting part (2) symmetrically connected to the lower end of the square tube (1), the square tube (1) and the arc-shaped connecting part (2) are tangent and overpass to form an arc surface, characterized in that, The arc surface is provided with a plurality of equidistantly distributed guide ribs (6), the upper end of the guide rib (6) is connected with an isolation head (5), the isolation head (5) is an arc structure, and the free end thereof is bent downward, and the lower end of the square tube (1) is detachably provided with a water draining structure.

2. The cleaning jig for a hard and brittle material thin product according to claim 1, wherein The upper end of the square tube (1) is connected with symmetrically arranged mounting ears (3).

3. The cleaning jig for a hard and brittle material thin product according to claim 2, wherein The upper end of the square tube (1) is provided with a notch (4) in the parallel direction of the mounting ear (3).

4. The brittle material ultra-thin product cleaning tool according to claim 3, wherein One side of the square tube (1) is provided with a lateral port (7) in the parallel direction of the mounting ear (3), and the other side is provided with a hanging ear (10).

5. The brittle material ultra-thin product cleaning tool according to claim 4, wherein The lower end of the arc-shaped connecting portion (2) is provided with a vertical plate (8), and the outer side of the vertical plate (8) is vertically provided with a lower hanging plate (9).

6. The brittle material ultra-thin product cleaning tool according to claim 5, wherein The water draining structure comprises a water draining disc (11), the upper end of the water draining disc (11) is connected with symmetrically arranged upper hanging plates (12), and the upper hanging plate (12) is matched with the lower hanging plate (9) to install and fix the water draining disc (11).

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