Automatic replacement device for laser protection liquid

Abstract

The utility model discloses an automatic replacing device for laser protection liquid, which is applied to the field of machining and comprises a support, a mother liquid barrel and an auxiliary liquid barrel are mounted at the top of the support, a liquid supplementing pump is mounted at the top of the support, and a liquid pumping port and a liquid discharging port of the liquid supplementing pump are communicated with a liquid pumping hose and a liquid discharging hose respectively. The top of the mother liquid barrel and the top of the auxiliary liquid barrel are both in threaded connection with connecting covers, and the interiors of the two connecting covers are both rotationally connected with connecting pipes through waterproof sealing bearings; the mother liquid barrel and the auxiliary liquid barrel are arranged, and the liquid supplementing pump, the liquid pumping hose, the liquid discharging hose, the connecting cover, the connecting pipe, the pumping pipe and the discharging pipe are matched, so that laser protection liquid can be supplemented to the mother liquid barrel, and shutdown for filling is not needed. And the laser protection liquid is directly supplemented into the mother liquid barrel through the auxiliary liquid barrel, and the situation that air is injected into the mother liquid barrel is avoided, so that the laser protection liquid does not need to be consumed to discharge air, and waste of the laser protection liquid can be avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of machining, in particular to a kind of laser protection fluid automatic replacement device. BACKGROUND

[0002] In the wafer packaging process, in wafer cutting process, for Low-k wafer product, laser slotting machine needs to be used.After laser slotting, laser generates high temperature and vaporizes the Low-K material on wafer surface, part of machine exhaust, part of condensation falls on wafer surface as high-temperature silicon dust.In order to avoid damage to wafer chip surface caused by condensation of high-temperature silicon slag, a layer of water-soluble laser protection fluid is first applied on the product surface.During laser operation, high-temperature vaporized silicon slag falls on the laser protection fluid and does not directly contact the product.After cutting is completed, the laser protection fluid can be washed clean with high-pressure deionized water.

[0003] Laser protection fluid is stored in barrels, and a single barrel needs to be replaced when it is used up.Laser equipment is connected to laser protection fluid through pipeline.When replacing, air may enter the pipeline due to pressure difference, and the air in the pipeline needs to be discharged after the new barrel is installed.It generally takes about 500ml of laser protection fluid to completely discharge the air in the pipeline.Not only is the machine stopped for a long time, but also the laser protection fluid is wasted when pushing out the air.In order to solve the above problems, we propose a kind of laser protection fluid automatic replacement device. UTILITY MODEL CONTENT

[0004] The utility model aims to provide a kind of laser protection fluid automatic replacement device, it has the advantage that liquid is replaced without stopping.

[0005] The above technical purpose of the utility model is realized by the following technical scheme: a kind of laser protection fluid automatic replacement device, including support, the top of the support is equipped with mother liquor barrel and auxiliary liquid barrel, the top of the support is equipped with liquid supplement pump, the liquid suction port and liquid discharge port of the liquid supplement pump are respectively communicated with liquid suction hose and liquid discharge hose, the top of the mother liquor barrel and auxiliary liquid barrel is all screw thread connection with connecting cover, the inside of two connecting covers is all rotationally connected with connecting pipe by waterproof sealing bearing, two connecting pipes are respectively communicated with liquid suction hose and liquid discharge hose, and the top of two connecting pipes is respectively communicated with extraction pipe and discharge pipe.

[0006] By setting the mother liquor barrel and auxiliary liquid barrel, the liquid supplement pump, the liquid suction hose, the liquid discharge hose, the connecting cover, the connecting pipe, the extraction pipe and the discharge pipe, the laser protection fluid in the mother liquor barrel can be supplemented without stopping and refilling.The laser protection fluid is directly supplemented to the inside of the mother liquor barrel through the auxiliary liquid barrel, so air is not injected into the inside of the mother liquor barrel, and the laser protection fluid is not wasted.

[0007] The present invention is further configured such that: a high liquid level sensor, a medium liquid level sensor and a low liquid level sensor are installed sequentially from top to bottom inside the mother liquor tank and the auxiliary liquid tank.

[0008] Using the above technical solution, high-level, medium-level, and low-level sensors are installed inside both the mother liquor tank and the auxiliary liquor tank. The high-level sensor inside the mother liquor tank and the auxiliary liquor tank is used to monitor the high level of the laser protective liquid inside the mother liquor tank and the auxiliary liquor tank; the medium-level sensor inside the mother liquor tank and the auxiliary liquor tank is used to monitor the medium level of the laser protective liquid inside the mother liquor tank and the auxiliary liquor tank; and the low-level sensor inside the mother liquor tank and the auxiliary liquor tank is used to monitor the low level of the laser protective liquid inside the mother liquor tank and the auxiliary liquor tank.

[0009] The present invention is further configured such that: a spray head connecting pipe is provided inside the mother liquor tank, and a sealing plug is fixedly fitted onto the surface of the spray head connecting pipe, and the sealing plug is inserted into the top of the connecting cover.

[0010] By adopting the above technical solution, the spray head connecting pipe and the sealing plug are used to seal the space between the spray head connecting pipe and the connecting cover, preventing external gas from entering the interior of the mother liquor tank. After the sealing plug and the connecting cover form a sealed connection, the sealing plug will not actively separate from the connecting cover without external force pulling.

[0011] The present invention is further configured such that: two button indicator lights are installed on the top of the bracket, the two button indicator lights being a yellow button light and a green button light, respectively.

[0012] Using the above technical solution, the button indicator light is set to provide a continuous or flashing reminder based on the amount of protective liquid inside the mother liquor tank and the auxiliary liquor tank.

[0013] The present invention is further configured such that: a baffle is installed on the top of the bracket, and the side of the mother liquor tank and the auxiliary liquor tank near the baffle is in contact with the connecting cover.

[0014] The above technical solution uses baffles to prevent the mother liquor tank and the auxiliary liquor tank from sliding outwards.

[0015] The present invention is further configured such that: a second button indicator light is installed on the top of the bracket, and the second button indicator light is a red button light.

[0016] Using the above technical solution, the second button indicator light is used to provide a continuous or flashing indicator light based on the liquid levels inside the mother liquor tank and the auxiliary liquor tank. The color of the second button indicator light is red.

[0017] In summary, this utility model has the following beneficial effects:

[0018] This invention, by setting up a mother liquor tank and a secondary liquor tank, along with a replenishment pump, a suction hose, a discharge hose, a connecting cap, a connecting pipe, an extraction pipe, and a discharge pipe, enables the replenishment of laser protective fluid into the mother liquor tank without requiring machine shutdown. Furthermore, by replenishing the laser protective fluid directly into the mother liquor tank from the secondary liquor tank, there is no risk of air being injected into the mother liquor tank, thus eliminating the need to consume laser protective fluid to expel air and preventing waste. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural view of the present invention;

[0020] Figure 2 This is a schematic diagram of the bracket of this utility model;

[0021] Figure 3 This is a side sectional view of the mother liquor tank and the auxiliary liquor tank of this utility model;

[0022] Figure 4 This is a utility model Figure 3 A magnified view of a portion of point A in the middle.

[0023] Reference numerals in the attached diagram: 1. Support; 2. Mother liquor tank; 3. Substitute liquor tank; 4. Make-up pump; 5. Suction hose; 6. Drain hose; 7. Connecting cap; 8. Connecting pipe; 9. Extraction pipe; 10. Discharge pipe; 11. High liquid level sensor; 12. Medium liquid level sensor; 13. Low liquid level sensor; 14. Spray head connecting pipe; 15. Sealing plug; 16. Button indicator light one; 17. Baffle; 18. Button indicator light two. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the accompanying drawings.

[0025] Example 1:

[0026] refer to Figure 1 , Figure 2 , Figure 3 and Figure 4An automatic replacement device for laser protective fluid includes a support 1. A mother fluid tank 2 and a secondary fluid tank 3 are mounted on the top of the support 1. A replenishment pump 4 is also mounted on the top of the support 1. The pump 4 has a suction port and a discharge port connected to a suction hose 5 and a discharge hose 6, respectively. Both the mother fluid tank 2 and the secondary fluid tank 3 are threadedly connected to a connecting cap 7. The inside of each connecting cap 7 is rotatably connected to a connecting pipe 8 via a waterproof sealing bearing. The two connecting pipes 8 are connected to the suction hose 5 and the discharge hose 6, respectively. The top ends of the two connecting pipes 8 are connected to an extraction pipe 9 and a discharge pipe 10, respectively. By setting up the mother fluid tank 2 and the secondary fluid tank 3, and using the replenishment pump 4, suction hose 5, discharge hose 6, connecting cap 7, connecting pipe 8, extraction pipe 9, and discharge pipe 10, laser protective fluid can be replenished inside the mother fluid tank 2 without stopping the machine for refilling. Furthermore, the laser protective fluid is directly replenished into the mother liquor tank 2 through the auxiliary liquid tank 3, so there is no situation where air is injected into the mother liquor tank 2. Therefore, there is no need to consume laser protective fluid to expel air, which can avoid waste of laser protective fluid.

[0027] Furthermore, a high-level sensor 11, a medium-level sensor 12, and a low-level sensor 13 are sequentially installed inside the mother liquor tank 2 and the auxiliary liquor tank 3 from top to bottom. The high-level sensor 11 inside the mother liquor tank 2 and the auxiliary liquor tank 3 is used to monitor the high level of the laser protective liquid inside the mother liquor tank 2 and the auxiliary liquor tank 3; the medium-level sensor 12 inside the mother liquor tank 2 and the auxiliary liquor tank 3 is used to monitor the medium level of the laser protective liquid inside the mother liquor tank 2 and the auxiliary liquor tank 3; and the low-level sensor 13 inside the mother liquor tank 2 and the auxiliary liquor tank 3 is used to monitor the low level of the laser protective liquid inside the mother liquor tank 2 and the auxiliary liquor tank 3.

[0028] Furthermore, the mother liquor tank 2 is equipped with a spray head connecting pipe 14 inside, and a sealing plug 15 is fixedly fitted onto the surface of the spray head connecting pipe 14. The sealing plug 15 is inserted into the top of the connecting cover 7. The spray head connecting pipe 14 and the sealing plug 15 are used to seal the space between the spray head connecting pipe 14 and the connecting cover 7, preventing external gas from entering the interior of the mother liquor tank 2. After the sealing plug 15 and the connecting cover 7 form a sealed connection, the sealing plug 15 will not actively separate from the connecting cover 7 without external force pulling.

[0029] Furthermore, two button indicator lights 16 are installed on the top of the bracket 1. The two button indicator lights 16 are a yellow button light and a green button light, respectively. The button indicator lights 16 are used to provide a constant light or flashing reminder based on the amount of protective liquid inside the mother liquor tank 2 and the auxiliary liquor tank 3.

[0030] Furthermore, a baffle 17 is installed on the top of the bracket 1. The sides of the mother liquor tank 2 and the auxiliary liquor tank 3 near the baffle 17 are in contact with the connecting cover 7. The baffle 17 is used to prevent the mother liquor tank 2 and the auxiliary liquor tank 3 from sliding outward.

[0031] Furthermore, a button indicator light 218 is installed on the top of the bracket 1. The button indicator light 218 is a red button light. The button indicator light 218 is used to indicate the liquid level in the mother liquor tank 2 and the auxiliary liquor tank 3 by keeping it constantly lit or flashing. The color of the button indicator light 218 is red.

[0032] Brief description of usage:

[0033] A high liquid level sensor 11, a medium liquid level sensor 12, and a low liquid level sensor 13 are installed inside the mother liquid tank 2 and the auxiliary liquid tank 3. The liquid level signal is collected through the optocoupler board using the original machine power supply.

[0034] When the liquid level in the mother liquor tank 2 is lower than the middle liquid level sensor 12, the middle liquid level sensor 12 senses the middle liquid level and the replenishment pump 4 starts. It draws the protective liquid inside the auxiliary liquid tank 3 through the suction hose 5, connecting pipe 8, and discharge pipe 10, and replenishes it into the mother liquor tank 2 through the discharge hose 6, connecting pipe 8, and suction pipe 9, so that the liquid level inside the mother liquor tank 2 reaches the high liquid level sensor 11. When the protective liquid inside the auxiliary liquid tank 3 is lower than its internal low liquid level sensor 13, the replenishment pump 4 stops replenishing the mother liquor tank 2 through the auxiliary liquid tank 3.

[0035] When the replenishment pump 4 is not working, only the yellow button indicator light 16 is constantly lit; when the replenishment pump 4 is working, only the green button indicator light 16 is constantly lit.

[0036] If the liquid level in the auxiliary liquid tank 3 is lower than the low liquid level sensor 13, the replenishment pump 4 will stop working, the red button indicator light 18 will stay on, and the yellow button indicator light 16 will flash.

[0037] When the liquid level in the auxiliary liquid tank 3 is lower than the low liquid level and the liquid level in the mother liquid tank 2 is sensed by the medium liquid level sensor 12, the replenishment pump 4 stops working, the red button indicator light 18 stays on, and the yellow button indicator light 16 flashes. After that, the auxiliary liquid tank 3 can be replaced. After the auxiliary liquid tank 3 is replaced, press the yellow button indicator light 16 to restore the standby state.

[0038] When replacing the auxiliary liquid tank 3, hold the connecting pipe 8 and rotate the connecting cover 7 threaded on the top of the auxiliary liquid tank 3. When the connecting cover 7 rotates, the bearing inside it will rotate around the connecting pipe 8. Therefore, the connecting cover 7 can be completely separated from the auxiliary liquid tank 3, and the discharge pipe 10 can be pulled out of the interior of the auxiliary liquid tank 3 by pulling the connecting cover 7.

[0039] Install the new auxiliary liquid tank 3, connect the connecting cover 7 to the auxiliary liquid tank 3 and tighten it, then press the yellow button indicator light 16 to reset the light.

[0040] This device eliminates the need for replacing the mother liquor tank 2, preventing air from entering it. It enables replacement without shutting down the machine, significantly saving laser protective fluid and increasing machine productivity.

[0041] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. An automatic laser protective fluid replacement device, comprising a support (1), characterized in that: The top of the support (1) is equipped with a mother liquor tank (2) and a secondary liquor tank (3). The top of the support (1) is equipped with a replenishment pump (4). The pump (4) has a suction port and a discharge port connected to a suction hose (5) and a discharge hose (6), respectively. The tops of the mother liquor tank (2) and the secondary liquor tank (3) are threaded with connecting caps (7). The interiors of the two connecting caps (7) are rotatably connected to connecting pipes (8) through waterproof sealing bearings. The two connecting pipes (8) are connected to the suction hose (5) and the discharge hose (6), respectively. The top ends of the two connecting pipes (8) are connected to an extraction pipe (9) and a discharge pipe (10), respectively.

2. The automatic laser protective fluid replacement device according to claim 1, characterized in that: The mother liquor tank (2) and the auxiliary liquor tank (3) are equipped with a high liquid level sensor (11), a medium liquid level sensor (12) and a low liquid level sensor (13) from top to bottom.

3. The automatic laser protective fluid replacement device according to claim 1, characterized in that: The mother liquor tank (2) is equipped with a spray head connecting pipe (14) inside. A sealing plug (15) is fixedly fitted on the surface of the spray head connecting pipe (14). The sealing plug (15) is inserted into the top of the connecting cover (7) for sealing.

4. The automatic laser protective fluid replacement device according to claim 1, characterized in that: The bracket (1) is equipped with two button indicator lights (16) on its top, which are a yellow button light and a green button light, respectively.

5. The automatic laser protective fluid replacement device according to claim 1, characterized in that: A baffle (17) is installed on the top of the bracket (1), and the side of the mother liquor tank (2) and the auxiliary liquor tank (3) near the baffle (17) is in contact with the connecting cover (7).

6. The automatic laser protective fluid replacement device according to claim 1, characterized in that: A second button indicator light (18) is installed on the top of the bracket (1), and the second button indicator light (18) is a red button light.

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