Storage device of wafer container

Abstract

The utility model provides a storage device of a wafer container. The storage device comprises a cavity, a sensor and an alarm unit. A plurality of stacked storage layers are arranged in a cavity, the structures of the storage layers are the same, each storage layer comprises a plurality of storage positions, each storage position can store a wafer container, all the storage positions are arranged in an array mode, and each column of storage positions form a shed position; monitoring whether the wafer container exceeds the safety position range of the shed position or not through a sensor arranged on the top surface and / or the bottom surface of the shed position; when the wafer container exceeds the safe position range of the shed position, the alarm unit triggers alarm, and when the sensor cannot monitor the wafer container outside the safe position range of the shed position, the alarm is recovered. Therefore, the wafer container with the abnormal storage position can be recognized in time, the robot is prevented from colliding with the wafer container, and the safety of products and equipment is improved.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and more particularly to a wafer-level storage device. Background Technology

[0002] Automated storage and retrieval systems (STKs) in semiconductor factories are used for the automated storage and retrieval of materials on production lines within semiconductor cleanrooms. Front-opening unified pods (FOUPs) are containers used in semiconductor manufacturing processes to protect, transport, and store wafers. If the FOUPs in an STK are placed incorrectly, it can cause interference with robots or collisions, leading to product and equipment damage and ultimately losses.

[0003] Timely identification of FOUPs with abnormal placement is of great significance for improving product and equipment safety and reducing costs. Summary of the Invention

[0004] The technical problem to be solved by this utility model is to provide a storage device for wafer containers that can promptly identify wafer containers placed in abnormal positions, thereby improving product safety and equipment safety.

[0005] To address the aforementioned problems, this utility model provides a wafer container storage device, comprising: a cavity, wherein multiple stacked storage layers are disposed within the cavity, each storage layer having the same structure, each storage layer including multiple storage locations, each storage location capable of storing one wafer container, all storage locations being arranged in an array, each column of storage locations constituting a shelf; sensors are disposed on the top and / or bottom surfaces of the shelf, the sensors being used to monitor whether the wafer container exceeds the safe position range of the shelf; and an alarm unit communicating with the sensors, the alarm unit being configured to: trigger an alarm when the sensors detect that the wafer container exceeds the safe position range of the shelf, and reset the alarm when the sensors cannot detect the wafer container outside the safe position range of the shelf.

[0006] In some embodiments, each storage layer is provided with a plurality of storage shelves, and each storage shelf corresponds to a storage location.

[0007] In some embodiments, the safe location range is a defined location range when the wafer container is stored in the storage location.

[0008] In some embodiments, the top surface of the shelf is located on the upper surface of the cavity, and the bottom surface of the shelf is located on the lower surface of the cavity.

[0009] In some embodiments, three sensors are provided for each of the racks, two of which are located on the two sides of the top or bottom surface of the rack to monitor whether the wafer container is outside the safe position range of the rack, and the other sensor is located in the middle of the top or bottom surface of the rack to monitor whether the wafer container is stored in the middle of the rack.

[0010] In some embodiments, the sensor is a through-beam photosensitive sensor, which includes a transmitter and a receiver, the transmitter and the receiver being disposed on the top surface and the bottom surface, respectively, or the transmitter and the receiver being disposed on the bottom surface and the top surface, respectively.

[0011] In some embodiments, the sensor is a reflective light sensor, and the sensor is disposed on the top surface or the bottom surface.

[0012] In some embodiments, the alarm unit further includes an alarm device, which issues an alarm when the alarm unit triggers an alarm.

[0013] The above technical solution provides a wafer container storage device, including a cavity, sensors, and an alarm unit. Multiple stacked storage layers are arranged within the cavity, all with identical structures. Each storage layer includes multiple storage locations, each capable of storing one wafer container. All storage locations are arranged in an array, with each row of locations forming a shelf. Sensors located on the top and / or bottom surface of each shelf monitor whether the wafer container exceeds the safe position range of the shelf. When the wafer container exceeds the safe position range, the alarm unit triggers an alarm. The alarm is deactivated when the sensors no longer detect the wafer container outside the safe position range of the shelf. This allows for timely identification of wafer containers in abnormal storage locations, preventing collisions between robots and wafer containers and improving product and equipment safety.

[0014] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the present invention. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of the storage device of the wafer container provided in the first embodiment of this utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the storage compartment in the wafer container provided in the first embodiment of this utility model;

[0018] Figure 3 This is a top view of the monitoring point of the sensor on the side of the wafer container provided in the first embodiment of the present invention;

[0019] Figure 4 This is a top view of the monitoring point on the side of the wafer container provided by the second embodiment of the present invention.

[0020] List of reference numerals in the attached diagram:

[0021] 10 Wafer Containers

[0022] 11 Cavities

[0023] 111 Storage Layer

[0024] 112 Storage rack

[0025] 113 Upper surface

[0026] 114 Lower surface

[0027] 115 Sheds

[0028] 116 Safe location range

[0029] 12 sensors

[0030] 121 transmitter

[0031] 122 receiver

[0032] Monitoring points 123 and 223

[0033] 13 Alarm Units

[0034] 14 Alarm Detailed Implementation

[0035] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0036] Figure 1 This is a schematic diagram of the structure of the storage device of the wafer container provided in the first embodiment of this utility model; Figure 2 This is a schematic diagram of the structure of the storage compartment in the wafer container provided in the first embodiment of this utility model; Figure 3 This is a top view of the monitoring point on the side of the wafer container provided in the first embodiment of the present invention.

[0037] like Figure 1 As shown, the storage device of the wafer container includes: a cavity 11, a sensor 12, and an alarm unit 13.

[0038] The cavity 11 contains multiple stacked storage layers 111, each with the same structure. Each storage layer 111 includes multiple storage locations, and each storage location can store a wafer container 10. All the storage locations are arranged in an array, and each column of storage locations constitutes a bay 115. Figure 1 As shown, the cavity 11 has a parallel upper surface 113 and a lower surface 114, and the space between the upper surface 113 and the lower surface 114, which is the storage space of a longitudinally arranged row of storage positions, is the shelf 115. The wafer container 10 is cuboid in shape. In this embodiment, the wafer container 10 is a FOUP.

[0039] In this embodiment, the cavity 11 is rectangular parallelepiped in shape. Correspondingly, each storage layer 111 is also rectangular parallelepiped in shape. In some embodiments, the cavity 11 is cylindrical in shape, and correspondingly, each storage layer 111 is also cylindrical in shape, but the thickness of the storage layer 111 is less than the thickness of the cavity 11.

[0040] Each of the storage layers 111 is provided with a plurality of storage racks 112, and each storage rack 112 can store one wafer container 10, that is, one storage rack 112 corresponds to one storage location.

[0041] like Figure 1As shown, each storage layer 111 has a row of storage racks 112 arranged symmetrically on both sides. Each storage rack 112 is a thin plate and has an opening on one side. When the wafer container 10 is stored on the storage rack 112, the wafer container 10 occupies one of the storage positions in the storage layer 111.

[0042] The storage rack 112 is a metal storage rack, which can ensure sufficient support strength in a relatively thin form.

[0043] In this embodiment, the top surface of the shelf 115 is located on the upper surface 113 of the cavity 11, the bottom surface of the shelf 115 is located on the lower surface 114 of the cavity 11, and the shelf 115 is arranged longitudinally in the cavity 11. Figure 1 As shown, the cavity 11 includes four storage layers 111, and correspondingly, each shelf 115 includes four storage positions arranged longitudinally. In some embodiments, the cavity 11 includes eleven storage layers 111, and correspondingly, each shelf 115 includes eleven storage positions arranged longitudinally.

[0044] Sensors are provided on the top and / or bottom surfaces of the bay 115. Specifically, the sensor 12 is located on the upper surface 113 and / or the lower surface 114 of the cavity 11. The sensor 12 is used to monitor whether the wafer container 10 exceeds the safe position range 116 of the bay 115. One or more sensors 12 may be provided for each bay 115.

[0045] The safe position range 116 is the defined position range of the wafer container 10 when it is stored in the storage location. Specifically, when the wafer container 10 is stored in the storage location via the storage rack 112, the wafer container 10 must not exceed the safe position range 116 to prevent the robot from colliding with the stored wafer container 10 when moving and transporting it within the cavity 11. If a wafer container 10 exists that exceeds the safe position range 116, the robot may collide with the wafer container 10 that exceeds the safe position range 116 due to insufficient space when moving and transporting it within the cavity 11, resulting in damage to the product and equipment.

[0046] Since the storage locations for the wafer containers 10 are distributed identically in each of the storage layers 111, the safe location ranges 116 of the wafer containers 10 are also distributed identically in each of the storage layers 111. The safe location ranges 116 located in different storage layers 111 also form an array within the cavity 11. The wafer containers 10 in the same bay 115 have sides facing the same direction located in the same vertical plane.

[0047] In some embodiments, a sensor 12 is provided for each of the bays 115, the sensor 12 being located on one side of the top or bottom surface of the bay 115, the side corresponding to the side on which the wafer container 10 is most likely to exceed the safe position range 116 of the bay 115.

[0048] In this embodiment, three sensors 12 are provided for each of the booths 115. Two of the sensors 12 are respectively located on the two sides of the top or bottom surface of the booth 115 to monitor whether the wafer container 10 exceeds the side of the safe position range 116 of the booth 115. The other sensor 12 is located in the middle of the top or bottom surface of the booth 115 to monitor whether the wafer container 10 is stored in the middle of the booth 115.

[0049] For details, please refer to Figure 2 and Figure 3 For each of the shed positions 115, three sensors 12 are respectively set on the top and bottom surfaces of the shed position 115, that is, three sensors 12 are respectively set on the upper surface 113 and the lower surface 114 of the cavity 11 at the positions corresponding to the shed position 115. Figure 2 The dashed box indicates the bay 115. Two sensors 12 are located on the outer side of the bay 115 to monitor whether the wafer container 10 extends beyond the safe position range 116 of the bay 115. Another sensor 12 is located at the center of the top surface or the center of the bottom surface of the bay 115 to monitor whether the wafer container 10 is stored in the center of the bay 115.

[0050] In this embodiment, the sensor 12 is a through-beam light sensor, such as... Figure 2As shown, the sensor 12 includes a transmitter 121 and a receiver 122, which are respectively disposed on the upper surface 113 and the lower surface 114. The light beam emitted by the transmitter 121 is aligned with the receiver 122 from top to bottom along the direction of the arrow. When the light beam between the transmitter 121 and the receiver 122 is blocked, it can be determined that there is an obstruction in the straight line between the transmitter 121 and the receiver 122. Specifically, when the sensor 12 used to monitor whether the wafer container 10 exceeds the safe position range 116 of the shelf 115 detects an obstruction, it is determined that the wafer container 10 exceeds the safe position range 116 of the shelf 115; when the sensor 12 used to monitor whether the wafer container 10 is stored in the middle of the shelf 115 detects an obstruction, it is determined that at least one wafer container 10 is stored in the middle of the shelf 115.

[0051] In this embodiment, as Figure 3 As shown, the monitoring points 123 of the two sensors 12 are located outside the boundaries of the safe position range 116, and the two boundaries correspond to the two symmetrical sides of the wafer housing 115. The monitoring point 123 of the other sensor 12 is located on the upper surface of the wafer container 10.

[0052] In some embodiments, the two sensors 12 respectively monitor whether the wafer container 10 is outside the safe position range 116 of the shelf 115 on two adjacent sides.

[0053] In some embodiments, the transmitter 121 is disposed on the lower surface 114 and the receiver 122 is disposed on the upper surface 113. The light beam emitted by the transmitter 121 is aligned with the receiver 122 in a bottom-to-top direction. The monitoring point 123 of the sensor 12 located below the bottom surface of the shelf 115 is located on the lower surface of the wafer container 10.

[0054] In some embodiments, the sensor 12 is a reflective light sensor, disposed on the top and / or bottom surface of the bay 115. The top surface of the bay 115 is located on the upper surface 113 of the cavity 11, and the bottom surface of the bay 115 is located on the lower surface 114 of the cavity 11. Accordingly, the sensor 12 is disposed on the upper surface 113, and a reflector is disposed on the lower surface 114. The presence of an obstruction between the sensor 12 and the reflector is determined by monitoring changes in the reflected light beam. When the sensor 12 is disposed on the lower surface 114, the reflector is disposed on the upper surface 113. When an obstruction exists between the sensor 12 and the reflector, it is determined that the wafer container 10 exceeds the safe position range 116 of the bay 115. Specifically, if there is an obstruction between the sensor 12 and the reflector used to monitor whether the wafer container 10 exceeds the safe position range 116 of the shelf 115, it is determined that the wafer container 10 exceeds the safe position range 116 of the shelf 115; if there is an obstruction between the sensor 12 and the reflector used to monitor whether the wafer container 10 is stored in the middle of the shelf 115, it is determined that at least one wafer container 10 is stored in the shelf 115.

[0055] Continue to refer to Figure 1 The alarm unit 13 communicates with the sensor 12. The alarm unit 13 is configured to: trigger an alarm when the sensor 12 detects that the wafer container 10 is outside the safe position range 116 of the rack 115, and reset the alarm when the sensor 12 can no longer detect the wafer container 10 outside the safe position range 116 of the rack 115.

[0056] In this embodiment, the alarm unit 13 includes a controller connected to all the sensors 12 to obtain monitoring results for all the bays 115. When any of the bays 115 has a wafer container 10 outside the safe position range 116, the controller triggers an alarm.

[0057] The alarm unit 13 also includes an alarm 14. When the alarm unit 13 triggers an alarm, the controller drives the alarm to sound an alarm. For example, as... Figure 1 As shown, the alarm 14 is a buzzer, which sounds when the alarm unit 13 triggers the alarm; or, for example, the alarm 14 also includes an alarm light, which lights up when the alarm unit 13 triggers the alarm.

[0058] The controller continuously monitors whether the wafer container 10 in the rack 115 is outside the safe position range 116. When the sensor 12 detects that the wafer container 10 is outside the safe position range 116 of the rack 115, the alarm unit 13 triggers an alarm to remind the operator to correct the abnormally positioned wafer container 10. After the operator corrects the position, if the controller no longer detects the wafer container 10 outside the safe position range 116 of the rack 115, the alarm unit 13 will reset and the state of the alarm device 14 will be reset. For example, the alarm device 14 is a buzzer, and when the alarm unit 13 resets, the alarm device 14 will turn off its alarm sound; or, for example, the alarm device includes an alarm light, and when the alarm unit 13 resets, the alarm light will turn off.

[0059] In this embodiment, three sensors 13 are provided for each shelf 115. By adding sensors 12 located above the top surface or below the bottom surface of the shelf 115, interference in determining when the shelf 115 is empty is reduced. When the sensor 12 located on the top surface and / or bottom surface of the shelf 115 detects that at least one wafer container 10 is stored in the shelf 115, it is determined whether the sensor 12 located outside the shelf 115 detects an obstruction beyond the safe position range 116, and then it is determined whether the wafer container 10 in the shelf 115 is outside the safe position range 116. When the sensor 12 located above the top surface or below the bottom surface of the shelf 115 detects that there is no wafer container 10 in the shelf 115, the monitoring result of the shelf 115 can be skipped.

[0060] Figure 4 This is a top view of the sensor's monitoring point on the side of the wafer container according to the second embodiment of this utility model. The difference between the second embodiment and the first embodiment lies in the arrangement of the sensor.

[0061] Similar to the first embodiment, refer to Figure 1 The storage device of the wafer container includes: a cavity 11, a sensor 12, and an alarm unit 13.

[0062] like Figure 4As shown, the shelf 115 includes four sides, one of which is used to fix the storage rack 112. Four sensors are provided for each shelf 115. Three sensors are used to monitor whether there are any obstructions beyond the safe position range 116 on the other three sides of the shelf 115, thereby determining whether the wafer container 10 exceeds the safe position range 116 of the shelf 115. The fourth sensor is used to monitor whether at least one wafer container 10 is stored in the middle of the shelf 115, reducing interference when the shelf 115 is empty. Correspondingly, three monitoring points 223 are located outside the safe position range 116 and corresponding to the three sides of the safe position range 116 of the shelf 115, and one monitoring point 223 is located on the upper surface of the wafer container 10.

[0063] The above technical solution provides a wafer container storage device, including a cavity, sensors, and an alarm unit. Multiple stacked storage layers are arranged within the cavity, each storage layer having the same structure and including multiple storage locations. Each storage location can store one wafer container, and all storage locations are arranged in an array, with each row of storage locations forming a shelf. Sensors located on the top and / or bottom surface of the shelf monitor whether the wafer container exceeds the safe position range of the shelf. When the wafer container exceeds the safe position range of the shelf, the alarm unit triggers an alarm; the alarm is deactivated when the sensors no longer detect the wafer container outside the safe position range of the shelf. This allows for timely identification of wafer containers in abnormal storage locations, preventing collisions between robots and wafer containers, and improving product and equipment safety.

[0064] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion. The various embodiments in this specification are described in a related manner, and similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0065] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of protection of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. A storage device for a wafer container, characterized in that, include: The cavity contains multiple stacked storage layers, each with the same structure. Each storage layer includes multiple storage locations, and each storage location can store a wafer container. All the storage locations are arranged in an array, and each column of storage locations constitutes a shelf. Sensors are provided on the top and / or bottom surfaces of the shelf to monitor whether the wafer container exceeds the safe position range of the shelf. An alarm unit is provided, which communicates with the sensor. The alarm unit is configured to trigger an alarm when the sensor detects that the wafer container is outside the safe position range of the rack, and to reset the alarm when the sensor can no longer detect the wafer container outside the safe position range of the rack.

2. The storage device for a wafer container according to claim 1, characterized in that, Each storage layer is provided with multiple storage racks, and each storage rack corresponds to a storage location.

3. The storage device for a wafer container according to claim 1, characterized in that, The safe location range is the defined location range when the wafer container is stored in the storage location.

4. The storage device for a wafer container according to claim 1, characterized in that, The top surface of the shed is located on the upper surface of the cavity, and the bottom surface of the shed is located on the lower surface of the cavity.

5. The storage device for a wafer container according to claim 1, characterized in that, Three sensors are provided for each of the racks. Two of the sensors are located on the two sides of the top or bottom surface of the rack to monitor whether the wafer container is outside the safe position range of the rack. The third sensor is located in the middle of the top or bottom surface of the rack to monitor whether the wafer container is stored in the middle of the rack.

6. The storage device for a wafer container according to claim 1, characterized in that, The sensor is a through-beam optical sensor, which includes a transmitter and a receiver. The transmitter and the receiver are respectively disposed on the top surface and the bottom surface, or the transmitter and the receiver are respectively disposed on the bottom surface and the top surface.

7. The storage device for a wafer container according to claim 1, characterized in that, The sensor is a reflective light sensor, and the sensor is disposed on the top surface or the bottom surface.

8. The storage device for a wafer container according to claim 1, characterized in that, The alarm unit also includes an alarm device, which sounds an alarm when the alarm unit triggers an alarm.

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