Tool equipment for preparing coating

Abstract

The utility model relates to the technical field of crystal growth equipment, in particular to tooling equipment for preparing a coating, which comprises a shell, a bearing cylinder and a plurality of groups of bearing components, a closed accommodating cavity is arranged in the shell, the bearing cylinder with two ends communicated along a first direction is arranged in the accommodating cavity, and the plurality of groups of bearing components are fixedly arranged on the inner wall of the bearing cylinder at intervals along the first direction. Each bearing assembly is provided with at least three coplanar supporting points, the shell is fixedly connected with a supporting rod, the supporting rod is arranged in the bearing cylinder and extends in the first direction, and a plurality of crucibles are fixedly arranged on the supporting rod in the first direction. The production efficiency is greatly improved, the tantalum sources are placed in the multiple crucibles arranged in the first direction, the intermediate reaction product tantalum oxide atmosphere in the containing cavity can be more uniform, and the uniformity of the coating on the surface of each relay ring is ensured.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth equipment technology, and in particular to a tooling equipment for preparing coatings. Background Technology

[0002] With the rapid development of ultra-high voltage power transmission, new energy vehicles, and other fields, the market demand for silicon carbide substrates is expanding rapidly. Physical vapor transport (PVT) growth of silicon carbide single crystals is currently the mainstream silicon carbide single crystal growth process. In the PVT process, the silicon (Si) atmosphere has a strong corrosive effect on the crucible material, leading to carbon powder falling off the crucible surface and affecting the quality of silicon carbide crystal growth. Therefore, coating the graphite crucible with tantalum carbide (TaC) to ensure crystal growth quality is an ideal choice.

[0003] Existing tantalum carbide coating apparatus and method for relay rings (CN202310994198) proposes to obtain a tantalum carbide coating by further reacting a tantalum source vapor deposition atmosphere with a graphite base. However, this apparatus is designed to perform coating operations on only a single relay ring at a time. While it meets basic coating requirements to a certain extent, it becomes inefficient for large-scale production or when multiple relay rings need to be processed simultaneously, failing to meet the demands of high-efficiency, batch production. Furthermore, even when coating multiple relay rings simultaneously, this apparatus still suffers from uneven tantalum carbide coating on the relay ring surface, resulting in quality issues. Utility Model Content

[0004] The purpose of this invention is to provide a tooling device for preparing coatings, so as to solve the problems of low efficiency and unevenness in applying tantalum carbide coatings through relay rings in the prior art.

[0005] The technical solution of this utility model is: a tooling device for preparing a coating, comprising: a shell, a bearing cylinder, and multiple sets of bearing components. The shell has a closed receiving cavity inside. The bearing cylinder, which is open at both ends along a first direction, is built into the receiving cavity. The multiple sets of bearing components are fixedly disposed at intervals along the first direction on the inner wall of the bearing cylinder. Each bearing component has at least three coplanar support points. The shell is fixedly connected to a support rod. The support rod is inside the bearing cylinder and extends along the first direction. Multiple crucibles are fixedly disposed on the support rod along the first direction.

[0006] Preferably, the central axis of the support rod is coaxial with the central axis of the bearing cylinder, and the support points of the plurality of bearing components are at the same distance from the support rod.

[0007] Preferably, the supporting components are uniformly distributed in the first direction, the crucibles are uniformly distributed in the first direction, and the supporting components and the crucibles are correspondingly arranged in the first direction.

[0008] Preferably, the bearing assembly includes multiple bearing members, which are arranged in a circumferential array and fixedly connected to the inner wall of the bearing cylinder. All of the multiple bearing members extend toward the support rod to support the relay ring.

[0009] Preferably, the bearing member includes a rod, one end of which is threaded to the inner wall of the bearing cylinder, and the rod is fixed with at least one sharp part, the sharp end of each of the sharp parts extending in the same direction along a first direction.

[0010] Preferably, the housing includes an outer shell and an end cap. The outer shell is closed at one end along a first direction, and the other end is open. The end cap is detachably connected to the opening of the outer shell, and the end cap has an air hole communicating with the receiving cavity.

[0011] Preferably, the crucible is fixed around the support rod, and the crucible has reaction grooves arranged around the support rod, with the openings of the plurality of reaction grooves all facing the end cap.

[0012] Preferably, a plurality of support spikes are fixed on the inner bottom surface of the outer shell, the sharp ends of the support spikes are arranged toward the end cap, the sharp ends of the support spikes are located on the same horizontal plane, and the plurality of support spikes are circumferentially distributed around the support rod to support one of the relay rings.

[0013] Compared with the prior art, the advantages of this utility model are:

[0014] By fixing multiple sets of support components at intervals along the first direction inside the support cylinder, each support component can support one relay ring, realizing the simultaneous coating operation of multiple relay rings, which greatly improves production efficiency. Tantalum source and carbon base are placed in several crucibles set along the first direction. The tantalum source and carbon base react to generate tantalum oxide and carbon monoxide atmosphere. The tantalum oxide atmosphere reacts with the carbon base on the surface of the relay ring to form tantalum carbide coating, which can make the intermediate reaction product tantalum oxide atmosphere in the containment cavity more uniform, ensuring the uniformity of the coating on the surface of each relay ring. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0016] Figure 1 This is a schematic diagram of the tooling equipment for preparing a coating according to the present invention;

[0017] Figure 2 This is a radial cross-sectional view of the tooling equipment for preparing a coating according to the present invention;

[0018] Figure 3 This is a schematic diagram of the structure of the bearing component described in this utility model;

[0019] Figure 4 This is an axial cross-sectional view of the tooling equipment for preparing a coating according to the present invention.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Shell; 11. Receiving cavity; 12. Outer shell; 13. End cap; 14. Vent; 15. Support spike; 2. Bearing cylinder; 3. Bearing assembly; 31. Bearing component; 311. Rod; 312. Sharp part; 4. Relay ring; 5. Support rod; 6. Crucible; 61. Reaction tank. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0023] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0024] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0025] like Figure 1 and Figure 2As shown, a tooling device for preparing a coating includes a housing 1, a support cylinder 2, and multiple sets of support components 3. The housing 1 has a closed receiving cavity 11 inside. The support cylinder 2 is detachably connected to the housing 1, and the support cylinder 2, with its two ends connected along a first direction, is built into the receiving cavity 11. The multiple sets of support components 3 are fixed to the inner wall of the support cylinder 2 along the first direction. Each set of support components 3 is used to support a relay ring 4, that is, multiple relay rings 4 can be supported along the first direction. The support component 3 has at least three coplanar support points, the plane of which is perpendicular to the first direction, to stably support the relay ring 4, so that the relay ring 4 can maintain a relatively stationary state. The housing 1 is fixedly connected to a support rod 5, and the support rod 5 is fixedly connected to multiple crucibles 6. Each crucible 6 can hold a tantalum source. After the tantalum source reacts in the crucible 6, it generates a tantalum oxide atmosphere. The tantalum oxide atmosphere reacts with the carbon-based material on the inner wall of the relay ring 4 to produce a tantalum carbide coating.

[0026] Specifically, the tantalum source in crucible 6 is a mixture of tantalum pentoxide powder and graphite powder. The tantalum pentoxide and graphite powder react to generate an atmosphere of tantalum oxide and carbon monoxide. Then, the atmosphere of tantalum oxide reacts with the carbon-based material on the inner wall of relay ring 4 to form a tantalum carbide coating.

[0027] It is worth noting that the first direction refers to the direction in which the two ends of the bearing cylinder 2 are connected, that is, the direction in which the relay rings 4 are arranged or stacked within the bearing cylinder 2. In this embodiment, the first direction is the vertical direction, and the plane containing at least three support points of the same group of bearing components 3 is the horizontal plane.

[0028] In this embodiment, the housing 1 includes an outer shell 12 and an end cap 13. The outer shell 12 has a thin-walled structure, and the receiving cavity 11 is the space inside the outer shell 12. The top of the outer shell 12 along the first direction is an opening that communicates with the receiving cavity 11. The bottom of the outer shell 12 along the first direction is a closed bottom end face, which is on a horizontal plane. The end cap 13 is detachably connected to the opening of the housing 1. Preferably, the end cap 13 abuts against the top of the outer shell 12 to close the receiving cavity 11. More preferably, the end cap 13 is connected to the outer shell 12 by a snap-fit ​​or other connecting structure to ensure a tight connection between the end cap 13 and the outer shell 12. The reaction of the mixture of tantalum pentoxide powder and graphite powder requires a high temperature to occur. The housing 1 is placed in a high-temperature environment, and the temperature is transferred into the bearing cylinder 2, causing the tantalum pentoxide powder and graphite powder to react. The end cap 13 has an air hole 14, which is connected to the receiving cavity 11 to balance the air pressure between the receiving cavity 11 and the outside. Preferably, the air hole 14 is located at the center of the end cap 13, and the central axis of the air hole 14 is coaxial with the center line of the support rod 5.

[0029] In this embodiment, both the outer shell 12 and the carrier cylinder 2 are cylindrical structures, facilitating the loading of the carrier cylinder 2 into the receiving cavity 11. The outer wall of the carrier cylinder 2 is fitted to the inner wall of the outer shell 12. One end of the carrier cylinder 2 along the first direction abuts against the bottom end face inside the outer shell 12, and the other end abuts against the end cap 13. The shell 1 restricts the movement of the carrier cylinder 2 to ensure that the relay ring 4 inside the carrier cylinder 2 can be in a stable state. Both ends of the carrier cylinder 2 along the first direction are open, allowing the airflow inside the carrier cylinder 2 to flow from bottom to top towards the air hole 14.

[0030] The central axis of the support rod 5 is coaxial with the central axis of the bearing cylinder 2. The support points of multiple bearing components 3 are at the same distance from the support rod 5. The relay ring 4 supported by the bearing component 3 is at the same distance from the support rod 5, thereby making the coating on the inner wall of the relay ring 4 more uniform.

[0031] The support components 3 and crucibles 6 are uniformly distributed in the first direction, and are correspondingly arranged in the first direction. During the application of the coating to the relay ring 4, the gas density of tantalum oxide gradually decreases in the space along the first direction. The crucibles 6 can react in multiple locations along the first direction to replenish the tantalum oxide in the air, ensuring the uniformity of tantalum oxide in the space along the first direction. Preferably, the crucibles 6 and support components 3 correspond one-to-one.

[0032] The crucible 6 is fixed around the support rod 5. Preferably, the crucible 6 is disc-shaped, and the crucible 6 has reaction grooves 61 arranged around the support rod 5. Preferably, the crucible 6 has an annular groove, and the openings of the multiple reaction grooves 61 all face the end cap 13. The disc-shaped crucible 6 and the annular groove design make the spatial distribution inside the crucible 6 more uniform, which is beneficial to the uniform dispersion of reactants (such as tantalum oxide) in the receiving cavity 11.

[0033] The supporting assembly 3 includes multiple supporting members 31, which are arranged in a circumferential array and fixedly connected to the inner wall of the supporting cylinder 2. Multiple supporting members 31 in the same group are located on the same horizontal plane and extend towards the support rod 5. These multiple supporting members 31 together support a relay ring 4. Preferably, there are three groups of supporting members 31, with an included angle of 120° between any two adjacent supporting members 31, allowing the three supporting members 31 to evenly distribute the weight of the relay ring 4.

[0034] like Figure 3As shown, specifically, the carrier 31 includes a rod 311 and a pointed part 312. One end of the rod 311 is threaded to the inner wall of the carrier cylinder 2, and the other end extends toward the support rod 5. The pointed end of each pointed part 312 extends vertically upward. The bottom of the relay ring 4 abuts against the pointed end of the pointed part 312, that is, reducing the contact area between the pointed part 312 and the bottom of the relay ring 4 to ensure that the bottom of the relay ring 4 can be coated with a uniform and nearly complete coating.

[0035] like Figure 4 As shown, a number of support spikes 15 are fixed on the inner bottom surface of the outer shell 12. The sharp ends of the support spikes 15 are arranged towards the end cap 13. The sharp ends of the support spikes 15 are located on the same horizontal plane. The number of support spikes 15 are distributed circumferentially around the support rod 5 to support a relay ring 4 in the space near the bottom of the bearing cylinder 2. On the one hand, this can improve the efficiency of applying the coating to the relay ring 4. On the other hand, it can balance the gas density of the bottom tantalum oxide and further improve the uniformity of tantalum oxide.

[0036] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A tooling apparatus for preparing a coating, characterized in that, The device includes a shell (1), a support cylinder (2), and multiple sets of support components (3). The shell (1) has a closed receiving cavity (11) inside. The support cylinder (2), which is open at both ends along a first direction, is built into the receiving cavity (11). Multiple sets of support components (3) are fixedly disposed on the inner wall of the support cylinder (2) at intervals along the first direction. Each support component (3) has at least three coplanar support points. The shell (1) is fixedly connected to a support rod (5). The support rod (5) is inside the support cylinder (2) and extends along the first direction. Multiple crucibles (6) are fixedly disposed on the support rod (5) along the first direction.

2. The tooling equipment for preparing a coating according to claim 1, characterized in that: The central axis of the support rod (5) is coaxial with the central axis of the bearing cylinder (2), and the support points of the plurality of bearing components (3) are at the same distance from the support rod (5).

3. The tooling equipment for preparing a coating according to claim 2, characterized in that: The support components (3) are evenly distributed in the first direction, the crucibles (6) are evenly distributed in the first direction, and the support components (3) and the crucibles (6) are correspondingly arranged in the first direction.

4. The tooling equipment for preparing a coating according to claim 1, characterized in that: The bearing assembly (3) includes multiple bearing members (31), which are arranged in a circumferential array and fixedly connected to the inner wall of the bearing cylinder (2). All the bearing members (31) extend toward the support rod (5) to support the relay ring (4).

5. The tooling equipment for preparing a coating according to claim 4, characterized in that: The support member (31) includes a rod (311), one end of which is threaded to the inner wall of the support cylinder (2). The rod (311) is fixed with at least one sharp part (312), and the sharp end of each sharp part (312) extends in the same direction along a first direction.

6. The tooling equipment for preparing a coating according to claim 4, characterized in that: The housing (1) includes an outer shell (12) and an end cap (13). The outer shell (12) is closed at one end along a first direction, and the other end is open. The end cap (13) is detachably connected to the opening of the outer shell (12). The end cap (13) has an air hole (14) that communicates with the receiving cavity (11).

7. The tooling equipment for preparing a coating according to claim 6, characterized in that: The crucible (6) is fixed around the support rod (5), and the crucible (6) has a reaction groove (61) arranged around the support rod (5). The openings of the multiple reaction grooves (61) all face the end cap (13).

8. The tooling equipment for preparing a coating according to claim 6, characterized in that: The inner bottom surface of the outer shell (12) is provided with a plurality of support spikes (15), the sharp ends of the support spikes (15) are arranged toward the end cap (13), the sharp ends of the support spikes (15) are located on the same horizontal plane, and the plurality of support spikes (15) are distributed circumferentially around the support rod (5) to support one relay ring (4).

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