Electrostatic powder coaxial capacitor

Abstract

The utility model belongs to the technical field of atomic layer deposition, and relates to an electrostatic powder coaxial capacitor, which comprises an outer cylinder used for accommodating an inner cylinder; the inner column body is used for forming an electric field together with the outer column body; the inner column body is arranged in the outer column body; the insulating part is used for insulating the outer column body and the inner column body; the insulating part is respectively connected with the outer column body and the inner column body; wherein the outer column body is connected with a negative electrode of a power supply, and the inner column body is connected with a positive electrode of the power supply. According to the electrostatic powder coaxial capacitor provided by the invention, the dispersion uniformity of powder in an atomic layer deposition process is improved, so that the quality of a thin film is improved; the powder agglomeration phenomenon is reduced, and equipment blockage and operation interruption caused by agglomeration are avoided; through electrostatic auxiliary dispersion, the working efficiency and stability of the powder ALD equipment are improved; the technology can be expanded to other industrial fields needing powder dispersion, and has a wide application prospect.

Description

TECHNICAL FIELD

[0001] The utility model relates to atomic layer deposition technical field especially relates to a static powder coaxial capacitor. BACKGROUND

[0002] Atomic layer deposition (ALD) is a technique for manufacturing ultra-thin films, which achieves precise control of thin film growth by alternately introducing different chemical vapor precursors onto the surface of a substrate.

[0003] In the process of powder atomic layer deposition, uniform dispersion of powder is crucial for the quality and performance of thin films. However, existing powder dispersion techniques often have problems of powder agglomeration and uneven dispersion, which limits the application of atomic layer deposition technology in powder materials. SUMMARY

[0004] Therefore, the utility model provides a static powder coaxial capacitor.

[0005] Specifically, the utility model is realized by the following technical solutions:

[0006] According to the first aspect of the utility model, a static powder coaxial capacitor is provided, comprising:

[0007] An outer cylinder for accommodating an inner cylinder;

[0008] An inner cylinder for forming an electric field with the outer cylinder; the inner cylinder is arranged in the outer cylinder;

[0009] An insulating part for insulating the outer cylinder and the inner cylinder; the insulating part is connected with the outer cylinder and the inner cylinder respectively;

[0010] Wherein, the outer cylinder is connected with the negative pole of the power supply, and the inner cylinder is connected with the positive pole of the power supply.

[0011] Optionally, the outer cylinder comprises a base, the inner cylinder is arranged on the base, and the inner cylinder and the base are connected through the insulating part.

[0012] Optionally, the outer cylinder further comprises a side wall, which is arranged on the base along the circumference with the center of the inner cylinder as the axis.

[0013] Optionally, the outer cylinder further comprises an inclined wall, which is arranged on the end of the side wall along the circumference with the center of the inner cylinder as the axis.

[0014] Optionally, the inclined wall extends in the direction away from the side wall along the trend of gradually approaching the inner cylinder.

[0015] Optionally, the outer cylinder further comprises an opening, and the end of the inclined wall extends in a circumferential direction to form the opening with the center of the inner cylinder as an axis.

[0016] Optionally, an insulating layer is arranged on the outer wall of the inner cylinder.

[0017] Optionally, the insulating part is made of Teflon or ceramic.

[0018] Optionally, the insulating layer is made of Teflon or ceramic.

[0019] Optionally, the voltage range of the power supply is 1-10kV.

[0020] The technical scheme provided by the utility model has at least the following beneficial effects:

[0021] The electrostatic powder coaxial capacitor provided by the application improves the dispersion uniformity of the powder in the atomic layer deposition process, thereby improving the quality of the thin film; reduces the powder agglomeration phenomenon, avoids the equipment blockage and operation interruption caused by agglomeration; improves the working efficiency and stability of the powder ALD equipment through electrostatic auxiliary dispersion; the technology can be extended to other industrial fields requiring powder dispersion, and has wide application prospects. BRIEF DESCRIPTION OF DRAWINGS

[0022] The accompanying drawings incorporated in the specification and forming a part thereof illustrate embodiments consistent with the present application and together with the description serve to explain the principles of the application.

[0023] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the accompanying drawings needed to be used in the embodiments or related technical description will be briefly introduced as follows, and obviously, other drawings can also be obtained by those skilled in the art without creative labor on the premise of not paying the creative labor.

[0024] Figure 1 The first embodiment structure schematic view of the electrostatic powder coaxial capacitor provided by the embodiments of the present application is shown in the figure.

[0025] Figure 2 The second embodiment structure schematic view of the electrostatic powder coaxial capacitor provided by the embodiments of the present application is shown in the figure. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described in the following with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0027] Figure 1 A static powder coaxial capacitor suitable for the embodiments of the utility model is schematically shown.

[0028] Referring to Figures 1-2 The application provides a static powder coaxial capacitor, which comprises:

[0029] An outer cylinder 1 is used for accommodating an inner cylinder 2.

[0030] The inner cylinder 2 is used for forming an electric field together with the outer cylinder 1; the inner cylinder 2 is arranged in the outer cylinder 1.

[0031] An insulation part 3 is used for insulating the outer cylinder 1 and the inner cylinder 2; the insulation part 3 is connected with the outer cylinder 1 and the inner cylinder 2 respectively.

[0032] The outer cylinder 1 is connected with the negative pole of a power supply, and the inner cylinder 2 is connected with the positive pole of the power supply.

[0033] In the embodiments of the application, the coaxial capacitor comprises an outer cylinder 1 connected with the negative pole of a power supply and an inner cylinder 2 arranged in the outer cylinder 1 and insulated from the outer cylinder 1 by an insulation part 3. The inner cylinder 2 is connected with the positive pole of the power supply, and the outer cylinder 1 is connected with the negative pole of the power supply, so as to generate a static electric field in a powder ALD device. The powder is charged with the same kind of charge in the process of contacting the outer cylinder 1, and the powder particles are dispersed due to the mutual repulsion between the same kind of charges, thereby reducing the agglomeration phenomenon. The application introduces an innovative design of a static powder coaxial capacitor applied in the field of atomic layer deposition (ALD) technology.

[0034] 1. The capacitor mainly comprises the following three parts:

[0035] The outer cylinder is connected with the negative pole of the power supply and serves as the shell of the capacitor. It is responsible for providing a stable electric field environment.

[0036] The inner cylinder is connected with the positive pole of the power supply and is arranged inside the outer cylinder. The electric field formed between the inner cylinder and the outer cylinder is the key area for powder dispersion.

[0037] Insulating part: ensures electrical isolation between the outer and inner columns while maintaining the structural stability. The insulating part is connected to both the outer and inner columns, ensuring that the electric field is formed only between the outer and inner columns.

[0038] 2. Working principle and advantages

[0039] Improved powder dispersion uniformity: When the powder enters the capacitor, it is subjected to a strong electric field between the inner and outer columns. The powder particles are dispersed by electrostatic force, reducing agglomeration. This dispersion mechanism improves the uniformity of the powder during the ALD process, thereby improving the quality and consistency of the thin film.

[0040] Prevent equipment clogging: Powder agglomeration is one of the main causes of equipment clogging. By electrostatic dispersion, the formation of agglomerated particles is reduced, effectively avoiding equipment clogging and operational interruptions.

[0041] Improved efficiency and stability: Electrostatic-assisted dispersion not only improves the utilization rate of powder, but also reduces the deposition time extension and deposition efficiency decline caused by agglomeration. This enables the ALD equipment to operate more stably and efficiently.

[0042] Wide application prospects: This technology is not only suitable for ALD raw materials in powder form, but can also be extended to other industries that require powder dispersion, such as powder metallurgy and paint spraying. Its efficient and stable dispersion mechanism provides new technical solutions for these fields.

[0043] The electrostatic powder coaxial capacitor proposed in this application effectively solves the dispersion problem of powder in the atomic layer deposition process through innovative electric field design. It not only improves the quality and deposition efficiency of the thin film, but also avoids the risk of equipment clogging and operational interruptions. This technology has wide application prospects and brings new development opportunities for powder dispersion and thin film preparation fields.

[0044] Exemplarily, the outer column 1 comprises a base 11, and the inner column 2 is arranged on the base 11, and the inner column 2 and the base 11 are connected through the insulating part 3.

[0045] In the embodiment of the application, the base 11 is in the form of a sheet and is used to mount the insulating part 3 and the inner column 2.

[0046] Exemplarily, the outer column 1 further comprises a side wall 12, which is arranged on the base 11 in a circumferential direction with the center of the inner column 2 as the axis.

[0047] In the embodiment of the application, the side wall 12 is in the form of a circular ring, and the center of the side wall 12 is collinear with the center of the inner column 2, and the line is perpendicular to the base 11.

[0048] Exemplarily, the outer cylinder 1 further comprises a slant wall 13, which is arranged in a circumferential extension direction of the end of the side wall 12 with the center of the inner cylinder 2 as the axis.

[0049] In the embodiment of the present application, the slant wall 13 is in the shape of a circular ring, and the center of the slant wall 13 is collinear with the center of the inner cylinder 2, and the line is perpendicular to the base 11. The slant wall 13 is connected to the end of the side wall 12 away from the base 11.

[0050] Exemplarily, the slant wall 13 extends in a gradually close-to trend of the inner cylinder 2 in the direction away from the side wall 12.

[0051] In the embodiment of the present application, the slant wall 13 gradually closes to the inner cylinder 2 in the direction gradually away from the side wall 12. The base 11, the side wall 12 and the slant wall 13 jointly form a containing cavity, which wraps the inner cylinder 2.

[0052] Exemplarily, the outer cylinder 1 further comprises an opening 14, which is formed by the end of the slant wall 13 extending in a circumferential direction with the center of the inner cylinder 2 as the axis.

[0053] In the embodiment of the present application, the end of the slant wall 13 away from the side wall 12 forms the opening 14, which is used for the powder to enter.

[0054] Exemplarily, an insulating layer 21 is arranged on the outer wall of the inner cylinder 2.

[0055] In the embodiment of the present application, the insulating layer 21 is used to isolate the powder and prevent the powder from being close to the outer wall of the inner cylinder 2.

[0056] Exemplarily, the insulating part 3 is made of Teflon or ceramic.

[0057] In the embodiment of the present application, Teflon or ceramic is a high-temperature-resistant and chemical-corrosion-resistant insulating material, which can ensure the safety of the insulating connection between the outer cylinder 1 and the inner cylinder 2.

[0058] Exemplarily, the insulating layer 21 is made of Teflon or ceramic.

[0059] In the embodiment of the present application, Teflon or ceramic is a high-temperature-resistant and chemical-corrosion-resistant insulating material, which can ensure the stability and safety in the high-temperature ALD process.

[0060] Exemplarily, the voltage range of the power supply is 1-10kV.

[0061] In the embodiments of the present application, according to the required type of powder processing equipment (fluidized bed, rotating bed, etc.), the outer cylinder 1 and the inner cylinder 2 are assembled to obtain a coaxial capacitor structure, which ensures that the inner cylinder 2 is substantially the same height as the outer cylinder 1, and the surface of the inner cylinder 2 is isolated by a suitable insulating material. The electrostatic field voltage is controlled in the range of 1 kV to 10 kV to ensure effective dispersion of the powder.

[0062] The electrostatic powder coaxial capacitor is suitable for various ALD processes that require powder dispersion, especially in situations where powder agglomeration is severe and the risk of equipment blockage is high. Its efficient powder dispersion capability and stable electric field environment make this technology have wide application prospects in fields such as semiconductor manufacturing, optical device preparation, and energy storage material synthesis. The electrostatic powder coaxial capacitor provided in the present application improves the uniformity of powder dispersion in the atomic layer deposition process, thereby improving the quality of the thin film; reduces powder agglomeration, avoiding equipment blockage and operation interruption caused by agglomeration; improves the working efficiency and stability of the powder ALD equipment through electrostatic auxiliary dispersion; and can be extended to other industrial fields that require powder dispersion, having wide application prospects.

[0063] It should be noted that in the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0064] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned partial terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0065] In addition, the terms "mounting", "setting", "provided with", "connection", "connected" should be broadly understood. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0066] Furthermore, the terms "first", "second", and the like, are used herein to distinguish one element from another, but do not imply a relative importance or a quantity thereof. The meaning of "a", "an", and "the" includes singular and plural references unless otherwise clear from the context.

[0067] The foregoing is merely illustrative of the present application and various modifications can be made by those skilled in the art without departing from the spirit or scope of the application. Therefore, the present application is not limited to the embodiments described herein but rather is defined by the scope of the appended claims, including all equivalents of the subject matter recited therein.

Claims

1. An electrostatic powder coaxial capacitor, characterized in that, include: The outer column is used to accommodate the inner column; The inner column is used to form an electric field together with the outer column; The inner column is disposed within the outer column; An insulating part is provided for insulating the outer column and the inner column; the insulating part is connected to the outer column and the inner column respectively; The outer cylinder is connected to the negative terminal of the power supply, and the inner cylinder is connected to the positive terminal of the power supply.

2. The electrostatic powder coaxial capacitor according to claim 1, characterized in that, The outer column includes a base, the inner column is disposed on the base, and the inner column and the base are connected by the insulating part.

3. The electrostatic powder coaxial capacitor according to claim 2, characterized in that, The outer column further includes a side wall, which extends circumferentially on the base with the center of the inner column as the axis.

4. The electrostatic powder coaxial capacitor according to claim 3, characterized in that, The outer column further includes an inclined wall, which extends circumferentially at the end of the side wall with the center of the inner column as the axis.

5. The electrostatic powder coaxial capacitor according to claim 4, characterized in that, The inclined wall extends in a direction away from the side wall, gradually approaching the inner column.

6. The electrostatic powder coaxial capacitor according to claim 4, characterized in that, The outer column further includes an opening, which is formed by the end of the inclined wall extending circumferentially around the center of the inner column.

7. The electrostatic powder coaxial capacitor according to claim 1, characterized in that, An insulating layer is provided on the outer wall of the inner column.

8. The electrostatic powder coaxial capacitor according to claim 1, characterized in that, The insulating part is made of Teflon or ceramic.

9. The electrostatic powder coaxial capacitor according to claim 7, characterized in that, The insulating layer is made of Teflon or ceramic.

10. The electrostatic powder coaxial capacitor according to claim 1, characterized in that, The voltage range of the power supply is 1-10kV.

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