Crystal bar detection equipment and system

Abstract

The utility model discloses a crystal bar detection device and system, and the device comprises a supporting main body which is provided with a first detection station and a second detection station adjacent to the first detection station; the distance measuring device is configured at the first detection station and comprises a distance measuring assembly for measuring the distance of a plurality of measuring points of the crystal bar located at the first detection station; wherein the crystal bar comprises at least one unground end face, and the plurality of measuring points are located on the unground end face; and the stress detection device is configured at the second detection station and comprises a stress detection assembly for carrying out stress detection on the crystal bar transferred from the first detection station to the second detection station.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of detection, and in particular to a crystal bar detection device and system. BACKGROUND

[0002] At present, crystals of different materials are widely used in the fields of semiconductors, optics, etc. Taking sapphire crystals as an example, sapphire crystals can be made into optical products such as infrared windows, lenses, and prisms due to their high stability, high hardness, etc., and can also be made into electronic products such as LED substrates and insulating layers of integrated circuits.

[0003] In the process of manufacturing various crystal products, it is usually necessary to use crystal bars (such as sapphire crystal bars) as raw materials for production and processing. In order to ensure the quality of the end face of the crystal bar, the end face needs to be ground, and the flatness (i.e. the height difference of the end face) of the end face needs to be determined before grinding. In addition, the stress of the crystal bar is also a necessary detection process, and if the stress in the crystal bar is unqualified, it will also seriously affect the yield and performance of the subsequent production materials or final products. However, the stress detection and flatness detection of the crystal bar need to be completed in different devices respectively, and even need to be assisted by manual detection equipment, which results in low detection efficiency and accuracy.

[0004] Therefore, how to improve the detection efficiency and accuracy of the flatness detection and stress detection of the crystal bar is a technical problem to be solved. SUMMARY

[0005] In view of the above-mentioned shortcomings of the related art, the purpose of the present application is to provide a crystal bar detection device and system to overcome the technical problem of how to improve the detection efficiency and accuracy of the flatness detection and stress detection of the crystal bar in the above-mentioned related art.

[0006] To achieve the above-mentioned purpose and other related purposes, the first aspect of the present application provides a crystal bar detection device, comprising: a support main body having a first detection station and a second detection station adjacent to the first detection station; a distance measuring device configured at the first detection station, comprising a distance measuring component for measuring the distance of a plurality of measurement points of a crystal bar located at the first detection station; wherein the crystal bar comprises at least one ungrounded end face, and the plurality of measurement points are located on the ungrounded end face; a stress detection device configured at the second detection station, comprising a stress detection component for stress detection of the crystal bar transferred from the first detection station to the second detection station.

[0007] In some examples of the first aspect, the crystal bar comprises one ground end face and one ungrounded end face.

[0008] In some examples of the first aspect, the support body comprises a support frame for configuring the distance measuring device and the stress detection device, and an open housing arranged around the support frame.

[0009] In some examples of the first aspect, the open housing comprises at least one access door for maintenance.

[0010] In some examples of the first aspect, the distance measuring assembly comprises a distance measuring instrument for measuring distance, and a distance measuring moving mechanism for moving the distance measuring instrument and / or the crystal bar to enable the distance measuring instrument to measure a plurality of measuring points of the crystal bar.

[0011] In some examples of the first aspect, the plurality of measuring points comprises a center point of the ungrounded end surface and a plurality of points on a profile.

[0012] In some examples of the first aspect, the distance measuring instrument is a laser distance measuring instrument.

[0013] In some examples of the first aspect, the distance measuring moving mechanism comprises a linear moving mechanism for moving the distance measuring instrument in a straight line, and a rotating mechanism arranged below the linear moving mechanism for supporting the crystal bar and rotating the crystal bar.

[0014] In some examples of the first aspect, the distance measuring device further comprises a lifting plate connected to the linear moving mechanism, and a vertical moving mechanism for driving the lifting plate to move up and down.

[0015] In some examples of the first aspect, the stress detection assembly comprises a light source for emitting polarized light towards the crystal bar arranged at the second detection station, and a stress image acquisition device arranged above the light source for selectively receiving the polarized light passing through the crystal bar to obtain a stress detection image.

[0016] In some examples of the first aspect, the light source is a planar light source.

[0017] In some examples of the first aspect, the stress detection assembly further comprises a horizontal moving mechanism for moving the stress image acquisition device in a horizontal direction to enable the stress image acquisition device to acquire the stress detection image at different positions.

[0018] In some examples of the first aspect, the ground end surface of the crystal bar arranged at the second detection station faces the stress image acquisition device.

[0019] In some examples of the first aspect, the crystal bar detection device further comprises an identification device arranged on the support body for identifying an identification on the crystal bar.

[0020] In a second aspect, the application provides a crystal bar detection system, comprising: the crystal bar detection device as described in any of the examples of the first aspect; and a robot adjacent to the crystal bar detection device, configured to transfer the crystal bar from a first detection station of the crystal bar detection device to a second detection station.

[0021] In some examples of the second aspect, the robot comprises an articulated arm and a mechanical hand at a distal end of the articulated arm configured to hold the crystal bar.

[0022] In some examples of the second aspect, the crystal bar detection system further comprises a feeding device at a feeding area on a first side of the robot and a discharging device at a discharging area on a second side of the robot.

[0023] In some examples of the second aspect, the crystal bar detection system further comprises a protective fence arranged around the robot, the feeding device, and the discharging device.

[0024] In summary, the crystal bar detection device and system provided by the application can use the distance measuring device to measure the multiple measuring points of the crystal bar at the first detection station of the support body of the crystal bar detection device to achieve flatness detection, and can use the stress detection device to detect the stress of the crystal bar when the crystal bar is transferred from the first detection station to the second detection station. Thus, the detection of two processes can be completed by one device, and manual holding of the detection device is not required, improving the detection efficiency and accuracy. Further, when the crystal bar comprises one ground end face and one unground end face, the ground end face of the crystal bar at the second detection station is directed towards the stress image acquisition device, so that the stress detection image acquired by the stress image acquisition device can more accurately reflect the stress of the crystal bar. Further, the horizontal movement mechanism can move the stress image acquisition device to acquire stress detection images of the crystal bar at different positions. BRIEF DESCRIPTION OF DRAWINGS

[0025] The specific features involved in the application are shown in the appended claims. The features and advantages of the application involved can be better understood by referring to the exemplary embodiments described in detail below and the accompanying drawings. Brief description of the drawings is as follows:

[0026] Figure 1 A structural schematic diagram of a crystal bar detection device in an embodiment of the application is shown.

[0027] Figure 2 A state schematic diagram of a crystal bar at a first detection station of a crystal bar detection device in an embodiment of the application is shown.

[0028] Figure 3The diagram shows the state of the crystal rod being located at the second detection station of the crystal rod detection equipment in one embodiment of this application.

[0029] Figure 4 This application is displayed. Figure 1 The diagram shown is a schematic representation of the crystal rod inspection device after part of the outer shell has been removed, viewed from one angle.

[0030] Figure 5 This application is displayed. Figure 4 A magnified view of a portion of point F1 in a crystal rod testing device.

[0031] Figure 6 This application is displayed. Figure 3 A magnified view of a portion of the crystal rod testing equipment at point F2.

[0032] Figure 7 The diagram shown is a schematic representation of the main control unit in one embodiment of this application.

[0033] Figure 8 The diagram shown is a schematic representation of a crystal rod detection system according to one embodiment of this application. Detailed Implementation

[0034] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand the advantages and technical effects of this application from the content disclosed in this specification. In the following description, some embodiments may be referenced to the accompanying drawings. It should be understood that other embodiments not shown in the drawings may also be used, and changes in specific structures, parts or mechanisms, components, and operations may be made without departing from the spirit and scope of this application. The following detailed description should not be considered limiting, and the scope of the embodiments of this application is limited only by the claims published in this application. The terminology used herein is for describing particular embodiments only and is not intended to limit this application.

[0035] It should be understood that although the terms first, second, or third, etc., may be used herein to describe various elements or parameters in some embodiments, these elements or parameters should not be limited by these terms. These terms are used only to distinguish one element or parameter from another, and not to define the order, priority, or importance of multiple elements. For example, a first detection station may be referred to as a second detection station, and similarly, a second detection station may be referred to as a first detection station, without departing from the scope of the various described embodiments. Both the first detection station and the second detection station are describing a detection station, but they are not the same detection station unless the context otherwise clearly indicates otherwise. Similar cases include a first side and a second side, a first moving mechanism and a second moving mechanism, etc.

[0036] Furthermore, as used herein, the singular forms “a,” “an,” and “the” are intended to include the plural forms as well, unless the context indicates otherwise. It should be further understood that the terms “comprising,” “including,” and “including” indicate the presence of the stated features, steps, operations, elements, components, items, kinds, and / or groups, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, kinds, and / or groups. For example, a process, method, system, product, or device that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products, or devices. Additionally, the term “and / or,” which may be used hereinafter, describes the relationship between related objects, indicating that three relationships may exist; for example, A and / or B can represent: A alone, A and B simultaneously, and B alone. Furthermore, the character “ / ”, unless otherwise specified, generally indicates that the preceding and following related objects have an “and / or” relationship. Additionally, in the description of embodiments of this application, “multiple” refers to two or more. Furthermore, the terms “or” and “and / or” as used herein are interpreted as inclusive, or mean either one or any combination thereof. Exceptions to this definition only arise when a combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0037] It should also be understood that when an element, such as a layer, region, or substrate, is referred to as being "on" another element or extending "on" another element, the element may be directly on or directly extending onto the other element, or intermediate elements may be present. Conversely, when an element is referred to as being "directly on" another element or "directly extending onto" another element, no intermediate elements are present. It will also be understood that when an element is referred to as being "connected" or "attached" to another element, it may be directly connected or coupled to the other element, or intermediate elements may be present. Conversely, when an element is referred to as being "directly connected" or "directly coupled" to another element, no intermediate elements are present. Furthermore, the term "coupled" generally means physical, mechanical, magnetic, and / or electrical coupling or connection, and in the absence of specific contrasting language, the presence of intermediate elements between coupled or associated items is not excluded.

[0038] Relative terms such as “below,” “above,” “upper,” “lower,” “horizontal,” or “vertical” may be used herein to describe the relationship between one element, layer, or region and another element, layer, or region illustrated in the figures. It will be understood that these terms are intended to cover different device orientations other than those depicted in the figures. In this application, “vertical,” “horizontal,” and “parallel” are defined as including cases within ±10% of the standard definition. For example, vertical typically refers to an angle of 90° relative to a reference line, but in this application, vertical refers to cases including those within 80° to 100°. Unless otherwise expressly stated, comparative quantitative terms (such as “above” and “below”) are intended to cover the concept of equality. As an example, “above” can mean not only “greater than” in a mathematical sense but also “equal to.”

[0039] The present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. The technical solutions in the embodiments of the present application are clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, not all of them. Based on the embodiments in the present application, all other embodiments and technical effects obtained by those skilled in the art without creative effort should fall within the scope of protection of the present application. The terms "an embodiment," "implementation," or similar wording used throughout this specification mean that a specific feature, structure, or characteristic described together with an embodiment is included in at least one embodiment of the present application. Therefore, the appearance of the phrases "in an embodiment," "in an embodiment," and similar wording throughout this specification may (but does not necessarily) refer to the same embodiment.

[0040] In view of the technical problems described in the background art regarding how to improve the detection efficiency and accuracy of flatness and stress detection of crystal rods, this application discloses a crystal rod detection equipment and system. By configuring a ranging device at the first detection station of the support body of the crystal rod detection equipment and a stress detection device at the second detection station, the ranging device can be used to measure the distance of multiple measurement points of the crystal rod located at the first detection station to achieve flatness detection. When the crystal rod is transferred from the first detection station to the second detection station, the stress detection device can be used to perform stress detection on the crystal rod. In this way, the detection of two processes can be completed with one device, and there is no need for manual handling of the detection device, thus improving detection efficiency and accuracy.

[0041] The crystal rod described in this application is a columnar crystal with two opposing end faces. For example, the crystal rod is a cylindrical crystal, and the two opposing end faces are the two circular surfaces of the cylindrical crystal. Depending on the actual production process and requirements, the shape of the crystal rod can also be configured as a square column or other shapes. The crystal rod includes at least one unground end face. In one example, the crystal rod includes one ground end face and one unground end face. For example, the crystal rod is a columnar crystal with an end face size smaller than the end face size of the ingot, cut / extracted from a columnar crystal (also called a crystal ingot) with a large end face size obtained through a crystal growth process. Before extracting the crystal rod, one end face of the ingot is often ground to facilitate subsequent processing or inspection, so that the extracted crystal rod includes one ground end face and one unground end face. In other examples, depending on the production process and flow, the crystal rod may also include two unground end faces. The crystal rod can be a crystal rod made of transparent materials such as sapphire crystal rod or quartz crystal rod.

[0042] The crystal rod testing equipment described in this application is used for measuring the distance of the unground end face of the crystal rod and for stress detection of the crystal rod.

[0043] Please see Figures 1 to 3 , Figure 1 The diagram shown is a structural schematic of a crystal rod testing device according to one embodiment of this application. Figure 2 This diagram illustrates the state of a crystal rod located at the first detection station of a crystal rod detection device in one embodiment of this application. Figure 3 The figure shows a schematic diagram of the state of a crystal ingot located at the second detection station of a crystal ingot detection device in one embodiment of this application. As shown, the crystal ingot detection device includes a support body 1, a ranging device 2, and a stress detection device 3. The support body 1 has a first detection station 10 and a second detection station 11 adjacent to the first detection station 10. The ranging device 2 is disposed at the first detection station 10 and includes a ranging component for measuring the distance of multiple measuring points of the crystal ingot 4 located at the first detection station 10, the multiple measuring points being located on the unground end face of the crystal ingot. The stress detection device 3 is disposed at the second detection station 11 and includes a stress detection component for performing stress detection on the crystal ingot 4 transferred from the first detection station 10 to the second detection station 11. To clearly illustrate the relative positions of the components in the crystal ingot detection device in this embodiment of the application, Figure 3 The code defines six directions: up, down, front, back, left, and right. The up and down direction can also be called the vertical direction. Any direction within a plane (i.e., a horizontal plane) that is perpendicular to the up and down direction is called the horizontal direction.

[0044] like Figure 1As shown, the support body 1 has a first detection station 10 and a second detection station 11, with the second detection station 11 adjacent to the first detection station 10. The first detection station 10 and the second detection station 11 are two adjacent spatial regions. In one embodiment, the first detection station 10 and the second detection station 11 can be two sub-spaces within the accommodating space inside the support body 1; for example, the first detection station 10 is the left-hand space within the accommodating space, and the second detection station 11 is the right-hand space within the accommodating space. It should be noted that this application does not limit the formation of the first and second detection stations. For example, when the support body is configured as a support platform, the first and second detection stations can also be two spatial regions on the upper part of the support platform.

[0045] In one specific embodiment, please refer to Figure 4 and combined Figure 1 , Figure 4 This application is displayed. Figure 1 The diagram shows the structure of the crystal rod inspection device after removing part of the outer shell, viewed from one angle. As shown, the support body 1 includes a support frame 12 and an open outer shell 13. The support frame 12 is used to configure the ranging device 2 and the stress detection device 3. Figure 4 In the example shown, the support frame 12 includes a frame body 120 and a support platform 121. An accommodating space is formed between the upper side of the support platform 121 and the frame body 120. The first inspection station 10 and the second inspection station 11 are two sub-spaces within this accommodating space. Figure 4 As shown, the first inspection station 10 is the left space in the accommodating space, and the second inspection station 11 is the right space in the accommodating space. The ranging device 2 is disposed at the first inspection station 10, and the stress detection device 3 is disposed at the second inspection station 11. The open housing 13 is arranged around the support frame 12, and a loading port is formed on the open housing 13 for the loading operator (worker or robot described later) to place the crystal rods at the first inspection station 10 and the second inspection station 11. In one example, to facilitate maintenance of the crystal rod inspection equipment by the operator, the housing 13 includes at least one maintenance door 130 for maintenance. For example, please refer to [reference needed]. Figure 4 and Figure 3 The outer shell 13 includes seven maintenance doors 130 surrounding the outside of the support frame 12. Specifically, the outer shell 13 is provided with one maintenance door 130 on the rear side and the left and right sides of the accommodating space, and one maintenance door 130 is provided in the front, back, left and right directions on the lower side of the support platform 121.

[0046] It should be noted that although the above embodiments are described with the example of the support body including a support frame and an open shell configured around the support frame, and the support frame including a frame body and a support platform, this is not a limitation. In other embodiments, the support body may only include a support frame, or only include an open shell made of a material with high hardness (such as metal, alloy, etc.). The support frame may also be configured as a support platform, as long as the support body has a first detection station for configuring the ranging device and a second detection station for configuring the stress detection device.

[0047] Please see Figure 2 The ranging device 2 is disposed at the first inspection station 10 and includes a ranging component for measuring the distance to multiple measuring points of the crystal ingot 4 located at the first inspection station 10. The crystal ingot 4 located at the first inspection station 10 includes at least one unground end face; that is, the crystal ingot 4 may include one unground end face and one ground end face, or it may include two unground end faces, and the multiple measuring points are located on the unground end face. In the example where the crystal ingot includes two unground end faces, the orientation of the end faces of the crystal ingot 4 can be reversed by a worker, a robot (described later), or a flipping component additionally configured in the ranging device to achieve distance measurement of the measuring points on the two unground end faces. In one embodiment, the multiple measuring points include the center point of the unground end face and multiple points on its contour. Multiple points on the contour of the unground end face can be evenly distributed on the contour or randomly distributed on the contour. Taking the multiple points on the contour being evenly distributed and the crystal rod including an unground end face as an example, the multiple measurement points include the center point of the unground end face and 8 or 4 points evenly distributed on the contour of the unground end face.

[0048] The ranging component can be a contact ranging component or a non-contact ranging component. In embodiments where the ranging component is configured as a non-contact ranging component, damage to the end face of the crystal ingot can be avoided during the ranging process, thus preventing adverse effects on the crystal ingot. In the following embodiments, the ranging component is described as a non-contact ranging component, and the crystal ingot includes a ground end face as an example.

[0049] In one embodiment, after measuring multiple distances (e.g., the relative distances between multiple measuring points and the rangefinder) by a ranging component to multiple measuring points on an unground end face, the main control device described below can use the difference between the largest and smallest distance values ​​among the multiple distance values ​​as the flatness of the unground end face, and then the grinding device can grind the unground end face based on the obtained flatness.

[0050] In one embodiment, such as Figure 2As shown, the ranging component includes a rangefinder 20 and a ranging moving mechanism 21. The rangefinder 20 is used for distance measurement, and the ranging moving mechanism 21 is used to move the rangefinder 20 and / or the crystal rod 4 so that the rangefinder 20 can measure the distance to multiple measurement points of the crystal rod 4. Taking a laser rangefinder 20 as an example, the principle of distance measurement is explained. The rangefinder 20 emits a laser towards the measurement point and receives the laser reflected from the measurement point. Then, the rangefinder 20 can calculate the relative distance between the measurement point and the rangefinder based on the received laser and the emitted laser to achieve distance measurement of the measurement point. For example, the rangefinder 20 calculates the relative distance between the measurement point and the rangefinder based on the time interval between the emitted laser and the received laser. Alternatively, the rangefinder 20 can also calculate the relative distance between the measurement point and the rangefinder based on the phase offset between the emitted laser and the received laser. This application does not limit the type of rangefinder. In other embodiments, the rangefinder can also be a visual rangefinder or other rangefinders that meet the measurement accuracy requirements. The ranging moving mechanism 21 moves the rangefinder 20 and / or the crystal rod 4, enabling relative movement between the rangefinder 20 and the crystal rod 4. This allows the rangefinder 20 to measure distances at multiple points on the crystal rod. The ranging moving mechanism 21 can be a moving mechanism that can only move the rangefinder 20, a moving mechanism that can only move the crystal rod 4, or a moving mechanism that can move both the rangefinder 20 and the crystal rod 4. In the following embodiments, the ranging moving mechanism 21 is described as a moving mechanism that can move both the rangefinder 20 and the crystal rod 4.

[0051] In one embodiment, such as Figure 2As shown, the ranging movement mechanism 21 includes a linear movement mechanism 210 and a rotating mechanism 211 located below the linear movement mechanism 210. The rangefinder 20 is disposed on the linear movement mechanism 210. The linear movement mechanism 210 is used to drive the rangefinder 20 to perform linear movement, and the rotating mechanism 211 is used to support the crystal rod 4 and drive the crystal rod 4 to rotate. In this embodiment, the crystal rod 4 is disposed on the rotating mechanism 211 in the vertical direction and located below the rangefinder. The unground end face of the crystal rod 4 faces the rangefinder 20, that is, the unground end face of the crystal rod 4 faces upward. Taking the multiple measurement points, including the center point of the unground end face and multiple points on the contour, as an example, the cooperation between the linear movement mechanism 210 and the rotation mechanism 211 will be explained. For instance, the initial position of the rangefinder 20 is located at the center point of the unground end face. After the rangefinder 20 measures the center point, the linear movement mechanism 210 drives the rangefinder 20 to move linearly, and the distance of movement is the same as the radius of the crystal rod, so that the rangefinder 20 moves to the contour of the unground end face. Then, the rotation mechanism 211 can drive the crystal rod 4 to rotate multiple times so that the rangefinder 20 can be aligned with the multiple measurement points on the contour to achieve distance measurement of the multiple measurement points on the contour. It should be noted that the cooperation between the linear movement mechanism 210 and the rotation mechanism 211 in this application can be adaptively adjusted according to different positions of the measurement points or different dimensions of the crystal rod end face.

[0052] In one embodiment, please refer to Figure 5 and combined Figure 4 , Figure 5 This application is displayed. Figure 4 A partial enlarged view of point F1 in the crystal rod testing equipment is shown in the figure. The linear movement mechanism 210 is configured to drive the rangefinder 20 to move linearly in the front-back direction. The linear movement mechanism 210 includes a mounting base 2100 for mounting the rangefinder 20, a slide rod 2101, and a linear drive component 2102. The mounting base 2100 is sleeved on the slide rod 2101, and the slide rod 2101 is suspended above the rotating mechanism 211 in the front-back direction. The linear drive component 2102 is connected to the mounting base 2100 so that the mounting base 2100 can drive the rangefinder 20 to move linearly in the front-back direction on the slide rod 2101 under the drive of the linear drive component 2102. The linear drive component 2102 is, for example, a cylinder.

[0053] It should be noted that this application does not limit the direction in which the linear movement mechanism 210 drives the rangefinder 20 to move linearly or the specific structure of the linear movement mechanism 210, as long as the linear movement mechanism 210 can also drive the rangefinder 20 to move in the horizontal direction.

[0054] In one embodiment, please refer to Figure 2 The rotating mechanism 211 is disposed on the support platform 121, and has a rotating stage 2110 for supporting the crystal rod 4 and a drive motor 2111 for driving the rotating stage 2110 to rotate. Under the drive of the drive motor 2111, the rotating stage 2110 can drive the crystal rod 4 located on it to rotate. Although Figure 2 In the illustrated embodiment, the rotating mechanism 211 is arranged on the support platform 121 as an example, but it is not limited thereto. In embodiments where the support body does not include the support platform, the rotating mechanism may also be suspended in the first detection station and located below the linear movement mechanism.

[0055] It should be noted that although the above embodiments use the example of a ranging component including a rangefinder and a ranging moving mechanism to describe the ranging component, this is not a limitation. In other embodiments, the ranging component may also include multiple rangefinders to enable the ranging component to measure distances to multiple measurement points on the crystal rod. Furthermore, the ranging moving mechanism, including a linear moving mechanism that drives the rangefinder to move linearly and a rotating mechanism that drives the crystal rod to rotate, is only one example. In some other embodiments, the crystal rod may be positioned on a fixed support, and the ranging moving mechanism may include a linear moving mechanism capable of driving the rangefinder to move linearly and a rotating moving mechanism connected to the linear moving mechanism to drive the linear moving mechanism to rotate, thereby enabling the rangefinder to align with each measurement point through rotation and linear motion. In other embodiments, the rangefinder may be positioned in a fixed location, and the ranging moving mechanism may be configured as a support capable of driving the crystal rod to move linearly and rotate, thereby enabling each measurement point to align with the rangefinder through the linear and rotational motion of the crystal rod.

[0056] To accommodate crystal ingots of different heights, enabling the ranging component to measure the distance of crystal ingots of varying heights, in one embodiment, please refer to... Figure 5 and combined Figure 1 As shown in the figure, the ranging device 2 further includes a lifting plate 220 connected to the linear motion mechanism 210 and a vertical moving mechanism 221 for driving the lifting plate 220 to move up and down. In a specific embodiment, the vertical moving mechanism 221 is arranged vertically on the support platform 121 of the support body. The vertical moving mechanism 221 has a guide rail arranged vertically, and the lifting plate 220 is slidably arranged on the guide rail. Thus, driven by the vertical moving mechanism 221, the lifting plate 220 can drive the linear motion mechanism 210 to move up and down on the guide rail. The vertical moving mechanism 221 can be, for example, a drive mechanism including a lead screw or a drive mechanism including a cylinder.

[0057] like Figure 3As shown, the stress detection device 3 is disposed at the second detection station 11. The stress detection device 3 includes a stress detection component, which is used to perform stress detection on the crystal rod 4 transferred from the first detection station 10 to the second detection station 11. In one example, as... Figure 3 As shown, after the crystal rod 4 is measured at the first inspection station 10, it can be transferred from the first inspection station 10 to the second inspection station 11 by the robot's manipulator 71, which will be described later. The crystal rod 4 is then clamped at the first inspection station 10 so that the stress detection component can perform stress detection on the crystal rod 4. For illustrative purposes, Figure 3 Only the robot's manipulator 71 is shown in the illustration. In another example, the crystal rod 4 can also be transferred from the first inspection station 10 to the second inspection station 11 by a worker. In this embodiment, the stress detection device 3 also includes a clamping member or a transparent platform disposed at the second inspection station 11. After the worker places the crystal rod 4 on the clamping member or the transparent platform, the stress detection component can detect the crystal rod 4.

[0058] The stress detection component can be a stress detection component based on polarized light or a stress detection component based on a coherent laser beam. This application does not limit the type of stress detection component. In the following embodiments, a stress detection component based on polarized light is used as an example for description.

[0059] In one embodiment, please refer to Figure 3 As shown in the figure, the stress detection component includes a light source 30 and a stress image acquisition device 31 disposed on the upper side of the light source 30. The light source 30 emits polarized light towards the crystal rod 4 located at the second detection station 11. After passing through the crystal rod 4, the polarized light reaches the stress image acquisition device 31. The stress image acquisition device 31 selectively receives the polarized light passing through the crystal rod 4 to obtain a stress detection image, thereby realizing stress detection on the crystal rod 4. The polarized light is white polarized light, and the stress detection image includes colored stripes. The main control device described later can identify the colored stripes in the stress detection image to determine whether stress exists in the crystal rod and the magnitude of the stress (e.g., determining the presence and magnitude of stress based on the detected stress detection image and a stress-free standard image).

[0060] In an embodiment where the crystal ingot includes a ground end face and an unground end face, to avoid the unground end face affecting the acquired stress detection image, the ground end face of the crystal ingot 4 located at the second detection station 11 faces the stress image acquisition device. For example, as... Figure 2 and Figure 3As shown, when the ground surface of the crystal rod 4 is inspected at the first inspection station 10, the ground surface of the crystal rod 4 faces the rangefinder 20, that is, the unground surface faces upward. After the inspection at the first inspection station 10 is completed, the operator or the robot described later will rotate the crystal rod 4 so that the ground surface of the crystal rod 4 at the second inspection station 11 faces the stress image acquisition device 31, that is, the ground surface faces upward.

[0061] In one embodiment, such as Figure 3 As shown, the light source 30 is a planar light source; for example, the light source 30 is... Figure 3 The rectangular light source shown in this application does not limit the shape of the light source 30. In other embodiments, the shape of the light source 30 can also be a regular shape such as a square or a circle, or an irregular shape. The light source can be as follows: Figure 3 The configuration shown can also be suspended on the support platform 121 or in the second testing station.

[0062] In one embodiment, please refer to Figure 6 and combined Figure 3 , Figure 6 This application is displayed. Figure 3 A partial magnified view of point F2 in the crystal rod inspection device is shown in the figure. The stress image acquisition device 31 includes a camera 310 and a polarizer (not shown) located in front of the camera 310. The polarizer is used to selectively transmit polarized light passing through the crystal rod. Specifically, when polarized light passes through the crystal rod and is incident on the polarizer, the polarizer only allows light vibrating along its polarization axis to pass through, thereby achieving selective transmission of polarized light passing through the crystal rod. This allows the camera 310 to receive the polarized light passing through the polarizer to obtain a stress detection image. In one embodiment, the camera 310 includes a photosensitive sensor (e.g., CCD or CMOS), for example, the camera 310 is a color camera.

[0063] To enable the stress image acquisition device to acquire the stress detection image at different locations, in one embodiment, the stress detection assembly further includes a horizontal movement mechanism for moving the stress image acquisition device in the horizontal direction. The horizontal movement mechanism will be described in detail below, taking as an example that it can move the stress image acquisition device in the front-back and left-right directions. Please refer to [link to relevant documentation]. Figure 6 and combined Figure 3As shown in the figure, the horizontal moving mechanism includes a first moving mechanism 3200 arranged in the left-right direction and a second moving mechanism 3201 arranged in the front-back direction. The first moving mechanism 3200 is connected to the support body 1, for example, the first moving mechanism 3200 is disposed on the top of the frame 120 of the support body 1. The second moving mechanism 3201 is slidably disposed on the first moving mechanism 3200 to move in the left-right direction on the first moving mechanism under the drive of the first moving mechanism 3200. The camera 310 is slidably disposed on the second moving mechanism 3201 to move in the front-back and left-right directions on the second moving mechanism 3201 under the drive of the second moving mechanism 3201. In this way, the first moving mechanism 3200 and the second moving mechanism 3201 can drive the camera 310 to move in the front-back and left-right directions. In one example, the first moving mechanism and the second moving mechanism are, for example, a drive mechanism including a lead screw or a drive mechanism including a cylinder. It should be noted that this application does not limit the direction of movement of the stress image acquisition device by the horizontal moving mechanism or the specific structure of the horizontal moving mechanism, as long as it can drive the stress image acquisition device to move in the horizontal direction. In some other embodiments, a clamping member capable of holding the crystal ingot or a transparent stage supporting the crystal ingot may be provided at the second detection station, and a mechanism capable of driving the clamping member or the transparent stage to move horizontally may be provided at the second detection station, so that the horizontal movement of the clamping member or the transparent stage can drive the crystal ingot to move horizontally relative to the stress image acquisition device.

[0064] Please see Figure 1 The crystal rod inspection equipment also includes an identification device 5 disposed on the support body 1 for identifying markings on the crystal rod. Examples of markings on the crystal rod include QR codes, text, barcodes, etc., disposed on the surface of the crystal rod. Depending on the marking, the identification device 5 can be a barcode reader or a camera. For example, if the marking on the crystal rod is a QR code, the identification device 5 is a barcode reader. The identification device 5 can automatically identify the QR code to determine the crystal rod's identification code. Then, the main control device described later can associate the distance measurement results from multiple measurement points obtained by the distance measuring device and the stress detection results obtained by the stress detection device with the crystal rod's identification code. In one example, such as... Figure 1 As shown, the identification device 5 is located at the first detection station 10. In other examples, the identification device may also be configured at the second detection station.

[0065] In one embodiment, the crystal rod inspection device further includes a main control unit, which is used to perform steps such as determining flatness based on distance measurements from multiple measurement points, determining the presence and magnitude of stress in the crystal rod based on stress detection images, and controlling the movement of the distance measuring mechanism and the horizontal moving mechanism. Furthermore, when the robot, described later, loads the crystal rod onto the inspection device, the main control unit is also used to communicate with the robot to control it to perform transfer tasks.

[0066] Please see Figure 7 The diagram shows a schematic representation of the main control unit in one embodiment of this application. The main control unit includes a storage device 90 and a processing device 91 connected to the storage device 90. Furthermore, the main control unit also includes a communication interface 92.

[0067] In some embodiments, the storage device 90 is used to store at least one program that can be executed by the processing device 91 to coordinate the storage device 90 in performing steps such as determining the presence and magnitude of stress, controlling the movement of the ranging and horizontal movement mechanisms as described in the above embodiments. Here, the storage device 90 includes, but is not limited to, read-only memory (ROM), random access memory (RAM), and nonvolatile RAM (NVRAM). For example, the storage device 90 includes flash memory or other non-volatile solid-state storage devices. In some embodiments, the storage device 90 may also include memory located remotely from one or more processing devices 91, such as network-attached memory accessed via RF circuitry or external ports and communication networks, wherein the communication network may be the Internet, one or more intranets, local area networks, wide area networks, storage area networks, etc., or suitable combinations thereof. A memory controller can control access to the memory by other components of the device, such as the CPU and peripheral interfaces.

[0068] In some embodiments, the processing device 91 includes one or more processors. The processing device 91 is operatively capable of performing data read and write operations with the storage device 90. The processing device 91 includes one or more general-purpose microprocessors, one or more application-specific integrated circuits (ASICs), one or more digital signal processors (DSPs), one or more field-programmable gate arrays (FPGAs), or any combination thereof.

[0069] In some embodiments, the communication interface 92 includes at least one interface unit, each interface unit being used to output a visual interface, receive human-computer interaction events generated according to the operation of a technician, etc. For example, the communication interface 92 includes, but is not limited to, serial interfaces such as HDMI interfaces or USB interfaces, or parallel interfaces, etc. In one embodiment, the communication interface 92 further includes a network communication unit, which is a device for data transmission using wired or wireless networks, examples of which include, but are not limited to, integrated circuits including network cards, local area network modules such as WiFi modules or Bluetooth modules, and wide area network modules such as mobile networks, etc.

[0070] This application also provides a crystal rod inspection system; please refer to [link / reference]. Figure 8 The figure shows a schematic diagram of the structure of a crystal rod detection system in one embodiment of this application. As shown in the figure, the crystal rod detection system includes a crystal rod detection device 6 and a robot 7.

[0071] The crystal rod testing device 6 and its structure and function are the same as or similar to the structure and function of the crystal rod testing device disclosed in any of the foregoing embodiments. Please refer to [link / reference] for details. Figures 1 to 7 As described in any of the embodiments and related descriptions, they will not be repeated here.

[0072] The robot 7 is located adjacent to the crystal rod inspection device 6, for example, see [link to relevant documentation]. Figure 8 The robot 7 is positioned opposite the loading port of the ingot inspection device 6. The robot 7 is used to transfer the ingot from the first inspection station of the ingot inspection device 6 to the second inspection station. Specifically, the ingot inspection device 6 and the robot 7 are communicatively connected. After the ranging device of the ingot inspection device 6 completes ranging of the unground end face of the ingot located at the first inspection station, the main control unit of the ingot inspection device 6 sends a transfer command to the robot 7. The transfer command instructs the robot 7 to perform a transfer operation. Upon receiving the transfer command, the robot 7 transfers the ingot located at the first inspection station to the second inspection station of the ingot inspection device 6. Further, in one example, the ingot includes a ground end face and an unground end face. The transfer command also instructs the robot 7 to perform a flipping operation. Therefore, after receiving the transfer command, the robot 7 rotates the ingot during the transfer from the first inspection station to the second inspection station so that the ground end face of the ingot transferred to the second inspection station faces the stress image acquisition device. In embodiments where the second inspection station of the crystal rod inspection equipment is not equipped with a clamping device for holding crystal rods or a transparent stage, the robot 7 is also used to clamp the crystal rod at the second inspection station, for example, between the light source and the stress image acquisition device, so that the stress image acquisition device can acquire the stress detection image.

[0073] Please see Figure 8As shown in the figure, the robot 7 includes an articulated arm 70 and a robotic hand 71 for gripping crystal rods disposed at the distal end of the articulated arm 70. It should be noted that, although... Figure 8 For illustrative purposes, the robotic arm 71 is separated from the articulated arm 70, but in actual use, the robotic arm 71 is positioned at the distal / end-position of the articulated arm 70. The articulated arm 70 provides the robotic arm 71 with degrees of freedom of movement, enabling the robotic arm 71 to move the held crystal rod. In one embodiment, these degrees of freedom include translational and rotational degrees of freedom, allowing the articulated arm 70 to both translate and select the robotic arm 71.

[0074] In one embodiment, to facilitate loading and unloading by robot 7, such as Figure 8 As shown, the crystal ingot inspection system also includes a loading device 80 and a unloading device 81. The loading device 80 is located in the loading area 82 on the first side of the robot 7, and the unloading device 81 is located in the unloading area 83 on the second side of the robot 7. Thus, the robot can clamp the crystal ingot 4 in the loading device 80 and then transfer it to the crystal ingot inspection equipment 6. After the crystal ingot inspection equipment 6 completes the inspection, the robot transfers the crystal ingot 4 from the second inspection station to the unloading device 81. The first side and the second side are two different directions of the robot 7, for example... Figure 8 As shown, the first side is the left side of robot 7, and the second side is the right side of robot 7.

[0075] In one embodiment, the loading and unloading devices are, for example, a transfer vehicle, which includes multiple receiving slots that match the size of the crystal rods for storing them.

[0076] To avoid collisions between robots and staff during movement, such as Figure 8 As shown, the crystal rod inspection system also includes a protective barrier 9 surrounding the robot 7, the loading device 80, and the unloading device 81. In one embodiment, to facilitate the loading device 80 and the unloading device 81 entering and exiting the protective barrier 9, openings (not shown) are provided on both sides of the protective barrier 9 to allow the loading device 80 and the unloading device 81 to enter and exit.

[0077] In summary, the crystal rod inspection equipment and system disclosed in this application, by configuring a ranging device at the first inspection station of the supporting body of the crystal rod inspection equipment and a stress detection device at the second inspection station, can use the ranging device to measure the distance of multiple measurement points of the crystal rod located at the first inspection station to achieve flatness inspection. Furthermore, when the crystal rod is transferred from the first inspection station to the second inspection station, the stress detection device can be used to perform stress detection on the crystal rod. Thus, two inspection processes can be completed with a single device, eliminating the need for manual handling of the inspection equipment and improving inspection efficiency and accuracy. Furthermore, when the crystal rod includes a ground end face and an unground end face, by aligning the ground end face of the crystal rod located at the second inspection station with the stress image acquisition device, the stress detection image acquired by the stress image acquisition device can more accurately reflect the stress of the crystal rod. Furthermore, by moving the stress image acquisition device through a horizontal moving mechanism, stress detection images of the crystal rod can be acquired at different positions.

[0078] The above embodiments are merely illustrative of the inventive essence and beneficial effects of this application, and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the principles and scope of this application. Therefore, all equivalent modifications or alterations achieved by those skilled in the art without departing from the spirit and technical concept disclosed in this application should still be covered by the claims of this application.

Claims

1. A crystal rod testing device, characterized in that, include: The supporting body has a first testing station and a second testing station adjacent to the first testing station; A ranging device, configured at the first detection station, includes a ranging component for measuring the distance between multiple measuring points of a crystal rod located at the first detection station; wherein the crystal rod includes at least one unground end face, and the multiple measuring points are located on the unground end face; A stress testing device, configured at the second testing station, includes a stress testing component for stress testing of a crystal rod transferred from the first testing station to the second testing station.

2. The crystal rod testing equipment according to claim 1, characterized in that, The crystal rod includes a ground end face and an unground end face.

3. The crystal rod testing equipment according to claim 1, characterized in that, The support body includes a support frame for configuring the ranging device and the stress detection device, and an open shell surrounding the support frame.

4. The crystal rod testing equipment according to claim 3, characterized in that, The open enclosure includes at least one access door for maintenance.

5. The crystal rod testing equipment according to claim 1, characterized in that, The ranging assembly includes a rangefinder for measuring distance and a ranging movement mechanism for moving the rangefinder and / or the crystal rod so that the rangefinder can measure distances at multiple measuring points of the crystal rod.

6. The crystal rod testing equipment according to claim 1, characterized in that, The multiple measurement points include the center point of the unground end face and multiple points on the contour.

7. The crystal rod testing equipment according to claim 5, characterized in that, The rangefinder is a laser rangefinder.

8. The crystal rod testing equipment according to claim 5, characterized in that, The ranging moving mechanism includes a linear moving mechanism for driving the rangefinder to perform linear motion and a rotating mechanism located below the linear moving mechanism for supporting the crystal rod and driving the crystal rod to rotate.

9. The crystal rod testing equipment according to claim 8, characterized in that, The ranging device also includes a lifting plate connected to the linear movement mechanism and a vertical movement mechanism for driving the lifting plate to move up and down.

10. The crystal rod testing equipment according to claim 1, characterized in that, The stress detection assembly includes a light source for emitting polarized light toward a crystal rod located at the second detection station, and a stress image acquisition device disposed above the light source for selectively receiving polarized light passing through the crystal rod to obtain a stress detection image.

11. The crystal rod testing equipment according to claim 10, characterized in that, The light source is a planar light source.

12. The crystal rod testing equipment according to claim 10, characterized in that, The stress detection assembly further includes a horizontal movement mechanism for moving the stress image acquisition device in the horizontal direction so that the stress image acquisition device acquires the stress detection image at different positions.

13. The crystal rod testing equipment according to claim 10, characterized in that, The ground end face of the crystal rod located at the second detection station faces the stress image acquisition device.

14. The crystal rod testing equipment according to claim 1, characterized in that, The crystal rod testing equipment also includes an identification device disposed on the support body for identifying the markings on the crystal rod.

15. A crystal rod detection system, characterized in that, include: The crystal rod testing device as described in any one of claims 1-14; A robot, located adjacent to the crystal rod testing equipment, is used to transfer the crystal rod from the first testing station of the crystal rod testing equipment to the second testing station.

16. The crystal rod detection system according to claim 15, characterized in that, The robot includes an articulated arm and a robotic hand located at the distal end of the articulated arm for gripping the crystal rod.

17. The crystal rod detection system according to claim 15, characterized in that, The crystal rod inspection system also includes a loading device located in the loading area on the first side of the robot and a unloading device located in the unloading area on the second side of the robot.

18. The crystal rod detection system according to claim 17, characterized in that, The crystal rod inspection system also includes protective railings surrounding the robot, the feeding device, and the unloading device.

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