Appearance and gap detection device

Abstract

The utility model provides an appearance and gap detection device, and belongs to the technical field of chip detection. The appearance and gap detection device comprises a base, a fixing support, an appearance detection structure, a gap detection structure and a horizontal moving module, the fixing support comprises a transverse plate part and two vertical supporting legs fixed to the two ends of the transverse plate part, and the two vertical supporting legs are fixedly connected with the base; an opening used for containing the horizontal moving module is formed between the transverse plate part and the two vertical supporting legs, the appearance detection structure and the gap detection structure are installed on the two sides of the transverse plate part respectively, the horizontal moving module is arranged on the base and comprises a positioning structure used for positioning a chip tool, and the chip tool clamps a chip to be detected. And the horizontal moving module is used for driving the chip tool to move in a horizontal plane so as to realize appearance detection of the to-be-detected chip and gap detection at a plurality of detection points. The detection device provided by the utility model can realize appearance and gap detection of the chip to be detected, and the occupied volume of the detection device is saved.

Description

Technical Field

[0001] This application relates to the field of chip inspection technology, and in particular to an appearance and gap inspection device. Background Technology

[0002] Because chip manufacturing processes may involve positioning and assembly defects, it is usually necessary to inspect the chip's appearance. This is typically done by capturing images of the chip's surface and analyzing the data. For chips with cover plates, the gap between the chip's substrate and the cover plate is also a parameter that needs to be ensured; therefore, these types of chips also require gap inspection.

[0003] In actual testing, a production line is typically set up, with visual inspection equipment and gap inspection equipment sequentially installed along the direction of the production line to perform defect inspection on the chip. This requires separate mounting structures for the visual inspection and gap inspection equipment, which increases the distance between the two inspection methods and thus increases the volume occupied by the inspection structures. Utility Model Content

[0004] One objective of this invention is to provide an appearance and gap detection device that can detect the appearance and gap of the chip under test, while saving the space occupied by the detection device.

[0005] Another objective of this invention is to ensure the stable installation of the gap detection structure.

[0006] A further objective of this invention is to save on movement steps and improve detection efficiency.

[0007] An embodiment of this utility model provides an appearance and gap detection device, including a base, a fixed bracket, an appearance detection structure, a gap detection structure, and a horizontal moving module. The fixed bracket includes a horizontal plate and two vertical legs fixed to both ends of the horizontal plate. The two vertical legs are fixedly connected to the base. An opening for accommodating the horizontal moving module is formed between the horizontal plate and the two vertical legs. The appearance detection structure and the gap detection structure are respectively installed on both sides of the horizontal plate. The horizontal moving module is disposed on the base and includes a positioning structure for positioning a chip fixture. The chip fixture clamps a chip to be tested. The horizontal moving module is used to drive the chip fixture to move in a horizontal plane to realize appearance detection of the chip to be tested and gap detection at multiple detection points.

[0008] Optionally, the horizontal movement module includes:

[0009] A first guide rail extends along a first horizontal direction and is fixedly disposed above the base, and the first guide rail passes through the opening;

[0010] A sliding module that cooperates with the first guide rail and can slide along the length direction of the first guide rail. The sliding module includes the positioning structure and a second guide rail extending along a second horizontal direction, which is perpendicular to the first horizontal direction.

[0011] Optionally, the positioning structure has multiple positioning surfaces that cooperate with the chip tooling and is configured to move relative to the second guide rail along the first horizontal direction.

[0012] Optionally, the appearance detection structure includes a camera and a lighting box;

[0013] The fixed bracket also includes a horizontal support plate and an adjustable mounting structure. The horizontal support plate is used to support the lighting box, and the adjustable mounting structure is used to mount the camera and can be configured to various mounting heights.

[0014] Optionally, a plurality of first reinforcing plates are provided between the horizontal support plate and the transverse plate portion.

[0015] Optionally, the adjustable mounting structure includes a first plate fixedly connected to the horizontal plate portion and a vertically arranged second plate. The second plate has a mounting hole extending vertically. The second plate is connected to the first plate by a fastener passing through the mounting hole. The second plate is used to mount the camera.

[0016] Optionally, the first plate and the cross plate portion are respectively provided with a first through hole and a second through hole near the first plate.

[0017] Optionally, the fixed bracket further includes a support hanger, which includes a vertical plate and a horizontal plate that are perpendicular to each other. The top end of the vertical plate is fixedly connected to the horizontal plate and the bottom end is connected to one end of the vertical plate. The end of the horizontal plate away from the vertical plate is used to install the gap detection structure.

[0018] Optionally, the fixed bracket further includes a horizontal column portion disposed below the horizontal plate portion and connected at both ends to the two vertical support legs respectively, and the top end of the horizontal column portion also contacts the horizontal plate.

[0019] Optionally, the appearance inspection structure is installed in the middle of the fixed bracket along the second horizontal direction. When the chip fixture at the horizontal moving module is aligned with the appearance inspection structure, the center line of the gap detection mechanism is aligned with the target detection point, which is a test point in the first horizontal direction that is closest to the center of the chip under test.

[0020] According to one aspect of this utility model, a detection device capable of performing both appearance inspection and gap inspection of a chip is provided. The detection device includes a fixed bracket fixedly mounted on a base and a horizontally movable module that can move horizontally relative to the base. The fixed bracket has an opening allowing the horizontally movable module to pass through. The fixed bracket includes horizontal plate portions on both sides for respectively mounting the appearance inspection structure and the gap inspection structure, so that the detection device can sequentially complete the appearance and gap inspection of the chip under test. Furthermore, this method of mounting both the appearance inspection structure and the gap inspection structure on both sides of the same horizontal plate portion of the fixed bracket saves the volume occupied by the mounting structure and minimizes the distance between the two inspections, thus reducing the overall volume occupied by the detection structure.

[0021] Furthermore, this application provides an adjustable mounting structure that allows the camera height to be adjusted, enabling the camera to be fixed at different heights to meet various appearance inspection requirements. The inclusion of a first reinforcing plate enhances the structural strength of the horizontal support plate used to mount the lighting box, thereby ensuring the positional stability of the light source.

[0022] Furthermore, the first plate and the horizontal plate are respectively provided with a first through hole and a second through hole near the first plate. The two through holes can reduce the structural weight and also provide through holes for the arrangement of camera wiring harnesses, thereby facilitating the guidance of camera wiring harnesses.

[0023] Furthermore, the support bracket allows for lower installation of the gap detection structure, thus meeting the requirements for appearance and gap detection of the chip under test on the same horizontal plane. Furthermore, the horizontal column reinforcement strengthens the support bracket, ensuring stable installation of the gap detection structure.

[0024] Furthermore, since the chip under test first passes through the appearance inspection structure, which is centrally located on the fixed support, the chip fixture and the chip under test are also positioned in the middle of the fixed support. At this point, the centerline of the gap detection mechanism is aligned with the target test point. Therefore, after the appearance inspection, the gap at the target test point can be directly detected by simply controlling the sliding module to move along the first guide rail. Then, it can be moved sequentially to other detection points, thereby saving movement steps and improving detection efficiency. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the appearance and gap detection device according to an embodiment of the present invention;

[0026] Figure 2 yes Figure 1 A schematic diagram of the structure of the horizontal moving module, chip fixture, and chip under test of the appearance and gap detection device in an embodiment;

[0027] Figure 3 yes Figure 1 The appearance and structural schematic diagram of the horizontal moving module and chip tooling of the gap detection device in the embodiment;

[0028] Figure label:

[0029] 100-Appearance and gap inspection device, 10-Base, 20-Fixed bracket, 21-Horizontal plate, 211-Second through hole, 22-Vertical support leg, 23-Horizontal support plate, 24-First plate, 25-Second plate, 241-First through hole, 251-Mounting hole, 26-First reinforcing plate, 27-Vertical plate, 28-Horizontal plate, 29-Horizontal column, 30-Appearance inspection structure, 31-Camera, 32-Lighting box, 40-Gap inspection structure, 50-Horizontal moving module, 51-Positioning structure, 52-First guide rail, 53-Sliding module, 54-Second guide rail;

[0030] 200 - Chip tooling, 210 - Groove, 220 - Positioning notch;

[0031] 300 - Chip under test. Detailed Implementation

[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0033] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0036] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0037] Figure 1 This is a structural schematic diagram of an appearance and gap detection device 100 according to an embodiment of the present invention. Figure 2 yes Figure 1 A schematic diagram of the structure of the horizontal moving module 50, chip fixture 200, and chip under test 300 of the appearance and gap detection device 100 in an embodiment. Figure 1 As shown, in one embodiment, the appearance and gap detection device 100 includes a base 10, a fixed bracket 20, an appearance detection structure 30, a gap detection structure 40, and a horizontal moving module 50. The fixed bracket 20 includes a horizontal plate portion 21 and two vertical support legs 22 fixed to both ends of the horizontal plate portion 21. The two vertical support legs 22 are fixedly connected to the base 10, and an opening for accommodating the horizontal moving module 50 is formed between the horizontal plate portion 21 and the two vertical support legs 22. The appearance detection structure 30 and the gap detection structure 40 are respectively mounted on both sides of the horizontal plate portion 21. The horizontal moving module 50 is disposed on the base 10 and includes a positioning structure 51 for positioning the chip fixture 200 (see [reference]). Figure 2 ),like Figure 2As shown, the chip fixture 200 clamps the chip under test 300. The horizontal moving module 50 is used to move the chip fixture 200 in a horizontal plane to achieve appearance inspection of the chip under test 300 and gap detection at multiple inspection points. In one embodiment, the chip under test 300 may include a substrate (PCB board), a hydrophobic film coated on the surface of the substrate, and an ITO glass cover plate on the hydrophobic film. Gap detection refers to the detection of the gap between the hydrophobic film and the glass cover plate. Of course, in other embodiments, it can also be the detection of gaps between other structures of the chip under test 300, which is not limited here. The gap detection structure 40 here can be a commonly used gap detection device such as a laser detector, and the appearance inspection structure 30 can be a commonly used appearance inspection device such as a camera 31.

[0038] This embodiment provides a testing device capable of performing both appearance inspection and gap inspection of a chip. The device includes a fixed bracket 20 fixedly mounted on a base 10 and a horizontally movable module 50 that can move horizontally relative to the base 10. The fixed bracket 20 has an opening allowing the horizontally movable module 50 to pass through. The fixed bracket 20 includes horizontal plate portions 21 on both sides for mounting an appearance inspection structure 30 and a gap inspection structure 40 respectively, enabling the testing device to sequentially perform appearance and gap inspections on the chip 300 under test. Furthermore, this method of mounting both the appearance inspection structure 30 and the gap inspection structure 40 on both sides of the same horizontal plate portion 21 of the fixed bracket 20 saves space in the mounting structure and minimizes the distance between the two inspections, thus reducing the overall volume of the testing structure.

[0039] Figure 3 yes Figure 1 A schematic diagram of the horizontal moving module 50 and chip fixture 200 of the appearance and gap detection device 100 in one embodiment. In one embodiment, as... Figure 2 As shown, the horizontal movement module 50 includes a first guide rail 52 and a sliding module 53. The first guide rail 52 extends along a first horizontal direction and is fixedly disposed above the base 10, passing through an opening. The sliding module 53 cooperates with the first guide rail 52 and can slide along the length direction of the first guide rail 52. The sliding module 53 includes a positioning structure 51 and a second guide rail 54 extending along a second horizontal direction, which is perpendicular to the first horizontal direction. The positioning structure 51 has multiple positioning surfaces that cooperate with the chip fixture 200 and is configured to move relative to the second guide rail 54 along the first horizontal direction. Figure 3In the embodiment shown, a groove 210 for accommodating the chip under test 300 is formed on the upper surface of the chip fixture 200. A positioning notch 220 is formed on the side of the groove 210. The positioning notch 220 has two opposing side surfaces and a bottom surface. The positioning structure 51 in this embodiment can move along the first horizontal direction to form a positioning state that extends into the groove 210 and an unlocking state that extends out of the groove 210.

[0040] In this embodiment, the chip fixture 200 can be fixed at the sliding module 53 by controlling the movement of the positioning structure 51 along the first horizontal direction. This movement in this direction makes room above the chip fixture 200, so that it is convenient for a robotic arm or pneumatic gripper to place or move the chip fixture 200 out of the sliding module 53.

[0041] In one embodiment, the appearance inspection structure 30 includes a camera 31 and an illumination box 32. The mounting bracket 20 also includes a horizontal support plate 23 and an adjustable mounting structure. The horizontal support plate 23 supports the illumination box 32, and the adjustable mounting structure mounts the camera 31 and can be configured to various mounting heights. The adjustable mounting structure includes a first plate 24 fixedly connected to the horizontal plate portion 21 and a vertically arranged second plate 25. The second plate 25 has a vertically extending mounting hole 251. The second plate 25 is connected to the first plate 24 by fasteners passing through the mounting hole 251, and the second plate 25 is used to mount the camera 31. A plurality of first reinforcing plates 26 are provided between the horizontal support plate 23 and the horizontal plate portion 21. The first reinforcing plates 26 can be vertically arranged triangular plates. In one embodiment, the first plate 24 and the horizontal plate portion 21 have a first through hole 241 and a second through hole 211 near the first plate 24, respectively.

[0042] This embodiment provides an adjustable mounting structure that allows the camera 31 to be fixed at different heights to meet various appearance inspection requirements. The first reinforcing plate 26 enhances the structural strength of the horizontal support plate 23 used to mount the lighting box 32, thereby ensuring the positional stability of the light source.

[0043] Furthermore, the first plate 24 and the horizontal plate 21 are respectively provided with a first through hole 241 and a second through hole 211 near the first plate 24. The two through holes can reduce the structural weight and also provide through holes for the arrangement of the camera 31 wiring harness, thereby facilitating the guidance of the camera 31 wiring harness.

[0044] In a further embodiment, the fixed bracket 20 also includes a support hanger, which includes a vertical plate 27 and a horizontal plate 28 that are perpendicular to each other. The top end of the vertical plate 27 is fixedly connected to the horizontal plate portion 21, and the bottom end is connected to one end of the vertical plate 27. The end of the horizontal plate 28 away from the vertical plate 27 is used to install the gap detection structure 40. The fixed bracket 20 also includes a horizontal column portion 29, which is disposed below the horizontal plate portion 21 and whose two ends are respectively connected to two vertical support legs 22. The top end of the horizontal column portion 29 also contacts the horizontal plate 28.

[0045] In this embodiment, the support hanger allows the gap detection structure 40 to be installed at a lower position, thereby meeting the requirements for appearance and gap detection of the chip under test 300 on the same horizontal plane. Furthermore, the horizontal column 29 strengthens the support hanger, ensuring stable installation of the gap detection structure 40.

[0046] In one embodiment, the appearance inspection structure 30 is mounted at the middle of the fixed bracket 20 along the second horizontal direction. In a further embodiment, when the chip fixture 200 at the horizontal moving module 50 is aligned with the appearance inspection structure 30, the centerline of the gap detection mechanism is aligned with the target detection point, which is a test point in the first horizontal direction closest to the center of the chip 300 under test. Of course, in other embodiments, the gap detection mechanism may be mounted at the middle of the fixed bracket 20 along the second horizontal direction.

[0047] Since the camera 31 and the lighting box 32 are relatively heavy, placing them centrally on the fixed bracket 20 can ensure a balanced weight distribution.

[0048] Furthermore, since the chip under test 300 first passes through the appearance inspection structure 30, which is centrally located at the fixed support 20, the chip fixture 200 and the chip under test 300 are also positioned at the center of the fixed support 20. At this time, the centerline of the gap detection mechanism is aligned with the target test point. Therefore, after the appearance inspection, the gap at the target test point can be directly detected by simply controlling the sliding module 53 to move along the first guide rail 52, and then it can be moved sequentially to other test points, thereby saving movement steps and improving detection efficiency.

[0049] When performing inspection using the aforementioned appearance and gap detection device 100, the initial position of the sliding module 53 is first controlled so that the center of the chip under test 300 and the camera 31 are aligned in the second horizontal direction. The sliding module 53 is then moved along the first guide rail 52 to a position directly below the camera 31, where the camera 31 takes an image, thus achieving appearance inspection of the chip under test 300. Next, the sliding module 53 is moved along the first guide rail 52 to a position below the gap detection structure 40, where the target detection point is first inspected. Then, the sliding module 53 is moved along the first guide rail 52 and the second guide rail 54, so that all other detection points are directly below the gap detection structure 40, and gap inspection is performed one by one until all detection points have completed gap inspection. Finally, the sliding module 53 is moved back to its initial position.

[0050] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. An appearance and gap detection device, characterized in that, The device includes a base, a fixed bracket, an appearance inspection structure, a gap detection structure, and a horizontal moving module. The fixed bracket includes a horizontal plate and two vertical legs fixed to both ends of the horizontal plate. The two vertical legs are fixedly connected to the base. An opening for accommodating the horizontal moving module is formed between the horizontal plate and the two vertical legs. The appearance inspection structure and the gap detection structure are respectively installed on both sides of the horizontal plate. The horizontal moving module is disposed on the base and includes a positioning structure for positioning a chip fixture. The chip fixture holds a chip under test. The horizontal moving module is used to move the chip fixture in a horizontal plane to achieve appearance inspection of the chip under test and gap detection at multiple detection points.

2. The appearance and gap detection device according to claim 1, characterized in that, The horizontal movement module includes: A first guide rail extends along a first horizontal direction and is fixedly disposed above the base, and the first guide rail passes through the opening; A sliding module that cooperates with the first guide rail and can slide along the length direction of the first guide rail. The sliding module includes the positioning structure and a second guide rail extending along a second horizontal direction, which is perpendicular to the first horizontal direction.

3. The appearance and gap detection device according to claim 2, characterized in that, The positioning structure has multiple positioning surfaces that cooperate with the chip tooling and is configured to move relative to the second guide rail along the first horizontal direction.

4. The appearance and gap detection device according to claim 2, characterized in that, The appearance inspection structure includes a camera and a lighting box; The fixed bracket also includes a horizontal support plate and an adjustable mounting structure. The horizontal support plate is used to support the lighting box, and the adjustable mounting structure is used to mount the camera and can be configured to various mounting heights.

5. The appearance and gap detection device according to claim 4, characterized in that, Multiple first reinforcing plates are provided between the horizontal support plate and the transverse plate portion.

6. The appearance and gap detection device according to claim 4, characterized in that, The adjustable mounting structure includes a first plate fixedly connected to the horizontal plate and a vertically arranged second plate. The second plate has a mounting hole extending vertically. The second plate is connected to the first plate by a fastener passing through the mounting hole. The second plate is used to mount the camera.

7. The appearance and gap detection device according to claim 6, characterized in that, The first plate and the horizontal plate are respectively provided with a first through hole and a second through hole near the first plate.

8. The appearance and gap detection device according to claim 2, characterized in that, The fixed bracket also includes a support hanger, which includes a vertical plate and a horizontal plate that are perpendicular to each other. The top end of the vertical plate is fixedly connected to the horizontal plate and the bottom end is connected to one end of the vertical plate. The end of the horizontal plate away from the vertical plate is used to install the gap detection structure.

9. The appearance and gap detection device according to claim 8, characterized in that, The fixed bracket also includes a horizontal column, which is located below the horizontal plate and connected to the two vertical legs at both ends. The top of the horizontal column also contacts the horizontal plate.

10. The appearance and gap detection device according to any one of claims 2-9, characterized in that, The appearance inspection structure is installed in the middle of the fixed bracket along the second horizontal direction. When the chip fixture at the horizontal moving module is aligned with the appearance inspection structure, the center line of the gap detection structure is aligned with the target detection point. The target detection point is a test point in the first horizontal direction that is closest to the center of the chip under test.

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