Eutectic heating device

Abstract

The utility model relates to a eutectic heating device. The eutectic heating device is characterized in that a supporting beam is provided with a vacuum air pipe, one side of the supporting beam in the height direction is a sliding surface, and the sliding surface is used for a substrate to slide; the heating block is arranged on the sliding surface, a heater is arranged in the heating block, and a first air channel communicated with the vacuum air pipe is further formed in the heating block; the jig plate is arranged on the side, away from the sliding face, of the heating block in a covering mode, a second air channel communicated with the first air channel is further formed in the jig plate, and the second air channel is used for adsorbing the base plate. The eutectic heating device provided by the utility model has the advantages of simple structure, good temperature control effect and stable substrate adsorption.

Description

Technical Field

[0001] This utility model relates to the field of chip processing, and in particular to a eutectic heating device. Background Technology

[0002] In microelectronic devices, eutectic bonding is commonly used to solder chips onto a substrate. Eutectic bonding, also known as low-melting-point alloy bonding, allows two different metals to form an alloy in a specific weight ratio at temperatures far below their respective melting points. This bonding technique is highly temperature-sensitive. Excessive temperature can cause lead deformation, hindering solder adhesion during reflow soldering and leading to cold solder joints. It can also cause the chip to overheat, cracking and breaking, affecting electrical performance. Conversely, insufficient temperature can result in weak bonding, impacting electrical performance and making the chip prone to being pulled out during wire bonding, thus reducing yield. However, in current technologies, precise temperature control during eutectic bonding between the substrate and the chip is difficult, frequently resulting in defective products on the production line. Utility Model Content

[0003] Therefore, the purpose of this utility model is to provide a eutectic heating device, which has the advantages of simple structure and good temperature control.

[0004] A eutectic heating device includes: a support beam with a vacuum pipe, wherein one side of the support beam in the height direction is a sliding surface for sliding a substrate; a heating block disposed on the sliding surface, wherein a heater is disposed inside the heating block and a first air passage communicating with the vacuum pipe is also provided; and a fixture plate covering the side of the heating block opposite to the sliding surface, wherein a second air passage communicating with the first air passage is provided in the fixture plate and the second air passage is used to adsorb the substrate.

[0005] The eutectic heating device described in this utility model has an optimized and adjusted structure. Through the cooperation of the heating block, the fixture plate and the vacuum pipe, the device is more compatible with the substrate. It can also adsorb the substrate while heating it, thereby simplifying the device structure and improving the device's fixation effect and heating stability on the substrate.

[0006] Furthermore, a mounting groove is provided on the sliding surface, and both the heating block and the fixture plate are disposed in the mounting groove, with the side of the fixture plate facing away from the heating block flush with the sliding surface. This structure allows the top surface of the fixture plate to be flush with the support beam, resulting in better support for the substrate.

[0007] Furthermore, the fixture plate has a substrate sliding in end and a substrate sliding out end along the length direction of the support beam. The fixture plate has an extension located at the substrate sliding in end, which extends obliquely towards the bottom of the mounting groove. This structure can guide the substrate during movement, thereby allowing the substrate to move to the upper surface of the fixture plate.

[0008] Furthermore, the structure includes multiple first air channels, multiple second air channels, and multiple vacuum tubes. Each of the multiple first air channels is connected to a corresponding vacuum tube, and each of the multiple second air channels is connected to a corresponding first air channel. The multiple second air channels are spaced apart along the length of the support beam. This structure allows for control of the vacuuming operation of each second air channel, improving the adsorption effect of the fixture plate on the substrate, and thus enhancing the fixation effect of the fixture plate on the substrate.

[0009] Furthermore, the second air passage includes a main air passage and multiple adsorption holes. The side of the fixture plate opposite to the heating block is the mounting surface. The main air passage is located inside the fixture plate and is connected to the first air passage. The multiple adsorption holes are spaced apart along the width direction of the support beam on the mounting surface and are all connected to the main air passage. This structure allows for control of the vacuuming operation, enabling the adsorption holes in each row to open sequentially, improving the adsorption effect of the fixture plate on the substrate, and thus enhancing the fixation effect of the fixture plate on the substrate.

[0010] Furthermore, the support beam has a first end and a second end at its two ends along its length. The area of ​​the support beam between the first end and the heating block is a preheating zone, and the area between the second end and the heating block is a cooling zone. Both the preheating zone and the cooling zone are equipped with multiple heating elements and thermocouples. The heating elements are used to heat the support beam. This structure can preheat, heat, and cool the substrate during its movement, ensuring effective heating and cooling of the substrate.

[0011] Furthermore, it also includes thermocouples, which are provided in the heating block, the preheating zone and the cooling zone, and are used to detect temperature.

[0012] Furthermore, it includes a plurality of heaters, which are spaced apart inside the heating block, thereby enabling heating of a larger area of ​​the fixture plate.

[0013] Furthermore, the heating block is detachably mounted in the sliding surface, and the fixture plate is detachably mounted on the heating block, so that the heating block and the fixture plate can be adjusted accordingly according to the specifications of the substrate.

[0014] Furthermore, it also includes multiple leveling bolts. The jig plate has multiple mounting holes on the side opposite to the heating block, with these mounting holes spaced apart along the length of the support beam. Each leveling bolt is correspondingly positioned in one of these mounting holes, with its head inside the hole and its shank passing through the hole and connecting to the heating block. This structure is used to adjust the levelness of the heating block, ensuring its upper surface is horizontal on the support beam, thus facilitating quick replacement of the jig plate.

[0015] To better understand and implement this invention, the following detailed description is provided in conjunction with the accompanying drawings. Attached Figure Description

[0016] Figure 1 This is an overall structural diagram of the eutectic heating device described in this utility model;

[0017] Figure 2 for Figure 1 A magnified view of a portion of region A in the middle;

[0018] Figure 3 This is a structural diagram of the heating block;

[0019] Figure 4 This is a structural diagram of the jig plate;

[0020] Figure 5 This is a cross-sectional view showing the installation of the first airway, the second airway, and the vacuum tube.

[0021] Explanation of reference numerals in the attached drawings: 1. Support beam; 11. First end; 12. Second end; 13. Mounting groove; 2. Heating block; 21. Heater; 22. First air passage; 3. Fixture plate; 31. Extension; 32. Second air passage; 321. Main air passage; 322. Adsorption hole; 4. Heating element; 5. Thermocouple; 6. Leveling bolt; 7. Vacuum pipe. Detailed Implementation

[0022] This invention optimizes and adjusts the structure, using adsorption to achieve a better match between the device and the substrate, thus enabling precise positioning of the substrate. Combined with preheating, heating, and cooling steps, it enhances the heating effect on the substrate and the wafer. Furthermore, this solution improves the structure of the air passage, allowing the substrate to be positioned using the negative pressure created within the air passage, eliminating the need for additional positioning structures. This simplifies the device structure while improving the adsorption and fixation effect on the substrate.

[0023] Please see Figures 1-5 , Figure 1 This is an overall structural diagram of the eutectic heating device described in this utility model; Figure 2 for Figure 1 A magnified view of a portion of region A in the middle;Figure 3 This is a structural diagram of the heating block; Figure 4 This is a structural diagram of the jig plate; Figure 5 This is a cross-sectional view of the installation of the first airway, the second airway, and the vacuum tube.

[0024] This utility model discloses a eutectic heating device, including a support beam 1, a heating block 2, and a fixture plate 3. One side of the support beam 1 in the height direction is a sliding surface for sliding a substrate. The heating block 2 and the fixture plate 3 are both disposed on the sliding surface of the support beam 1, with the fixture plate 3 covering the side of the heating block 2 opposite to the sliding surface. Multiple heaters 21 are disposed inside the heating block 2, spaced apart along its width direction, to ensure uniform heating.

[0025] The support beam 1 extends in a straight line, with its two ends, a first end 11 and a second end 12, located along its length. During use, the substrate enters through the first end 11 and exits through the second end 12. A heating zone is located in the middle of the support beam 1. The area between the first end 11 and the heating block 2 is the preheating zone, and the area between the second end 12 and the heating block 2 is the cooling zone. Therefore, during use, the substrate is first preheated in the preheating zone, then heated in the heating zone to achieve die bonding, and finally slowly cooled in the cooling zone.

[0026] To ensure the substrate can move smoothly onto the fixture plate 3, the fixture plate 3 has a substrate sliding in end and a substrate sliding out end along the length of the support beam 1, with the substrate sliding in end located near the first end 11. The fixture plate 3 has an extension 31 located at the substrate sliding in end, which extends obliquely towards the bottom of the mounting groove 13, allowing the substrate to slide onto the fixture plate 3 via a guide surface during movement. Multiple sets of heating elements 4 and thermocouples 5 are also installed inside the preheating zone, heating zone, and cooling zone of the support beam 1. The heating elements 4 preheat the support beam 1, and the thermocouples 5 measure the temperature to detect the heating temperature.

[0027] A recessed mounting groove 13 is provided on the sliding surface at the top of the heating zone of the support beam 1. The heating block 2 and the fixture plate 3 are stacked in the mounting groove 13, with the fixture plate 3 covering the top of the heating block 2 away from the bottom of the mounting groove 13. The heating block 2 is detachably installed in the mounting groove 13, and the fixture plate 3 is detachably installed on the heating block 2, with the side of the fixture plate 3 facing away from the heating block 2 flush with the sliding surface. This detachable installation can be done in various ways, such as snap-fit ​​or adhesive. In this embodiment, the side of the fixture plate 3 facing away from the heating block 2 has multiple mounting holes, which are spaced apart along the length of the support beam 1. Both the fixture plate 3 and the heating block 2 are threadedly connected to the support beam 1 by leveling bolts 6. The leveling bolts 6 are respectively and correspondingly located in the multiple mounting holes. In this embodiment, there are two leveling bolts 6, which are spaced apart along the extension direction of the support beam 1. The head of the leveling bolt 6 is located in the mounting hole and abuts against the fixture plate 3, and the rod passes through the mounting hole and is threadedly connected to the heating block 2 or the mounting groove 13. In use, the tightness between the fixture plate 3, the heating block 2 and the support beam 1 can be adjusted by rotating the leveling bolt 6, thereby adjusting the tilt of the heating block 2 so that the fixture plate 3 fits the substrate better and improves the fixture plate 3's ability to adsorb and fix the substrate.

[0028] The heating block 2 has a first air passage 22, and the fixture plate 3 has a second air passage 32 that communicates with the first air passage 22. The support beam 1 is provided with a vacuum pipe 7, one end of which is connected to an external vacuum device, and the other end of the vacuum pipe 7 is connected to the first air passage 22, thereby realizing the vacuuming of the first air passage 22 and the second air passage 32 to form a negative pressure, and then adsorbing and fixing the substrate that has passed through the heating zone.

[0029] To enhance the adsorption and fixation effect, multiple first air channels 22 are provided, each corresponding to a specific vacuum tube 7. Multiple second air channels 32 are also provided, each corresponding to a specific first air channel 22. These second air channels 32 are spaced apart along the length of the support beam 1. Each second air channel 32 includes a main channel 321 and multiple adsorption holes 322. The main channel 321 is located inside the fixture plate 3, spaced apart along the extension direction of the support beam 1, and connected to the first air channels 22. The side of the fixture plate 3 facing away from the heating block 2 is the mounting surface. Multiple adsorption holes 322 are spaced apart on the mounting surface along the extension direction of the main channel 321 (i.e., the width direction of the support beam 1), and all are connected to the main channel 321. Since the extension direction of the main channel 321 determines the distribution direction of the adsorption holes 322, the shape of the main channel 321 can be designed according to actual conditions. It can extend obliquely or along a curve. Preferably, the extension direction of the main channel 321 is perpendicular to the extension direction of the support beam 1 in the horizontal plane.

[0030] In this embodiment, three first air channels 22 are used as an example. There are three vacuum pipes 7, each connected to one of the three first air channels 22. Two of the vacuum pipes 7 are located on both sides of the support beam 1, and the third passes through the support beam 1. There are three rows of adsorption holes 322 arranged at intervals along the moving direction of the substrate. During use, the three rows of adsorption holes 322 can be controlled to open sequentially to create a vacuum, thereby causing the substrate to be adsorbed and adhered to the fixture plate 3 from one end to the other, resulting in a tighter fit between the substrate and the fixture plate 3 and ensuring stable heating.

[0031] In use, the substrate can move along the support beam 1 under the action of other driving mechanisms, starting from the first end 11 and passing through the preheating zone, heating zone and cooling zone in sequence. When entering the heating zone, the vacuum tube 7 will be evacuated, and through the cooperation of the first air channel 22 and the second air channel 32, the adsorption hole 322 will generate negative pressure to adsorb and fix the substrate. Then, the heating and chip mounting process will be carried out. After the mounting is completed, the vacuum equipment will be turned off, and the adsorption hole 322 will no longer adsorb the substrate. At this time, the substrate will be moved out from the second end 12 through the cooling zone under the action of other driving mechanisms.

[0032] The eutectic heating device described in this utility model has an optimized and adjusted structure. Through the cooperation of the heating block, the fixture plate and the vacuum pipe, the device is better matched with the substrate. Through the reasonable setting of the air channel, the device can achieve stable adsorption of the substrate while heating it. Thus, while simplifying the device structure, it improves the device's fixation effect and heating stability on the substrate.

[0033] In the description of this application, it should be understood that if terms such as “height,” “length,” “width,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “top,” “bottom,” “inner,” and “outer” appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0034] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixed," "set in," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0036] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and this utility model also intends to include these modifications and variations.

Claims

1. A eutectic heating device, characterized in that, include: A support beam is provided with a vacuum pipe, and one side of the support beam in the height direction is a sliding surface, which is used for sliding of the substrate; A heating block is disposed on the sliding surface, and a heater is provided inside the heating block. A first air passage is also provided that communicates with the vacuum pipe. A fixture plate is provided on the side of the heating block opposite to the sliding surface. The fixture plate is also provided with a second air channel communicating with the first air channel. The second air channel is used to adsorb the substrate.

2. The eutectic heating device according to claim 1, characterized in that: The sliding surface is provided with a mounting groove, and the heating block and the fixture plate are both disposed in the mounting groove, with the side of the fixture plate facing away from the heating block flush with the sliding surface.

3. The eutectic heating device according to claim 2, characterized in that: The fixture plate is provided with a substrate sliding in end and a substrate sliding out end along the length direction of the support beam. The fixture plate has an extension located at the substrate sliding in end, and the extension extends obliquely toward the bottom of the mounting groove.

4. The eutectic heating device according to claim 1, characterized in that: It includes multiple first air passages, multiple second air passages, and multiple vacuum tubes. The multiple first air passages are connected to the multiple vacuum tubes in a one-to-one correspondence, and the multiple second air passages are connected to the first air passages in a one-to-one correspondence. The multiple second air passages are spaced apart along the length direction of the support beam.

5. The eutectic heating device according to claim 4, characterized in that: The second air passage includes a main air passage and multiple adsorption holes. The side of the fixture plate opposite to the heating block is the mounting surface. The main air passage is located inside the fixture plate and is connected to the first air passage. The multiple adsorption holes are spaced apart along the width direction of the support beam on the mounting surface and are all connected to the main air passage.

6. The eutectic heating device according to claim 1, characterized in that: The support beam has a first end and a second end at its two ends along its length. The area of ​​the support beam between the first end and the heating block is a preheating zone, and the area of ​​the support beam between the second end and the heating block is a cooling zone. Both the preheating zone and the cooling zone are equipped with multiple heating elements, which are used to heat the support beam.

7. The eutectic heating device according to claim 6, characterized in that: It also includes thermocouples, which are provided in the heating block, the preheating zone and the cooling zone, and are used to detect temperature.

8. The eutectic heating device according to claim 1, characterized in that: It includes a plurality of heaters, which are spaced apart inside the heating block.

9. The eutectic heating device according to claim 1, characterized in that: The heating block is detachably mounted on the sliding surface, and the fixture plate is detachably mounted on the heating block.

10. The eutectic heating device according to claim 9, characterized in that: It also includes multiple leveling bolts. The fixture plate has multiple mounting holes on the side opposite to the heating block. The multiple mounting holes are spaced apart along the length of the support beam. The multiple leveling bolts are respectively provided in the multiple mounting holes, and the head of the leveling bolt is located in the mounting hole. The shank of the leveling bolt passes through the mounting hole and is connected to the heating block.

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