Improved monitoring water film device

Abstract

The utility model relates to battery production equipment, in particular to an improved monitoring water film device, and aims to solve the problems that in the prior art, a water film device senses the water yield by means of a flow meter at a water film valve, and water cannot be normally monitored when the water film valve is damaged. In order to achieve the purpose, the water film device comprises a control unit, a water storage unit, a weighing unit and an alarm unit, the water storage unit is provided with a plurality of spraying units, and the spraying units are connected with the control unit; the water storage unit is arranged on the weighing unit, and the control unit is connected with the weighing unit; the alarm unit is connected with the control unit, and the control unit is suitable for controlling the alarm unit according to the weighing unit. By means of the scheme, the situation that in the prior art, the water outlet amount of the spraying unit is sensed only through a flow meter independently, and when independent flow monitoring fails, the situation that water does not flow out abnormally cannot be monitored is avoided, the probability that silicon wafers are over-etched due to abnormal water films can be reduced, production efficiency is improved, and batch abnormal output is reduced.

Description

Technical Field

[0001] This utility model relates to battery production equipment, specifically providing a device for improving the monitoring of water film. Background Technology

[0002] In recent years, advancements in solar cell manufacturing technology have led to reduced production costs and increased conversion efficiency, resulting in the widespread and rapid development of photovoltaic power generation, which has gradually become a crucial source of electricity. A solar cell is a photoelectric element that converts light energy into electrical energy directly through the photoelectric effect or photochemical effect, thus realizing photovoltaic power generation. The manufacturing process of silicon solar cells is relatively complex, generally including the following steps: slicing, texturing, diffusion, etching, anti-reflective coating deposition, electrode printing, electrode sintering, and testing. Among these steps, etching is required after the diffusion process to remove the diffusion layer. The BSG (Back Surface Field Silicon Wafer) / PSG (Phosphorus-doped Silicon Wafer) chain-type etching process involves single-sided etching, with the non-contact surfaces covered with a full-surface water film for protection to prevent chemical adhesion and over-etching abnormalities.

[0003] Currently, water film systems rely on distance sensors to open the water film valve and allow water to flow out according to a set distance using gravity. If the water film valve or sensor malfunctions and fails to flow out, manual on-site inspection of the water film coverage is required. If the malfunction is not detected, a batch of defective sheets will be sent down, affecting rework and production line first-pass yield.

[0004] Accordingly, there is a need in the art for a new chain-type water film device to solve the above problems. Utility Model Content

[0005] The present invention aims to solve the above-mentioned technical problems, namely, to solve the problem that in the prior art, the water film device relies on the flow meter at the water film valve to sense the water output, and the water output cannot be monitored normally when the water film valve is damaged.

[0006] In a first aspect, the present invention provides an improved monitoring device for water films, the water film device comprising:

[0007] Control unit;

[0008] A water storage unit, wherein the water storage unit is provided with multiple spray units, and the spray units are connected to the control unit;

[0009] A weighing unit, wherein the water storage unit is mounted on the weighing unit, and the control unit is connected to the weighing unit;

[0010] An alarm unit is provided, which is connected to the control unit, and the control unit is adapted to control the alarm unit according to the weighing unit.

[0011] In a specific embodiment having the above-described improved monitoring water film device, the water film device further includes:

[0012] A ranging unit is provided, which is connected to the control unit. The control unit is adapted to control the water outlet of the water storage unit according to the ranging unit.

[0013] In a specific embodiment of the improved monitoring water film device described above, the water storage unit is provided with a water outlet;

[0014] The spray unit includes a water film valve connected to the water outlet and connected to the control unit, which is adapted to control the on / off state of the water film valve.

[0015] In a specific embodiment of the improved monitoring water film device described above, the control unit is configured to obtain the spray water volume of the water storage unit through the weighing unit and compare the spray water volume with a threshold to output different control signals.

[0016] In a specific embodiment of the improved monitoring water film device described above, the different control signals include alarm signals and continuous operation signals. The alarm unit is adapted to receive alarm signals to trigger an alarm, and the spray unit is adapted to receive continuous operation signals to perform spraying.

[0017] In a specific embodiment of the improved water film monitoring device described above, the weighing unit includes a pressure sensor;

[0018] The control unit includes a comparator and a controller. One input terminal of the comparator is connected to the output terminal of the pressure sensor, the other input terminal of the comparator is connected to a constant voltage output terminal, and the output terminal of the comparator is connected to the controller.

[0019] In a specific embodiment of the improved water film monitoring device described above, the controller is connected to both the alarm unit and the spray unit, and the controller is adapted to selectively control the alarm unit and the spray unit according to the comparator.

[0020] In a specific embodiment of the above-described improved monitoring water film device, the alarm unit is characterized in that it is at least one of a light alarm and a buzzer alarm.

[0021] In a specific embodiment of the improved water film monitoring device described above, the weighing units are configured as multiple units and symmetrically arranged below the water storage unit.

[0022] In a specific embodiment of the improved water film monitoring device described above, multiple spray units are arranged on a horizontal plane at the same height.

[0023] By adopting the above technical solution, the improved water film monitoring device disclosed in this utility model measures the overall mass reduction of the water storage unit using a weighing unit. The control unit then uses the data fed back from the weighing unit to determine whether the multiple spray units on the water blowing unit are working properly and whether the water film device can form a uniform water film on the silicon wafer surface for protection. If the spray units of the water storage unit malfunction, the overall mass reduction of the water storage unit is abnormal. The control unit can then control the alarm unit to issue a warning based on the abnormal feedback value from the weighing unit. If the water storage unit is operating normally, the water film device will operate normally, and the control unit will not trigger an alarm. This solution avoids the limitations of existing technologies that rely solely on flow meters to sense the water output of the spray units. When individual flow monitoring fails, it cannot detect abnormal water output, thus reducing the probability of over-etching of silicon wafers due to water film abnormalities, improving production efficiency, and reducing batch production errors. Attached Figure Description

[0024] The preferred embodiments of this utility model are described below with reference to the accompanying drawings, in which:

[0025] Figure 1 This is a system layout diagram of the water film device in this application;

[0026] Figure 2 This is a schematic diagram of the structure of one embodiment of the water film device in this application;

[0027] Figure 3 This is a schematic diagram of another embodiment of the water film device in this application.

[0028] The components include: 1. Control unit; 2. Water storage unit; 3. Spraying unit; 4. Weighing unit; 5. Alarm unit; 6. Distance measuring unit; 7. Water film valve; 8. Pressure sensor; 9. Comparator; and 10. Controller. Detailed Implementation

[0029] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention. Those skilled in the art can make adjustments as needed to adapt to specific application scenarios.

[0030] It should be noted that in the description of this utility model, terms such as "upper," "lower," "left," "right," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the relevant device or component must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, ordinal numbers such as "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] like Figure 1 As shown, this utility model proposes an improved monitoring device for water film, including a control unit 1, a water storage unit 2, a weighing unit 4, and an alarm unit 5. The water storage unit 2 is provided with multiple spray units 3, and the spray units 3 are connected to the control unit 1. The water storage unit 2 is set on the weighing unit 4, and the control unit 1 is connected to the weighing unit 4. The alarm unit 5 is connected to the control unit 1, and the control unit 1 is adapted to control the alarm unit 5 according to the weighing unit 4.

[0033] The improved water film monitoring device proposed in this embodiment has a water storage unit 2 installed on a weighing unit 4, and multiple spraying units 3 installed on the water storage unit 2. When the silicon wafer is transported to the spraying area of ​​the water film device, the control unit 1 controls the spraying units 3 to spray, forming a water film on the surface of the silicon wafer for protection. The water film on the surface of the silicon wafer is required to be uniform and complete, so as to avoid over-etching during subsequent etching processes. As the spraying proceeds, the water volume in the water storage unit 2 decreases. The weighing unit 4 detects the mass loss of the water storage unit 2 and transmits the lost mass to the control unit 1. The control unit 1 will obtain the water volume based on the mass loss of the water storage unit 2 and determine whether it has reached the required threshold for complete water film coverage. If it has not reached the threshold, the control unit 1 will control the alarm unit 5 to sound an alarm, and the chain conveyor will also stop feeding. On-site personnel will confirm the actual water film situation, promptly investigate abnormalities, and reduce the number of abnormal silicon wafers transmitted to subsequent processes.

[0034] Based on the above embodiments, for example, the water storage unit 2 is equipped with 10 spray units 3, the chain machine uses 10 running plates, and the water output of each spray unit 3 is 90ml. Therefore, the water volume used for a single spray film is 900ml. According to the formula for the mass of an object, m=ρv, ρ(water)=1.0g / cm³3 Therefore, the single output mass of water storage unit 2 is 900g. If one of the 10 spray units 3 malfunctions and cannot output water, the output of the remaining 9 spray units 3 will be 810ml, and the single output mass of water storage unit 2 will be 810g. The weighing unit 4 detects the mass change of water storage unit 2 before and after spraying and transmits it to the control unit 1. The control unit 1 can determine the difference in mass change of water storage unit 2 before and after spraying and compare it with the mass threshold for complete water film coverage. The mass threshold for complete water film coverage can be set to 850g. Then, after water storage unit 2 sprays once, the mass loss of water storage unit 2 is 810g. Since the actual output is less than the mass threshold, the control unit 1 determines that there is a malfunction in spray unit 3 based on the data feedback, and then controls the alarm unit 5 to sound an alarm. In the above example, the mass threshold for complete water film coverage can be set to different values, but the set value must follow the rule that the total output of 9 spray units < the set value < the total output of 10 spray units.

[0035] Based on the above embodiments, see [link to relevant documentation] Figure 2 It also includes a ranging unit 6, which detects whether the silicon wafer has entered the spraying range of the spraying unit 3. The ranging unit 6 can be installed on the water storage unit 2 or the spraying unit 3, as long as it can detect that the silicon wafer has been transported into the spraying area. The ranging unit 6 is connected to the control unit 1. After the silicon wafer moves into the spraying area, the distance detected by the ranging unit 6 changes due to the obstruction of the silicon wafer. The control unit 1 then determines that the silicon wafer has moved to the corresponding position and controls the spraying unit 3 to spray, forming a water film on the surface of the silicon wafer.

[0036] Based on the above technical concept, one possible implementation of a water film device is described below, see reference. Figure 1 and Figure 2 The water storage unit 2 can be a water film tank with multiple water outlets. A water film valve 7 is installed on each water outlet. The water film valve 7 is connected to the control unit 1. The control unit 1 can control the opening and closing of the water film valve 7. The control unit 1 can obtain the mass change of the water storage unit 2 from the weighing unit 4. The control unit 1 calculates the spray water volume based on the mass change, compares it with a threshold, and outputs an alarm signal or a continuous operation signal based on the comparison result.

[0037] In the above embodiment, the weighing unit 4 adopts an online weighing instrument, which is installed below the water film tank. The online weighing instrument is communicatively connected to the control unit 1. The online weighing instrument can sense the mass change in the water film tank before and after spraying and synchronize the data to the control unit 1. The control unit 1 can output different control signals according to different comparison results. When the mass difference in the water film tank before and after spraying is less than the threshold, the control unit 1 determines that the spraying unit 3 is faulty and outputs an alarm signal. After receiving the alarm signal, the alarm unit 5 will sound an alarm. The alarm method is not limited to light, buzzer, etc. If the mass difference in the water film tank before and after spraying is greater than the threshold, the control unit 1 will output a continuous operation signal, and the water film device will operate normally.

[0038] In possible implementations, see [reference] Figure 1 and Figure 3 Another possible implementation of the water film device is as follows: the weighing unit 4 under the water storage unit 2 is a pressure sensor 8, and the control unit 1 includes a comparator 9 and a controller 10. The signal output terminal of the pressure sensor 8 is connected to one of the signal input terminals of the comparator 9, the other signal input terminal of the comparator 9 is connected to a constant voltage output terminal, and the output terminal of the comparator 9 is connected to the controller 10. The comparator 9 outputs different signals to the controller 10 according to the comparison result, and the controller 10 outputs a failure signal to the alarm unit 5.

[0039] During operation, once the ranging device detects that the silicon wafer has been delivered to the spraying area of ​​the spraying unit 3, it sends a feedback signal to the controller 10. The controller 10 then controls the spraying unit 3 to perform spraying. As spraying progresses, the water volume in the water film tank decreases until a single spray cycle ends. At this point, the pressure sensor 8 located below the water film tank outputs a first voltage signal to the comparator 9. The comparator 9 receives the voltage drop value from the pressure sensor 8. The other end of the comparator 9 is connected to a constant voltage output terminal, which receives a second voltage signal. The voltage value of the constant voltage output terminal can be set as needed, but the set voltage value must be... The second voltage signal is made to meet the following rule: the set voltage value is between the voltage drop value of all spray units 3 when they are complete and the voltage drop value of only one spray unit 3 when it is damaged. The comparator 9 outputs different signals by comparing the voltage drop value and the second voltage signal. When the voltage drop value is less than the second voltage signal, the comparator 9 outputs signal 1; when the voltage drop value is not less than the second voltage signal, the comparator 9 outputs signal 0. When the controller 10 receives signal 1 from the comparator 9, it controls the alarm unit 5 to alarm. When the controller 10 receives signal 0 from the comparator 9, the equipment continues to operate.

[0040] It should be noted that the two different implementation methods based on the same technical concept are merely exemplary and do not limit the scope of protection of this application. Any scheme that can determine whether there is a spraying failure in the water film device by monitoring the overall quality change of the water storage unit 2 should fall within the scope of protection of this application.

[0041] Based on the above embodiments, multiple weighing units 4 are set and symmetrically arranged below the water storage unit 2. The symmetrical arrangement of the weighing units 4 can more accurately weigh the mass change of the water storage unit 2 and transmit more accurate data to the control unit 1. This enables precise monitoring of the uniformity and integrity of the water film formed by the water film device spraying, and avoids over-etching of the silicon wafer in subsequent processes due to incomplete water film coverage.

[0042] Based on the above embodiments, multiple spray units 3 are arranged on the water storage unit 2, and the spray units 3 are on the same horizontal plane. The spray units 3 are at the same height from the silicon wafer, which is conducive to the formation of a uniform water film structure on the silicon wafer surface by the spray units 3. The spray units 3 are located at the same height, and the water flow rate of each spray unit 3 from the water storage unit 2 is also closer, which is conducive to the uniform distribution of the water film on the silicon wafer.

[0043] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. An improved device for monitoring water films, characterized in that, The water film device includes: Control unit (1); A water storage unit (2) is provided with multiple spray units (3), and the spray units (3) are connected to the control unit (1); Weighing unit (4), water storage unit (2) is disposed on the weighing unit (4), and control unit (1) is connected to the weighing unit (4); An alarm unit (5) is connected to the control unit (1), and the control unit (1) is adapted to control the alarm unit (5) according to the weighing unit (4).

2. The improved water film monitoring device according to claim 1, characterized in that, The water film device also includes: A ranging unit (6) is connected to the control unit (1), and the control unit (1) is adapted to control the water storage unit (2) to discharge water according to the ranging unit (6).

3. The improved water film monitoring device according to claim 1, characterized in that, The water storage unit (2) is provided with a water outlet; The spray unit (3) includes a water film valve (7), which is connected to the water outlet and to the control unit (1). The control unit (1) is adapted to control the opening and closing of the water film valve (7).

4. The improved water film monitoring device according to claim 1, characterized in that, The control unit (1) is configured to obtain the spray water volume of the water storage unit (2) through the weighing unit (4) and compare the spray water volume with a threshold to output different control signals.

5. The improved water film monitoring device according to claim 4, characterized in that, The different control signals include alarm signals and continuous operation signals. The alarm unit (5) is adapted to receive alarm signals to trigger an alarm, and the spray unit (3) is adapted to receive continuous operation signals to perform spraying.

6. The improved water film monitoring device according to claim 1, characterized in that, The weighing unit (4) includes a pressure sensor (8); The control unit (1) includes a comparator (9) and a controller (10). One input terminal of the comparator (9) is connected to the output terminal of the pressure sensor (8), and the other input terminal of the comparator (9) is connected to the constant voltage output terminal. The output terminal of the comparator (9) is connected to the controller (10).

7. The improved water film monitoring device according to claim 6, characterized in that, The controller (10) is connected to both the alarm unit (5) and the spray unit (3), and the controller (10) is adapted to selectively control the alarm unit (5) and the spray unit (3) according to the comparator (9).

8. The improved monitoring water film device according to any one of claims 1 to 7, characterized in that, The alarm unit (5) is at least one of a light alarm and a buzzer alarm.

9. The improved water film monitoring device according to claim 8, characterized in that, The weighing unit (4) is configured as a plurality of units and symmetrically arranged below the water storage unit (2).

10. The improved water film monitoring device according to claim 1, characterized in that, Multiple spray units (3) are arranged on a horizontal plane at the same height.

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