Auxiliary boat loading equipment

The design of the guide sleeve and ejector plate solves the problems of fixing the ceramic rod and uneven force distribution during the loading of the graphite boat, improving assembly efficiency and stability and reducing the risk of damage.

CN223833859UActive Publication Date: 2026-01-27SHIJIN (XIAN) APPLIED MATERIALS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202520331702.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-27
Publication Date
2026-01-27
Estimated Expiration
2035-02-27

AI Technical Summary

Technical Problem

During the loading of the graphite boat, the installation of the internal ceramic sleeve was difficult, resulting in low assembly efficiency and problems such as swaying of the ceramic rod and uneven force distribution.

Method used

An auxiliary boat loading device was designed, including a guide sleeve, a 90-degree tilting frame, and a push-out base plate. The ceramic rod is fixed by the guide sleeve, the push-out base plate pushes the ceramic rod up, and the position of the graphite boat blade is adjusted by the 90-degree tilting frame, which solves the problems of fixing the ceramic rod and uneven force distribution.

Benefits of technology

This improved the assembly speed and stability of graphite boats, reduced labor intensity, lowered the probability of boat blade damage, and achieved a more efficient assembly process.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223833859U_ABST
    Figure CN223833859U_ABST
Patent Text Reader

Abstract

The utility model provides auxiliary boat loading equipment. The auxiliary boat loading equipment at least comprises a boat loading platform, a guide sleeve, a 90-degree roll-over stand and an ejection bottom plate, the guide sleeve is vertically mounted on the upper side of the boat loading platform and is used for penetrating and accommodating the ceramic rod; the 90-degree roll-over stand is mounted on the upper side of the boat loading platform and is used for adaptively placing a graphite boat blade to be assembled; the ejection bottom plate is installed in the boat loading table in parallel, located on the lower side of the boat loading table and used for pushing the ceramic rod to rise. According to the auxiliary boat loading equipment provided by the embodiment of the utility model, the problem that the ceramic rod swings left and right and cannot be uniformly fixed in the process of starting to load the graphite boat is solved through the design of the guide sleeve, the boat loading is more efficient and faster, and the assembly speed of the graphite boat is improved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model relates to the field of graphite boat technology, and more specifically, to an auxiliary boat loading device. Background Technology

[0002] During the assembly of a graphite boat, a large number of ceramic sleeves are required to ensure the stability of the boat and the stable spacing between the graphite boat blades. The ceramic sleeves located on the edge of the graphite boat are relatively easy to install, but the internal ceramic sleeves are more difficult to install due to the smaller gaps between the graphite boat blades. Currently, workers do not have good auxiliary equipment during assembly, and the installation of ceramic sleeves is time-consuming, affecting assembly efficiency. Utility Model Content

[0003] To address the aforementioned problems, the purpose of this utility model embodiment is to provide an auxiliary loading device.

[0004] This utility model embodiment provides an auxiliary boat loading device, which includes at least: a loading platform, a guide sleeve, a 90-degree tilting frame, and a ejector base plate; the guide sleeve is vertically installed on the upper side of the loading platform for accommodating a ceramic rod; the 90-degree tilting frame is installed on the upper side of the loading platform for fitting and placing a graphite boat blade to be assembled; the ejector base plate is installed parallel to the inside of the loading platform and located on the lower side of the loading platform for pushing the ceramic rod up.

[0005] Optionally, the loading platform includes a base plate; the guide sleeve is vertically mounted on the upper surface of the base plate.

[0006] Optionally, the guide sleeve is circular or square, and the center of the guide sleeve is provided with an ejector rod, which is used to push the ceramic rod.

[0007] Optionally, the auxiliary boat loading device further includes: a linear guide rail, which is vertically installed around the ejector base plate to guide the ejector base plate to move upward and eject the ejector rod located inside the guide sleeve.

[0008] Optionally, the 90-degree tilting frame includes: a sliding guide rail; the sliding guide rail is vertically mounted on the upper surface of the 90-degree tilting frame, and the sliding guide rail is used to slide out the graphite boat.

[0009] Optionally, the loading platform further includes: a frame base and horizontal adjustment feet; the frame base and the horizontal adjustment feet are fixed together by bolts.

[0010] Optionally, an inner nylon sleeve support is nested inside the guide sleeve, and the ceramic rod corresponds one-to-one with the inner nylon sleeve support. The interior of the inner nylon sleeve support is used to place the ceramic sleeve.

[0011] Optionally, the 90-degree tilting frame is provided with cylindrical shafts at both ends, and the 90-degree tilting frame is installed on the upper side of the loading platform through the cylindrical shafts and bearings nested together.

[0012] In the above-described solution of this utility model embodiment, the guide sleeve design solves the problem of ceramic rods swaying left and right during the initial loading of the graphite boat, making uniform fixation impossible. Furthermore, the ejector plate design ensures that the ceramic rods rise together during the overall ascent, allowing for real-time position adjustments. The 90-degree tilting frame design addresses the issue of uneven force distribution and damage during graphite boat tilting. Compared to previous methods lacking adequate auxiliary equipment, this auxiliary loading device is more efficient and faster, improving the assembly speed of the graphite boat.

[0013] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This diagram illustrates the specific structure of an auxiliary boat loading device provided in an embodiment of the present invention.

[0016] Figure 2 This diagram shows another perspective view of the auxiliary boat loading device provided in an embodiment of the present invention.

[0017] icon:

[0018] 1-Loading platform, 2-Guide sleeve, 3-90-degree tilting frame, 4-Push-out base plate, 5-Linear guide rail, 11-Base plate, 12-Frame base, 13-Horizontal adjustment foot, 21-Push-out rod, 31-Sliding guide rail. Detailed Implementation

[0019] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0021] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0022] The graphite boat is a carrier for silicon wafer coating. It consists of graphite boat blades, ceramic rods, graphite nuts, and electrodes. The ceramic rods connect the graphite boat blades. Through-holes for the ceramic rods are formed in the graphite boat blades, through which the ceramic rods are installed between the graphite boat blades. The ceramic rods not only connect the graphite boat blades but also serve to separate adjacent blades at equal intervals. Ceramic sleeves are used to separate these blades, and they are spaced between the graphite boat blades, fitting over the ceramic rods.

[0023] The inventors discovered that currently, the loading process for each graphite boat takes 25 minutes and relies primarily on two workers. When loading the first five blades, the ceramic rod cannot be fixed vertically and tends to sway from side to side. This requires manual intervention to straighten the ceramic rod to the same side. However, even with manual straightening, the rod is prone to swaying, the standards are not well-consistent, and the techniques are not precise enough, leading to a high probability of blade damage and significant labor intensity during loading.

[0024] In view of the problems existing in the prior art, the purpose of this utility model is to provide an auxiliary loading device for graphite boats. Compared with the previous lack of good auxiliary devices, this auxiliary loading device is more efficient and faster, and improves the assembly speed of graphite boats.

[0025] like Figure 1 As shown, the auxiliary boat loading device includes: a loading platform 1, a guide sleeve 2, a 90-degree tilting frame 3, and a ejector base plate 4. The guide sleeve 2 is vertically installed on the upper side of the loading platform 1 to accommodate the ceramic rods. It should be noted that the ceramic rods are used to connect the graphite boat blades. The graphite boat blades have through holes for the ceramic rods, which are installed between the graphite boat blades. The ceramic rods not only connect the graphite boat blades but also serve to separate adjacent graphite boat blades at equal intervals.

[0026] Furthermore, the 90-degree tilting frame 3 is installed on the upper side of the loading platform 1 to accommodate the graphite boat blades to be assembled. The ejector base plate 4 is installed parallel to the interior of the loading platform 1 and located on its lower side. It can be understood that the ejector base plate 4 is located below the 90-degree tilting frame 3 and the guide sleeve 2 to push the ceramic rod upwards. For example, by raising the ejector base plate 4, the ceramic rod housed in the guide sleeve 2 is pushed upwards to a certain target height. It should be noted that this target height can be equal to or higher than the upper surface height of the uppermost graphite boat blade among the multiple graphite boat blades to be assembled, which are adapted to be placed on the 90-degree tilting frame 3, thereby allowing the ceramic rod to penetrate through multiple graphite boat blades to be assembled.

[0027] The auxiliary boat-loading device provided in this embodiment is used as follows: First, the ceramic rod is guided and fixed inside the guide sleeve 2. Then, the graphite boat blade to be assembled is placed flat on the 90-degree flip frame 3 for fitting. The ceramic sleeves (parts that separate the parts at equal intervals) are then placed on the outside of the ceramic rod. The ejector base plate 4 is raised to a suitable position according to the assembly progress, so that the ceramic rod is pushed to sequentially install the graphite boat blade to be assembled and the ceramic sleeves. After installation, the graphite nuts are screwed on both ends of the ceramic rod to quickly assemble the graphite boat. It should be noted that... Figure 2 Here is another structural view of the auxiliary boat loading device, which can be used as a reference.

[0028] The auxiliary boat loading device provided in this embodiment of the invention solves the problem of ceramic rods swaying left and right during the initial loading of the graphite boat, making uniform fixation impossible, through the design of the guide sleeve 2. Furthermore, the design of the ejector base plate 4 ensures that the ceramic rods rise together during the overall ascent, allowing for real-time position adjustments. The design of the 90-degree tilting frame 3 addresses the issue of uneven force distribution and damage during the graphite boat tilting process. Compared to previous methods without adequate auxiliary equipment, this auxiliary boat loading device is more efficient and faster, improving the assembly speed of the graphite boat.

[0029] Optionally, such as Figure 1 As shown, the loading platform 1 includes a base plate 11. It can be seen that the base plate 11 is located on the upper part of the entire auxiliary loading equipment, that is, the base plate 11 is located higher than the ejector base plate 4, and can be used to vertically install the guide sleeve 2.

[0030] Optionally, the guide sleeve 2 can be circular or square, and as shown in the figure. Figure 1 As shown, the guide sleeve 2 has an ejector rod 21 at its center. This ejector rod 21 is designed to eject the ceramic rod; that is, the ejector base plate 4 moves upward to directly lift the ejector rod 21, which in turn causes the ceramic rod to rise. It can be understood that the ejector base plate 4 indirectly pushes the ceramic rod upward.

[0031] Optionally, such as Figure 1 As shown, the auxiliary boat loading device may further include: a linear guide rail 5, which is vertically installed around the ejector base plate 4 to guide the ejector base plate 4 to move upward and eject the ejector rod 21 located inside the guide sleeve 2. For example, the ejector base plate 4 and the linear guide rail 5 can be fixed by bolts. The linear guide rail 5 is fixed inside the boat loading platform 1 by bolts, guiding the ejector base plate 4 to move up and down, thereby ejecting the ejector rod 21 inside the guide sleeve 2.

[0032] Optionally, such as Figure 1 As shown, the 90-degree tilting frame 3 includes a sliding guide rail 31; the sliding guide rail 31 is vertically mounted on the upper surface of the 90-degree tilting frame 3, and the sliding guide rail 31 is used to slide out the graphite boat. It should be noted that the number of sliding guide rails 31 can be multiple, and this embodiment of the present invention does not specifically limit this.

[0033] Optionally, such as Figure 1 As shown, the loading platform 1 may further include: a frame base 12 and horizontal adjustment feet 13. The frame base 12 and the horizontal adjustment feet 13 are fixed together by bolts. Furthermore, a protective plate may be provided through the side end of the frame base 12, and a top frame beam is provided inside the frame base 12.

[0034] Optionally, the inner side of the guide sleeve 2 is nested with an inner nylon sleeve support, and the ceramic rod corresponds one-to-one with the inner nylon sleeve support. The interior of the inner nylon sleeve support is used to place the ceramic sleeve (a part that serves to separate the parts at equal intervals).

[0035] Optionally, the 90-degree tilting frame 3 has cylindrical shafts at both ends, and the 90-degree tilting frame 3 is mounted on the upper side of the loading platform 1 through a nested arrangement of cylindrical shafts and bearings. This embodiment of the invention solves the problem of uneven force distribution and damage during the tilting of the graphite boat through the design of the 90-degree tilting frame.

[0036] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. An auxiliary loading device for boats, characterized in that, It includes at least: a loading platform (1), a guide sleeve (2), a 90-degree tilting frame (3), and a ejector base plate (4); The guide sleeve (2) is vertically installed on the upper side of the loading platform (1) for accommodating the ceramic rod; the 90-degree flipping frame (3) is installed on the upper side of the loading platform (1) for fitting the graphite boat blade to be assembled; the ejector base plate (4) is installed parallel inside the loading platform (1) and located on the lower side of the loading platform (1) for pushing the ceramic rod up.

2. The auxiliary loading equipment according to claim 1, characterized in that, The loading platform (1) includes a base plate (11); the guide sleeve (2) is vertically installed on the upper surface of the base plate (11).

3. The auxiliary loading equipment according to claim 1, characterized in that, The guide sleeve (2) is circular or square, and the center of the guide sleeve (2) is provided with an ejector rod (21), which is used to push the ceramic rod.

4. The auxiliary loading equipment according to claim 3, characterized in that, Also includes: A linear guide (5) is vertically installed around the ejector base plate (4) to guide the ejector base plate (4) to move upward and eject the ejector rod (21) located inside the guide sleeve (2).

5. The auxiliary loading equipment according to claim 1, characterized in that, The 90-degree flip frame (3) includes: a sliding guide rail (31); the sliding guide rail (31) is vertically installed on the upper surface of the 90-degree flip frame (3), and the sliding guide rail (31) is used to slide out the graphite boat.

6. The auxiliary loading equipment according to claim 1, characterized in that, The loading platform (1) also includes: a frame base (12) and a horizontal adjustment foot (13); the frame base (12) and the horizontal adjustment foot (13) are fixed together by bolts.

7. The auxiliary loading equipment according to claim 1, characterized in that, The inner side of the guide sleeve (2) is nested with an inner nylon sleeve support, and the ceramic rod corresponds one-to-one with the inner nylon sleeve support. The interior of the inner nylon sleeve support is used to place the ceramic sleeve.

8. The auxiliary loading equipment according to claim 1, characterized in that, The 90-degree tilting frame (3) is provided with cylindrical shafts at both ends, and the 90-degree tilting frame (3) is installed on the upper side of the loading platform (1) through the cylindrical shafts and bearings.