Crystal non-planar multi-angle nano mirror surface polishing machine

Abstract

The utility model relates to the technical field of crystal processing, and discloses a crystal non-planar multi-angle nano mirror surface polishing machine which comprises a base, a gantry type three-axis motion module and a main shaft unit, the gantry type three-axis motion module and the main shaft unit are arranged above the base, and a rotating mechanism is arranged on a sliding output seat of the gantry type three-axis motion module and comprises a rotating shaft. The main shaft unit is fixed on the rotating shaft; the main shaft unit is connected with a polishing wheel standard clamping handle, and the polishing wheel is installed on the polishing wheel standard clamping handle; a rotatable workbench is arranged in the middle of the base. The machining requirement of crystals with larger diameters can be met by arranging the gantry type three-axis movement module, the spindle unit can be located at various angles through the rotating mechanism, the polishing requirement of various non-planar crystals can be met, and the practicability and adaptability of the machine tool can be effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of crystal processing technology, and in particular to a crystal non-planar multi-angle nano-mirror polishing machine. Background Technology

[0002] In high-tech fields such as semiconductors and optics, single-crystal silicon is a crucial basic material, and its processing precision plays a decisive role in product performance. Especially for large-diameter circular single-crystal silicon, applications such as integrated circuit chip manufacturing and high-end optical lenses place extremely high demands on the polishing precision of both planar and non-planar surfaces. Currently, traditional machine tools face numerous technical bottlenecks in polishing large-diameter circular single-crystal silicon. In planar polishing, uneven pressure distribution and inconsistent polishing pad wear result in microscopic undulations in the finished surface, failing to meet high-precision requirements. For polishing non-planar surfaces such as circular conical surfaces, convex surfaces, and concave surfaces, existing technologies face even greater challenges. Utility Model Content

[0003] The purpose of this invention is to provide a crystal non-planar multi-angle nano-mirror polishing machine. By setting a gantry-type three-axis motion module, it can meet the processing needs of crystals with larger diameters. Through the rotation mechanism, the spindle unit can be placed at multiple angles, which can meet the polishing needs of various non-planar crystals and effectively improve the practicality and adaptability of the machine tool.

[0004] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0005] A crystal non-planar multi-angle nano-mirror polishing machine includes a base, a gantry-type three-axis motion module and a spindle unit disposed above the base. The gantry-type three-axis motion module has a rotating mechanism on its sliding output seat, the rotating mechanism including a rotating shaft, and the spindle unit fixed on the rotating shaft. A polishing wheel standard clamp is connected to the spindle unit, and the polishing wheel is mounted on the polishing wheel standard clamp. A controller controls the spindle unit, the rotating mechanism, and the gantry-type three-axis motion module.

[0006] The base has a rotatable worktable in the middle.

[0007] With the above technical solution, the crystal to be polished is fixed on the worktable, and the worktable drives the crystal to rotate. The gantry-type three-axis motion module can drive the sliding output seat to move up and down, forward and backward, and left and right. The sliding output seat drives the rotating mechanism to move, thereby driving the spindle unit to move. At the same time, the rotation of the rotating shaft can also cause the spindle unit to rotate, so that the spindle unit can be in different angle states. The spindle unit drives the polishing wheel to rotate through the standard chuck of the polishing wheel. The polishing wheel performs planar and non-planar polishing work on the crystal.

[0008] The present invention is further configured such that: a worm gear is fixed in the middle of the rotating shaft, the worm gear meshes with a worm, and the worm and the rotating shaft are rotatably connected to the sliding output seat through bearings; the worm is connected to a first servo motor that drives it to rotate, the first servo motor is fixed on the sliding output seat, and the first servo motor is electrically connected to the controller.

[0009] Through the above technical solution, the first servo motor drives the worm gear to rotate, and the worm gear drives the rotating shaft to rotate through the worm wheel, thereby realizing the rotation of the spindle unit. The angle through which the spindle unit rotates can be precisely controlled by the servo motor.

[0010] This invention is further configured such that the worktable is connected to a DD direct drive motor that drives its rotation. The DD direct drive motor has a large torque, which can meet the rotation requirements of large-diameter crystals and high-mass crystals.

[0011] The present invention is further configured such that: the DD direct drive motor is fixed on multiple gravity sensors, the gravity sensors are fixed on a base plate, the base plate is fixedly connected to the base, and the gravity sensors are electrically connected to the controller;

[0012] A protective cover is provided on the substrate, and the DD direct drive motor and gravity sensor are housed inside the protective cover. The gravity sensor can detect the pressure exerted on the crystal during polishing, and transmit the pressure to the controller in real time. The controller then controls the polishing intensity of the polishing wheel.

[0013] The present invention is further configured such that the angle range of the main spindle unit rotating around the rotation axis is -90° to 5°.

[0014] This invention is further configured such that a heightening support beam is provided between the base and the gantry-type three-axis motion module. The heightening support beam can further increase the height of the gantry-type three-axis motion module, while preventing debris and cutting fluid generated during machining from entering the relevant moving components of the gantry-type three-axis motion module, thus reducing wear and ensuring working accuracy.

[0015] The present invention is further configured as follows: the gantry-type three-axis motion module includes a Z-axis screw screwed to a sliding output seat, the Z-axis screw screw being rotatably connected to an X-axis slider and having a Z-axis motor connected to one end thereon; a Z-axis slide rail is fixed to the X-axis slider, and the X-axis slider is slidably connected to the Z-axis slide rail; the X-axis slider is screwed to the X-axis screw screw, the X-axis screw screw being rotatably connected to a connecting beam and having an X-axis motor connected to one end thereon; an X-axis slide rail is fixed to the connecting beam, and the X-axis slider is slidably connected to the X-axis slide rail; a Y-axis slider is connected to each end of the connecting beam, and the Y-axis slider is slidably connected to a corresponding heightening pad beam; a Y-axis screw screw is rotatably connected to the heightening pad beam, the Y-axis slider is screwed to the Y-axis screw screw, and a Y-axis motor driving the rotation of the Y-axis screw screw is connected to one end thereon.

[0016] The outstanding effect of this utility model is:

[0017] Compared with existing technologies, by setting up a gantry-type three-axis motion module, the processing needs of crystals with larger diameters can be met. The rotating mechanism allows the spindle unit to be at multiple angles, which can meet the polishing needs of various non-planar crystals and effectively improve the practicality and adaptability of the machine tool.

[0018] Polishing pressure can be monitored in real time by setting a pressure sensor. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the workbench portion of this utility model;

[0021] Figure 3 for Figure 1 A magnified view of a specific area (A);

[0022] Figure 4 for Figure 3 A sectional view of BB;

[0023] Figure 5 for Figure 4 Sectional view of CC.

[0024] Attached label: 1, base;

[0025] 2. Gantry-type three-axis motion module; 21. Pressure-bearing part; 22. Z-axis screw; 23. X-axis slider; 24. Z-axis motor; 25. X-axis screw; 26. Connecting beam; 27. X-axis motor; 28. Y-axis slider; 29. ​​Y-axis motor;

[0026] 211. Arc plate; 212. Horizontal plate; 213. Diagonal plate;

[0027] 3. Spindle unit; 31. Polishing wheel standard chuck; 32. Polishing wheel standard chuck;

[0028] 4. Rotating mechanism; 41. Rotating shaft; 42. Worm gear; 43. Worm; 44. First servo motor;

[0029] 51. Worktable; 52. DD direct drive motor; 53. Gravity sensor; 54. Base plate; 55. Protective cover;

[0030] 6. Raise the support beam;

[0031] 9. Crystal. Detailed Implementation

[0032] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0033] The following is for reference Figures 1 to 5 The present invention will be described as follows:

[0034] A crystal non-planar multi-angle nano-mirror polishing machine, such as Figure 1 , Figure 4 As shown, the system includes a base 1, a gantry-type three-axis motion module 2 mounted on the base 1, and a spindle unit 3. The gantry-type three-axis motion module 2 has a rotating mechanism 4 on its sliding output seat 21. The rotating mechanism 4 includes a rotating shaft 41, and the spindle unit 3 is fixed to the rotating shaft 41. A polishing wheel standard clamp 31 is connected to the spindle unit 3, and a polishing wheel 32 is mounted on the polishing wheel standard clamp 31. A controller controls the spindle unit, the rotating mechanism, and the gantry-type three-axis motion module.

[0035] The base 1 has a rotatable worktable 51 in the middle.

[0036] The crystal 9 to be polished is fixed on the worktable, which drives the crystal to rotate. The gantry-type three-axis motion module can drive the sliding output seat to move up and down, forward and backward, and left and right. The sliding output seat drives the rotating mechanism to move, thereby driving the spindle unit to move. At the same time, the rotation of the rotating shaft can also cause the spindle unit to rotate, thus allowing the spindle unit to be in different angle states. The spindle unit drives the polishing wheel to rotate through the standard chuck of the polishing wheel. The polishing wheel performs planar and non-planar polishing work on the crystal.

[0037] like Figure 4 , Figure 5 As shown, a worm gear 42 is fixed in the middle of the rotating shaft 41, and the worm gear 42 meshes with a worm 43. The worm 43 and the rotating shaft 41 are rotatably connected to the sliding output seat 21 through bearings. The worm 43 is connected to a first servo motor 44 that drives it to rotate. The first servo motor 44 is fixed on the sliding output seat 21 and is electrically connected to the controller.

[0038] The first servo motor drives the worm gear to rotate, and the worm gear drives the rotating shaft to rotate through the worm wheel, thereby realizing the rotation of the spindle unit. The angle through which the spindle unit rotates can be precisely controlled by the servo motor.

[0039] like Figure 2 As shown, the worktable 51 in this embodiment is connected to a DD direct drive motor 52 that drives its rotation. The DD direct drive motor has a large torque, which can meet the rotation requirements of large-diameter crystals and high-mass crystals.

[0040] The DD direct drive motor 52 is fixed on multiple gravity sensors 53, the gravity sensors 53 are fixed on the base plate 54, the base plate 54 is fixedly connected to the base 1, and the gravity sensors are electrically connected to the controller.

[0041] A protective cover 55 is provided on the substrate 54, and the DD direct drive motor 52 and gravity sensor 53 are disposed inside the protective cover 55. The gravity sensor can detect the pressure on the crystal during polishing, and transmit the pressure to the controller in real time. The controller controls the polishing intensity of the polishing wheel.

[0042] like Figure 3 As shown, the main spindle unit 3 rotates around the rotation axis 41 in an angle range of -90° to 5°.

[0043] like Figure 1 As shown, a heightening beam 6 is provided between the base 1 and the gantry-type three-axis motion module 2 in this embodiment. The heightening beam can further increase the height of the gantry-type three-axis motion module, while preventing the chips and cutting fluid generated during processing from entering the relevant moving components of the gantry-type three-axis motion module, reducing wear and ensuring working accuracy.

[0044] The gantry-type three-axis motion module 2 includes a Z-axis screw 22 screwed to a sliding output seat 21, the Z-axis screw 22 being rotatably connected to an X-axis slider 23 and having a Z-axis motor 24 connected to one end thereon; a Z-axis slide rail is fixed to the X-axis slider 23, and the X-axis slider 23 is slidably connected to the Z-axis slide rail; the X-axis slider 23 is screwed to an X-axis screw 25, the X-axis screw 25 being rotatably connected to a connecting beam 26 and having an X-axis motor 27 connected to one end thereon; an X-axis slide rail is fixed to the connecting beam 26, and the X-axis slider 23 is slidably connected to the X-axis slide rail; a Y-axis slider 28 is connected to each end of the connecting beam 26, and the Y-axis slider 28 is slidably connected to a corresponding heightening beam 6; a Y-axis screw is rotatably connected to the heightening beam 6, the Y-axis slider is screwed to the Y-axis screw, and a Y-axis motor 29 is connected to one end of the Y-axis screw to drive its rotation.

[0045] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model. These improvements and modifications assumed above should also be considered within the protection scope of the present utility model.

Claims

1. A crystal non-planar multi-angle nano-mirror polishing machine, comprising a base (1), a gantry-type three-axis motion module (2) and a spindle unit (3) disposed above the base (1), characterized in that: The gantry-type three-axis motion module (2) has a rotating mechanism (4) on its sliding output seat (21). The rotating mechanism (4) includes a rotating shaft (41), and the main shaft unit (3) is fixed on the rotating shaft (41). The base (1) has a rotatable worktable (51) in the middle.

2. The crystal non-planar multi-angle nano-mirror polishing machine according to claim 1, characterized in that: A worm gear (42) is fixed in the middle of the rotating shaft (41), and the worm gear (42) meshes with a worm (43). The worm (43) and the rotating shaft (41) are rotatably connected to the sliding output seat (21) through bearings. The worm (43) is connected to a first servo motor (44) that drives it to rotate.

3. The crystal non-planar multi-angle nano-mirror polishing machine according to claim 1, characterized in that: The workbench (51) is connected to a DD direct drive motor (52) that drives it to rotate.

4. A crystal non-planar multi-angle nano-mirror polishing machine according to claim 3, characterized in that: The DD direct drive motor (52) is fixed on multiple gravity sensors (53), the gravity sensors (53) are fixed on the base plate (54), and the base plate (54) is fixedly connected to the base (1). The substrate (54) is provided with a protective cover (55), and the DD direct drive motor (52) and gravity sensor (53) are disposed inside the protective cover (55).

5. A crystal non-planar multi-angle nano-mirror polishing machine according to claim 1, characterized in that: The main spindle unit (3) rotates around the rotation axis (41) in an angle range of -90° to 5°.

6. The crystal non-planar multi-angle nano-mirror polishing machine according to claim 1, characterized in that: A heightening support beam (6) is provided between the base (1) and the gantry-type three-axis motion module (2).

7. A crystal non-planar multi-angle nano-mirror polishing machine according to claim 6, characterized in that: The gantry-type three-axis motion module (2) includes a Z-axis screw (22) screwed to the sliding output seat (21), the Z-axis screw (22) being rotatably connected to the X-axis slider (23) and one end of which is connected to a Z-axis motor (24); the X-axis slider (23) being screwed to the X-axis screw (25), the X-axis screw (25) being rotatably connected to the connecting beam (26) and one end of which is connected to an X-axis motor (27); each end of the connecting beam (26) is connected to a Y-axis slider (28), the Y-axis slider (28) being slidably connected to the corresponding heightening pad beam (6); the heightening pad beam (6) is rotatably connected to a Y-axis screw, the Y-axis slider being screwed to the Y-axis screw, and one end of the Y-axis screw being connected to a Y-axis motor (29) that drives it to rotate.

Images