Chassis structure of single crystal furnace

Abstract

The utility model relates to a single crystal furnace base plate structure which comprises a base plate, a cooling groove is formed in the front face of the base plate, a plurality of sets of partition plate pieces are arranged on the inner side of the cooling groove, the circle centers of the partition plate pieces coincide, each partition plate piece is composed of two partition plates, the circle centers of the two partition plates in the same set coincide, and the interval between the two partition plates in the same set is 1 cm or above; a cooling groove is formed in the base plate, an inner ring is arranged in the middle of the cooling groove, a first annular frame is arranged on the inner side of the inner ring, a plurality of lock catch grooves are formed in the base plate in a concave mode, locking columns are arranged in the lock catch grooves, a plurality of locking frames are arranged on the partition plate, the lock catch grooves are matched with the locking frames, and locking columns are arranged in the lock catch grooves. Two independent waterway systems of the water channel and the cooling piece are formed between the partition plates, the cooling requirements of different areas of the furnace body are met respectively, the temperatures in the different areas tend to be consistent, space waste is avoided, and energy consumption waste is reduced.

Description

Technical Field

[0001] This invention belongs to the field of single crystal furnace chassis, specifically a single crystal furnace chassis structure. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon using a graphite heater in an inert gas environment and grows dislocation-free single crystals through the Czochralski method. It plays a crucial role in the production of high-purity single crystal materials. The main components of a single crystal furnace include a lifting head, auxiliary chamber, furnace cover, furnace cylinder, lower furnace cylinder, furnace bottom plate, base frame, crucible lower transmission device, water distributor and water circuit arrangement, argon gas pipeline arrangement, vacuum pump and vacuum dust removal system, power supply and electrical control cabinet, etc. These components work together to ensure the normal operation of the single crystal furnace. With the deepening promotion of intelligent manufacturing and green manufacturing concepts, the automation, intelligence, and environmental protection of single crystal furnaces will become future development trends.

[0003] Existing patent CN202221089178.4, entitled "A Single Crystal Furnace Cooling System," features "a method for implementing a second cooling device, wherein high-temperature furnace air in the single crystal furnace first enters the first heat exchange tube and exchanges heat with water in the water tank, thereby completing the first stage of cooling. Then, the furnace air that has completed the first stage of cooling enters the sealed cooling box and exchanges heat with water in the second heat exchange tube. Finally, the furnace air that has completed the second stage of cooling returns to the single crystal furnace through the second docking shell." However, it still has some shortcomings. For example, when the cooler used is working, the cooling effect changes rapidly as it moves away from the cooler, resulting in excessive temperature differences in some areas of the chassis. Furthermore, it cannot separately control the temperature of the outer and inner rings of the chassis according to requirements. Therefore, a single crystal furnace chassis structure is proposed. Utility Model Content

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0005] Given the following technical problems in the existing technology: when the cooler is working, the cooling effect changes rapidly as people move away from the cooler, resulting in excessive temperature differences in some areas of the chassis, and the temperature of the outer and inner rings of the chassis cannot be controlled separately according to requirements.

[0006] To solve the above technical problems, the present invention provides the following technical solution: a single crystal furnace chassis structure, including a chassis, a cooling groove is provided on the front of the chassis, and an array of partition members are provided on the inner side of the cooling groove. The centers of the partition members coincide, and each partition member is composed of two partitions. The centers of the two partitions in the same group coincide, and there is a gap between the two partitions in the same group. The gap between the two partitions is more than 1 cm.

[0007] The cooling tank has an inner ring in the middle, and an annular frame is provided on the inner side of the inner ring. The chassis has multiple locking slots, and a locking post is provided in the locking slot. Several locking frames are provided on the partition. The locking slot matches the locking frame. An elliptical seat is provided on the top of the locking post, and the outer side of the elliptical seat is wrapped with rubber.

[0008] A honeycomb structure is provided on the ring frame. The honeycomb structure is composed of several hexagonal ring structures. The hexagonal ring structure is made up of short pipes of the same length spliced ​​together. The short pipes are connected to their adjacent short pipes.

[0009] As a preferred technical solution for the chassis structure of a single crystal furnace, the partition is an arc-shaped plate, and the spacing between the partitions on different partition components is more than 2 cm;

[0010] Water can flow through channels separated by partitions.

[0011] As a preferred technical solution for the chassis structure of a single crystal furnace, the cooling component is provided with three annular frames one and several annular frames two, and the inner bottom wall of the cooling tank is provided with three mounting holes, which correspond to the annular frames one;

[0012] The mounting hole and the ring frame are reserved space for the installation of subsequent equipment.

[0013] As a preferred technical solution for a single crystal furnace chassis structure, the bottom of the locking frame is provided with a locking groove, the locking groove is inserted into a corresponding locking post, the locking groove includes a straight groove, a locking cavity and an insertion hole, the top of the straight groove is provided with a locking cavity, the bottom of the straight groove is provided with an insertion hole, the insertion hole is funnel-shaped, the locking cavity is rugby ball-shaped, the shape of the locking cavity matches the shape of the top of the locking post, and the top of the locking post is inserted into the locking cavity;

[0014] The use of locking pins, locking brackets, latches, and locking slots enables the partition to be quickly locked to the chassis.

[0015] As a preferred technical solution for the chassis structure of a single crystal furnace, the chassis is provided with an insertion slot, an electrode is inserted into the insertion slot, an installation cylinder is sleeved on the outer side of the bottom of the electrode, the upper side of the electrode abuts against the second installation plate, the lower side of the electrode abuts against the first installation plate, the second installation plate and the first installation plate are connected by a connecting bolt, one end of the connecting bolt is threaded with a lock nut, and the installation cylinder is sandwiched between the first installation plate and the chassis.

[0016] The electrode is locked onto the chassis using mounting plate one, mounting plate two, connecting bolts, and mounting sleeve. At the same time, the mounting sleeve can control and reduce the portion of the electrode extending out of the furnace bottom. The inner ring is located in the inner circle, and the part outside the inner ring is the outer circle.

[0017] The beneficial effects of the single crystal furnace chassis structure of the present invention are as follows: by utilizing the partition components to form two independent water circuit systems, namely water channels and cooling components, the cooling needs of different areas of the furnace body are met respectively, and the temperature in different areas tends to be consistent, avoiding space waste and reducing energy waste. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 This is a side view cross-sectional structural diagram of the present invention;

[0021] Figure 3 This is a schematic diagram of the front structure of the partition of the present invention;

[0022] Figure 4 This is a cross-sectional structural diagram of the locking frame of the present invention;

[0023] Figure 5 For the present invention Figure 2 A magnified schematic diagram of part A in the middle section;

[0024] Figure 6 This is a schematic diagram of the front structure of the chassis of the present invention;

[0025] Figure 7 This is a diagram showing the positional relationship between the electrodes and the chassis of this invention.

[0026] Reference numerals: 1. Chassis; 2. Cooling tank; 3. Partition plate; 4. Connecting rib; 5. Support foot; 6. Locking groove; 601. Straight groove; 602. Locking cavity; 603. Insertion hole; 7. Mounting hole; 8. Inner ring; 9. Positioning groove; 10. Locking post; 11. Locking frame; 12. Locking groove; 13. Cooling component; 14. Ring frame one; 15. Ring frame two; 16. Mounting plate one; 17. Mounting plate two; 18. Connecting bolt; 19. Electrode; 20. Mounting cylinder. Detailed Implementation

[0027] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0028] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0029] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0030] Secondly, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include three-dimensional spatial dimensions of length, width, and depth.

[0031] like Figures 1-7 As shown, the present invention proposes a single crystal furnace chassis structure, including a chassis 1. A cooling groove 2 is provided on the front of the chassis 1. An array of partition members is provided on the inner side of the cooling groove 2. The centers of the partition members coincide. Each partition member is composed of two partitions 3. The centers of the two partitions 3 in the same group coincide. There is a gap between the two partitions 3 in the same group. The gap between the two partitions 3 is more than 1 cm.

[0032] The cooling tank 2 has an inner ring 8 in the middle, and an annular frame 14 is provided on the inner side of the inner ring 8. The chassis 1 has a plurality of locking grooves 12 recessed in it, and a locking post 10 is provided in the locking groove 12. The partition 3 has a plurality of locking frames 11. The locking grooves 12 match the locking frames 11. The top of the locking post 10 is provided with an elliptical seat, and the outer side of the elliptical seat is wrapped with rubber.

[0033] The ring frame 14 is provided with a honeycomb structure, which is composed of several hexagonal ring structures. The hexagonal ring structure is made up of short pipes of the same length spliced ​​together, and the short pipes are connected to their adjacent short pipes.

[0034] The partition 3 is an arc-shaped plate, and the distance between the partitions 3 on different partition components is more than 2 cm;

[0035] The liquid can flow through the channels separated by the partitions 3.

[0036] The cooling component 13 is provided with three annular frames 14 and several annular frames 2 15. The inner bottom wall of the cooling tank 2 is provided with three mounting holes 7, which correspond to the annular frames 14.

[0037] Installation hole 7 and ring frame 14 are reserved for the installation of subsequent equipment.

[0038] The bottom of the locking frame 11 is provided with a locking groove 6, which is inserted into the corresponding locking post 10. The locking groove 6 includes a straight groove 601, a locking cavity 602 and an insertion hole 603. The top of the straight groove 601 is provided with a locking cavity 602, and the bottom of the straight groove 601 is provided with an insertion hole 603. The insertion hole 603 is funnel-shaped, and the locking cavity 602 is rugby ball-shaped. The shape of the locking cavity 602 matches the shape of the top of the locking post 10, and the top of the locking post 10 is inserted into the locking cavity 602.

[0039] By utilizing the locking pin 10, locking bracket 11, locking groove 12 and locking groove 6, the partition 3 can be quickly locked to the chassis 1.

[0040] The chassis 1 has a slot for insertion, and an electrode 19 is inserted into the slot. A mounting sleeve 20 is fitted on the outer side of the bottom of the electrode 19. The upper side of the electrode 19 abuts against the second mounting plate 17, and the lower side of the electrode 19 abuts against the first mounting plate 16. The second mounting plate 17 and the first mounting plate 16 are connected by a connecting bolt 18. One end of the connecting bolt 18 is threaded with a lock nut. The mounting sleeve 20 is sandwiched between the first mounting plate 16 and the chassis 1.

[0041] The electrode 19 is locked onto the chassis 1 using mounting plate 16, mounting plate 17, connecting bolts 18 and mounting cylinder 20. At the same time, the mounting cylinder 20 can control and reduce the portion of the electrode 19 extending out of the furnace bottom. The inner ring 8 is located in the inner ring, and the portion outside the inner ring 8 is the outer ring.

[0042] The chassis 1 has a support foot 5 connected to each side by a connecting rib 4, and the cooling tank 2 can also have positioning slots 9 on both sides.

[0043] The specific implementation method is as follows: water channels are formed between the partitions, and liquid water is introduced into the water channels. The gap between the two partitions 3 of the same partition can be filled with liquid water. At the same time, liquid water is introduced into the cooling component 13 and discharged from the edge of the cooling component 13. By utilizing the water channels formed between the partitions and the cooling component 13, two independent water system systems are formed to meet the cooling needs of different areas of the furnace body, avoiding space waste and reducing energy waste.

[0044] By reducing the portion of electrode 19 extending beyond the furnace bottom, the direct contact area between this area and the water-cooling jacket is decreased, thereby reducing the heat loss from the insulation system due to water cooling. This change significantly improves the insulation performance inside the single crystal furnace, resulting in a more stable furnace temperature, which is beneficial for high-quality single crystal growth. Due to the reduced unnecessary heat loss, the insulation system can effectively maintain the temperature range, improving temperature control accuracy and stability. With the improved insulation system performance, the current power of the heating heaters required to maintain the furnace temperature can be correspondingly reduced. This change reduces energy consumption, achieving the goal of energy saving and consumption reduction.

[0045] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0046] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A single-crystal furnace chassis structure, characterized in that: Includes a chassis (1) and a cooling component (13). The chassis (1) has a cooling groove (2) on its front side. The cooling groove (2) has an array of partitions on its inner side. The partitions have overlapping centers. The partitions are composed of two partitions (3). The two partitions (3) in the same group have overlapping centers. The cooling tank (2) has an inner ring (8) in the middle, and an annular frame (14) is provided on the inner side of the inner ring (8). The chassis (1) has a plurality of locking grooves (12) recessed, and a locking post (10) is provided in the locking groove (12). The partition (3) has a plurality of locking frames (11). The locking groove (12) matches the locking frame (11). The top of the locking post (10) is provided with an elliptical seat, and the outer side of the elliptical seat is wrapped with rubber. The cooling component (13) is provided with three ring frame one (14) and several ring frame two (15). The ring frame one (14) is provided with a honeycomb structure, which is composed of several hexagonal ring structures. The hexagonal ring structure is spliced ​​together by short pipes of the same length, and the short pipes are connected to their adjacent short pipes.

2. The single crystal furnace chassis structure according to claim 1, characterized in that: The partition (3) is an arc-shaped plate, and the distance between the partitions (3) on different partition pieces is more than 2 cm.

3. The single crystal furnace chassis structure according to claim 1, characterized in that: The inner bottom wall of the cooling tank (2) has three mounting holes (7), which correspond to the ring frame (14).

4. The single crystal furnace chassis structure according to claim 1, characterized in that: The bottom of the locking frame (11) is provided with a locking groove (6), which is inserted into the corresponding locking post (10).

5. The single crystal furnace chassis structure according to claim 4, characterized in that: The locking groove (6) includes a straight groove (601), a locking cavity (602), and a plug-in hole (603). The top of the straight groove (601) is provided with a locking cavity (602), and the bottom of the straight groove (601) is provided with a plug-in hole (603). The plug-in hole (603) is trumpet-shaped, and the locking cavity (602) is rugby ball-shaped. The shape of the locking cavity (602) matches the shape of the top of the locking post (10), and the top of the locking post (10) is plugged into the locking cavity (602).

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