Visual equipment bearing frame for observation opening of crystal growth furnace

By designing a vision equipment carrier for the observation port of the crystal growth furnace, and using a rotating bracket and magnetic chassis to adjust the position of the camera and filter, the problem of camera position adjustment was solved, production efficiency and adaptability were improved, and material costs were reduced.

CN223837644UActive Publication Date: 2026-01-27ANHUI YIXIN SEMICON CO LTD
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Patent Information

Application Number
CN202423254812.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-28
Publication Date
2026-01-27
Estimated Expiration
2034-12-28

AI Technical Summary

Technical Problem

In the production of monocrystalline silicon, the different flow tubes and furnace depths of different types of monocrystalline silicon require frequent adjustments to the camera position to adapt to changes in image features. Existing technologies cannot effectively solve the problem of image blurring or the target object being out of the field of view under different conditions using fixed-focus lenses.

Method used

Design a vision equipment carrier for the observation port of a crystal growth furnace, including a rotating bracket, guide rails and a magnetic chassis. These components allow for the adjustment of the position and angle of the industrial camera and filter, enabling flexible loading and fixing to meet different production needs.

Benefits of technology

It achieves high stability and easy adjustment of industrial cameras and filters, reduces material costs, improves production efficiency and adaptability, and meets the needs of various single crystal production.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a visual equipment bearing frame for an observation port of a crystal growth furnace, which relates to the technical field of crystal growth furnace production and comprises a rotary support movably connected to the observation port of a flange, a bearing seat movably connected to the end of the rotary support, a guide rail fixedly connected to the bearing seat, and a guide rod movably connected to the guide rail. A first magnetic suction chassis and a second magnetic suction chassis are movably clamped in the guide rails, an industrial camera is arranged at the top end of the first magnetic suction chassis, and an optical filter is arranged at the top end of the second magnetic suction chassis. The device has the advantages that the inclination, the transverse distance and the longitudinal distance of the industrial camera or the optical filter can be freely adjusted according to production requirements, adjustment is easy and convenient, stability is high, disassembly and assembly are easy and convenient, production requirements are met, and production efficiency is improved.
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Description

Technical Field

[0001] This utility model relates to the field of crystal growth furnace production technology, and more specifically, to a visual equipment support frame for the observation port of a crystal growth furnace. Background Technology

[0002] In the process of monocrystalline silicon production, vision equipment needs to be installed at the flange observation port of the furnace to observe and acquire images of the scene inside the furnace. For most companies, the same furnace will always use a guide tube of the same diameter and the furnace depth is also a fixed depth, so the camera can be adjusted to a fixed position to work.

[0003] However, some companies are currently developing furnaces suitable for producing various types of single crystals. This includes not only the lattice form of the single crystal but also its size. This results in different flow guides and furnace depths being used in the same furnace for different types of products. This indirectly leads to variations in the image characteristics within the furnace, necessitating adjustments to the camera position to find the appropriate location for image acquisition. The main reason is that different flow guide sizes cause changes in the position and size of the flow guide obstructing the field of view in the image. Changes in furnace depth, especially with fixed focus (industrial cameras use fixed-focus lenses), will result in blurry images or objects not appearing in the field of view when captured at the previous camera height. Therefore, fixed-focus lenses must be manually adjusted to capture images with a suitable field of view, highlighting the urgent need for a visual equipment support frame for the observation port of crystal growth furnaces.

[0004] There are currently no effective solutions to the problems in the relevant technologies. Utility Model Content

[0005] In view of the problems in the related technologies, the purpose of this utility model is to propose a vision equipment support frame for the observation port of a crystal growth furnace, so as to overcome the above-mentioned technical problems existing in the existing related technologies.

[0006] The technical solution of this utility model is implemented as follows:

[0007] A visual equipment support frame for the observation port of a crystal growth furnace includes: a rotating bracket movably connected to the flange observation port; a support base movably connected to the end of the rotating bracket; a guide rail fixedly connected to the support base; and a first magnetic suction base and a second magnetic suction base movably engaged within the guide rail.

[0008] An industrial camera is mounted on the top of the first magnetic base, and a filter is mounted on the top of the second magnetic base.

[0009] Furthermore, the guide rail includes a transverse rail and a longitudinal rail, wherein the transverse rail and the longitudinal rail are integrally formed.

[0010] Furthermore, the transverse track and the longitudinal track are respectively provided with sliding grooves adapted to the first magnetic base and the second magnetic base.

[0011] Furthermore, the groove includes several sets of iron sheets arranged in an array.

[0012] Furthermore, the industrial camera and the filter are adapted to each other, and a gap is provided between the industrial camera and the filter.

[0013] Furthermore, the filter is located between the industrial camera and the flange observation port.

[0014] The beneficial effects of this utility model are:

[0015] This utility model pre-adjusts the guide rail to a suitable position according to the flange observation port through the bearing seat and rotating bracket, and fixes the industrial camera and filter respectively through the first magnetic base and the second magnetic base. The first magnetic base and the second magnetic base can be adjusted to move along the guide rail to a designated position to meet the loading requirements of the industrial camera and filter. It can not only adjust the tilt, lateral distance and longitudinal distance of the industrial camera or filter at will according to production needs, but also make the adjustment simple, have high stability, and be easy to disassemble and assemble, thus meeting production needs and improving production efficiency.

[0016] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a structural schematic diagram of a vision device support frame for the observation port of a crystal growth furnace according to an embodiment of the present invention;

[0020] Figure 2 This is a bottom view schematic diagram of a vision device support frame for the observation port of a crystal growth furnace according to an embodiment of the present invention.

[0021] In the picture:

[0022] 1. Support base; 2. Rotating bracket; 3. Guide rail; 4. First magnetic base; 5. Second magnetic base; 6. Industrial camera; 7. Filter; 8. Flange observation port;

[0023] 31. Horizontal track; 32. Longitudinal track; 33. Slide; 34. Iron sheet. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.

[0025] According to an embodiment of the present invention, a vision device support frame for the observation port of a crystal growth furnace is provided.

[0026] like Figures 1-2 As shown, a visual equipment support frame for the observation port of a crystal growth furnace includes: a rotating bracket 2 movably connected to the flange observation port 8, a support seat 1 movably connected to the end of the rotating bracket 2, a guide rail 3 fixedly connected to the support seat 1, and a first magnetic suction base 4 and a second magnetic suction base 5 movably engaged in the guide rail 3, wherein;

[0027] An industrial camera 6 is mounted on the top of the first magnetic base 4, and a filter 7 is mounted on the top of the second magnetic base 5.

[0028] The industrial camera 6 and the filter 7 are adapted to each other, and there is a gap between the industrial camera 6 and the filter 7.

[0029] The filter 7 is located between the industrial camera 6 and the flange observation port 8.

[0030] This technical solution pre-adjusts the guide rail 3 to a suitable position using the bearing seat 1 and rotating bracket 2 according to the flange observation port 8. The industrial camera 6 and filter 7 are fixed by the first magnetic base 4 and the second magnetic base 5 respectively. The first magnetic base 4 and the second magnetic base 5 are adjusted to move along the guide rail 3 to a designated position to meet the loading requirements of the industrial camera 6 and filter 7. It can not only adjust the tilt, lateral distance and longitudinal distance of the industrial camera 6 or filter 7 at will according to production needs, but also has simple adjustment, high stability, and easy disassembly and assembly, thus meeting production needs and improving production efficiency.

[0031] In addition, when applying the above-mentioned filter 7, the brightness inside the furnace is very high during production. A special coated filter is often used to filter the light because it is corrosion resistant and can adjust the light transmittance. Generally, indium gallium tin oxide (ITO) is used, but this material is expensive. Normally, a filter of the same size is directly installed on the flange observation port.

[0032] The present invention uses a second magnetic base 5 to assemble a filter 7 which moves along the guide rail 3 to a designated position. The position of the filter 7 can be adjusted according to the position of the industrial camera 6, saving material costs, while also having high flexibility and adaptability.

[0033] Specifically, in application, most medium and large enterprises start with white furnace bodies, and a coated filter the size of a flange window is relatively expensive. However, this invention can save a lot of material costs and is highly adjustable.

[0034] Additionally, the guide rail 3 includes a transverse rail 31 and a longitudinal rail 32, which are integrally formed. The transverse rail 31 and the longitudinal rail 32 are respectively provided with grooves 33 adapted to the first magnetic base 4 and the second magnetic base 5. Each groove 33 includes several arrayed iron sheets 34.

[0035] This technical solution uses a guide rail 3 with a transverse track 31 and a longitudinal track 32 integrally formed, which respectively allows the industrial camera 6 or the filter 7 to move to a designated position along the guide rail 3, and is fixed by the first magnetic base 4 or the second magnetic base 5 in conjunction with the iron sheet 34, so as to meet the actual production loading requirements and achieve high loading stability.

[0036] In summary, the following effects can be achieved by using the above-mentioned technical solution of this utility model: the guide rail 3 is pre-adjusted to a suitable position according to the flange observation port 8 through the bearing seat 1 and the rotating bracket 2, and the industrial camera 6 and the filter 7 are fixed by the first magnetic base 4 and the second magnetic base 5 respectively. The first magnetic base 4 and the second magnetic base 5 are adjusted to move along the guide rail 3 to a designated position to meet the loading requirements of the industrial camera 6 and the filter 7. Not only can the tilt, lateral distance and longitudinal distance of the industrial camera 6 or the filter 7 be adjusted at will according to production needs, but the adjustment is also simple, the stability is high, the disassembly and assembly are simple, the production needs are met, and the production efficiency is improved.

[0037] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A support frame for a vision device used at the observation port of a crystal growth furnace, characterized in that, include: A rotating bracket (2) is movably connected to the flange observation port (8). A bearing seat (1) is movably connected to the end of the rotating bracket (2). A guide rail (3) is fixedly connected to the bearing seat (1). A first magnetic suction base (4) and a second magnetic suction base (5) are movably engaged in the guide rail (3). An industrial camera (6) is mounted on the top of the first magnetic base (4), and a filter (7) is mounted on the top of the second magnetic base (5).

2. The visual equipment support frame for the observation port of a crystal growth furnace according to claim 1, characterized in that, The guide rail (3) includes a transverse rail (31) and a longitudinal rail (32), wherein the transverse rail (31) and the longitudinal rail (32) are integrally formed.

3. A visual equipment support frame for the observation port of a crystal growth furnace according to claim 2, characterized in that, The transverse track (31) and the longitudinal track (32) are respectively provided with grooves (33) adapted to the first magnetic base (4) and the second magnetic base (5).

4. A visual equipment support frame for the observation port of a crystal growth furnace according to claim 3, characterized in that, The groove (33) includes several sets of iron sheets (34) arranged in an array.

5. A visual equipment support frame for the observation port of a crystal growth furnace according to claim 1, characterized in that, The industrial camera (6) and the filter (7) are adapted to each other, and a gap is provided between the industrial camera (6) and the filter (7).

6. A visual equipment support frame for the observation port of a crystal growth furnace according to claim 5, characterized in that, The filter (7) is located between the industrial camera (6) and the flange observation port (8).