Diamond color center machining system

By using a laser beam splitting module and an integrated beam modulation, fluorescence detection, and laser intensity detection system, the problems of fiber damage and fluorescence mixing were solved, enabling efficient preparation and detection of NV color centers and improving the reliability and accuracy of the experiment.

CN223841576UActive Publication Date: 2026-01-27BEIJING UNIV OF POSTS & TELECOMM
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202423196380.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-24
Publication Date
2026-01-27
Estimated Expiration
2034-12-24

AI Technical Summary

Technical Problem

In existing technologies, damage caused by fiber optic connections and difficulties in adjusting optical paths affect the preparation quality and detection efficiency of NV color centers, and the mixing of fluorescence and laser in free space affects the detection effect.

Method used

A laser beam splitting module is used to split the laser into a processing laser and an intensity detection laser. Combined with a beam modulation system, a fluorescence detection system, and a laser intensity detection system, the target fluorescence and non-target light are processed separately, realizing the integrated preparation, detection, and characterization of NV color centers.

Benefits of technology

This improved the reliability and repeatability of NV color center preparation, avoided fiber damage and difficulties in optical path adjustment, enabled flexible optical path adjustment and precise laser control, and improved the accuracy and efficiency of the experiment.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223841576U_ABST
    Figure CN223841576U_ABST
Patent Text Reader

Abstract

The utility model relates to the technical field of laser processing, in particular to a diamond color center processing system. Comprising a laser beam splitting module, laser is split into processing laser and initial intensity detection laser, the processing laser is used for preparing the diamond NV color center, sample detection laser containing target fluorescence and intensity detection laser are obtained at the same time, the sample detection laser is subjected to fluorescence filtering to obtain the target fluorescence, then detection is conducted, and the preparation effect of the NV color center is obtained; the intensity detection laser performs fluorescence isolation to obtain light except target fluorescence, then detection is performed, whether the processing laser meets the requirement for NV color center preparation or not is judged, and the diamond color center processing system integrating NV color center preparation, detection and characterization is achieved. The wavelength of laser used by the diamond color center machining system and an optical element can be flexibly adjusted according to experimental requirements, and femtosecond laser precise micro-nano machining on the surface or the interior of diamond or other hard materials at normal temperature and normal pressure is achieved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model relates to the field of laser processing technology, and in particular to a diamond color center processing system. Background Technology

[0002] NV centers are point defects in diamond, formed by a nitrogen atom replacing a carbon atom in diamond and creating a vacancy in the vicinity. NV centers have high quantum yield and can be optically manipulated. Combined with the excellent chemical stability and biocompatibility of diamond itself, they have shown great potential in many cutting-edge fields such as quantum sensing, quantum computing, and high-resolution imaging.

[0003] Currently, optical fibers are mostly used for connection and installation in the preparation of NV color centers. However, optical fibers are easily damaged, such as physical damage caused by bending and stretching, and the influence of environmental factors such as humidity and temperature changes, which can lead to poor transmission quality and affect the preparation of NV color centers. Furthermore, connecting various components through optical fibers also increases the difficulty of changing or adjusting the optical path, which is not conducive to subsequent detection. Therefore, in order to avoid the use of optical fibers, it is proposed to use free-space propagating lasers for the preparation of NV color centers.

[0004] When a laser propagates through free space to diamond to prepare NV centers, the NV centers undergo electronic transitions and generate fluorescence. The generated fluorescence is used to detect the NV centers. However, the fluorescence generated by the electronic transitions can also mix with the laser through free space, affecting the detection and characterization of the NV centers. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a diamond color center processing system.

[0006] To achieve the above objectives, this utility model provides a diamond color center processing system, comprising:

[0007] Beam modulation system, fluorescence detection system, laser intensity detection system, diamond processing station;

[0008] The beam modulation system includes a laser emission module and a laser beam splitting module. The laser emission module provides laser light to the diamond color center processing system, and the laser beam splitting module splits the laser light to obtain a processing laser and an initial intensity detection laser. The processing laser is focused onto the diamond to be processed located at the diamond processing position to prepare diamond color centers and obtain a sample detection laser containing target fluorescence and an intensity detection laser. The sample detection laser is output to the fluorescence detection system, and the intensity detection laser is output to the laser intensity detection system.

[0009] The fluorescence detection system includes a filtering module, a fluorescence filtering module, and a first display module. The filtering module selects the sample detection laser and outputs it to the fluorescence filtering module. The fluorescence filtering module filters out non-target light from the selected sample detection laser to obtain target fluorescence and outputs it to the first display module for fluorescence signal detection and display.

[0010] The laser intensity detection system includes a fluorescence isolation module and a second display module; the fluorescence isolation module isolates the target fluorescence in the intensity detection laser to obtain light other than the target fluorescence and outputs it to the second display module for photoelectric conversion and display.

[0011] The laser emitting module, the laser beam splitting module, the diamond processing station, the filtering module, the fluorescence filtering module, and the first display module are arranged sequentially along the direction of the laser pulse beam output by the laser emitting module, and the fluorescence isolation module and the second display module are arranged sequentially along the direction of the intensity detection laser.

[0012] Optionally, the laser emitting module uses a picosecond laser.

[0013] Optionally, the laser emitted by the laser emission module has a bandwidth range of 10nm to 60nm and a frequency range of 82MHz to 86MHz.

[0014] Optionally, the laser beam splitting module includes a beam modulation unit and a spatial light modulator;

[0015] The beam modulation unit includes a first narrowband filter and a first 4-f system; the first narrowband filter selects the laser emitted by the laser emitting module, and the first 4-f system expands the selected laser beam to obtain an expanded initial laser beam; the spatial light modulator splits the expanded initial laser beam to obtain a processing laser beam and an intensity detection laser beam.

[0016] Optionally, the filtering module includes a broadband filter and a second narrowband filter, which select and transmit the sample detection laser within a specific frequency range after sample preparation.

[0017] Optionally, the fluorescence filtering module employs a first infinity conjugate objective lens, which includes a first objective lens and a first tube lens, to filter out non-target light in the sample detection laser and obtain target fluorescence.

[0018] Optionally, the fluorescence isolation module employs a second infinity conjugate objective lens, which includes a second objective lens and a second tube lens, for isolating fluorescence and adjusting laser intensity.

[0019] Optionally, the first display module uses an avalanche photodiode, and the second display module uses a charge-coupled device.

[0020] Optionally, the diamond processing station adopts a three-dimensional piezoelectric platform, the diamond to be processed is placed on the three-dimensional piezoelectric platform, and the processing laser is adjusted to be focused on the diamond to be processed using the three-dimensional piezoelectric platform.

[0021] Optionally, it also includes: a second 4-f system and a third 4-f system; wherein the second 4-f system is disposed between the spatial light modulator and the diamond processing position, and is used to reduce the processing laser beam; the third 4-f system is disposed between the spatial light modulator and the fluorescence isolation module, and is used to reduce the intensity detection laser beam.

[0022] In summary, the advantages and beneficial effects of this utility model are as follows:

[0023] This utility model provides a diamond color center processing system, comprising: a beam modulation system, a fluorescence detection system, a laser intensity detection system, and a diamond processing position; the beam modulation system includes a laser emission module and a laser beam splitting module; the laser emission module provides laser light to the diamond color center processing system, and the laser beam splitting module splits the laser light to obtain a processing laser and an intensity detection laser; the processing laser is focused onto the diamond to be processed located at the diamond processing position to prepare diamond color centers and obtain a sample detection laser containing target fluorescence and an intensity detection laser; wherein, the sample detection laser is output to the fluorescence detection system, and the intensity detection laser is output to the laser intensity detection system; the fluorescence detection system includes a filtering module, a fluorescence filtering module, and a first display module; the filtering module filters the sample... The detection laser is selected and output to the fluorescence filtering module. The fluorescence filtering module filters out non-target light in the selected sample detection laser to obtain target fluorescence, which is then output to the first display module for fluorescence signal detection and display. The laser intensity detection system includes a fluorescence isolation module and a second display module. The fluorescence isolation module isolates the target fluorescence in the intensity detection laser to obtain light other than the target fluorescence, which is then output to the second display module for photoelectric conversion and display. The laser emitting module, the laser beam splitting module, the diamond processing station, the filtering module, the fluorescence filtering module, and the first display module are arranged sequentially along the direction of the laser pulse beam output by the laser emitting module, and the fluorescence isolation module and the second display module are arranged sequentially along the direction of the intensity detection laser.

[0024] This application employs a laser beam splitting module to divide the laser output from the laser emission module into a processing laser and an initial intensity detection laser; wherein,

[0025] The processing laser is used to prepare diamond color centers, and at the same time, a sample detection laser containing target fluorescence is obtained after the diamond color centers are prepared. The target fluorescence is obtained by processing the sample detection laser. The fluorescence is collected by the fluorescence filtering module and the first display module, the fluorescence intensity change is recorded, and the intensity distribution of the target fluorescence is analyzed. The concentration and uniformity of the NV color centers can be determined, thereby obtaining the preparation effect of the NV color centers.

[0026] During the preparation of diamond NV centers, the NV centers undergo electronic transitions to generate fluorescence. This fluorescence (i.e., target fluorescence) mixes with the initial intensity detection laser in free space, forming the intensity detection laser containing the target fluorescence. To avoid the target fluorescence affecting the laser intensity detection, the laser intensity detection system isolates the target fluorescence from the intensity detection laser, obtaining light other than the target fluorescence. The laser power of the light obtained after removing the target fluorescence is detected and the data is recorded. By processing and analyzing the data, the laser power distribution and total power are evaluated to determine whether the processing laser meets the requirements for NV center preparation. Based on the evaluation results, the intensity of the processing laser is adjusted to ensure that the NV centers are fully excited without oversaturation or causing other undesirable phenomena, such as heating effects. Therefore, by detecting and analyzing the intensity detection laser, the intensity of the processing laser can be precisely controlled, improving the preparation effect of NV centers and enhancing the reliability and repeatability of the experiment.

[0027] Meanwhile, the laser beam splitting module makes it more flexible to change the optical path during the laser preparation process, avoiding the use of optical fibers in existing optical path preparation, thus avoiding problems such as damage to optical fibers or poor light transmission quality and inconvenience in optical path modification caused by optical fiber connection and installation.

[0028] By combining a beam modulation system, a fluorescence detection system, and a laser intensity detection system, a diamond color center processing system integrating the preparation, detection, and characterization of NV color centers has been realized. The wavelength of the laser and the optical components used in the diamond color center processing system can be flexibly adjusted according to experimental requirements, enabling femtosecond laser precision micro-nano processing of the surface or interior of diamond or other hard materials at room temperature and pressure. Attached Figure Description

[0029] Figure 1 A schematic diagram of the structure of a diamond color center processing system provided by this utility model;

[0030] Figure 2 This is a schematic diagram of the optical path of a diamond color center processing system provided by this utility model. Detailed Implementation

[0031] Currently, optical fibers are commonly used for the fabrication of NV centers (non-radioactive color centers). Optical fibers can effectively transmit light generated by lasers or other light sources to the region where the NV center is located. When the NV center is excited, it emits fluorescence, which can be collected by the optical fiber and guided to the detection equipment. Optical fibers provide an efficient optical path transmission solution. However, optical fibers are easily damaged. For example, physical damage during bending or stretching, as well as environmental factors such as humidity and temperature changes, can all lead to poor transmission quality and affect the fabrication of NV centers. Furthermore, connecting various components through optical fibers increases the difficulty of modifying or adjusting the optical path, which is not conducive to subsequent detection. Therefore, to improve the quality of NV center fabrication, this application provides a diamond center processing system.

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solution of this utility model will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0033] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0034] This utility model provides a diamond color center processing system, such as Figure 1 As shown, it includes:

[0035] Beam modulation system 10, fluorescence detection system 20, laser intensity detection system 30, diamond processing station 40;

[0036] The beam modulation system includes a laser emitting module 101 and a laser beam splitting module 102. The laser emitting module 101 provides laser light to the diamond color center processing system, and the laser beam splitting module 102 splits the laser light to obtain a processing laser and an initial intensity detection laser. The processing laser is focused onto the diamond to be processed at the diamond processing position to prepare diamond color centers and obtain a sample detection laser and an intensity detection laser containing target fluorescence. The sample detection laser is output to the fluorescence detection system 20, and the intensity detection laser is output to the laser intensity detection system 30.

[0037] The fluorescence detection system 20 includes a filtering module 201, a fluorescence filtering module 202, and a first display module 203. The filtering module 201 selects the sample detection laser and outputs it to the fluorescence filtering module 202. The fluorescence filtering module 202 filters out non-target light in the selected sample detection laser to obtain target fluorescence and outputs it to the first display module 203 for fluorescence signal detection and display.

[0038] The laser intensity detection system 30 includes a fluorescence isolation module 301 and a second display module 302; the fluorescence isolation module 301 isolates the target fluorescence in the intensity detection laser to obtain light other than the target fluorescence and outputs it to the second display module 302 for photoelectric conversion and display.

[0039] The laser emitting module 101, the laser beam splitting module 102, the diamond processing station 40, the filtering module 201, the fluorescence filtering module 202, and the first display module 203 are arranged sequentially along the direction of the laser pulse beam output by the laser emitting module 101, and the fluorescence isolation module 301 and the second display module 302 are arranged sequentially along the direction of the intensity detection laser.

[0040] Specifically, in this embodiment of the invention, the diamond color center processing system is used to prepare and characterize NV color centers in diamond.

[0041] In other embodiments, the diamond color center processing system is also used for precision micro / nano processing of the surface or interior of sapphire, quartz, or other suitable hard materials.

[0042] In this embodiment of the invention, the bandwidth of the laser output by the laser emitting module is 10nm~60nm, the wavelength of the laser output by the laser emitting module is 500nm~560nm, and the frequency range of the laser output by the laser emitting module is 82MHz~86MHz.

[0043] In this embodiment of the invention, the laser emission module uses a picosecond laser to provide ultra-short pulse width laser for the diamond color center processing system. The use of a shorter wavelength laser is to improve the processing resolution.

[0044] In other embodiments, the laser emission module selects a suitable laser or laser system based on the properties of the sample material (e.g., material bandgap, ablation threshold) and the requirements of the processing parameters. For example, it may use a mode-locked femtosecond laser system from Spectra-Physics, with a center wavelength of 500 nm, a continuously adjustable output bandwidth of 10 nm to 60 nm, and a repetition frequency of 84 MHz to 86 MHz.

[0045] Picosecond laser processing technology offers true three-dimensionality at room temperature and a wide range of processable materials. Using a picosecond laser to prepare NV centers of diamond in an atmospheric environment avoids the risks associated with fiber optic connections and installations (e.g., physical damage during bending and stretching, and environmental factors such as humidity and temperature changes), which can lead to poor optical path transmission quality and affect NV center preparation. It also avoids the increased difficulty of modifying or adjusting the optical path by connecting various components via fiber optics, hindering subsequent testing and further promoting the application of NV centers and wide bandgap materials in cutting-edge technology fields.

[0046] In this embodiment of the invention, the laser beam splitting module includes a beam modulation unit and a spatial light modulator;

[0047] The beam modulation unit selects and expands the laser emitted by the laser emission module to obtain an expanded initial laser; the spatial light modulator splits the expanded initial laser into a processing laser and an initial intensity detection laser.

[0048] In this embodiment of the invention, the beam modulation unit includes a first narrowband filter and a first 4-f system (not shown); the first narrowband filter selects the laser emitted by the laser emitting module, and the first 4-f system expands the laser selected by the first narrowband filter.

[0049] In this embodiment of the invention, the first narrowband filter is a 532nm narrowband filter that selects the laser emitted by the laser emitting module to obtain pure green light, which is used to excite the NV color center; the first 4-f system expands the obtained green light beam, thereby expanding the laser beam, improving the laser effect, and facilitating the subsequent beam splitting of the laser by the spatial light modulator.

[0050] In this embodiment of the invention, the spatial light modulator is a transmission-refractive phase spatial light modulator and the transmission-refractive ratio is set to 50:50 to obtain the corresponding processing laser and initial intensity detection laser.

[0051] In other embodiments, the range of the transmission-refraction ratio of the transmission-refraction type phase spatial light modulator is set according to actual needs.

[0052] To prevent the high-energy laser emitted by the picosecond laser from damaging the spatial light modulator, the power density of the laser output by the picosecond laser is calculated in advance to avoid damage to the spatial light modulator and ensure the integrity of the device.

[0053] The laser emitted by the laser emission module is split into two beams by the laser beam splitting module to obtain an initial intensity detection laser and a processing laser, wherein:

[0054] The processing laser is used to prepare NV centers in diamond, and a sample detection laser containing target fluorescence is obtained after the diamond color center preparation. The target fluorescence is obtained by processing the sample detection laser. The fluorescence is collected by the fluorescence filtering module and the first display module, the fluorescence intensity change is recorded, and the intensity distribution of the target fluorescence is analyzed. The concentration and uniformity of the NV center can be determined, thereby obtaining the preparation effect of the NV center.

[0055] During the preparation of diamond NV centers, the NV centers undergo electronic transitions to generate fluorescence. This fluorescence (i.e., target fluorescence) mixes with the initial intensity detection laser in free space, forming the intensity detection laser containing the target fluorescence. To avoid the influence of the target fluorescence on the laser intensity detection, the laser intensity detection system uses an appropriate filter to remove the target fluorescence, isolating the target fluorescence contained in the intensity detection laser. The light obtained after removing the target fluorescence is then subjected to laser power detection imaging and the data is recorded. By processing and analyzing the data, the laser power distribution and total power are evaluated, which determines whether the processing laser meets the requirements for NV center preparation. Based on the evaluation results, the intensity of the processing laser is adjusted to ensure that the NV centers are fully excited without oversaturation or causing other undesirable phenomena, such as heating effects. Therefore, by detecting and analyzing the intensity detection laser, the intensity of the processing laser can be precisely controlled, improving the preparation effect of NV centers and enhancing the reliability and repeatability of the experiment.

[0056] By combining a beam modulation system, a fluorescence detection system, and a laser intensity detection system, the diamond color center processing system simultaneously completes the preparation, detection, and characterization of diamond NV color centers. This achieves the integration of a single system for the preparation, detection, and characterization of diamond NV color centers, further promoting the application of wide-bandgap materials with NV color centers in cutting-edge technology fields. It also avoids the current use of optical fibers for connection and installation in laser preparation processes, thus avoiding problems such as fiber damage, poor light transmission quality, and difficulty in changing or adjusting the optical path, which can affect the preparation of NV color centers. The wavelength of the laser and optical components used in the diamond color center processing system can be flexibly adjusted according to experimental requirements, enabling femtosecond laser precision micro / nano processing of the surface or interior of diamond or other hard materials at room temperature and pressure.

[0057] In this embodiment of the invention, the filtering module includes a broadband filter and a second narrowband filter. The sample detection laser containing the target fluorescence obtained after preparing the NV color center is selected and transmitted within a specific frequency range through the broadband filter and the second narrowband filter. In conjunction with the subsequent fluorescence filtering module, non-target light in the sample detection laser is filtered out, thereby obtaining the target fluorescence, which facilitates the subsequent detection of the target fluorescence. Specifically, the broadband filter is a 600nm high-pass filter, and the second narrowband filter is an 800nm ​​low-pass filter.

[0058] In this embodiment of the invention, the first narrowband filter and the second narrowband filter are Lyot-type birefringent crystal tunable filters.

[0059] In this embodiment of the invention, the fluorescence filtering module employs a first infinity conjugate objective lens, which includes a first objective lens and a first tube lens. A fluorescence filter is added between the first objective lens and the first tube lens to filter out non-target light in the sample detection laser, thereby obtaining target fluorescence.

[0060] In this embodiment of the invention, the wavelength range of the target fluorescence is 630nm~800nm.

[0061] In this embodiment of the invention, the first objective lens is a light-sheet fluorescent objective lens, which not only makes the visual imaging background darker and the fluorescence brighter and clearer, but also makes the imaging effect clearer and sharper.

[0062] The magnification of the first infinity conjugate objective lens depends on the focal length of the first objective lens. By selecting a first objective lens with a suitable focal length, the magnification of the first infinity conjugate objective lens can be adjusted to meet different needs in the NV color center preparation process and obtain the best imaging effect.

[0063] The fluorescence filtering module employs a first infinity conjugate objective lens in conjunction with a fluorescence filter. This design removes non-target light, allowing only fluorescence emitted from the NV color center to pass through, thus acquiring the target fluorescence. This eliminates background noise and interference from non-target light, significantly improving image clarity and signal-to-noise ratio, enhancing image contrast, and making the acquired data more accurate and reliable. This improves experimental precision and ease of operation. This configuration allows for better evaluation of the quality and performance characteristics of NV color center preparation. Furthermore, the fluorescence filtering module's simple design allows for easy replacement of objectives or filters according to actual needs without recalibrating the entire optical path, greatly improving experimental efficiency.

[0064] Specifically, the non-target light in other bands of the sample detection laser is eliminated by the filtering module (the first infinity conjugate objective lens in conjunction with the fluorescence filter) to obtain pure target fluorescence, which facilitates the subsequent judgment of the preparation effect of the NV color center by the first display module.

[0065] In this embodiment of the invention, the first display module employs an avalanche photodiode (APD). Since the target fluorescence obtained through the fluorescence filtering module is a very weak fluorescence signal, the APD amplifies the fluorescence signal by applying a high reverse bias voltage and utilizing the ionization collision effect, i.e., avalanche breakdown. This enables the detection of the weak fluorescence signal emitted by the NV color center. The fluorescence signal is processed and recorded to evaluate the number, distribution, and optical properties of the NV color centers, thereby characterizing the effectiveness of the fabrication process. The bias voltage ranges from 100V to 200V.

[0066] In other embodiments, the first display module selects a suitable device or photoelectric conversion system based on the actual situation.

[0067] In this embodiment of the invention, the fluorescence blocking module employs a second infinity conjugate objective lens, which includes a second objective lens and a second tube lens. An appropriate optical filter, such as a short-pass filter or a band-stop filter, is added between the second objective lens and the second tube lens to block fluorescence and adjust laser intensity.

[0068] In this embodiment of the invention, the second objective lens is an ANDOR Zyla 5.5 SCOMS imaging camera.

[0069] The intensity detection laser is isolated from the target fluorescence by the second infinity conjugate objective lens. The light obtained after removing the target fluorescence is then used for laser power detection imaging and data recording. By processing and analyzing the data, the laser power distribution and total power are evaluated to determine whether the processing laser meets the requirements for NV center preparation. Based on the evaluation results, the intensity of the processing laser is adjusted to ensure that the NV centers are fully excited without oversaturation or causing other undesirable phenomena, such as heating effects. Therefore, by detecting and analyzing the intensity detection laser, the intensity of the processing laser can be precisely controlled, improving the preparation effect of NV centers and enhancing the reliability and repeatability of the experiment.

[0070] In this embodiment of the invention, the second display module employs a charge-coupled device (CCD).

[0071] In this embodiment of the invention, the diamond processing station adopts a three-dimensional piezoelectric platform, the sample to be processed (diamond) is located on the three-dimensional piezoelectric platform, and the processing laser is adjusted to be focused on the diamond to be processed by the three-dimensional piezoelectric platform to achieve ablation or modification of the diamond to be processed.

[0072] The three-dimensional piezoelectric platform can achieve a three-dimensional movement accuracy of 1nm, with a maximum movement of 100mm*100mm in the xy plane and a maximum movement of 20μm in the z direction, enabling the laser to be precisely focused on the preparation position of the sample to be processed.

[0073] In other embodiments, the diamond color center processing system further includes a second 4-f system and a third 4-f system; the second 4-f system is disposed between the spatial light modulator and the diamond processing position, and is used to reduce the processing laser beam; the third 4-f system is disposed between the spatial light modulator and the fluorescence isolation module, and is used to reduce the processing laser and the intensity detection laser beam to match the numerical aperture (NA) of the first and second objectives of the subsequent system, so as to make full use of the first and second objectives while avoiding excessive dissipation of laser energy. Specifically, the numerical aperture of the first and second objectives is 100.

[0074] In this embodiment of the invention, the optical path of the processing is as follows: Figure 2 As shown, the picosecond laser emits laser light that is selected by the first narrowband filter to obtain pure green light. The green light is then expanded by the first 4-f system (not shown). The expanded green light is then incident on the spatial light modulator, which generates processing laser and initial intensity detection laser according to the settings.

[0075] The processing laser is beam-constricted by a second 4-f system (not shown) and then output to the diamond to prepare NV centers, obtaining a sample detection laser containing target fluorescence after NV center preparation. The sample detection laser is sequentially passed through a broadband filter and a second narrowband filter for laser selection, and then passes through the first infinity conjugate objective lens equipped with a fluorescence filter to filter the fluorescence, obtaining the target fluorescence. The fluorescence intensity data is obtained through the APD. The initial intensity detection laser is beam-constricted by a third 4-f system (not shown) and then output to the second infinity conjugate objective lens to isolate the fluorescence, obtaining the remaining light other than the target fluorescence. The laser light signal is then converted into a digital signal by the CCD to generate an image. By combining the fluorescence intensity data obtained by the APD with the image obtained by the second display module, the preparation effect of the NV center is comprehensively evaluated.

[0076] Finally, it should be noted that any modification or equivalent substitution of some or all of the technical features made based on the technical solution of the present utility model device structure and the described embodiments, without departing from the corresponding technical solution of the present utility model, shall fall within the patent scope of the present utility model device structure and the described implementation.

Claims

1. A diamond color center processing system, characterized in that, include: Beam modulation system, fluorescence detection system, laser intensity detection system, diamond processing station; The beam modulation system includes a laser emission module and a laser beam splitting module. The laser emission module provides laser light to the diamond color center processing system, and the laser beam splitting module splits the laser light to obtain a processing laser and an initial intensity detection laser. The processing laser is focused onto the diamond to be processed at the diamond processing position to prepare diamond color centers and obtain a sample detection laser and an intensity detection laser containing target fluorescence. The sample detection laser is output to the fluorescence detection system, and the intensity detection laser is output to the laser intensity detection system. The fluorescence detection system includes a filtering module, a fluorescence filtering module, and a first display module. The filtering module selects the sample detection laser and outputs it to the fluorescence filtering module. The fluorescence filtering module filters out non-target light from the selected sample detection laser to obtain target fluorescence and outputs it to the first display module for fluorescence signal detection and display. The laser intensity detection system includes a fluorescence isolation module and a second display module; the fluorescence isolation module isolates the target fluorescence in the intensity detection laser to obtain light other than the target fluorescence and outputs it to the second display module for photoelectric conversion and display. The laser emitting module, the laser beam splitting module, the diamond processing station, the filtering module, the fluorescence filtering module, and the first display module are arranged sequentially along the direction of the laser pulse beam output by the laser emitting module, and the fluorescence isolation module and the second display module are arranged sequentially along the direction of the intensity detection laser.

2. The diamond color center processing system as described in claim 1, characterized in that, The laser emitting module uses a picosecond laser.

3. The diamond color center processing system as described in claim 1, characterized in that, The laser emitted by the laser emission module has a bandwidth range of 10nm to 60nm and a frequency range of 82MHz to 86MHz.

4. The diamond color center processing system as described in claim 1, characterized in that, The laser beam splitting module includes a beam modulation unit and a spatial light modulator; The beam modulation unit includes a first narrowband filter and a first 4-f system; the first narrowband filter selects the laser emitted by the laser emitting module, and the first 4-f system expands the selected laser beam to obtain an expanded initial laser beam; the spatial light modulator splits the expanded initial laser beam to obtain a processing laser beam and an intensity detection laser beam.

5. The diamond color center processing system as described in claim 1, characterized in that, The filtering module includes a broadband filter and a second narrowband filter, which select and transmit the sample detection laser within a specific frequency range after sample preparation.

6. The diamond color center processing system as described in claim 1, characterized in that, The fluorescence filtering module employs a first infinity conjugate objective lens, which includes a first objective lens and a first tube lens, to filter out non-target light in the sample detection laser and obtain target fluorescence.

7. The diamond color center processing system as described in claim 1, characterized in that, The fluorescence isolation module employs a second infinity conjugate objective lens, which includes a second objective lens and a second tube lens, used to isolate fluorescence and adjust laser intensity.

8. The diamond color center processing system as described in claim 1, characterized in that, The first display module uses an avalanche photodiode; the second display module uses a charge-coupled device.

9. A diamond color center processing system as described in claim 1, characterized in that, The diamond processing station employs a three-dimensional piezoelectric platform, on which the diamond to be processed is placed. The processing laser is focused onto the diamond using the three-dimensional piezoelectric platform.

10. A diamond color center processing system as described in claim 4, characterized in that, Also includes: A second 4-f system and a third 4-f system; the second 4-f system is disposed between the spatial light modulator and the diamond processing position, and is used to reduce the processing laser beam; the third 4-f system is disposed between the spatial light modulator and the fluorescence isolation module, and is used to reduce the intensity detection laser beam.