High-power microwave power supply

Abstract

The utility model relates to the field of microwave plasma, and discloses a high-power microwave power supply, which comprises a shell, a connecting pipe is fixedly connected to the inner bottom end of the shell, a microwave generating component is mounted on the top side of the connecting pipe, a junction box is fixedly connected to the top side of the microwave generating component, a connecting wire is arranged in the junction box, and the connecting wire is connected with the connecting pipe. The connecting wire penetrates through the left side of the outer wall of the junction box and is fixedly connected with a first transformer, and a cooling assembly is installed at the right end of the front side of the inner wall of the shell. According to the utility model, the device is cooled through the fan, the cooling channel and the cooling assembly, so that the effect of cooling the device is achieved, the stable operation of the device is ensured, the temperature of the microwave generation assembly is kept in a suitable range, the performance fluctuation caused by temperature fluctuation is greatly reduced, and the service life of the device is prolonged. The situation that electronic components in the equipment are overheated is effectively prevented, the aging process is slowed down, and therefore the service life of the equipment is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of microwave plasma, and in particular to a high-power microwave power supply. Background Technology

[0002] The design of this high-power microwave power supply system integrates several key technologies. These include using a transformer to convert the input voltage to the voltage required by the microwave generator, and a three-phase rectifier bridge to convert AC to DC for system use. To protect sensitive components in the circuit, a common-inductance resistor is integrated to prevent damage caused by sudden voltage or current changes. The control component acts as a circuit breaker, quickly cutting off power to protect the circuit in case of an anomaly. Operators can monitor the device's operating status and perform necessary controls through an intuitive control panel. After generating microwaves, the microwave generator emits them through a square transmitting tube, while detection equipment inside the tube monitors energy leakage to ensure operational safety and normal equipment operation. This integration of technologies enables the high-power microwave power supply system to operate efficiently, stably, and safely.

[0003] Although this device is frequently used in daily life, there are still some problems with the device itself. For example, existing technology may not be able to maintain a stable microwave frequency and amplitude under all conditions, especially in extreme environments or long-term operation. Environmental changes, equipment aging, and other factors may cause changes in microwave frequency and amplitude, and real-time adjustment of these changes may be very difficult. At the same time, some devices do not take into account heat dissipation, which may lead to prolonged high temperatures that accelerate the aging of electronic components and materials in the microwave generator, thereby damaging the device, shortening its service life, and further affecting the plasma characteristics in the MPCVD process, reducing the quality of the deposited material. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a high-power microwave power supply that can precisely adjust microwave power as needed, ensuring stable microwave frequency and amplitude to improve device safety and anti-interference capabilities, while also providing heat dissipation for the device.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A high-power microwave power supply includes a housing. A connecting pipe is fixedly connected to the bottom of the housing's interior. A microwave generating component is mounted on the top side of the connecting pipe. A junction box is fixedly connected to the top side of the microwave generating component. A connecting wire is installed inside the junction box, passing through the left side of the junction box's outer wall and fixedly connected to a transformer. A cooling component is mounted on the right front side of the housing's inner wall. The top right side of the cooling component is connected to the top rear side of the microwave generating component via a cooling pipe. The bottom right side of the microwave generating component is connected to the bottom rear side of the microwave generating component via a return pipe. A fan is mounted on the rear side of the housing's inner wall. A detection rod is fixedly connected to the bottom of the microwave generating component. A control panel is located on the left side of the top of the housing's outer wall. A detection device is mounted on the rear side.

[0007] Furthermore, the detection rod penetrates the top side of the outer wall of the connecting tube, and the detection rod is located inside the connecting tube.

[0008] Furthermore, a mounting plate is fixedly connected to the left side of the control panel, and a control plate is provided at the rear right side of the mounting plate.

[0009] Furthermore, multiple transformers are fixedly connected to the right side of the mounting plate, and all of the multiple transformers are located at the front end of the control board.

[0010] Furthermore, a three-phase rectifier bridge is fixedly connected to the right side of the mounting plate, and a control component is provided at the bottom of the three-phase rectifier bridge. The control component is fixedly connected to the mounting plate.

[0011] Furthermore, a common-mode inductor is installed at the bottom right side of the mounting plate, and the control component, the three-phase rectifier bridge, and the common-mode inductor are connected by a connecting wire.

[0012] Furthermore, a three-phase filter is installed on the front right side of the mounting plate.

[0013] Furthermore, the connecting pipe extends through the front side of the outer wall of the housing and is connected to the launch channel via a flange ring.

[0014] This utility model has the following beneficial effects:

[0015] In this invention, the device is cooled by a fan, a cooling channel, and a cooling component, thus achieving the effect of cooling the device and ensuring stable operation. At the same time, the temperature of the microwave generating component is kept within a suitable range, greatly reducing performance fluctuations caused by temperature fluctuations, effectively preventing overheating of the internal electronic components, slowing down the aging process, and extending the service life of the device.

[0016] In this invention, the transformer can accurately solve the problem of mismatch between the power system voltage and the device requirements. The three-phase rectifier bridge efficiently completes the conversion of AC to DC power, providing a stable and suitable form of power for the device, ensuring the normal operation of the device, laying the foundation for the realization of various subsequent functions, improving the overall reliability and stability of the device operation, reducing the risk of failure and downtime caused by power supply problems, and facilitating long-term stable industrial production or equipment use. Attached Figure Description

[0017] Figure 1 This is a perspective view of a high-power microwave power supply proposed in this utility model.

[0018] Figure 2 This is a schematic diagram of the cooling channel structure of a high-power microwave power supply proposed in this utility model.

[0019] Figure 3 This is a schematic diagram of the internal structure of a high-power microwave power supply proposed in this utility model.

[0020] Figure 4 This is a schematic diagram of the microwave generating component structure of a high-power microwave power supply proposed in this utility model.

[0021] Figure 5 This is a schematic diagram of the control component structure of a high-power microwave power supply proposed in this utility model.

[0022] Legend:

[0023] 1. Housing; 2. Transmission channel; 3. Control panel; 4. Control board; 5. Junction box; 6. Fan; 7. Detection equipment; 8. Cooling pipe; 9. Microwave generating component; 10. Detection rod; 11. Three-phase filter; 12. Transformer I; 13. Control components; 14. Three-phase rectifier bridge; 15. Return pipe; 16. Common mode inductor; 17. Transformer II; 18. Connecting pipe; 19. Flange ring; 20. Cooling component; 21. Mounting plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Reference Figure 2-4This utility model provides an embodiment of a high-power microwave power supply, including a housing 1. A connecting pipe 18 is fixedly connected to the bottom of the inner side of the housing 1. A microwave generating component 9 is installed on the top side of the connecting pipe 18. A junction box 5 is fixedly connected to the top side of the microwave generating component 9. A connecting wire is installed inside the junction box 5, passing through the left side of the outer wall of the junction box 5 and fixedly connected to a transformer 12. A cooling component 20 is installed on the front right side of the inner wall of the housing 1. A connection is established between the top right side of the cooling component 20 and the top rear side of the microwave generating component 9. Cooling pipe 8 is connected. The bottom right side of microwave generator 9 and the bottom rear side of microwave generator 9 are connected through return pipe 15. Fan 6 is installed on the rear side of inner wall of housing 1. Detection rod 10 is fixedly connected to the bottom of microwave generator 9. Control panel 3 is set on the left side of top side of outer wall of housing 1. Detection device 7 is installed on the rear side of 18. Detection rod 10 penetrates the top side of outer wall of connecting pipe 18. Detection rod 10 is located inside connecting pipe 18. Connecting pipe 18 penetrates the front side of outer wall of housing 1 and is connected to emission channel 2 through flange ring 19.

[0026] Specifically, during use, the voltage of transformer 12 is adjusted via control panel 3. After voltage adjustment, microwave generator 9 is activated to generate microwaves, which are then transmitted to connecting pipe 18. The microwaves are then transmitted through connecting pipe 18 and transmitting channel 2. Simultaneously, detection device 7 detects and prevents microwave leakage. After prolonged operation, the device inevitably generates heat. When the internal temperature becomes too high, detection rod 10 detects this and sends feedback to control panel 3, activating fan 6 and cooling component 20. Hot air is then introduced into cooling component 20 via cooling pipe 8 for cooling. After cooling, the air is returned to microwave generator 9 via return pipe 15, further cooling the device. This cooling effect ensures stable operation and maintains the temperature of microwave generator 9 within a suitable range, significantly reducing performance fluctuations caused by temperature fluctuations. It effectively prevents overheating of internal electronic components, slows down the aging process, and extends the device's lifespan.

[0027] Reference Figure 1 , Figure 3 and Figure 5A mounting plate 21 is fixedly connected to the left side of the control panel 3. A control board 4 is located at the rear right side of the mounting plate 21. Multiple transformers 17 are fixedly connected to the right side of the mounting plate 21. All transformers 17 are located at the front end of the control board 4. A three-phase rectifier bridge 14 is fixedly connected to the right side of the mounting plate 21. A control component 13 is located at the bottom of the three-phase rectifier bridge 14. The control component 13 is fixedly connected to the mounting plate 21. A common-mode inductor 16 is installed at the bottom right side of the mounting plate 21. The control component 13, the three-phase rectifier bridge 14, and the common-mode inductor 16 are connected by connecting wires. A three-phase filter 11 is installed at the front right side of the mounting plate 21.

[0028] Specifically, since the voltage provided by the power system often cannot directly match the operating requirements of the target device, transformer 17 plays a crucial role. Transformer 17 can accurately convert the input voltage into a specific voltage value that the device can use. This process effectively solves the voltage mismatch problem and lays the foundation for subsequent power conversion and utilization. After the voltage is adjusted by transformer 17, it enters the three-phase rectifier bridge 14, which can efficiently convert the input AC power into DC power, thus realizing the important transformation of power form from AC to DC to meet the device's internal DC power requirements. In the complex process of power conversion, sensitive components in the circuit face many risks. Common-mode inductor 16 plays a vital protective role here. Common-mode inductor 16 can sensitively sense changes in current in the circuit. By leveraging its own characteristics, the device can quickly adjust its resistance value, thereby limiting further increases in current. Simultaneously, the control component 13 plays an indispensable role in circuit protection. It monitors the circuit's operating status in real time, and if a short circuit, overload, or other dangerous situation occurs, the control component 13 will immediately disconnect the circuit connection, preventing the continued transmission of dangerous current, thus ensuring the safe and stable operation of the entire circuit. Notably, operators can fully control the device through the convenient control panel 3, which provides a stable and compatible power source, ensuring the device's normal operation and laying the foundation for subsequent functional implementation. This improves the overall reliability and stability of the device, reduces the risk of malfunctions and downtime due to power supply issues, and is beneficial for long-term stable industrial production or equipment use.

[0029] Working Principle: During operation, since the voltage provided by the power system often cannot directly match the operating requirements of the target device, transformer 17 plays a crucial role. Transformer 17 accurately converts the input voltage into a specific voltage value usable by the device, effectively solving the voltage mismatch problem and laying the foundation for subsequent power conversion and utilization. After adjustment by transformer 17, the voltage enters the three-phase rectifier bridge 14, which efficiently converts the input AC power into DC power, thus achieving a significant transformation of power form from AC to DC to meet the device's internal DC power requirements. During this complex power conversion process, sensitive components in the circuit face numerous risks. Common-mode inductor 16 plays a vital protective role here. Common-mode inductor 16 can sensitively sense changes in current in the circuit and, based on its characteristics, quickly adjusts its resistance value to limit further current increases. Simultaneously, control component 13 also plays an indispensable role in circuit protection, monitoring the circuit's operation in real time. In operation, if a short circuit, overload, or other dangerous situation occurs in the circuit, the control component 13 will immediately disconnect the circuit connection to prevent the continued transmission of dangerous current, thereby ensuring the safe and stable operation of the entire circuit. It is particularly worth mentioning that the operator can fully control the device through the convenient control panel 3. Then, the voltage of transformer 12 can be adjusted through the control panel 3. After the voltage adjustment is completed, the microwave generating component 9 is started, which generates microwaves and transmits them to the inside of the connecting pipe 18. The microwaves are then transmitted out through the connecting pipe 18 and the transmitting channel 2. At the same time, the detection device 7 will detect and prevent microwave leakage. After the device has been working for a long time, it will inevitably heat up inside. When the internal temperature of the device is too high, it will be detected by the detection rod 10 and fed back to the control panel 3. The fan 6 and the cooling component 20 can then be started, allowing hot air to enter the cooling component 20 through the cooling pipe 8 for cooling. After cooling is completed, the hot air is returned to the microwave generating component 9 through the return pipe 15 to cool the microwave generating component 9.

[0030] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A high-power microwave power supply, comprising a housing (1), characterized in that: A connecting pipe (18) is fixedly connected to the bottom of the inner wall of the outer shell (1). A microwave generating component (9) is installed on the top side of the connecting pipe (18). A junction box (5) is fixedly connected to the top side of the microwave generating component (9). A connecting wire is provided inside the junction box (5). The connecting wire passes through the left side of the outer wall of the junction box (5) and is fixedly connected to a transformer (12). A cooling component (20) is installed on the right side of the inner wall of the outer shell (1). The top right side of the cooling component (20) and the top rear side of the microwave generating component (9) are connected by a cooling pipe (8). The bottom right side of the microwave generating component (9) and the bottom rear side of the microwave generating component (9) are connected by a return pipe (15). A fan (6) is installed on the rear side of the inner wall of the outer shell (1). A detection rod (10) is fixedly connected to the bottom of the microwave generating component (9). A control panel (3) is provided on the left side of the top side of the outer wall of the outer shell (1). A detection device (7) is installed on the rear side of the (18).

2. The high-power microwave power supply according to claim 1, characterized in that: The detection rod (10) penetrates the top side of the outer wall of the connecting tube (18), and the detection rod (10) is located inside the connecting tube (18).

3. A high-power microwave power supply according to claim 1, characterized in that: The left side of the control panel (3) is fixedly connected to the mounting plate (21), and the right rear end of the mounting plate (21) is provided with the control plate (4).

4. A high-power microwave power supply according to claim 3, characterized in that: Multiple transformers (17) are fixedly connected to the right side of the mounting plate (21), and the multiple transformers (17) are all located at the front end of the control plate (4).

5. A high-power microwave power supply according to claim 4, characterized in that: A three-phase rectifier bridge (14) is fixedly connected to the right side of the mounting plate (21). A control component (13) is provided at the bottom of the three-phase rectifier bridge (14). The control component (13) is fixedly connected to the mounting plate (21).

6. A high-power microwave power supply according to claim 5, characterized in that: A common-mode inductor (16) is installed at the bottom right side of the mounting plate (21), and the control component (13), the three-phase rectifier bridge (14) and the common-mode inductor (16) are connected by a connecting line.

7. A high-power microwave power supply according to claim 5, characterized in that: A three-phase filter (11) is installed on the front right side of the mounting plate (21).

8. A high-power microwave power supply according to claim 1, characterized in that: The connecting pipe (18) passes through the front side of the outer wall of the outer shell (1) and is connected to the launch channel (2) through the flange ring (19).

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