Liquid filtering device

Abstract

A liquid filtering device comprises: a chamber for accommodating a liquid; the filtering unit is fixedly arranged in the cavity and is used for filtering liquid in the cavity; and the vibration unit is coupled with the cavity and is used for driving the cavity to vibrate, so that the bubbles mixed in the liquid escape from the liquid. By adopting the technical scheme, the liquid filtering effect can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of liquid filtering, especially to a liquid filtering device. BACKGROUND

[0002] In the semiconductor integrated circuit manufacturing process, a large number of chemicals are used, and the purity of the chemicals will have a crucial influence on the yield of the product. Therefore, the filtration of chemicals (generally referring to liquids) is an important link in the semiconductor integrated circuit manufacturing process.

[0003] However, when the filtering device is used to filter the liquid, the filtering effect is not good. Therefore, how to provide a technical scheme to filter the liquid and improve the liquid filtering effect has become a problem to be solved by the technical personnel in the field. SUMMARY

[0004] The technical problem solved by the utility model is to provide a liquid filtering device to improve the filtering effect.

[0005] In order to solve the above problems, the utility model embodiment provides a liquid filtering device, which comprises: a chamber for containing liquid; a filtering unit fixedly arranged in the chamber for filtering the liquid in the chamber; and a vibration unit coupled with the chamber for driving the chamber to vibrate so that the bubbles mixed in the liquid escape from the liquid.

[0006] Optionally, the vibration unit comprises: a fixing ring for fixing the chamber; and a patch type vibration motor attached to the fixing ring, wherein the patch type vibration motor drives the chamber to vibrate through the fixing ring.

[0007] Optionally, the liquid filtering device comprises: a support for supporting the chamber; and the vibration unit further comprises: an elastic member, one end of the elastic member is fixedly connected with the support, and the other end of the elastic member is fixedly connected with the fixing ring; and the vibration unit is arranged on the side wall of the chamber and close to the bottom of the chamber.

[0008] Optionally, the liquid filtering device further comprises: a bubble detection unit coupled with the side wall of the chamber for emitting a detection signal into the chamber to detect whether there are bubbles in the liquid in the chamber.

[0009] Optionally, the bubble detection unit comprises: a bubble detector arranged in and / or outside the chamber; and the bubble detector comprises one or more of an optical detector, an ultrasonic detector and a laser detector.

[0010] Optionally, the liquid filtration device further includes: a collection unit disposed along the path of transmission or reflection of the detection signal through the liquid in the chamber, for acquiring bubble information when the liquid in the chamber is detected by the bubble detection unit, the bubble information including: the number and size of the bubbles.

[0011] Optionally, the liquid filtration device further includes: a processing unit connected to the acquisition unit, used to determine whether the vibration unit needs to drive the chamber to vibrate based on the bubble information.

[0012] Optionally, the filtering unit includes: a filter element fixedly disposed within the chamber; the filter element having an annular columnar sidewall and a bottom fixedly connected to the annular columnar sidewall.

[0013] Optionally, the filter element satisfies one or more of the following: the filter element includes: a semi-permeable membrane; the bottom of the filter element is an outwardly convex curved surface.

[0014] Optionally, the chamber includes: an inlet connected to the chamber, through which the liquid enters the chamber; a first outlet connected to the filter element, through which the liquid filtered by the filter element flows to the outside of the filter unit; and a second outlet connected to the chamber, through which the liquid between the sidewall of the filter element and the sidewall of the chamber flows to the outside of the chamber.

[0015] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0016] The liquid filtration device in this embodiment of the present invention includes at least a chamber for containing liquid and a vibration unit. The vibration unit is coupled to the chamber, and the vibration unit drives the chamber to vibrate. The vibration of the chamber causes the liquid inside the chamber to vibrate, so that the gas mixed in the liquid inside the chamber escapes from the liquid, thereby improving the liquid filtration effect. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a liquid filtration device.

[0019] Figures 2 to 5 This is a schematic diagram of the structure of the liquid filtration device of this utility model. Detailed Implementation

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] In the liquid filtration process of existing semiconductor integrated circuit manufacturing, there are instances of ineffective liquid filtration. The following section will discuss... Figure 1 The reasons for poor liquid filtration effect were analyzed.

[0022] refer to Figure 1 This is a schematic diagram of a liquid filtration device.

[0023] The liquid filtration device includes: a filter dish 100 and a filter membrane 101 connected to the filter dish 100.

[0024] The liquid to be filtered (hereinafter referred to as "the liquid to be filtered") is located in the gap 104 between the inner wall 102 of the filter dish 100 and the outer wall 103 of the filter membrane, and the liquid filtered by the filter membrane 101 is located inside the filter membrane 101.

[0025] However, during the filtration of the liquid, air bubbles may be mixed into the liquid in the filter dish 100. The liquid in the filter dish 100 includes: the liquid to be filtered located between the gaps 104, and the filtered liquid located within the filter membrane 101; air bubbles 105 may be mixed into the liquid within the gaps 104, and / or air bubbles 106 may be mixed into the liquid within the filter membrane 101.

[0026] There are several possible ways in which air bubbles can be introduced into the liquid in the filter dish 100:

[0027] First, during the process of transferring the liquid to be filtered to the gap 104, air from the environment will mix into the liquid to be filtered, resulting in the presence of air bubbles 105 in the liquid to be filtered.

[0028] Second, after the filter device is used multiple times, the amount of liquid remaining in the filter dish 100 gradually increases, and more bubbles accumulate in the remaining liquid.

[0029] Third, the filter dish 100 and filter membrane 101 need to be cleaned periodically with the liquid to be filtered. During the cleaning process, air will mix into the liquid to be filtered used for cleaning, resulting in air bubbles in the liquid to be filtered used for cleaning. The liquid to be filtered used for cleaning will remain in the filter dish 100 and filter membrane 101.

[0030] Taking photoresist as an example, the adverse effects of air bubbles in the liquid are explained:

[0031] First, air bubbles will clog the pores of the filter membrane 101, reducing the efficiency and lifespan of the filter membrane 101.

[0032] Second, air bubbles can affect the flow rate and pressure of the photoresist, leading to unstable and uneven photoresist coating.

[0033] Third, air bubbles in the photoresist after coating can cause defects in semiconductor devices, such as open circuits.

[0034] In summary, such as Figure 1 The liquid filtration device shown has the problem of poor liquid filtration effect.

[0035] To address the aforementioned technical problems, this utility model provides a liquid filtration device that can improve the liquid filtration effect.

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0037] refer to Figures 2 to 5 This is a structural schematic diagram of the liquid filtration device of this utility model, wherein... Figure 2 This is a structural diagram showing the positional relationship between the chamber, the filter unit, and the vibration unit. Figure 3 This is a schematic diagram of the spatial structure of the filter element. Figure 4 This is a schematic diagram of the spatial structure of the fastener. Figure 5 This is a schematic diagram of the overall structure of the filtration device.

[0038] The liquid filtration device includes: a chamber 200 for containing liquid; a filtration unit 300 fixed in the chamber 200 for filtering the liquid located in the chamber 200; and a vibration unit 400 coupled to the chamber 200 for driving the chamber 200 to vibrate so that air bubbles mixed in the liquid escape from the liquid.

[0039] In the liquid filtration device of this utility model embodiment, the vibration unit 400 is coupled to the chamber 200. The vibration unit 400 drives the chamber 200 to vibrate, and the vibration of the chamber 200 drives the liquid in the chamber 200 to vibrate, so that the gas mixed in the liquid in the chamber 200 escapes from the liquid, thereby improving the liquid filtration effect.

[0040] Continue to refer to Figure 2 and Figure 5 The liquid filtration device may include a chamber 200 for containing liquid.

[0041] The chamber 200 can not only contain liquid, but also the filter unit 300.

[0042] The chamber 200 is made of materials including metal (such as stainless steel, aluminum, etc.) or antistatic plastic (such as polycarbonate, electro-polypropylene, acrylic, etc.). The chamber 200 has a ring-shaped cylindrical structure, which includes any of the following: a ring-shaped cylindrical structure, a ring-shaped elliptical cylindrical structure, a ring-shaped square cylindrical structure, etc. This application embodiment does not limit the material of the chamber 200 or the specific ring-shaped cylindrical structure; those skilled in the art can adjust the settings according to actual conditions. In this embodiment, the chamber 200 is made of plastic, and the chamber 200 has a ring-shaped cylindrical structure.

[0043] In this embodiment, the material of the chamber 200 is acrylic, which has transparent properties.

[0044] The chamber 200 includes an inner wall 201 and an outer wall 202.

[0045] Continue to refer to Figure 2 and Figure 3 The liquid filtration device may include a filtration unit 300.

[0046] The filtration unit 300 is fixedly disposed in the chamber 200 and is used to filter the liquid to be filtered located in the chamber 200.

[0047] The filtration unit 300 includes: a filter element 301 for filtering the liquid to be filtered, wherein the liquid to be filtered is filtered by the filter element 301 to form a filtered liquid, and the filter element 301 is also used to contain the filtered liquid.

[0048] The filter element 301 is fixedly disposed within the chamber 200, including: the filter element 301 is fixedly disposed on the inner side wall 201 of the chamber, or the filter element 301 is fixedly disposed on the top 203 of the chamber, or the filter element 301 is fixedly disposed on the bottom 204 of the chamber.

[0049] The filter unit 300 further includes bolts 306 and / or screws (not shown), the filter element 301 is fixed in the chamber 200 by bolts 306 and / or screws, and the filter element 301 is detachably fixed to the chamber 200.

[0050] In this embodiment, the filter element 301 is fixed to the top 203 of the chamber by the bolt 306, and there is a receiving space 205 between the outer wall 302 of the filter element and the inner wall 201 of the chamber; the receiving space 205 is used to receive the liquid to be filtered.

[0051] In this embodiment, the liquid contained in the containing space 205 is the liquid to be filtered, and the liquid contained in the filter element 301 is the filtered liquid. In other embodiments, the liquid contained in the containing space 205 can be the filtered liquid, and the liquid contained in the filter element 301 can be the liquid to be filtered.

[0052] The filter element 301 has an annular columnar sidewall and a bottom fixedly connected to the annular columnar sidewall. The filter element 301 satisfies one or more of the following: the filter element 301 includes a semi-permeable membrane; the bottom 308 of the filter element 301 is an outwardly convex curved surface 305.

[0053] In this embodiment, the filter element 301 is a semi-permeable membrane.

[0054] The semipermeable membrane is a type of membrane that selectively allows certain substances, such as water molecules and small ions, to pass through while restricting the passage of larger molecules or particles. The pore size of the semipermeable membrane determines its selectivity; membranes with smaller pore sizes can prevent larger molecules from passing through. The semipermeable membrane can be made of a variety of materials, including polymers, ceramics, or biomaterials.

[0055] The filter element 301 has an annular cylindrical structure, which includes any of the following: an annular cylindrical structure, an annular elliptical cylindrical structure, an annular square cylindrical structure, etc. This application embodiment does not limit the specific annular cylindrical structure of the filter element 301; those skilled in the art can adjust and set it according to actual conditions. In this embodiment, the filter element 301 has an annular cylindrical structure.

[0056] The filter element 301 has an annular columnar sidewall, including: an outer sidewall 302 and an inner sidewall 303.

[0057] The bottom of the filter element 301 is a flat surface, or the bottom of the filter element 301 is an outwardly convex curved surface 305.

[0058] Continue to refer to Figure 2 and Figure 3In this embodiment, the filter element 301 is composed of an annular cylindrical structure 307 and a bottom 308 connected to the inner wall (inner wall 303 of the filter element) and the outer wall (outer wall 302 of the filter element) of the annular cylindrical structure. The bottom 308 is an outwardly protruding curved surface 305.

[0059] The bottom 308 is an outwardly convex curved surface 305, which has the following beneficial effects: it can reduce the risk of air bubbles remaining on the lower surface of the bottom 308 of the filter element 301, and reduce the probability of air bubbles remaining on the lower surface of the bottom 308 of the filter element 301 entering the liquid to be filtered, thereby improving the liquid filtration effect.

[0060] Continue to refer to Figure 5 The liquid filtration device may include a support 600.

[0061] The bracket 600 is used to support the chamber 200.

[0062] The bracket 600 is made of metal (such as stainless steel, aluminum, etc.) or antistatic plastic (such as polycarbonate, electro-polypropylene, acrylic, etc.). In this embodiment, the bracket 600 is made of metal.

[0063] Continue to refer to Figure 2 and Figure 5 The liquid filtration device may include: a vibration unit 400.

[0064] The vibration unit 400 is coupled to the chamber 200 and is used to drive the chamber 200 to vibrate so that the bubbles mixed in the liquid can escape from the liquid.

[0065] The vibration direction of the chamber 200 includes: back-and-forth vibration along the direction Y parallel to the side wall of the chamber 200 and / or back-and-forth vibration along the direction X perpendicular to the side wall of the chamber 200.

[0066] The vibration unit 400 is disposed on the side wall of the chamber 200. In this embodiment, the vibration unit 400 is disposed on the outer side wall 202 of the chamber and near the bottom of the chamber 200, which has the following beneficial effects:

[0067] First, it can cause air bubbles in the liquid to be filtered, located near the bottom of the chamber 200, to move upward along the Y direction and merge with air bubbles in the liquid to be filtered in the moving direction. The merged air bubbles are larger, which increases the rate at which the air bubbles escape from the liquid to be filtered in the chamber 200, thereby improving the filtration effect of the liquid.

[0068] Secondly, it can also cause the air bubbles in the filtered liquid located near the bottom of the filter element 301 to move upward along the Y direction and merge with the air bubbles in the filtered liquid in the moving direction. The merged air bubbles are larger, which increases the rate at which the air bubbles escape from the filtered liquid inside the filter element 301, thereby improving the filtration effect of the liquid.

[0069] In other embodiments, the vibration unit 400 is located at any position on the outer sidewall 202 of the cavity.

[0070] Continue to refer to Figure 2 and Figure 4 The vibration unit 400 may include a fixing ring 401, which includes an inner wall 402 and an outer wall 403.

[0071] The fixing ring 401 is used to fix the chamber 200 and also to transmit the vibration provided by the vibration unit 400 to the liquid to be filtered and the filtered liquid.

[0072] In some embodiments, the shape of the fixing ring 401 includes an annular column structure, which includes any one of the following: an annular cylindrical structure, an annular elliptical column structure, an annular square column structure, etc.; in other embodiments, the shape of the fixing ring 401 includes a semi-annular column structure, which includes any one of the following: a semi-annular cylindrical structure, a semi-annular elliptical column structure, a semi-annular square column structure, etc.; the embodiments of this application do not limit the specific structure of the fixing ring 401, and those skilled in the art can adjust and set it according to the actual situation.

[0073] The fixing ring 401 is made of metal (such as stainless steel, aluminum, etc.) or antistatic plastic (such as polycarbonate, electro-polypropylene, acrylic, etc.).

[0074] In this embodiment, the fixing ring 401 is made of metal, which has a high vibration frequency and the following beneficial effects:

[0075] First, it is easy to transmit the vibration of the patch-type vibration motor 404 to the liquid to be filtered, which increases the rate at which bubbles escape from the liquid and improves the filtration effect of the liquid.

[0076] Secondly, it also makes it easier to transmit the vibration of the patch-type vibration motor 404 to the filtered liquid, increasing the rate at which bubbles escape from the filtered liquid and improving the filtration effect of the liquid.

[0077] Continue to refer to Figure 2 , Figure 4 and Figure 5In this embodiment, the fixing ring 401 is a semi-annular cylindrical structure, which has the following beneficial effects:

[0078] First, it facilitates the placement of the chamber 200 within the fixing ring 401 along the X or Y direction.

[0079] Secondly, it facilitates the removal of the chamber 200 from the fixing ring 401 along the X or Y direction.

[0080] Third, by placing the chamber 200 in the fixing ring 401 along the X direction and removing the chamber 200 from the fixing ring 401 along the X direction, the size of the bracket 600 along the Y direction can be reduced.

[0081] The inner diameter d2 of the fixing ring 401 is equal to the outer diameter d1 of the chamber 200, so that the inner sidewall 402 of the fixing ring is tightly attached to the outer sidewall 202 of the chamber, which has the following beneficial effects:

[0082] First, it is easy to transmit the vibration of the patch-type vibration motor 404 to the liquid to be filtered in the chamber 200, which increases the rate at which bubbles escape from the liquid to be filtered and improves the filtration effect of the liquid.

[0083] Secondly, it also facilitates the transmission of the vibration of the patch-type vibration motor 404 to the filtered liquid inside the filter element 301, increasing the rate at which bubbles escape from the filtered liquid and improving the filtration effect of the liquid.

[0084] Continue to refer to Figure 2 and Figure 5 The vibration unit 400 may include a patch-type vibration motor 404.

[0085] The patch-type vibration motor 404 is attached to the fixing ring 401. In this embodiment, the patch-type vibration motor 404 is attached to the outer wall 403 of the fixing ring.

[0086] The patch-type vibration motor 404 drives the chamber 200 to vibrate via the fixing ring 401. That is, the vibration of the patch-type vibration motor 404 drives the fixing ring 401 to vibrate, the vibration of the fixing ring 401 drives the chamber 200 to vibrate, the vibration of the chamber 200 drives the liquid to be filtered to vibrate, the vibration of the liquid to be filtered drives the filter element 301 to vibrate, and the vibration of the filter element 301 drives the filtered liquid to vibrate. This not only increases the rate at which bubbles escape from the liquid to be filtered, but also increases the rate at which bubbles escape from the filtered liquid, thereby improving the filtration effect of the liquid.

[0087] In this embodiment, the patch-type vibration motor is attached to the outer wall 403 of the fixing ring by adhesive and / or bolts.

[0088] In some embodiments, the patch-type vibration motor 404 may be attached to the side wall of the chamber 200 and / or the side wall of the filter element 301. It should be noted that being attached to the side wall of the chamber 200 includes being attached to the inner side wall 201 of the chamber and / or being attached to the outer side wall 202 of the chamber, and being attached to the side wall of the filter element 301 includes being attached to the inner side wall 303 of the filter element and / or being attached to the outer side wall 302 of the filter element.

[0089] In other embodiments, the patch-type vibration motor 404 may be attached to the bottom and / or the top of the chamber 200. It should be noted that being attached to the bottom of the chamber 200 includes being attached to the bottom of the chamber 200 and located inside the chamber 200 and / or being attached to the bottom of the chamber 200 and located outside the chamber 200, and being attached to the top of the chamber 200 includes being attached to the top of the chamber 200 and located inside the chamber 200 and / or being attached to the top of the chamber 200 and located outside the chamber 200.

[0090] In other embodiments, the patch-type vibration motor 404 may be attached to the bottom and / or the top of the filter element 301. It should be noted that being attached to the bottom of the filter element 301 includes being attached to the bottom of the filter element 301 and located inside the filter element 301 and / or being attached to the bottom of the filter element 301 and located outside the filter element 301, and being attached to the top of the filter element 301 includes being attached to the top of the filter element 301 and located inside the filter element 301 and / or being attached to the top of the filter element 301 and located outside the filter element 301.

[0091] The position and number of the patch-type vibration motors 404 attached to the filter device can be selected according to actual needs.

[0092] The structure of the patch-type vibration motor 404 mainly includes: a rotor (eccentric wheel): typically composed of a semi-circular or irregularly shaped metal block, mounted off-center from the central axis. When the motor rotates, the rotation of the eccentric wheel generates an unbalanced torque, thus causing vibration; a stator (coil and magnet): a set of wire coils wound on the stator frame, which generates a magnetic field when current passes through; the magnetic field generated by the magnet and the coil interacts to drive the rotor to rotate; bearings (or support structures): used to support the rotor and allow it to rotate freely while maintaining the stability of the rotor; and a housing: protecting all internal components and providing a connection interface with the processing unit 505, typically made of plastic or metal.

[0093] The working principle of the patch-type vibration motor 404 is as follows:

[0094] When current passes through the stator coil, the coil generates a magnetic field. This magnetic field interacts with the magnets on the stator to create a driving force, causing the rotor (eccentric wheel) to rotate. Since the center of gravity of the eccentric wheel is not at the center of rotation, centrifugal force is generated during rotation, which causes the patch-type vibration motor 404 to vibrate. By adjusting the magnitude and frequency of the input current, the intensity and frequency of the vibration can be controlled.

[0095] The vibration unit 400 is disposed on the side wall of the chamber 200 and close to the bottom of the chamber 200. The vibration unit 400 is coupled to the chamber 200. In this embodiment, the fixing ring 401 in the vibration unit 400 is disposed on the outer side wall 202 of the chamber and coupled to the chamber 200, and the fixing ring 401 is close to the bottom of the chamber 200.

[0096] Continue to refer to Figure 5 The vibration unit 400 may include an elastic element 405.

[0097] One end of the elastic element 405 is fixedly connected to the bracket 600, and the other end of the elastic element 405 is fixedly connected to the fixing ring 401. In this embodiment, one end of the elastic element 405 is fixedly connected to the bracket 600 by welding and / or bolts (not shown), and the other end of the elastic element 405 is fixedly connected to the fixing ring 401 by welding and / or bolts (not shown). In other embodiments, the bracket 600, the elastic element 405, and the fixing ring 401 are integrally formed.

[0098] The elastic element 405 has the following beneficial effects:

[0099] First, the chamber 200 is fixed on the bracket 600.

[0100] Secondly, the patch-type vibration motor 404 facilitates the vibration of the chamber 200, the liquid to be filtered, the filter element 301, and the filtered liquid, thereby improving the filtration effect of the liquid.

[0101] When the patch-type vibration motor 404 vibrates, it also drives the elastic element 405 to vibrate together. This can reduce the probability that the vibration amplitude of the chamber 200 will be reduced due to the influence of the elastic element 405. For example, if the elastic element 405 does not have vibration characteristics or has a small vibration amplitude, the vibration amplitude of the chamber 200 will be reduced due to the influence of the elastic element 405, which does not have vibration characteristics or has a small vibration amplitude.

[0102] The elastic element 405 includes a metal elastic element 405 or a plastic elastic element 405. The material of the metal elastic element 405 includes one or more of copper, iron, steel, and aluminum; the material of the plastic elastic element 405 includes one or more of nylon, polyurethane, and polyoxymethylene. In this embodiment, the elastic element 405 is a metal elastic element 405 made of copper.

[0103] Continue to refer to Figure 5 The bracket 600 may include a liftable tray 601. When the liquid filtration device is used for filtration, the tray rises and adsorbs the chamber 200, assisting the elastic element 405 and the fixing ring 401 in fixing the chamber 200. Before the patch-type vibration motor 404 drives the chamber 200 to vibrate, the tray releases the chamber 200 and descends, separating from the chamber 200.

[0104] In this embodiment, the liftable tray 601 and the bracket 600 are connected by a lifter.

[0105] The principle by which the vibration unit 400 causes bubbles mixed in the liquid to escape from the liquid mainly includes the following aspects: First, the buoyancy of the bubbles; bubbles in the liquid are subject to buoyancy and will move upward. By applying vibration to the liquid in the chamber 200 through the vibration unit 400, the fluidity of the liquid can be enhanced, causing the bubbles to rise to the liquid surface more quickly. Second, the bursting of bubbles; vibration can cause changes in the shape and size of bubbles. When bubbles are subjected to sufficient vibration, they may burst or merge, thereby reducing the number of bubbles in the liquid, especially under high-frequency vibration, small bubbles are more likely to burst. Third, the flow of the liquid; vibration causes the liquid in the chamber 200 to flow, increasing the internal flow velocity of the liquid, which can accelerate the movement and aggregation of bubbles. The stronger the fluidity of the liquid, the easier it is for bubbles to be brought to the surface. Fourth, the merging of bubbles; vibration can also cause small bubbles to merge into larger bubbles. Larger bubbles rise faster and are therefore easier to be expelled from the liquid.

[0106] Continue to refer to Figure 2 and Figure 5 The liquid filtration device may include a bubble detection unit 503.

[0107] The bubble detection unit 503 is used to transmit a detection signal into the chamber 200 to detect whether there are bubbles in the liquid in the chamber 200, that is, to detect whether there are bubbles 500 in the liquid to be filtered and whether there are bubbles 501 in the filtered liquid.

[0108] The bubble detection unit 503 includes: a bubble detector (not shown).

[0109] The bubble detection unit 503 is coupled to the side wall of the chamber 200, that is, the bubble detection unit 503 is placed inside and / or outside the chamber 200. In this embodiment, the bubble detection unit 503 is placed outside the chamber 200. The specific positional relationship between the bubble detection unit 503 and the outside of the chamber 200 can be set according to actual needs.

[0110] The bubble detector includes one or more of the following: an optical detector, an ultrasonic detector, and a laser detector. In this embodiment, the bubble detector is an optical detector.

[0111] The optical detector works on the following principle: it uses the difference in the propagation characteristics of light in liquids and bubbles to detect bubbles. When light passes through bubbles in a liquid, phenomena such as refraction, reflection, and scattering occur. The presence of bubbles is determined by detecting changes in these light signals.

[0112] The optical detector has the following advantages:

[0113] First, it has high sensitivity and resolution, enabling it to detect tiny bubbles.

[0114] Second, it is effective in detecting air bubbles in transparent or semi-transparent liquids.

[0115] Third, it is a non-contact detection method that will not interfere with the liquid.

[0116] In this embodiment, the bubble detector includes a transmitter (not shown) and an alarm (not shown).

[0117] The bubble detector transmits a detection signal to the liquid inside the chamber 200 via the transmitter.

[0118] The liquid in the chamber 200 includes: the liquid to be filtered and the filtered liquid.

[0119] The transmitter can emit detection signals including: optical signals, infrared rays, microwaves, X-rays, etc. In this embodiment, the transmitter is equipped with a light source (not shown), and the detection signal emitted by the transmitter through the light source is an optical signal.

[0120] The bubble detection unit 503 includes: a detection power supply (not shown), connected to the light source, to provide power to the light source.

[0121] The alarm is used to trigger an alarm when the bubble detector detects the presence of bubbles in the liquid within the chamber 200 or when the bubble size exceeds a preset specification.

[0122] Continue to refer to Figure 5 The liquid filtration device may include: a collection unit 504.

[0123] The acquisition unit 504 is used to acquire bubble information when the liquid in the chamber 200 is detected by the bubble detection unit 503. The bubble information includes the number and size of the bubbles.

[0124] The acquisition unit 504 is arranged along the path of the detection signal transmitted or reflected by the liquid in the chamber 200. In this embodiment, the acquisition unit 504 is arranged along the path of the detection signal reflected by the liquid in the chamber 200.

[0125] The acquisition unit 504 includes: a receiver (not shown), a graphics generator (not shown), and a display.

[0126] The receiver receives the detection signal emitted by the transmitter of the bubble detection unit 503 into the chamber 200, and the reflected signal after being reflected by the liquid in the chamber 200.

[0127] In this embodiment, the bubble detection unit 503 emits a detection signal to the bubble 500 along path AB, the bubble 500 reflects the detection signal to the acquisition unit 504 along path BC, the bubble detection unit 503 emits a detection signal to the bubble 501 along path DE, and the bubble 501 reflects the detection signal to the acquisition unit 504 along path EF.

[0128] The graphics generator clearly displays the bubble information in the liquid within the chamber 200 on the display screen based on the reflected signal.

[0129] Continue to refer to Figure 5 The liquid filtration device may include a processing unit 505.

[0130] The processing unit 505 is used to determine, based on the bubble information, whether the vibration unit 400 needs to drive the chamber 200 to vibrate.

[0131] In this embodiment, the processing unit 505 is connected to the acquisition unit 504 via optical fiber 506 to achieve fast data transmission.

[0132] In this embodiment, the processing unit 505 includes a data processor and memory.

[0133] The data processor is used to process the bubble information collected by the acquisition unit 504; the memory is used to store data during the data processing to prevent data loss.

[0134] The processing unit 505, based on the bubble information acquired by the acquisition unit 504, statistically summarizes the size and / or number of bubbles in the liquid within the chamber 200.

[0135] The processing unit 505 further includes a judgment subunit (not shown), used to judge and summarize whether the size and / or number of bubbles in the liquid in the chamber 200 are within a preset specification. If the size and / or number of bubbles are within the preset specification, the processing unit 505 determines that the vibration unit 400 does not need to drive the chamber 200 to vibrate. If the size and / or number of bubbles exceed the preset specification, the processing unit 505 determines that the vibration unit 400 needs to drive the chamber 200 to vibrate, thereby increasing the rate at which bubbles in the liquid in the chamber 200 escape from the liquid and improving the filtration effect.

[0136] The processing unit 505 may include:

[0137] The power source provides the power for the vibration of the attached vibration motor.

[0138] The circuit board is used to control the vibration amplitude and frequency of the patch-type vibration motor 404.

[0139] A connecting wire connects the circuit board to the surface mount vibration motor 404.

[0140] Continue to refer to Figure 2 and Figure 5 The chamber 200 may include:

[0141] The inlet 700 is connected to the chamber 200, and the liquid enters the chamber 200 through the inlet 700.

[0142] The shape of the inlet 700 includes one or more of the following: circle, square, triangle and polygon. In this embodiment, the shape of the inlet 700 is circle.

[0143] In this embodiment, the inlet 700 and the chamber 200 are integrally formed.

[0144] The liquid filtration device may include:

[0145] The first storage tank (not shown) is used to store the liquid to be filtered.

[0146] A first liquid pump (not shown) is mounted on the first storage tank.

[0147] In this embodiment, the inlet 700 is connected to the inlet pipe (not shown), the inlet pipe is connected to the first liquid pump, the first liquid pump is connected to the first storage tank, and the first liquid pump draws the liquid to be filtered in the first storage tank sequentially through the first storage tank, the first liquid pump, the inlet pipe and the inlet 700 into the accommodating space 205 between the side wall of the chamber 200 and the filter element 301.

[0148] In other embodiments, the inlet 700 is connected to the first liquid pump, the first liquid pump is connected to the inlet pipe, the inlet pipe is connected to the first storage tank, and the first liquid pump draws the liquid to be filtered from the first storage tank through the first storage tank, the inlet pipe, the first liquid pump and the inlet 700 in sequence into the accommodating space 205 between the side wall of the chamber 200 and the filter element 301.

[0149] Continue to refer to Figure 2 The chamber 200 may include:

[0150] The first liquid outlet 701 is connected to the filter element 301, and the liquid filtered by the filter element 301 flows out of the filter unit 300 through the first liquid outlet 701.

[0151] The shape of the first liquid outlet 701 includes one or more of the following: circle, square, triangle and polygon. In this embodiment, the shape of the first liquid outlet 701 is circle.

[0152] In this embodiment, the first liquid outlet 701 is integrally formed with the chamber 200.

[0153] The liquid filtration device may include:

[0154] The second storage tank (not shown) is used to store the liquid filtered by the filter element 301.

[0155] A second pump (not shown) is mounted on the second storage tank.

[0156] In this embodiment, the first liquid outlet 701 is connected to the inlet pipe (not shown), the inlet pipe is connected to the second liquid pump, the second liquid pump is connected to the second storage tank, and the second liquid pump draws the liquid filtered in the filter element 301 into the second storage tank in sequence through the filter element 301, the first liquid outlet 701, the inlet pipe and the second liquid pump.

[0157] In other embodiments, the first liquid outlet 701 is connected to the second liquid pump, the second liquid pump is connected to the inlet pipe (not shown), the inlet pipe is connected to the second storage tank, and the second liquid pump draws the liquid filtered in the filter element 301 sequentially through the filter element 301, the first liquid outlet 701, the second liquid pump and the inlet pipe into the second storage tank.

[0158] Continue to refer to Figure 2 The chamber 200 may include:

[0159] The second liquid outlet 702 is connected to the chamber 200, and the liquid between the side wall of the filter element 301 and the side wall of the chamber 200 flows out of the chamber 200 through the second liquid outlet 702.

[0160] The shape of the second liquid outlet 702 includes one or more of the following: circle, square, triangle and polygon. In this embodiment, the shape of the second liquid outlet 702 is circle.

[0161] In this embodiment, the second liquid outlet 702 is integrally formed with the chamber 200.

[0162] The liquid filtration device may include:

[0163] A third storage tank (not shown) is used to store the liquid between the sidewall of the filter element 301 and the sidewall of the chamber 200.

[0164] A third pump (not shown) is installed on the third storage tank.

[0165] In this embodiment, the second liquid outlet 702 is connected to the second liquid outlet pipe (not shown), the second liquid outlet pipe is connected to the third liquid pump, the third liquid pump is connected to the third storage tank, and the third liquid pump draws the liquid between the side wall of the filter element 301 and the side wall of the chamber 200 sequentially through the chamber 200, the second liquid outlet 702, the second liquid outlet pipe and the third liquid pump into the third storage tank.

[0166] In other embodiments, the second liquid outlet 702 is connected to the third liquid pump, the third liquid pump is connected to the second liquid outlet pipe, the second liquid outlet pipe is connected to the third storage pipe, and the third liquid pump draws the liquid between the side wall of the filter element 301 and the side wall of the chamber 200 sequentially through the chamber 200, the second liquid outlet 702, the third liquid pump, and the second liquid outlet pipe into the third storage tank.

[0167] In this embodiment, the liquid between the sidewall of the filter element 301 and the sidewall of the chamber 200 is the liquid to be filtered. After being filtered by the filter element 301, the liquid to be filtered becomes the filtered liquid, which is located in the filter element 301.

[0168] In other embodiments, the liquid in the filter element 301 is the liquid to be filtered. After being filtered by the filter element 301, the liquid to be filtered becomes the filtered liquid, which is located in the receiving space 205 between the side wall of the filter element 301 and the side wall of the chamber 200. As for how the liquid to be filtered enters the filter element 301 and how the filtered liquid is removed from between the side wall of the filter element 301 and the side wall of the chamber 200, those skilled in the art can deduce this by referring to the foregoing embodiments, and it will not be elaborated here.

[0169] It should be noted that the liquid between the sidewall of the filter element 301 and the sidewall of the chamber 200 includes one or more of the following: the liquid to be filtered, the waste liquid after filtration, and the liquid used to clean the inside of the chamber 200 and the inside of the filter element 301.

[0170] Explanation of the filtered waste liquid: After the liquid to be filtered enters the accommodating space 205 between the outer wall 302 of the filter element and the inner wall 201 of the chamber, if air bubbles or other impurities are mixed in the liquid to be filtered, the liquid to be filtered mixed with air bubbles or other impurities does not meet the requirements of the liquid to be filtered, and thus becomes filtered waste liquid, for example, if there are many air bubbles, the air bubbles are large, or the impurity concentration is high.

[0171] In summary, the liquid filtration device of this application can improve the liquid filtration effect.

[0172] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature.

[0173] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0174] It should be understood that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this article indicates that the preceding and following related objects have an "or" relationship.

[0175] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make possible changes and modifications to the technical solution of the present invention by using the methods and techniques disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims

1. A liquid filtration device, characterized by, The application relates to a liquid filtering device. The device comprises: a chamber for containing liquid; a filtering unit fixed in the chamber for filtering the liquid in the chamber; 2. The liquid filtration device of claim 1, wherein, a vibration unit coupled with the chamber for driving the chamber to vibrate so that the bubbles mixed in the liquid escape from the liquid. The vibration unit comprises: a fixing ring for fixing the chamber; 3. The liquid filtration device of claim 2, wherein, a patch vibration motor attached to the fixing ring, which drives the chamber to vibrate through the fixing ring. The device comprises: a support for supporting the chamber; The vibration unit further comprises: a resilient member, one end of which is fixed to the support and the other end of which is fixed to the fixing ring; 4. The liquid filtration device of claim 1, wherein, The vibration unit is arranged on the side wall of the chamber and close to the bottom of the chamber. The device further comprises:

5. The liquid filtration device of claim 4, wherein, a bubble detection unit coupled with the side wall of the chamber for emitting a detection signal into the chamber to detect whether there are bubbles in the liquid in the chamber. The bubble detection unit comprises a bubble detector arranged in and / or outside the chamber.

6. The liquid filtration device of claim 4, wherein, The bubble detector comprises one or more of an optical detector, an ultrasonic detector and a laser detector. The device further comprises:

7. The liquid filtration device of claim 6, wherein, a collection unit arranged along the path of transmission or reflection of the detection signal by the liquid in the chamber for collecting bubble information when the liquid in the chamber is detected by the bubble detection unit, wherein the bubble information comprises the number and size of the bubbles. The device further comprises:

8. The liquid filtration device of claim 1, wherein, a processing unit connected with the collection unit for determining whether the vibration unit needs to drive the chamber to vibrate according to the bubble information. The filtering unit comprises a filtering member fixed in the chamber.

9. The liquid filtration device of claim 8, wherein, The filtering member has an annular cylindrical side wall and a bottom fixedly connected with the annular cylindrical side wall. The filtering member satisfies one or more of the following conditions: The filtering member comprises a semi-permeable membrane.

10. The liquid filtration device of claim 8, wherein, The bottom of the filtering member is an outwardly convex curved surface. The chamber comprises: an inlet connected with the chamber, through which the liquid enters the chamber; a first liquid outlet connected with the filtering member, through which the filtered liquid flows out of the filtering unit; a second liquid outlet connected with the chamber, through which the liquid between the side wall of the filtering member and the side wall of the chamber flows out of the chamber.

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