Adjustable ultrahigh vacuum sample support structure

Abstract

The utility model discloses an adjustable ultrahigh vacuum sample support structure. The adjustable ultrahigh vacuum sample support structure comprises a sample support, x pressing sheets and x fastening assemblies, the sample support is provided with a working face, the working face is provided with a first area and a second area, the second area is distributed around the first area, the first area is used for bearing samples, the second area is provided with an assembling groove, and the assembling groove is used for assembling the samples. The x fastening assemblies are arranged in the assembling groove at intervals in the length direction of the assembling groove, and each pressing piece is matched with one fastening assembly and at least used for pressing a sample located in the first area. The adjustable ultrahigh vacuum sample support structure provided by the embodiment of the utility model can be used in an ultrahigh vacuum environment, and can be quickly adjusted according to the characteristics of different samples so as to adapt to the samples with various shapes and sizes.

Description

TECHNICAL FIELD

[0001] The utility model relates to an adjustable ultrahigh vacuum sample support structure and belongs to the technical field of vacuum machinery. BACKGROUND

[0002] In today's frontier fields, such as the development of new superconducting materials or the performance exploration of high-performance alloys in the field of material science; metal surface electron state analysis or semiconductor surface atomic reconstruction research in the field of surface physics research; and in the fine field of micro-nano processing, such as the photolithography manufacturing of micro-nano structures or the precise manipulation of nanoparticles, accurate control and fine operation of samples in an ultrahigh vacuum experimental environment are the key to accurate measurement and analysis. The Institute of Nanotechnology and Nanobionics of the Chinese Academy of Sciences designed and built the world's first nanometer field large scientific device that meets the standards of national major scientific infrastructure, which is a combination of material growth, device processing, and testing analysis, namely the Nano-X vacuum interconnection experiment station. It can realize in-situ growth measurement and analysis in a vacuum degree of 10 -10 Torr. Different devices are interconnected through pipes, which requires easy sample transfer and testing between different devices and inside the devices. In modern scientific research, samples come in various shapes and sizes, especially with the development of nanotechnology, samples are becoming smaller and more complex in shape, making testing more difficult.

[0003] Now the interconnection between different devices is through a small car powered by a magnet to carry samples through a vacuum interconnection pipeline between different device adapters. The sample holder is a key component for carrying and fixing samples, and its design directly affects the success or failure of the experiment and the accuracy of the results. The sample holder carrying the sample is mostly a specific size molybdenum sample holder with a fixed structure, which is generally used for samples of specific shapes or sizes. In addition, for samples of different sizes, silver glue, spot welding, and other methods are generally used to fix them on the molybdenum holder.

[0004] Traditional sample holder designs are mostly fixed structures that only consider specific shapes or sizes of samples, lacking flexibility and adaptability. Especially when dealing with irregularly shaped or differently sized samples, the design shortcomings of traditional sample holders are particularly evident, and can only be fixed by methods such as silver paste or spot welding. However, fixing by methods such as silver paste or spot welding also faces challenges such as being unable to heat to a high temperature for outgassing (silver paste will outgas when used, and it takes a long time to cure when fixing the sample, exceeding 200°C), introducing noise (tantalum sheets cannot accurately and firmly fix the sample), and damaging the sample structure during sample preparation and replacement (tantalum sheets easily wear the sample surface, etc.), affecting the stability and reliability of experimental results, which increases the complexity of sample preparation. With the development of nanotechnology, samples are becoming smaller and more complex in shape, and traditional sample holders cannot meet the needs of these new types of samples. The design of the sample holder not only needs to ensure the stability of the sample in an ultra-high vacuum environment, but also needs to be able to adjust to different sizes and shapes of samples. Therefore, developing a sample holder that can adapt to different shapes and sizes of samples is of great significance for improving experimental efficiency, ensuring sample safety, and obtaining high-quality experimental data. Practical new content

[0005] The main purpose of the present application is to provide an adjustable ultra-high vacuum sample holder structure to overcome the shortcomings of the prior art.

[0006] To achieve the above-mentioned purposes of the present application, the technical scheme adopted by the present application comprises:

[0007] The present application provides an adjustable ultra-high vacuum sample holder structure, which comprises a sample holder, x pressing plates, and x fastening components. The sample holder has a working surface, the working surface has a first area and a second area, the second area is distributed around the periphery of the first area, the first area is used to carry samples, and the second area is provided with an assembly groove. The x fastening components are arranged in the assembly groove in the length direction of the assembly groove. Each pressing plate cooperates with a fastening component and is used to press the sample in the first area.

[0008] The fastening component has a locked state and an unlocked state. When the fastening component is in the locked state, the fastening component is fixedly matched with the sample holder and the pressing plate. When the fastening component is in the unlocked state, the fastening component is movably matched with the sample holder. The fastening component and the pressing plate can only move in the length direction of the assembly groove under the action of an external force and change their positions in the second area. The length direction of the assembly groove is the circumferential direction of the first area, and x≥2.

[0009] Compared with the prior art, the present application has the following advantages:

[0010] The adjustable ultrahigh vacuum sample holder structure can be used in an ultrahigh vacuum environment, and can be quickly adjusted according to characteristics of different samples to adapt to samples of various shapes and sizes.

[0011] The adjustable ultrahigh vacuum sample holder structure can meet sample testing requirements of different sizes and specifications at the same time, and is more convenient to replace samples, and more importantly, the adjustable ultrahigh vacuum sample holder structure reduces damage to samples, reduces temperature limitation of sample processing, and reduces introduction of noise. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0013] Figure 1 is a whole structure schematic diagram of an adjustable ultrahigh vacuum sample holder structure provided in a typical embodiment case of the present application;

[0014] Figure 2 is a whole structure schematic diagram of an adjustable ultrahigh vacuum sample holder structure provided in a typical embodiment case of the present application;

[0015] Figure 3 is a longitudinal section structure schematic diagram of an adjustable ultrahigh vacuum sample holder structure provided in a typical embodiment case of the present application;

[0016] Figure 4 is a structure schematic diagram of a fastening base provided in a typical embodiment case of the present application;

[0017] Figure 5 is a structure schematic diagram of a fastening base provided in a typical embodiment case of the present application when the fastening base is assembled in an assembly groove;

[0018] Figure 6 is a structure schematic diagram of a fastening base provided in a typical embodiment case of the present application when the fastening base is assembled in an assembly groove. DETAILED DESCRIPTION

[0019] In view of the deficiencies in the prior art, the present inventors have long studied and practiced a large amount of practice to propose the technical solutions of the present application. The technical solutions, implementation processes and principles will be further explained as follows.

[0020] The utility model embodiment provides a kind of adjustable ultrahigh vacuum sample support structure, it includes: sample support, x tablet, x fastening component, the sample support has working surface, the working surface has first area and second area, the second area is distributed around the periphery of the first area, the first area is used to carry sample, the second area is provided with assembly slot, x the fastening component is spaced apart in the assembly slot in the length direction and is arranged in the assembly slot, each the tablet is cooperated with a fastening component, and at least for the sample located in the first area is compressed tightly;

[0021] Wherein, the fastening component has locking state and unlocking state, when the fastening component is in locking state, the fastening component is fixedly cooperated with the sample support, the tablet, when the fastening component is in unlocking state, the fastening component is movably cooperated with the sample support, the fastening component and the tablet can only be moved in the length direction of the assembly slot under external force and change its position in the second area, the length direction of the assembly slot is the circumferential direction of the first area, x≥2.

[0022] Further, the fastening component includes fastening adjusting member, fastening base and elastic member, the fastening base is arranged in the assembly slot, the maximum width of the fastening base in the assembly slot is greater than the width of the slot opening of the assembly slot and less than the maximum width of the assembly slot, the fastening base is limited in the assembly slot along the longitudinal direction of the assembly slot;

[0023] The fastening base has a threaded hole through itself, the fastening adjusting member is threadedly connected with the fastening base, the fastening adjusting member passes through the threaded hole and abuts against the groove bottom of the assembly slot, the tablet is clamped and fixed between the fastening adjusting member and the fastening base, the elastic member is arranged between the fastening base and the groove bottom of the assembly slot, the elastic member provides elastic force to make the fastening base and the groove wall of the assembly slot keep abutting along the longitudinal direction of the assembly slot;By screwing the fastening component and / or changing the deformation amount of the elastic member along the longitudinal direction of the assembly slot, the fastening component can be converted between the locking state and the unlocking state.

[0024] Still further, the assembly slot includes first slot section and second slot section arranged in sequence along its longitudinal direction, the groove bottom of the assembly slot is located at the bottom of the second slot section, the slot opening of the assembly slot is located at the top of the first slot section, the width of the first slot section < the maximum width of the part of the fastening base located in the second slot section is less than the width of the second slot section, first step structure is formed between the first slot section and the second slot section, the fastening base abuts against the first step structure along the longitudinal direction of the assembly slot.

[0025] Further, the first slot section and the second slot section are both rectangular slot structures, and a longitudinal section of the assembly slot is in a convex letter structure.

[0026] Further, the fastening base has a first face and a second face arranged oppositely, the threaded hole penetrates through the first face and the second face, the pressing plate is arranged between the fastening adjusting member and the first face, and the second face faces the slot bottom of the assembly slot, wherein the first face is a plane, and the second face is a curved surface.

[0027] Further, the second face is a cylindrical surface.

[0028] Further, an axial direction of the threaded hole is parallel to a longitudinal direction of the assembly slot.

[0029] Further, the first face of the fastening base further has a second step structure corresponding to the first step structure, and the second step structure keeps contact along the longitudinal direction of the assembly slot under the elastic force provided by the elastic member.

[0030] Further, the fastening base comprises a first base part and a second base part, the first base part is fixedly arranged on the second base part, one face of the second base part opposite to the first base part is the second face, and a width of the first base part < a width of a slot opening of the assembly slot < a width of a slot bottom of the assembly slot.

[0031] Further, the elastic member comprises a spring plate, the spring plate is arranged in an extension along a width direction of the assembly slot, one end of the spring plate is fixedly connected to the fastening base as a fixed end, and the other end is arranged in the assembly slot as a free end, a part of the spring plate close to the fixed end is attached to the second face of the fastening base, and another part close to the free end is attached to the slot bottom of the assembly slot, and a length of the spring plate is greater than half of an arc length of the second face of the fastening base, and the spring plate is in an elastic deformation state.

[0032] Further, the elastic member comprises two or more spring plates, and the two or more spring plates are arranged on two sides of the threaded hole respectively.

[0033] Further, the pressing plate comprises a fixed part, a first transition connecting part, a second transition connecting part and a pressing part arranged in sequence in a direction from the second area to the first area, the fixed part is arranged between the fastening adjusting member and the fastening base, the pressing part is located in the first area and is used for pressing a sample located in the first area, the fixed part and the pressing part are located in the same plane, and the first transition connecting part and the second transition connecting part are arranged at an angle.

[0034] Further, the assembly groove is an annular groove continuously arranged along the circumference of the first region, or the assembly groove is an annular multi-segment groove segmentally arranged along the circumference of the first region.

[0035] The technical scheme, implementation process and principles will be further explained below in combination with the drawings and specific implementation cases. Unless specifically stated, the sample holder, fastening base, pressing piece, elastic piece, screw and the like disclosed in the embodiments of the present application can be obtained by market purchase or conventional process known in the art, and the specific product model and size parameters and the like are not limited herein.

[0036] In a more specific implementation case, please refer to Figure 1 A structure of an adjustable ultrahigh vacuum sample holder 100 includes a sample holder 100, four pressing pieces 200 and four fastening assemblies 300. The working surface of the sample holder 100 has a first region and a second region, and the second region is distributed around the periphery of the first region. The first region is used to carry a sample. The four pressing pieces 200 are arranged at intervals along the circumference of the first region, and are preferably distributed at four different orientations of the first region. Each fastening assembly 300 corresponds to a pressing piece 200. The fastening assembly 300 is used to fix the pressing piece 200 on the sample holder 100. The pressing piece 200 is used to press the sample placed on the working surface. The four pressing pieces 200 together form a sample fixing structure. The fastening assembly 300 can be converted between a locked state and an unlocked state. When the fastening assembly 300 is in the locked state, the fastening assembly 300 is fixedly matched with the sample holder 100 and the pressing piece 200. When the fastening assembly 300 is in the unlocked state, the fastening assembly 300 is movably matched with the sample holder 100. The positions of the fastening assembly 300 and the pressing piece 200 on the sample holder 100 can be adjusted, so that the sample fixing structure can adapt to the fixation of samples of different sizes and shapes.

[0037] Specifically, the second region of the working surface of the sample holder 100 is provided with four assembly grooves 110. The four assembly grooves 110 correspond to and are parallel to the four edges of the rectangular first region. The fastening assembly 300 is arranged in the assembly groove 110. The fastening assembly 300 and the assembly groove 110 are configured such that the fastening assembly 300 moves in the length direction of the assembly groove 110 in the assembly groove 110 in the unlocked state, so as to change the position of the pressing piece 200 on the sample holder 100.

[0038] The specific configuration structure between the fastening assembly 300 and the assembly groove 110, the sample holder 100 and how the fastening assembly 300 and the pressing piece 200 are movably configured with the sample holder 100 will be specifically described as follows.

[0039] Specifically, please refer to Figure 2 , Figure 3 ,Figure 4 and Figure 5 The fastening assembly 300 comprises a fastening adjusting member 320, a fastening base 310 and two elastic pieces 330. The fastening base 310 is arranged in the assembly groove 110 and has a threaded hole 301 penetrating through itself. The fastening adjusting member 320 is arranged in the threaded hole 301 and is threadedly connected with the fastening base 310. The fastening adjusting member 320 penetrates through the threaded hole 301 and abuts against the groove bottom of the assembly groove 110. The pressing piece 200 is clamped and fixed between the fastening adjusting member 320 and the fastening base 310. The two elastic pieces 330 are arranged at the bottom of the fastening base 310 and are located on both sides of the threaded hole 301. The elastic pieces 330 are in an elastically deformed state between the fastening base 310 and the groove bottom of the assembly groove 110. The fastening base 310 has a gap in the length, width and depth directions of the assembly groove 110. The fastening base 310 is limited in the assembly groove 110 but can move along the length direction of the assembly groove 110 under an external force to change the position of the fastening assembly 300 and the pressing piece 200 on the working surface of the sample holder 100. In addition, by screwing the fastening assembly 300 and / or changing the deformation amount of the elastic member in the depth direction of the assembly groove 110, the gap between the fastening base 310 and the sample holder 100 in the depth direction of the assembly groove 110 can be changed, so that the fastening assembly 300 can be switched between the locked state and the unlocked state.

[0040] Specifically, please refer to Figure 5 and Figure 6, the assembly groove 110 comprises a first groove section 111 and a second groove section 112 arranged in sequence along the longitudinal direction of the assembly groove 110, the groove bottom of the assembly groove 110 is located at the bottom of the second groove section 112, the groove opening of the assembly groove 110 is located at the top of the first groove section 111, the first groove section 111 and the second groove section 112 are both rectangular in longitudinal cross section, the width W1 of the first groove section 111 is less than the width W2 of the second groove section 112, and the groove wall of the assembly groove 110 has a first step structure 113 corresponding to the connection between the first groove section 111 and the second groove section 112; the fastening base 310 comprises a first base section 311 and a second base section 312, the first base section 311 is fixedly arranged on the second base section 312, the second base section 312 is located in the second groove section 112, the first base section 311 is located in the first groove section 111, the width W3 of the first base section 311 is less than the width W4 of the second base section 312, the surface of the fastening base 310 has a second step structure 313 corresponding to the connection between the first base section 311 and the second base section 312, the second step structure 313 corresponds to the first step structure 113, and at the same time, the width W3 of the first base section 311 is less than the width W1 of the first groove section 111, the width W4 of the second base section 312 is less than the width W2 of the second groove section 112, and the thickness H2 of the second base section 312 is less than the depth H1 of the second groove section 112. Through the above design, the fastening base 310 is limited in the assembly groove 110, and at the same time, the fastening base 310 can move in the length direction of the assembly groove 110. When the fastening adjusting member 320 is screwed, the fastening adjusting member 320 is fed or retracted in the threaded hole 301, and the gap between the first step structure 113 of the assembly groove 110 and the second step structure 313 of the fastening base 310 changes accordingly. When the gap between the first step structure 113 and the second step structure 313 is greater than 0, the fastening base 310 is movably matched with the sample holder 100, and when the gap between the first step structure 113 and the second step structure 313 is 0 and tightly fitted, the fastening base 310 is fixed with the sample holder 100.

[0041] Specifically, the first base is a cuboid structure, and the second base is a semi-cylindrical or arc-shaped column structure. The first base is fixed to the flat side of the second base, and the side of the second base facing away from the first base is cylindrical. The cylindrical surface of the second base contacts the bottom of the assembly groove 110. With this design, while confining the fastening base 310 within the assembly groove 110, the fastening base 310 can also be removed from the assembly groove 110. Specifically, the removal method can be as follows: push the fastening base 310 along the width direction of the assembly groove 110 until its side edge along the width direction is exposed in the groove opening area of ​​the assembly groove 110, then rotate the fastening base 310 around its own axial direction. Based on the semi-cylindrical or arc-shaped column structure of the fastening base 310, the fastening base 310 can be removed from the assembly groove 110. Similarly, the process of assembling the fastening base 310 into the assembly groove 110 is the reverse of the removal process. It should be noted that the width W4 of the second base is less than or equal to the diameter of the cylindrical structure to which it belongs. The specific parameter design of the width W4 of the second base, the width W1 of the first groove segment 111, and the width W2 of the second groove segment 112 should meet the requirements that the fastening base 310 can be inserted into the assembly groove 110 from the outside and can be removed from the assembly groove 110 in the manner described above.

[0042] Specifically, one end of the spring piece 330 is fixedly connected to the side edge of the second base portion 312 along the width direction as a fixed end, and the other end is disposed in the assembly groove 110 as a free end. A portion of the spring piece 330 near the connecting end is in contact with the cylindrical surface of the second base portion 312 or extends along the cylindrical surface of the fastening base 310, and another portion near the free end is in contact with the bottom of the groove of the assembly groove 110. Furthermore, the length of the spring piece 330 is greater than half the arc length of the cylindrical surface of the second base portion 312. The spring piece 330 is in an elastic deformation state. The elastic force provided by the spring piece 330 drives the fastening base 310 to move in a tendency to contact the first step structure 113 of the assembly groove 110 along the longitudinal direction of the assembly groove 110. For example, the spring piece 330 can be a spring steel sheet, a copper alloy sheet, or a nickel alloy sheet, etc. Understandably, the elastic force provided by the spring 330 and the mutual abutment between the threaded fastener and the bottom of the mounting groove 110 stably restrict the fastening base 310 to a designated position within the mounting groove 110.

[0043] Understandably, the surface of the fastening base facing the bottom of the assembly groove in this utility model is set as a cylindrical surface. On the one hand, this makes it easy to tilt and remove the fastening base. On the other hand, the cylindrical surface design also allows the fastening base to maintain a good fit with the spring piece. Furthermore, since the fastening base needs to move (through sliding fit) to different positions within the assembly groove, a certain gap is left in the longitudinal direction of the assembly groove to facilitate sliding. The spring piece can provide a force that allows the fastening base to resist the step structure within the assembly groove, thereby more firmly fixing the position of the fastening base.

[0044] Specifically, please refer to Figure 2 and Figure 3 The pressing sheet 200 comprises a fixed part 210, a first transition connecting part 220, a second transition connecting part 230 and a pressing part 240 arranged in sequence along the direction from the second region to the first region, the fixed part 210 is arranged between the fastening adjusting member 320 and the fastening base 310, the pressing part 240 is located in the first region and is used for pressing the sample located in the first region, the fixed part 210 and the pressing part 240 are located in the same plane, the first transition connecting part 220 and the second transition connecting part 230 are inclined upward relative to the fixed seat and the pressing part 240, and the first transition connecting part 220 and the second transition connecting part 230 are arranged at an angle. More specifically, the pressing sheet 200 is a metal sheet with elasticity and toughness, for example, the pressing sheet 200 can be a steel sheet, a copper alloy sheet or a nickel alloy sheet, etc., the pressing sheet 200 with the above structure can provide greater and more stable pressing force, so as to more stably fix the sample.

[0045] More specifically, the fixed part 210 of the pressing sheet 200 can be provided with a mounting hole, a threaded fastener passes through the mounting hole on the pressing sheet 200 and is threadedly connected with the fastening base 310, it can be understood that the threaded fastener can be a screw or a bolt, etc., the diameter of the nut of the screw or the bolt is greater than the diameter of the mounting hole on the pressing sheet 200.

[0046] The adjustable ultrahigh vacuum sample holder structure can be used in an ultrahigh vacuum environment, and can be quickly adjusted according to the characteristics of different samples to adapt to samples of various shapes and sizes.

[0047] The adjustable ultrahigh vacuum sample holder structure provided by the embodiment of the utility model solves the limitation of the conventional sample holder in the prior art, provides a flexible, efficient and safe solution, can meet the strict requirements of sample processing in modern scientific research and industrial applications, and through the innovative design, the user can easily install, replace and adjust the sample without damaging the sample structure, so that the flexibility and efficiency of the experiment are greatly improved.

[0048] The adjustable ultrahigh vacuum sample holder structure provided by the embodiment of the utility model can simultaneously meet the sample testing requirements of different sizes and specifications, and when the sample is replaced, it is more convenient and faster, and more importantly, the adjustable ultrahigh vacuum sample holder structure provided by the embodiment of the utility model reduces the damage to the sample, reduces the limitation of sample processing by temperature, and reduces the introduction of noise.

[0049] It should be understood that the above embodiments are only to illustrate the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made in accordance with the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. An adjustable ultra-high vacuum sample holder structure, characterized by, The application relates to a sample holder, which comprises x tablet pressing pieces and x fastening assemblies, wherein the sample holder has a working surface, the working surface has a first area and a second area, the second area is distributed around the periphery of the first area, the first area is used for carrying samples, the second area is provided with an assembly groove, x fastening assemblies are arranged in the assembly groove in a length direction of the assembly groove, each tablet pressing piece is matched with a fastening assembly and is used for pressing the sample in the first area at least, the fastening assembly has a locking state and an unlocking state, the fastening assembly is fixedly matched with the sample holder and the tablet pressing piece when the fastening assembly is in the locking state, the fastening assembly is movably matched with the sample holder when the fastening assembly is in the unlocking state, the fastening assembly and the tablet pressing piece can only move in the length direction of the assembly groove under the action of external force and change the position of the fastening assembly in the second area, the length direction of the assembly groove is the circumferential direction of the first area, and x is greater than or equal to 2. The fastening assembly comprises a fastening adjusting piece, a fastening base and an elastic piece, the fastening base is arranged in the assembly groove, the maximum width of the part of the fastening base in the assembly groove is greater than the width of the slot opening of the assembly groove and smaller than the maximum width of the assembly groove, and the fastening base is limited in the assembly groove in the longitudinal direction of the assembly groove. The fastening base has a threaded hole penetrating through the fastening base, the fastening adjusting piece is threadedly connected with the fastening base, the fastening adjusting piece penetrates through the threaded hole and abuts against the groove bottom of the assembly groove, the tablet pressing piece is clamped and fixed between the fastening adjusting piece and the fastening base, the elastic piece is arranged between the fastening base and the groove bottom of the assembly groove, the elastic piece provides elastic force to make the fastening base and the groove wall of the assembly groove abut against each other in the longitudinal direction of the assembly groove, and the fastening assembly can be converted between the locking state and the unlocking state by screwing the fastening assembly and / or changing the deformation amount of the elastic piece in the longitudinal direction of the assembly groove.

2. The adjustable ultra-high vacuum sample holder structure of claim 1, wherein: The assembly groove comprises a first groove section and a second groove section arranged in sequence in the longitudinal direction of the assembly groove, the groove bottom of the assembly groove is located at the bottom of the second groove section, the slot opening of the assembly groove is located at the top of the first groove section, the width of the first groove section is smaller than the maximum width of the part of the fastening base in the second groove section, which is smaller than the width of the second groove section, a first step structure is formed between the first groove section and the second groove section, and the fastening base abuts against the first step structure in the longitudinal direction of the assembly groove. The first groove section and the second groove section are both rectangular groove structures, and the longitudinal section of the assembly groove presents a convex structure.

3. The adjustable ultra-high vacuum sample holder structure of claim 2, wherein: The fastening base has a first surface and a second surface arranged oppositely, the threaded hole penetrates through the first surface and the second surface, the tablet pressing piece is arranged between the fastening adjusting piece and the first surface, and the second surface faces the groove bottom of the assembly groove, wherein the first surface is a plane, and the second surface is a curved surface.

4. The adjustable ultra-high vacuum sample holder structure of claim 3, wherein: The second surface is a cylindrical surface.

5. The adjustable ultra-high vacuum sample holder structure of claim 3, wherein: ​ 6. The adjustable ultra-high vacuum sample holder structure of claim 5, wherein: ​ 7. The adjustable ultra-high vacuum sample holder structure of claim 5, wherein: The axial direction of the threaded hole is parallel to the longitudinal direction of the assembly groove.

8. The adjustable ultra-high vacuum sample holder structure of claim 5, wherein: The first surface of the fastening base further has a second step structure corresponding to the first step structure, and the second step structure keeps contact with the assembly groove in the longitudinal direction under the elastic force provided by the elastic member.

9. The adjustable ultra-high vacuum sample holder structure of claim 8, wherein: The fastening base comprises a first base part and a second base part, the first base part is fixedly arranged on the second base part, the surface of the second base part opposite to the first base part is the second surface, and the width of the first base part is less than the width of the slot opening of the assembly groove and less than the width of the groove bottom of the assembly groove.

10. The adjustable ultra-high vacuum sample holder structure of claim 5, wherein: The elastic member comprises a spring piece, the spring piece is arranged in the width direction of the assembly groove as a whole, one end of the spring piece is fixedly connected with the fastening base as a fixed end, the other end of the spring piece is arranged in the assembly groove as a free end, a part of the spring piece close to the fixed end is attached to the second surface of the fastening base, another part of the spring piece close to the free end is attached to the groove bottom of the assembly groove, the length of the spring piece is greater than half of the arc length of the second surface of the fastening base, and the spring piece is in an elastic deformation state.

11. The adjustable ultra-high vacuum sample holder structure of claim 10, wherein: The elastic member comprises two or more spring pieces, and the two or more spring pieces are arranged on both sides of the threaded hole respectively.

12. The adjustable ultra-high vacuum sample holder structure of claim 2, wherein: The pressing piece comprises a fixed part, a first transition connecting part, a second transition connecting part and a pressing part arranged in sequence in the direction from the second region to the first region, the fixed part is arranged between the fastening adjusting member and the fastening base, the pressing part is located in the first region and is used for pressing the sample located in the first region, the fixed part and the pressing part are located in the same plane, and the first transition connecting part and the second transition connecting part are arranged at an angle.

13. The adjustable ultra-high vacuum sample holder structure of claim 1, wherein: The assembly groove is a continuous annular groove arranged along the circumference of the first region, or the assembly groove is a ring multi-segment groove arranged in segments along the circumference of the first region.

Images