Mechanical arm for wafer carrying

Abstract

The utility model discloses a mechanical arm for wafer carrying, which comprises a clamping mechanism and a telescopic spring arranged in the clamping mechanism, the outer side of the clamping mechanism is provided with a carrying mechanism, the top of the carrying mechanism is provided with a lifting support, the clamping mechanism comprises a clamping support, and the clamping support is provided with a clamping groove. A supporting column is fixedly installed at the top of the clamping support, a clamping motor is fixedly installed in the center of the interior of the clamping support, the output end of the clamping motor is fixedly connected with a bevel gear transmission assembly, clamping threaded rods are fixedly installed on the periphery of the bevel gear transmission assembly, and the bevel gear transmission assembly is fixedly connected with the clamping threaded rods. The outer side of the clamping threaded rod is in threaded connection with a limiting threaded sleeve, the clamping motor is used for driving the bevel gear transmission assembly and the clamping threaded rod to rotate, so that the limiting threaded sleeve drives the clamping supporting frame and the clamping surrounding plate to move relatively while moving on the outer side of the clamping threaded rod, and the clamping supporting frame and the clamping surrounding plate are clamped through the elastic force effect of a protection spring; and the clamping protection plate is driven to clamp and fix the wafer.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer production technical field, concretely is a kind of mechanical arm for wafer conveying. BACKGROUND

[0002] Wafer refers to a kind of basic material in semiconductor manufacturing process, also be called silicon wafer or chip, it is usually made of single crystal silicon disc-shaped object, with very high purity and uniform structure, wafer can be manufactured into various integrated circuits and microelectronic components, such as microprocessor, memory, sensor etc., in semiconductor industry, wafer plays a very important role, is one of the basic materials for manufacturing chip.

[0003] Publication No. CN220241494U discloses a kind of for wafer conveying mechanical arm, fixed support motor drive gear rotates, gear engages front face gear ring rotation, makes rotary disc rotate under the support of fixed support, in this process, slide bar in sliding slot follows rotary disc sliding, again because limit block can only be inwards to the limit frame and contract, so rotary disc rotates, four limit blocks are moved to the center of circle simultaneously, drive clamping block to clamp wafer from four directions simultaneously, complete wafer clamping and fast positioning work, it is convenient to accurately lock the center of wafer, improve wafer conveying precision, but the patent still has the following problems in actual use process:

[0004] The mechanical arm for wafer conveying although makes four limit blocks move to the center of circle simultaneously by setting fixed support motor drive gear rotation, drive clamping block to clamp wafer from four directions simultaneously, but there is no related protection device for wafer protection in the process of wafer clamping, it is easy to cause wafer clamping deformation phenomenon, to affect the integrity of wafer.

[0005] Therefore, a kind of mechanical arm for wafer conveying is proposed to solve the problems raised in the above. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a kind of mechanical arm for wafer conveying to solve the problems raised in the above background art, the mechanical arm for wafer conveying although makes four limit blocks move to the center of circle simultaneously by setting fixed support motor drive gear rotation, drive clamping block to clamp wafer from four directions simultaneously, but there is no related protection device for wafer protection in the process of wafer clamping, it is easy to cause wafer clamping deformation phenomenon, to affect the integrity of wafer.

[0007] To achieve the above object, the utility model provides the following technical scheme: a kind of mechanical arm for wafer conveying, including clamping mechanism, and the telescopic spring of installation in the inside of clamping mechanism;

[0008] The outer side of the clamping mechanism is provided with a conveying mechanism, and the top of the conveying mechanism is provided with a lifting support;

[0009] Further comprising:

[0010] The clamping mechanism comprises a clamping support, a support column is fixedly installed at the top of the clamping support, and a clamping motor is fixedly installed at the inner central position of the clamping support;

[0011] The output end of the clamping motor is fixedly connected with a bevel gear transmission assembly, and a clamping threaded rod is fixedly installed around the bevel gear transmission assembly;

[0012] The outer side of the clamping threaded rod is threadedly connected with a limiting threaded sleeve, and the bottom of the limiting threaded sleeve is fixedly installed with a clamping support frame.

[0013] Preferably, a clamping surrounding plate is fixedly installed at the end of the clamping support frame, a protection spring is fixedly installed at the bottom inner side of the clamping surrounding plate, a clamping protection plate is fixedly installed at the end of the protection spring, a clamping bottom plate is fixedly installed at the bottom of the clamping surrounding plate, and an inclined groove is formed at the top of the clamping bottom plate.

[0014] Preferably, a anti-blocking support rod is fixedly installed at the middle of the clamping support frame, a telescopic spring is fixedly installed at the bottom central position of the clamping support frame, a ventilation sleeve is fixedly installed at the bottom of the telescopic spring, ventilation holes are formed at the top of the ventilation sleeve, the ventilation holes are in engagement with the anti-blocking support rod, and a fixed suction disc is fixedly installed at the bottom of the ventilation sleeve.

[0015] Preferably, the conveying mechanism comprises a support base, rotating supports are symmetrically installed at the top of one side of the support base, a rotating motor is fixedly installed at the outer side of one of the rotating supports, a rotating worm is fixedly connected with the output end of the rotating motor, and a rotating worm wheel is in engagement with one side of the rotating worm.

[0016] Preferably, the rotating worm wheel is in rotation connection with the support base, a translation support is fixedly installed at the top of the rotating worm wheel, a translation motor is fixedly installed at one side of the translation support, a translation threaded rod is fixedly connected with the output end of the translation motor, and a translation threaded sleeve is threadedly connected with the outer side of the translation threaded rod.

[0017] Preferably, the lifting support is fixedly installed at the top of the translation threaded sleeve, a lifting motor is fixedly installed at the top of the lifting support, a lifting threaded rod is fixedly connected with the output end of the lifting motor, a lifting threaded sleeve is threadedly connected with the outer side of the lifting threaded rod, and an adjusting support is fixedly installed at one side of the lifting threaded sleeve.

[0018] Preferably, the end of the adjusting support is fixedly provided with an adjusting motor, an output end of the adjusting motor is fixedly connected with an adjusting threaded rod, and the outer side of the adjusting threaded rod is threadedly connected with an adjusting threaded sleeve, which is fixedly arranged at the top of the supporting column.

[0019] Compared with the prior art, the mechanical arm for wafer conveying has the advantages that: the pinion gear transmission assembly and the clamping threaded rod are driven to rotate by the clamping motor, the limiting threaded sleeve moves on the outer side of the clamping threaded rod, the clamping support and the clamping surrounding plate are relatively moved, the clamping protection plate is driven to clamp and fix the wafer by the elastic force of the protection spring, the lifting threaded sleeve is driven to move up and down by the lifting motor, the adjusting threaded sleeve is driven to move by the adjusting motor, the supporting column and the clamping support are driven to move, the position of the clamping support can be adjusted, and the wafer is conveniently conveyed.

[0020] 1. The clamping mechanism can drive the pinion gear transmission assembly and the clamping threaded rod to rotate by the clamping motor, the limiting threaded sleeve moves on the outer side of the clamping threaded rod, the clamping support and the clamping surrounding plate are relatively moved, the clamping protection plate is driven to clamp and fix the wafer by the elastic force of the protection spring, the wafer is conveniently shovelled up by the inclined groove at the top of the clamping bottom plate, the wafer is simultaneously adsorbed and fixed by the fixed suction cup, air in the fixed suction cup is discharged through the air holes in the air sleeve, the air holes are blocked by the anti-blocking supporting rod, and the stability of the adsorption of the fixed suction cup is improved.

[0021] 2. The conveying mechanism can drive the rotating worm to rotate by the rotating motor, the translation support is driven to rotate by the meshing connection between the rotating worm and the rotating worm wheel, the translation screw rod is driven to rotate by the translation motor, the translation threaded sleeve drives the lifting support to move horizontally, the lifting threaded sleeve drives the adjusting support to move up and down by the lifting motor, the adjusting threaded sleeve drives the supporting column and the clamping support to move by the adjusting motor, the position of the clamping support can be adjusted, and the wafer is conveniently conveyed. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a whole three-dimensional structure schematic view of the utility model;

[0023] Figure 2 It is a three-dimensional structure schematic view of the clamping mechanism in the utility model;

[0024] Figure 3 It is a three-dimensional structure schematic view of the clamping surrounding plate in the utility model;

[0025] Figure 4The utility model discloses a three-dimensional structure schematic diagram of the section of the air-permeable sleeve and the fixed suction disc.

[0026] Figure 5 The utility model discloses a three-dimensional structure schematic diagram of the conveying mechanism.

[0027] Figure 6 The utility model discloses a three-dimensional structure schematic diagram of the section of the translation support, the lifting support and the adjusting support.

[0028] In the figure: 1, clamping mechanism, 101, clamping support, 102, support column, 103, clamping motor, 104, bevel gear transmission assembly, 105, clamping threaded rod, 106, limit threaded bushing, 107, clamping support frame, 108, clamping surrounding board, 109, protection spring, 110, clamping protection board, 111, clamping bottom plate, 112, inclined groove, 113, anti -block support rod, 114, extension spring, 115, air-permeable sleeve, 116, air hole, 117, fixed suction disc, 2, conveying mechanism, 201, support base, 202, rotating support, 203, rotating motor, 204, rotating worm, 205, rotating worm wheel, 206, translation support, 207, translation motor, 208, translation threaded rod, 209, translation threaded bushing, 210, lifting support, 211, lifting motor, 212, lifting threaded rod, 213, lifting threaded bushing, 214, adjusting support, 215, adjusting motor, 216, adjusting threaded rod, 217, adjusting threaded bushing. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments of the utility model, all the other embodiments obtained by the ordinary skilled in the art without creative work belong to the scope of the utility model protection.

[0030] Please refer to Figures 1-6The utility model provides technical scheme: a mechanical arm is carried to wafer, including clamping mechanism 1 and the telescopic spring 114 of installation in the inside of clamping mechanism 1, the outside of clamping mechanism 1 is provided with carrying mechanism 2, and the top of carrying mechanism 2 is provided with elevating support 210, clamping mechanism 1 includes clamping support 101, the top fixed mounting of clamping support 101 has support column 102, the inside center position fixed mounting of clamping support 101 has clamping motor 103, wherein, the output fixed connection of clamping motor 103 has bevel gear drive assembly 104, the periphery fixed mounting of bevel gear drive assembly 104 has clamping screw rod 105, wherein, the outside screw thread connection of clamping screw rod 105 has limit screw sleeve 106, the bottom fixed mounting of limit screw sleeve 106 has clamping support frame 107, the end fixed mounting of clamping support frame 107 has clamping surrounding board 108, the bottom inboard fixed mounting of clamping surrounding board 108 has protection spring 109, the end fixed mounting of protection spring 109 has clamping protection board 110, the bottom fixed mounting of clamping surrounding board 108 has clamping bottom plate 111, the top of clamping bottom plate 111 is equipped with inclined slot 112, the middle fixed mounting of clamping support frame 107 has anti -blocking support rod 113, telescopic spring 114 fixed mounting is at the bottom center position of clamping support 101, the bottom fixed mounting of telescopic spring 114 has ventilation sleeve 115, the top periphery of ventilation sleeve 115 is equipped with ventilation hole 116, ventilation hole 116 and anti -blocking support rod 113 are connected with the clamping of ventilation sleeve 115, the bottom fixed mounting of ventilation sleeve 115 has fixed sucking disc 117;

[0031] Carrying mechanism 2 includes support base 201, the top one side symmetry of support base 201 is installed with rotary support 202, the outside fixed mounting of one side rotary support 202 has rotary motor 203, the output fixed connection of rotary motor 203 has rotary worm 204, one side engagement connection of rotary worm 204 has rotary worm wheel 205, and rotary worm wheel 205 is rotatably connected with support base 201, and the top fixed mounting of rotary worm wheel 205 has translation support 206, and one side fixed mounting of translation support 206 has translation motor 207, and the output fixed connection of translation motor 207 has translation screw rod 208, and the outside screw thread connection of translation screw rod 208 has translation screw sleeve 209, and elevating support 210 is fixedly installed at the top of translation screw sleeve 209, and the top fixed mounting of elevating support 210 has elevating motor 211, and the output fixed connection of elevating motor 211 has elevating screw rod 212, and the outside screw thread connection of elevating screw rod 212 has elevating screw sleeve 213, and one side fixed mounting of elevating screw sleeve 213 has adjusting support 214, and the end fixed mounting of adjusting support 214 has adjusting motor 215, and the output fixed connection of adjusting motor 215 has adjusting screw rod 216, and the outside screw thread connection of adjusting screw rod 216 has adjusting screw sleeve 217, and adjusting screw sleeve 217 is fixedly installed at the top of support column 102.

[0032] Working principle: Before using this type of wafer handling robotic arm, it is necessary to check the overall condition of the device to ensure it can operate normally. Figure 1 - Figure 6 As shown, firstly, the wafer is adsorbed and fixed using a fixed suction cup 117. Simultaneously, air inside the fixed suction cup 117 is discharged through the vent hole 116 at the top of the vent sleeve 115. At the same time, the vent hole 116 is sealed using an anti-blocking support rod 113 to improve the stability of the fixed suction cup 117's adsorption. Secondly, the clamping motor 103 drives the bevel gear transmission assembly 104 and the clamping threaded rod 105 to rotate. This causes the limiting threaded sleeve 106 to move outside the clamping threaded rod 105, simultaneously moving the clamping support frame 107 and the clamping surrounding plate 108 relative to each other. The elastic force of the protective spring 109 drives the clamping protective plate 110 to clamp and fix the wafer. The inclined groove 112 at the top of the clamping base plate 111 further secures the wafer. To facilitate the lifting of the wafer, the rotating motor 203 drives the rotating worm gear 204 to rotate. Utilizing the meshing connection between the rotating worm gear 204 and the rotating worm wheel 205, the translation bracket 206 rotates. Simultaneously, the translation motor 207 is activated to drive the translation threaded rod 208 to rotate, causing the translation threaded sleeve 209 to move the lifting bracket 210 horizontally. At the same time, the lifting motor 211 is activated to drive the lifting threaded rod 212 to rotate, causing the lifting threaded sleeve 213 to move the adjusting bracket 214 up and down. The adjusting motor 215 is activated to drive the adjusting threaded rod 216 to rotate, causing the adjusting threaded sleeve 217 to move the support column 102 and the clamping bracket 101. This allows adjustment of the position of the clamping bracket 101, facilitating the handling of the wafer.

[0033] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A wafer conveying manipulator, comprising a clamping mechanism (1) and a telescopic spring (114) installed inside the clamping mechanism (1); The outer side of the clamping mechanism (1) is provided with a conveying mechanism (2), and the top of the conveying mechanism (2) is provided with a lifting support (210); characterized in that Further comprising: The clamping mechanism (1) comprises a clamping support (101), a support column (102) is fixedly installed on the top of the clamping support (101), and a clamping motor (103) is fixedly installed at the inner center position of the clamping support (101); Wherein, the output end of the clamping motor (103) is fixedly connected with a bevel gear transmission assembly (104), and the periphery of the bevel gear transmission assembly (104) is fixedly installed with a clamping threaded rod (105); Wherein, the outer side of the clamping threaded rod (105) is threadedly connected with a limiting threaded sleeve (106), and the bottom of the limiting threaded sleeve (106) is fixedly installed with a clamping support frame (107).

2. The wafer transfer robot according to claim 1, characterized by: The end of the clamping support frame (107) is fixedly installed with a clamping surrounding plate (108), the inner side of the bottom of the clamping surrounding plate (108) is fixedly installed with a protection spring (109), the end of the protection spring (109) is fixedly installed with a clamping protection plate (110), the bottom of the clamping surrounding plate (108) is fixedly installed with a clamping bottom plate (111), and the top of the clamping bottom plate (111) is provided with an inclined groove (112).

3. The wafer transfer robot according to claim 2, characterized by: The middle part of the clamping support frame (107) is fixedly installed with an anti-blocking support rod (113), the telescopic spring (114) is fixedly installed at the bottom center position of the clamping support (101), the bottom of the telescopic spring (114) is fixedly installed with a breathable sleeve (115), the top of the breathable sleeve (115) is provided with a breathable hole (116), the breathable hole (116) is connected with the anti-blocking support rod (113), and the bottom of the breathable sleeve (115) is fixedly installed with a fixed suction cup (117).

4. The wafer transfer robot according to claim 1, characterized by: The conveying mechanism (2) comprises a support base (201), a rotating support (202) is symmetrically installed on one side of the top of the support base (201), a rotating motor (203) is fixedly installed on the outer side of one side of the rotating support (202), the output end of the rotating motor (203) is fixedly connected with a rotating worm (204), and one side of the rotating worm (204) is meshedly connected with a rotating worm wheel (205).

5. The wafer transfer robot according to claim 4, wherein: The rotating worm wheel (205) is rotatably connected with the support base (201), the top of the rotating worm wheel (205) is fixedly installed with a translation support (206), one side of the translation support (206) is fixedly installed with a translation motor (207), the output end of the translation motor (207) is fixedly connected with a translation threaded rod (208), and the outer side of the translation threaded rod (208) is threadedly connected with a translation threaded sleeve (209).

6. The wafer transfer robot according to claim 1, characterized by: The lifting support (210) is fixedly installed at the top of the translation threaded sleeve (209), the top of the lifting support (210) is fixedly installed with a lifting motor (211), the output end of the lifting motor (211) is fixedly connected with a lifting threaded rod (212), the outer side of the lifting threaded rod (212) is threadedly connected with a lifting threaded sleeve (213), one side of the lifting threaded sleeve (213) is fixedly installed with an adjusting support (214).

7. The wafer transfer robot according to claim 6, wherein: The end of the adjusting support (214) is fixedly installed with an adjusting motor (215), the output end of the adjusting motor (215) is fixedly connected with an adjusting threaded rod (216), the outer side of the adjusting threaded rod (216) is threadedly connected with an adjusting threaded sleeve (217), the adjusting threaded sleeve (217) is fixedly installed at the top of the supporting column (102).

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