Cooling structure of vacuum reaction cavity

By installing water-cooling mechanisms at both ends of the stainless steel reaction tube, the problem of high-temperature aging of the sealing ring is solved by using cooling water to lower the temperature, thereby improving production efficiency and product performance.

CN223852730UActive Publication Date: 2026-01-30QINGDAO JINGCHENG HUAQI MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202520053684.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-10
Publication Date
2026-01-30
Estimated Expiration
2035-01-10

AI Technical Summary

Technical Problem

The sealing rings on the sealing flange are damaged due to aging at high temperatures, which affects the vacuum level, leading to a decrease in product performance and increased maintenance costs.

Method used

Water cooling mechanisms, including water cooling boxes and cold water pipes, are installed at both ends of the stainless steel reaction tube to reduce the impact of high temperature on the sealing ring by spraying cooling water.

Benefits of technology

Preventing seal aging, improving production efficiency, reducing maintenance costs, and enhancing product performance indicators.

✦ Generated by Eureka AI based on patent content.

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    Figure CN223852730U_ABST
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Abstract

The utility model belongs to the technical field of vacuum heat treatment furnaces, and particularly relates to a vacuum reaction cavity cooling structure which comprises a stainless steel reaction tube, two ends of the stainless steel reaction tube are respectively connected with a left pipeline and a right pipeline through sealing flanges, and sealing rings are arranged on the sealing flanges. Water cooling mechanisms are arranged at the positions, close to the sealing flanges at the two ends, of the stainless steel reaction pipe, the water cooling cabinet comprises a water cooling box, a cold water pipe is arranged in the water cooling box and sprays cooling water to the stainless steel reaction pipe, and the water cooling mechanisms are installed at the two ends of the stainless steel reaction pipe and can cool the two ends of the stainless steel reaction pipe. Therefore, the influence of high temperature on the sealing ring on the sealing flange is reduced, the sealing ring is prevented from being aged and damaged due to high temperature, the production efficiency is greatly improved, the maintenance cost is reduced, and the performance index of a product is improved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum heat treatment furnace technical field, concretely is a kind of vacuum reaction cavity cooling structure. BACKGROUND

[0002] Vacuum heat treatment furnace is applicable to the vacuum sintering, annealing and dysprosium permeation of magnetic material, superconducting material, alloy material and the process such as neodymium iron boron. The dysprosium permeation process is carried out in high-temperature vacuum or atmosphere protection state, and the reaction cavity needs to be rotated, the temperature in the reaction cavity of reaction stainless steel is very high, and the sealing ring on the sealing flange is often damaged due to high temperature, which affects the vacuum degree and leads to the decline of product performance index or even scrap, which brings many inconveniences to production. SUMMARY

[0003] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides a vacuum reaction cavity cooling structure.

[0004] A vacuum reaction cavity cooling structure, comprising a stainless steel reaction tube, the two ends of the stainless steel reaction tube are connected with left pipeline and right pipeline through sealing flanges respectively, a sealing ring is arranged on the sealing flange, a water cooling mechanism is arranged on the sealing flange close to the two ends of the stainless steel reaction tube, the water cooling mechanism comprises a water cooling box, a cold water pipe is arranged in the water cooling box, and the cold water pipe sprays cooling water on the stainless steel reaction tube.

[0005] Further, the bottom of the water cooling box is provided with an inlet pipe and an outlet pipe, the inlet pipe is connected with the cold water pipe, the cold water pipe is in hook-shaped structure, and the outlet pipe is communicated with the water cooling box.

[0006] Further, the two ends of the stainless steel reaction tube are rotatably installed on a base, and the base is located on a cabinet.

[0007] Further, the top of the water cooling box is provided with a cover, and the cover is provided with an observation window.

[0008] Further, the two sides of the outlet of the cold water pipe are provided with baffles.

[0009] Due to the adoption of the above technical scheme, the utility model has the beneficial technical effects that: in the utility model, water cooling mechanisms are installed on the two ends of the stainless steel reaction tube, which can cool the two ends of the stainless steel reaction tube, thereby reducing the influence of high temperature on the sealing ring on the sealing flange, preventing the sealing ring from being damaged due to high temperature, greatly improving production efficiency, reducing maintenance cost and improving product performance index. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 It is a side view of the utility model vacuum reaction cavity cooling structure.

[0011] Figure 2 For the utility model Figure 1 The partial section structure schematic diagram of A-A direction in figure 1 shows that the utility model discloses

[0012] Figure 3 For the utility model a vacuum reaction cavity cooling structure's front view.

[0013] In the figure 1, stainless steel reaction tube, 2, sealing flange, 3, left pipeline, 4, right pipeline, 5, sealing ring, 6, water-cooled box, 7, cold water pipe, 8, water inlet pipe, 9, water outlet pipe, 10, base, 11, cabinet, 12, cover, 13, observation window, 14, baffle. DETAILED DESCRIPTION

[0014] In order to more clearly illustrate the technical scheme of the utility model, the utility model is further described below in combination with the drawings, obviously, the drawings described below are only one embodiment of the utility model, and for the ordinary skilled person in the art, under the premise of not creating the creative labor, according to this drawing and embodiment, other embodiments obtained all belong to the protection scope of the utility model.

[0015] According to Figures 1-3 As shown in figure 1, a vacuum reaction cavity cooling structure, including stainless steel reaction tube 1, the both ends of the stainless steel reaction tube 1 are connected with left pipeline 3 and right pipeline 4 through sealing flange 2 respectively, the sealing flange 2 is equipped with sealing ring 5, and the sealing flange 2 close to both ends on stainless steel reaction tube 1 is equipped with water-cooled mechanism, the water-cooled mechanism includes water-cooled box 6, the water-cooled box 6 is equipped with cold water pipe 7, and the cold water pipe 7 sprays cooling water on stainless steel reaction tube 1.

[0016] In the above and specific technical scheme, the water-cooled mechanism is installed on the both ends of stainless steel reaction tube 1, can cool the both ends of stainless steel reaction tube 1, thereby reducing the influence of high temperature on sealing ring 5 on sealing flange 2, preventing sealing ring 5 from appearing aging damage due to high temperature, greatly improving production efficiency, reducing maintenance cost and improving the performance index of product.

[0017] The bottom of the water-cooled box 6 is equipped with water inlet pipe 8 and water outlet pipe 9, the water inlet pipe 8 is connected with cold water pipe 7, the cold water pipe 7 is hook-shaped structure, the water outlet pipe 9 is communicated with water-cooled box 6, cooling water enters into cold water pipe 7 through water inlet pipe 8, then sprays from the water outlet of cold water pipe 7, sprays on stainless steel reaction tube 1, then flows out through water outlet pipe 9, and cooling water carries out temperature reduction to stainless steel reaction tube 1, reduces the influence on sealing ring 5.

[0018] The stainless steel reaction tube 1 is rotatably installed on the base 10 which is located on the cabinet 11, and the stainless steel reaction tube 1 can be rotated to improve the cooling effect.

[0019] The top of the water cooling box 6 is provided with a cover 12 which is provided with an observation window 13, so that the state of the cooling water can be observed at any time, and the water inflow can be adjusted according to the water flow of the cooling water.

[0020] The both sides of the water outlet of the cold water pipe 7 are provided with baffle plates 14 which can effectively prevent the cooling water from splashing when the cooling water is sprayed on the stainless steel reaction tube 1.

[0021] The above examples are only exemplary embodiments of the present application, and are not used to limit the present application, and the protection scope of the present application is defined by the claims. Those skilled in the art can make various modifications or equivalent replacements to the present application within the spirit and protection scope of the present application, and such modifications or equivalent replacements shall be regarded as falling within the protection scope of the present application.

Claims

1. A vacuum reaction chamber cooling structure comprising a stainless steel reaction tube (1), characterized in that, Two ends of the stainless steel reaction tube (1) are connected with left pipeline (3) and right pipeline (4) through sealing flange (2) respectively, sealing ring (5) is arranged on the sealing flange (2), water cooling mechanism is arranged on the sealing flange (2) near two ends of the stainless steel reaction tube (1), the water cooling mechanism comprises water cooling box (6), cold water pipe (7) is arranged in the water cooling box (6), the cold water pipe (7) sprays cooling water on the stainless steel reaction tube (1).

2. The cooling structure of a vacuum reaction chamber according to claim 1, wherein The bottom of the water cooling box (6) is provided with water inlet pipe (8) and water outlet pipe (9), the water inlet pipe (8) is connected with the cold water pipe (7), the cold water pipe (7) is a hook-shaped structure, and the water outlet pipe (9) is communicated with the water cooling box (6).

3. The cooling structure of a vacuum reaction chamber according to claim 2, wherein Two ends of the stainless steel reaction tube (1) are rotatably installed on the base (10), and the base (10) is located on the cabinet (11).

4. The cooling structure of a vacuum reaction chamber according to claim 3, wherein The top of the water cooling box (6) is provided with cover (12), and the cover (12) is provided with observation window (13).

5. The cooling structure of a vacuum reaction chamber according to claim 4, wherein The two sides of the water outlet of the cold water pipe (7) are provided with baffle (14).