Magnetron sputtering coating clamp of chip film resistor

Abstract

The utility model relates to a magnetron sputtering coating clamp of a chip film resistor. Comprising a bottom plate, two guide strips which are oppositely arranged on the bottom plate and extend in the length direction of the bottom plate, two supporting sliding rails which are oppositely arranged on the bottom plate and located between the two guide strips, and two guide grooves which are formed in the opposite faces of the two guide strips and the supporting sliding rails and extend outwards. The limiting seat is arranged at one end of the bottom plate, the fixing seat is detachably arranged at one end of the bottom plate and is opposite to the limiting seat, the top surfaces of the supporting sliding rails are lower than the top surfaces of the guide grooves, the top surfaces of the guide grooves are lower than the top surface of the limiting seat, the chip-type thin film resistor is supported on the two supporting sliding rails, and the two ends of the chip-type thin film resistor are embedded into the opposite guide grooves respectively. The fixed seat is fixed between the limiting seat and the fixed seat; the composition of the clamp is specifically limited, and the two supporting slide rails are arranged between the two guide strips, so that the chip film resistor can be directly arranged in the clamp through the supporting slide rails, and the resistor which is thin in thickness and made of fragile materials cannot be damaged.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the resistor sputtering coating equipment technical field, specifically related to a sheet type thin film resistor's magnetron sputtering coating fixture. BACKGROUND

[0002] With the continuous iteration development of electronic technology, thin film resistor is widely used in precision electronic equipment due to the characteristics of high resistance precision, small temperature coefficient and high stability, and the market demand is increasing, and the update of vacuum coating special fixture closely related to the process also becomes increasingly critical in the improvement of coating process. Magnetron sputtering is the most common coating technology in the industry, its principle is that the originally free electrons accelerate to the substrate under the action of the electric field, and collide with argon atoms, ionize a large number of argon ions and electrons, argon ions are accelerated to bombard the target under the action of the electric field, and a large number of target atoms (or molecules) are deposited on the surface of the substrate.

[0003] Sheet type thin film resistor needs to be thin film metallized in the production process of ceramic substrate, not only needs to ensure the uniformity, integrity and density of ceramic sheet surface coating in the process of thin film metallization, but also needs to improve the manufacturing efficiency. Before the start of magnetron sputtering, the air in the sputtering machine needs to be pumped out by vacuum pump, which often takes tens of minutes to several hours, so that the vacuum degree in the cavity reaches the required value of the process. The traditional magnetron sputtering fixture can only be used for single size substrate or single loading substrate with small quantity, and it is difficult to shorten the vacuum time, which greatly affects the production efficiency and is difficult to mass production. At the same time, the traditional magnetron sputtering fixture is more complicated to operate, which is easy to cause the damage of substrate, and it is difficult to ensure the uniformity and density of sputtering coating in the sputtering process, which may cause the resistance hole, so that the electrical performance of the product is at risk, and further improvement is needed. SUMMARY

[0004] The utility model aims at overcoming the shortcomings of prior art, provides a sheet type thin film resistor's magnetron sputtering coating fixture.

[0005] The utility model adopts the following technical scheme:

[0006] A kind of sheet film resistor magnetron sputtering fixture, including bottom plate, two guide bars being oppositely arranged on the bottom plate and extending along its length direction, two support slides being oppositely arranged on the bottom plate and located between the two guide bars, two guide grooves being respectively arranged on the opposite faces of the two guide bars and extending outward, limiting seat being arranged at one end of the bottom plate, and fixed seat being detachably arranged at the opposite face of the limiting seat at one end of the bottom plate, the top surface of the support slide is lower than the top surface of the guide groove, and the top surface of the guide groove is lower than the top surface of the limiting seat, sheet film resistor is supported on the two support slides, and two ends are respectively embedded in the opposite guide grooves, and is fixed between the limiting seat and the fixed seat.

[0007] Further, two adjusting components are arranged on the bottom plate to connect and drive the opposite support slides to move up and down, the adjusting component includes a plurality of first adjusting screw holes being spaced apart on the bottom plate and extending along its length direction, a plurality of second adjusting screw holes being arranged on the support slide and opposite to the plurality of first adjusting screw holes, and a plurality of adjusting bolts being respectively screwed through the plurality of first adjusting screw holes and the opposite second adjusting screw holes.

[0008] Further, a connecting component is arranged between the fixed seat and the bottom plate, the connecting component includes two connecting columns being oppositely arranged at one end of the bottom plate, and two connecting holes being oppositely arranged on the opposite faces of the fixed seat and the bottom plate and respectively connected with the two connecting columns.

[0009] Further, the connecting column includes a connecting section connected with the bottom plate and a limiting section arranged at the upper end of the connecting section, the diameter of the limiting section is greater than that of the connecting section, the connecting hole includes an embedded section for the limiting section to be embedded and an extension section connected with the embedded section and extending outward for the connecting section to move, the diameter of the extension section is smaller than that of the limiting section, when the fixed seat is connected with the bottom plate, the limiting section extends into the fixed seat through the embedded section and moves the fixed seat in the direction close to the limiting seat, thereby driving the connecting section to move into the extension section, so that the limiting section is limited in the fixed seat to realize the connection between the fixed seat and the bottom plate.

[0010] Further, the opposite faces of the limiting seat and the fixed seat are formed with outwardly extending accommodation grooves.

[0011] Further, two fixing components are arranged on the bottom plate to respectively fix the two guide bars, the fixing component includes a plurality of first fixing screw holes arranged on the bottom plate, a plurality of second fixing screw holes arranged on the guide bar and opposite to the plurality of first fixing screw holes, and a plurality of fixing bolts respectively screwed through the plurality of first fixing screw holes and the opposite second fixing screw holes.

[0012] Further, the limiting seat is formed with a first connecting clamping groove extending inward from its outer side, the fixed seat is formed with a second connecting clamping groove extending inward from its outer side, and the two ends of the bottom plate are respectively formed with positioning clamping grooves extending inward and opposite to the first connecting clamping groove or the second connecting clamping groove.

[0013] From the above description of the utility model, compared with the prior art, the utility model has the beneficial effects that: the magnetron sputtering film fixture of the application can be applied to the chip film resistor with a length of 70±1.0 mm, a width of 60±1.0 mm and a thickness of 0.2-1 mm. The composition of the fixture is specifically limited, two supporting slides are arranged between the two guide strips, so that the chip film resistor can be directly loaded into the fixture through the supporting slides, and the resistor with thin thickness and fragile material will not be damaged. In addition, the arrangement of the guide groove, the limiting seat and the fixing seat can fix the assembled chip film resistor, which is reliable and simplifies the operation steps.

[0014] The arrangement of the first connecting slot, the second connecting slot and the two positioning slots makes the fixture vertically arranged and clamped with the rotating frame, so that the fixture can be stably vertically arranged in front of the target material in the rotating sputtering process to improve the sputtering effect and ensure the integrity, uniformity and density of the chip film resistor after sputtering and film coating.

[0015] Each of the fixture can load 10 chip film resistors, and the fixture can be used with the rotating frame to realize batch production, greatly improve the sputtering efficiency and reduce the production cost. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a use schematic view of the magnetron sputtering film fixture;

[0017] Figure 2 It is a structure schematic of the fixture Figure One ;

[0018] Figure 3 It is a structure schematic of the fixture Figure Two ;

[0019] Figure 4 It is a partial structure enlargement of the fixture Figure One ;

[0020] Figure 5 It is a partial structure enlargement of the fixture Figure Two ;

[0021] Figure 6 It is a partial structure enlargement of the fixture Figure Three ;

[0022] In the figure, 1 - bottom plate, 2 - guide bar, 3 - support slide rail, 4 - guide groove, 5 - limiting seat, 6 - fixed seat, 7 - adjusting assembly, 8 - connecting assembly, 9 - fixing assembly, 11 - positioning slot, 51 - first connecting slot, 52 - let go of the groove, 61 - second connecting slot, 71 - second adjusting screw hole, 72 - adjusting bolt, 81 - connecting column, 82 - connecting hole, 83 - connecting section, 84 - limiting section, 85 - embedding section, 86 - extension section, 91 - second fixing screw hole, 92 - fixing bolt. DETAILED DESCRIPTION

[0023] The utility model will be further described below through specific implementation.

[0024] Referring to Figures 1 to 6 As shown in the figure, a kind of sheet film resistor magnetron sputtering coating fixture can be vertically fixed on the rotating frame of magnetron sputtering equipment, including bottom plate 1, two guide bars 2 being oppositely arranged on bottom plate 1 and extending along its length direction, two support slide rails 3 being oppositely arranged on bottom plate 1 and located between two guide bars 2, two guide grooves 4 being respectively arranged on the opposite faces of two guide bars 2 and support slide rails 3 and extending outward, limiting seat 5 being arranged at one end of bottom plate 1, fixed seat 6 being detachably arranged at one end of bottom plate 1 and opposite to limiting seat 5, two adjusting assemblies 7 being arranged on bottom plate 1 and connected to drive two support slide rails 3 to move up and down, connecting assembly 8 being arranged between fixed seat 6 and bottom plate 1, and two fixing assemblies 9 for fixing two guide bars 2 on bottom plate 1, wherein the top surface of support slide rail 3 is lower than the top surface of guide groove 4, and the top surface of guide groove 4 is lower than the top surface of limiting seat 5, when assembling sheet film resistor, multiple sheet film resistors are supported on two support slide rails 3, and two ends are opposite to two guide grooves 4 respectively, then pushed inward from the side of two guide bars 2 to the end face and limiting seat 5, then repeat the above operation, complete the assembly of multiple sheet film resistors, after assembly, fixed seat 6 is fixed at one end of bottom plate 1, so that multiple sheet film resistors are fixed between limiting seat 5 and fixed seat 6;Specifically, limiting seat 5 is formed with first connecting slot 51 extending inward from its outer side, fixed seat 6 is formed with second connecting slot 61 extending inward from its outer side, and the two ends of bottom plate 1 are respectively formed with positioning slot 11 extending inward and opposite to first connecting slot 51 or second connecting slot 61, through first connecting slot 51, second connecting slot 61 and two positioning slots 11 and rotating frame clamping, so that the fixture is set in vertical state.

[0025] The adjusting assembly 7 can drive the relative support slide rail 3 to move up and down to adjust the distance between the top surface of the support slide rail 3 and the top surface of the guide groove 4 to adapt to the sputtering requirements of the chip film resistors with different thicknesses. Specifically, the adjusting assembly 7 includes a plurality of first adjusting screw holes arranged on the bottom plate 1 and extending along the length direction thereof, a plurality of second adjusting screw holes 71 arranged on the support slide rail 3 and opposite to the plurality of first adjusting screw holes, and a plurality of adjusting bolts 72 respectively threaded through the plurality of first adjusting screw holes and the opposite second adjusting screw holes 71. When the chip film resistor is assembled, the position of the support slide rail 3 is adjusted according to the thickness of the chip film resistor by the cooperation of the adjusting bolt 72 and the first adjusting screw hole and the second adjusting screw hole 71, so that the distance between the top surface of the support slide rail 3 and the top surface of the guide groove 4 conforms to the thickness of the chip film resistor, and the lamination of the chip film resistor during the assembly process is avoided.

[0026] The connecting assembly 8 includes two connecting columns 81 arranged opposite to each other on one end of the bottom plate 1 and opposite to the limiting seat 5, and two connecting holes 82 arranged opposite to each other on the opposite surface of the fixed seat 6 and the bottom plate 1 and connected with the two connecting columns 81, respectively. Specifically, the connecting column 81 includes a connecting segment 83 connected with the bottom plate 1 and a limiting segment 84 arranged on the upper end of the connecting segment 83, and the diameter of the limiting segment 84 is greater than that of the connecting segment 83. The connecting hole 82 includes an embedding segment 85 in which the limiting segment 84 is embedded, and an extension segment 86 connected with the embedding segment 85 and extending outward to allow the movement of the connecting segment 83, and the diameter of the extension segment 86 is smaller than that of the limiting segment 84. Further, the opposite surface of the limiting seat 5 and the fixed seat 6 is formed with a giving slot 52 extending outward. After the assembly of the chip film resistor is completed, the connecting hole 82 on the fixed seat 6 is opposite to the connecting column 81, so that the limiting segment 84 is inserted into the embedding segment 85 to extend into the fixed seat 6, and the fixed seat 6 is moved in the direction close to the limiting seat 5 to drive the connecting segment 83 to move into the extension segment 86, so that the limiting segment 84 is limited in the fixed seat 6 to realize the connection between the fixed seat 6 and the bottom plate 1. When the clamp is vertically fixed on the rotating frame, the fixed seat 6 is located at the upper end of the clamp and is supported on the connecting column 81 under the action of gravity to fix the assembled chip film resistor. After the sputtering is completed, the fixed seat 6 can be removed from the bottom plate 1 by moving it outward, and then the chip film resistor after sputtering can be pushed out of the guide groove 4 through the giving slot 52, so that the chip film resistor can be quickly removed without easily causing the chip film resistor to be contaminated or broken.

[0027] The fixing assembly 9 includes a plurality of first fixing screw holes arranged on the bottom plate 1, a plurality of second fixing screw holes 91 arranged on the guide strip 2 and opposite to the plurality of first fixing screw holes, and a plurality of fixing bolts 92 respectively threaded through the plurality of first fixing screw holes and the opposite second fixing screw holes 91. The guide strip 2 is fixed on the bottom plate 1 by the cooperation of the fixing bolt 92 and the first fixing screw hole and the second fixing screw hole 91.

[0028] Based on the above-mentioned magnetron sputtering film coating fixture, the operation of assembling and magnetron sputtering processing of the chip type thin film resistor includes the following steps:

[0029] Step 1, first move the fixed seat 6 fixed on the bottom plate 1 outward to the position where the limiting section 84 of the connecting column 81 is located in the embedded section 85 of the connecting hole 82, and then move the fixed seat 6 outward to make it separate from the bottom plate 1;

[0030] Step 2, support the chip type thin film resistor on the end of the two supporting rails 3, make its two sides respectively opposite to the two guide grooves 4, and then move the chip type thin film resistor in the direction close to the limiting seat 5, so that the two ends of the chip type thin film resistor are respectively embedded in the opposite guide grooves 4, and the side edges are in contact with the side surfaces of the limiting seat 5; repeat the above operation until the assembly of multiple chip type thin film resistors is completed;

[0031] Step 3, make the fixed seat 6 opposite to the end of the bottom plate 1, move the fixed seat 6 downward to make the limiting section 84 of the connecting column 81 embedded in the embedded section 85 of the connecting hole 82, and then move the fixed seat 6 in the direction close to the limiting seat 5, so that the connecting section 83 moves to the end of the extending section 86, to fix the multiple chip type thin film resistors between the limiting seat 5 and the fixed seat 6;

[0032] Step 4, fix the fixture assembled with multiple chip type thin film resistors in a vertical state on the rotating frame of the magnetron sputtering equipment, so that the fixed seat 6 is located at the upper end of the fixture, and the chip type thin film resistor is processed by the magnetron sputtering equipment;

[0033] Step 5, after the magnetron sputtering processing is completed, the fixture is disassembled from the rotating frame, and then the fixed seat 6 is removed, and the multiple chip type thin film resistors are pushed outward through the displacement slot 52, and then the multiple chip type thin film resistors completed magnetron sputtering processing are taken out.

[0034] The magnetron sputtering film coating clamp of the application can be applied to a chip type thin film resistor with a length of 70±1.0 mm, a width of 60±1.0 mm and a thickness of 0.2-1 mm, wherein the composition of the clamp is specifically limited, two support rails 3 are arranged between the two guide strips 2, so that the chip type thin film resistor can be directly loaded into the clamp through the support rails 3, and the resistor of the thin and fragile material will not be damaged, in addition, the arrangement of the guide groove 4, the limiting seat 5 and the fixing seat 6 can fix the assembled chip type thin film resistor, which is reliable and simplifies the operation steps; the arrangement of the first connecting slot 51, the second connecting slot 61 and the two positioning slots 11 makes the clamp vertically arranged and clamped with the rotating frame, so that the clamp can stably stand in front of the target material in the rotating sputtering process to overcome the centrifugal force, improve the sputtering effect, ensure the integrity, uniformity and density of the chip type thin film resistor after sputtering and film coating; meanwhile, the clamp can load 10 chip type thin film resistors, and can realize batch production by cooperating with the rotating frame, greatly improving the sputtering efficiency and reducing the production cost.

[0035] Of course, the application is not only suitable for the metallization film coating of the chip type thin film resistor, but also can be used for the ceramic sheet film coating of other chip elements, which can not only improve the sputtering film coating efficiency, but also ensure excellent film coating quality.

[0036] The above is only a preferred embodiment of the application, and therefore cannot limit the range of the application, that is, equivalent changes and modifications made according to the application range and content of the specification should still be within the scope of the application.

Claims

1. A magnetron sputter coating fixture for chip film resistors, characterized by: The utility model provides a sheet film resistor support device, including bottom plate, two guide bars of opposite setting on the bottom plate and extending along its length direction, two support slide rails of opposite setting on the bottom plate and being located between two guide bars, two guide grooves of setting respectively on the opposite face of two guide bars and support slide rail and extending outward, limiting seat of setting on the one end of bottom plate and the fixed seat of detachable setting on the one end of bottom plate and opposite with limiting seat, the top surface of support slide rail is lower than the top surface of guide groove, the top surface of guide groove is lower than the top surface of limiting seat, and sheet film resistor is supported on two support slide rails, and two ends are embedded in opposite guide groove respectively, and is fixed between limiting seat and fixed seat.

2. The magnetron sputter coater fixture for sheet thin film resistors according to claim 1, wherein: Still including two adjusting components of setting on the bottom plate and connecting and leading opposite support slide rail to move up and down, the adjusting component includes multiple first adjusting screw holes of spacing setting on the bottom plate and extending along its length direction, multiple second adjusting screw holes of setting on the support slide rail and opposite with multiple first adjusting screw holes and multiple adjusting bolts of respectively passing through multiple first adjusting screw holes and opposite second adjusting screw hole and screwing.

3. The magnetron sputter coater fixture for sheet thin film resistors of claim 1, wherein: Still including the connecting component of setting between fixed seat and bottom plate, the connecting component includes two connecting columns of opposite setting on the one end of bottom plate and two connecting holes of opposite setting on the opposite face of fixed seat and bottom plate and being connected with two connecting columns respectively.

4. The magnetron sputter coater fixture for sheet thin film resistors of claim 3, wherein: The connecting column includes the connecting section of connecting with bottom plate and the limiting section of setting on the upper end of connecting section, the diameter of limiting section is greater than the diameter of connecting section, the connecting hole includes the embedded section of being embedded with limiting section and the extension section of being connected with embedded section and extending outward for the movement of connecting section, the diameter of extension section is less than the diameter of limiting section, when fixed seat is connected with bottom plate, limiting section extends into fixed seat through embedded section and moves fixed seat along the direction close to limiting seat and further leads connecting section to move into extension section, so that limiting section is limited in fixed seat to realize the connection of fixed seat and bottom plate.

5. The magnetron sputtering coating fixture for a chip thin-film resistor according to claim 1, characterized in that: The opposite face of limiting seat and fixed seat forms the give way groove that extends outward.

6. The magnetron sputter coater fixture for sheet thin film resistors of claim 1, wherein: Still including two fixed components of fixing two guide bars on bottom plate respectively, the fixed component includes multiple first fixed screw holes of setting on the bottom plate, multiple second fixed screw holes of setting on the guide bar and opposite with multiple first fixed screw holes and multiple fixed bolts of respectively passing through multiple first fixed screw holes and opposite second fixed screw hole and cooperating.

7. The magnetron sputter coater fixture for sheet thin film resistors of claim 1, wherein: The limiting seat forms the first connecting clamping groove that extends from its outer side face to the inside, the fixed seat forms the second connecting clamping groove that extends from its outer side face to the inside, and the both ends of bottom plate form the positioning clamping groove that extends to the inside and opposite with first connecting clamping groove or second connecting clamping groove respectively.

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