Reaction furnace with deviation rectifying and conveying device used in CVD (Chemical Vapor Deposition) method
By employing a belt conveyor in the CVD process, and utilizing a combination of stainless steel belt, rollers, and retaining rings, the problem of discontinuous carbon nanotube growth substrates was solved, enabling continuous production and efficient material output, reducing energy consumption, controlling steel belt deviation, and increasing production capacity.
Patent Information
- Application Number
- CN202520294027.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-24
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-02-24
AI Technical Summary
In existing CVD methods, the growth substrate for carbon nanotubes is discontinuous, resulting in low production capacity. Furthermore, it is difficult to achieve automated continuous production under high-temperature conditions, making it difficult to discharge carbon nanotubes and control the offset of thin steel strips.
The belt conveyor system uses a stainless steel belt as the base, equipped with rollers and rigid bars. The base is connected by welding to achieve continuity, and rollers and retaining rings are used for correction to ensure stable operation of the thin steel belt under high temperature conditions.
It enables continuous production of carbon nanotubes, reduces energy consumption, simplifies the material discharge process, controls the deviation of thin steel strips, and improves production efficiency.
Smart Images
Figure CN223852765U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of production equipment for chemical vapor deposition (CVD), specifically a reaction furnace with a correction conveyor device for CVD. Background Technology
[0002] In existing chemical vapor deposition methods, the substrates used to generate deposits are discontinuous in horizontal reactors. For example, carbon nanotubes generated in horizontal reactors in CVD are deposited in containers made of substrate materials such as quartz boats or stainless steel boxes. These containers are arranged one by one in the horizontal furnace and are not interconnected, making it particularly difficult to remove the carbon nanotubes attached to the inner wall of the container.
[0003] Currently, both catalyst addition and carbon nanotube discharge require cooling to room temperature before manual operation. This not only increases energy consumption significantly but also makes unmanned, automated, continuous production difficult under such high temperatures, thus greatly limiting production capacity. Furthermore, existing belt conveyor systems struggle to control the deviation of the thin steel belt within the set range under high-temperature conditions.
[0004] Carbon nanotubes and carbon nanotube fibers, as emerging cutting-edge materials, have attracted widespread attention and research from the scientific and industrial communities due to their unique physical and chemical properties and broad application potential. Currently, there are three methods worldwide for preparing carbon nanotube fibers using carbon nanotubes: wet spinning, carbon nanotube array spinning, and floating catalytic spinning. Among these, carbon nanotube array spinning produces the highest purity carbon nanotube fibers, but due to the discontinuous and small area of its substrate container, continuous production is not possible, resulting in low production capacity and particularly high prices. In other words, the current technological bottleneck is that the area of the carbon nanotube growth substrate provided by the traditional structure is limited and the operation is intermittent.
[0005] In conclusion, it is urgent to find a solution that can provide an unrestricted growth substrate area for carbon nanotubes and enable continuous production. Utility Model Content
[0006] In view of the problems existing in the prior art, the purpose of this utility model is to provide a reactor with a correction conveying device for CVD process, so as to solve the problems mentioned in the background art.
[0007] To achieve the above object, the utility model provides the following technical scheme: horizontal reaction furnace 1 of continuous production by chemical vapor deposition method includes belt conveyor 2 and furnace body 3, and belt conveyor 2 includes belt 2A, roller 4 and rigid strip 6;Belt 2A is the substrate of deposit prepared by CVD method, and the outer envelope of roller 4 is crossed through the belt 2A of furnace body 3, and rigid strip 6 is connected with the opposite side of belt 2A and is integrated;Roller 4 includes cylinder 4A and baffle ring 4B, and cylinder 4A includes strip groove 4A1 that is evenly distributed along the circumference, and the circumferential length of adjacent two strip grooves 4A1 is equal to the center distance between adjacent two rigid strips 6 on belt 2A;Baffle ring 4B is located at both ends of cylinder 4A, and includes left baffle ring 4B1 and right baffle ring 4B2, and left baffle ring 4B1 and right baffle ring 4B2 block left end and right end of rigid strip 6 respectively to realize the deviation correction of belt 2A;Furnace body 3 includes initial section 5, reaction section 7 and discharge section 8, and the chemical reaction product grows on belt 2A in reaction section 7 and completes discharge in discharge section 8.
[0008] As a further scheme of the utility model: the reaction furnace 1 includes the reaction furnace for preparing carbon nanotube, and belt 2A includes stainless steel belt.
[0009] As a further scheme of the utility model: rigid strip 6 includes steel strip, and the steel strip includes round steel 6A.
[0010] As a further scheme of the utility model: the connection of rigid strip 6 and belt 2A includes the integrated mode of welding.
[0011] As a further scheme of the utility model: the width of strip groove 4A1 is greater than the width of rigid strip 6, and the length of rigid strip 6 is greater than the width of belt 2A.
[0012] Summarized above, compared with prior art, the utility model adopts a unique structure with belt as the substrate, thus provides a continuous production solution, and the specific advantages are as follows: 1) because the belt in conveyor is continuously operated, so the substrate area in CVD method is unlimited;2) because the conveying belt is planar, so the discharge and cleaning of carbon nanotube are particularly easy;3) energy consumption is low;4) under high temperature condition, the offset of thin steel belt can be controlled within the set range. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 It is the structure schematic drawing of belt conveyor 2 and furnace body 3 of horizontal reaction furnace 1, also the structure schematic drawing of belt 2A, roller 4 and rigid strip 6 of belt conveyor 2, also the structure schematic drawing of cylinder 4A and baffle ring 4B of roller 4, also the structure schematic drawing of left baffle ring 4B1 and right baffle ring 4B2 of baffle ring 4B, also the structure schematic drawing of initial section 5, reaction section 7 and discharge section 8 of furnace body 3;
[0014] Figure 2 is Figure 1 an A-A sectional view of
[0015] Figure 3 is Figure 1 an I partial enlarged view of
[0016] Figure 4 is Figure 1 a B view of
[0017] Figure 5 is Figure 4 a partial enlarged view of II in
[0018] Figure 6 is Figure 4 a C-C view of
[0019] Figure 7 is a structural schematic view of the integral furnace body 3.
[0020] reaction furnace 1, belt conveying device 2, belt 2A, furnace body 3, roller 4, cylinder 4A, strip-shaped groove 4A1, stop ring 4B, left stop ring 4B1, right stop ring 4B2, initial section 5, rigid strip 6, round steel 6A, reaction section 7, discharging section 8. DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0022] Please refer to Figures 1-7 In the embodiments of the present application, the horizontal reaction furnace 1 produced continuously by the chemical vapor deposition method comprises a belt conveying device 2 and a furnace body 3. The belt conveying device 2 comprises a belt 2A, a roller 4 and a rigid strip 6. The belt 2A is a substrate for preparing deposits by the CVD method. The belt 2A passes through the furnace body 3 and is enveloped by the roller 4. The rigid strip 6 is connected to the reverse side of the belt 2A as a whole. The roller 4 comprises a cylinder 4A and a stop ring 4B. The cylinder 4A comprises strip-shaped grooves 4A1 distributed uniformly along the circumference. The circumferential length of the adjacent two strip-shaped grooves 4A1 is equal to the center distance between the adjacent two rigid strips 6 on the belt 2A. The stop ring 4B is located at both ends of the cylinder 4A and comprises a left stop ring 4B1 and a right stop ring 4B2. The left stop ring 4B1 and the right stop ring 4B2 stop the left end and the right end of the rigid strip 6 respectively to realize the deviation correction of the belt 2A. The furnace body 3 comprises an initial section 5, a reaction section 7 and a discharging section 8. The chemical reaction product grows on the belt 2A in the reaction section 7 and is discharged in the discharging section 8.
[0023] It should be noted that the roller 4 comprises a driving roller and a driven roller.
[0024] The reaction furnace 1 comprises a reaction furnace for preparing carbon nanotubes, and the belt 2A comprises a stainless steel belt.
[0025] The rigid strip 6 comprises a steel strip, and the steel strip comprises a round steel 6A.
[0026] The connection between the rigid strip 6 and the belt 2A comprises a welded integrated mode.
[0027] The width of the strip-shaped groove 4A1 is greater than the width of the rigid strip 6, and the length of the rigid strip 6 is greater than the width of the belt 2A.
[0028] In the description of the utility model, it needs to be explained that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "front", "back" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the utility model, and in the utility model, it also needs to be explained that the terms "mounting", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally formed, or it can be mechanically connected, or it can be indirectly connected through an intermediate medium, and the specific meaning of the terms in the utility model can be understood according to the specific circumstances.
[0029] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.
Claims
1. A reaction furnace for use in a CVD method having a tape rectifying conveyer, characterized by The horizontal reaction furnace (1) for continuous production by chemical vapor deposition method comprises a belt conveying device (2) and a furnace body (3), the belt conveying device (2) comprises a belt (2A), rollers (4) and rigid strips (6); the belt (2A) is a substrate for depositing a deposit by CVD method, the belt (2A) passing through the furnace body (3) is enveloped by the rollers (4), and the rigid strips (6) are connected with the opposite side of the belt (2A) integrally; the rollers (4) comprise a cylinder (4A) and a retaining ring (4B), the cylinder (4A) comprises strip-shaped grooves (4A1) distributed uniformly along the circumference, the circumferential length of two adjacent strip-shaped grooves (4A1) is equal to the center distance between two adjacent rigid strips (6) on the belt (2A); the retaining ring (4B) is located at both ends of the cylinder (4A) and comprises a left retaining ring (4B1) and a right retaining ring (4B2), the left retaining ring (4B1) and the right retaining ring (4B2) block the left end and the right end of the rigid strip (6) respectively to realize the deviation correction of the belt (2A); the furnace body (3) comprises an initial section (5), a reaction section (7) and a discharge section (8), a chemical reaction product grows on the belt (2A) in the reaction section (7) and is discharged in the discharge section (8).
2. A reactor for CVD method having a tape rectifying and conveying device according to claim 1, characterized in that The reaction furnace (1) comprises a reaction furnace for preparing carbon nanotubes, and the belt (2A) comprises a stainless steel belt.
3. A reactor for CVD method having a tape rectifying and conveying device according to claim 2, characterized in that The rigid strip (6) comprises a steel strip, and the steel strip comprises a round steel (6A).
4. A reactor for CVD method having a tape rectifying and conveying device according to claim 3, characterized in that The connection of the rigid strip (6) with the belt (2A) comprises a welding integral mode.
5. The reactor for CVD method with a tape straightening and conveying device according to claim 1, characterized in that The width of the strip-shaped groove (4A1) is greater than the width of the rigid strip (6), and the length of the rigid strip (6) is greater than the width of the belt (2A).