Horizontal laminar flow high-uniformity air duct of anaerobic high-temperature atmosphere furnace

Abstract

The utility model discloses a horizontal laminar flow high-uniformity air duct of an anaerobic high-temperature atmosphere furnace. The horizontal laminar flow high-uniformity air duct comprises a motor, an axial flow fan blade, an air outlet shutter, an air suction shutter, a box body, an electric heating pipe, a main control box, a main shaft, a flow guide plate, an air inlet and fins, the output end of the motor is fixedly connected with a main shaft, the main shaft is fixedly connected with axial-flow fan blades, and the axial-flow fan blades are arranged in the box body; the uniform air duct structure is designed, the axial flow fan blades are driven by the motor to rotate at a high speed, heat released by the electric heating pipe in the bottom air duct is effectively and uniformly blown to the air outlet louver area, the air volume and the air direction are adjusted through the air outlet louver, and it is ensured that airflow is kept in a horizontal laminar flow state and can stably enter a sample layer; according to the airflow circulation mechanism, the uniform distribution of the internal temperature is realized, the heating efficiency and the temperature uniformity are remarkably improved, and a more stable and reliable thermal environment is provided for a sample test.

Description

TECHNICAL FIELD

[0001] The utility model relates to anaerobic high temperature atmosphere furnace technical field, especially in kind of anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct. BACKGROUND

[0002] With the rapid development of intelligent technology, especially the rapid development of semiconductor industry, the demand for high-temperature baking equipment is increasing, and the quality requirement of equipment is higher and higher; at present, whether in the semiconductor industry wafer (photoresist PI, PBO, BCB) solidification or in the LED manufacturing industry baking glass substrate, because it needs to be carried out in an oxygen-free, high-temperature environment, anaerobic high-temperature atmosphere furnace will be frequently used; anaerobic high-temperature atmosphere furnace is a kind of equipment that is often used in military industry, automobile, electronics and other industries.

[0003] At present, the high-temperature baking equipment on the domestic market is mainly high-temperature aging, which is simple in structure and single in function, and cannot meet the development of semiconductor industry and high-performance electronic industry, mainly having the following defects: one, the test box is of upper air outlet and lower air return structure, the upper sample will block the wind blowing to the lower sample, and the temperature uniformity is poor; two, if the cross section of the upper sample is large or the gap between the placed samples is dense, the bottom sample has no wind blowing, which affects the accuracy of sample test data; three, the sample layer is generally configured with 2 layers, which cannot meet the large batch sample test, and the work efficiency is low; four, the space required for placing the heater is large, which wastes the placement space and increases the equipment cost; at present, the anaerobic high-temperature atmosphere furnace of the same kind has poor baking effect as a whole, and cannot meet the use of semiconductor industry and high-performance electronic industry, especially in wafer solidification and PC multilayer sample baking, the sample heating uniformity is poor, which is easy to cause sample damage and economic loss. CONTENT OF THE UTILITY MODEL

[0004] The utility model aims at providing a kind of anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct to solve the problems raised in the above background.

[0005] In order to solve the above technical problems, the utility model provides the following technical scheme: a kind of anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct, including box, the side outer wall of box is fixedly connected with motor, the output end of motor is fixedly connected with main shaft, main shaft is fixedly connected with shaft flow fan blade, and shaft flow fan blade is arranged in box, the side of shaft flow fan blade is provided with guide plate, and guide plate is fixedly connected on the inner wall of box, frame is fixedly connected on guide plate, the bottom end of guide plate is provided with electric heating tube, and electric heating tube is fixedly connected on the inner wall of box.

[0006] As a further technical scheme of the utility model, the one side of frame is provided with air outlet louver, the other side of frame is provided with air inlet louver, and the air outlet louver and air inlet louver are all fixedly connected on the deflector, and the one side outer wall of deflector is provided with air inlet.

[0007] As a further technical scheme of the utility model, the inner wall of frame is fixedly connected with horizontal partition plate and vertical partition plate.

[0008] As a further technical scheme of the utility model, the one side outer wall of box body is fixedly connected with main control box, and motor is arranged in main control box, the one side outer wall of main control box is fixedly connected with cooling fan, and the one side outer wall of main control box is provided with cooling hole corresponding to the position of cooling fan.

[0009] As a further technical scheme of the utility model, the fin is fixedly connected on electric heating tube, and through hole is formed in fin.

[0010] As a further technical scheme of the utility model, the one side outer wall of box body is hingedly connected with protective door, and the lower surface of box body is fixedly connected with supporting leg.

[0011] As a further technical scheme of the utility model, the one side outer wall of main control box is fixedly connected with display screen.

[0012] Compared with the prior art, the utility model has the advantages that: the utility model is designed with uniformity air duct structure, the heat released by electric heating tube in bottom air duct is effectively blown to air outlet louver area through high-speed rotation of shaft flow fan blade driven by motor, air volume and air direction are adjusted through air outlet louver, air flow keeps horizontal laminar flow state, can stably enter sample layer and is discharged from another end, the air flow circulation mechanism not only realizes uniform distribution of internal temperature, but also significantly improves heating efficiency and temperature uniformity, provides more stable and reliable heat environment for sample test, and the design of multilayer sample layer frame structure can satisfy large batch sample test, not only greatly improves work efficiency, but also ensures uniformity of gap between samples, further guarantees uniformity of temperature distribution, thereby effectively avoids test error caused by uneven temperature, significantly improves accuracy of sample test data, the design of fin heating tube structure not only fully utilizes internal space of equipment, but also significantly expands contact area with air flow through fin, thereby further improves uniformity of air flow temperature, the existence of fin not only accelerates heat transfer, but also makes whole heating process more efficient and uniform, and provides more ideal heat exchange environment for sample test. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0014] Figure 1 It is a whole three-dimensional structure schematic diagram of the present application.

[0015] Figure 2 It is a whole front view cut structure schematic diagram of the present application.

[0016] Figure 3 It is a front view structure schematic diagram of the frame of the present application.

[0017] Figure 4 It is a three-dimensional structure schematic diagram of the electric heating tube of the present application.

[0018] In the figure: 1, motor; 2, axial flow fan blade; 3, air outlet louver; 4, transverse partition; 5, air inlet louver; 6, box body; 7, electric heating tube; 8, main control box; 9, heat dissipation fan; 10, heat dissipation hole; 11, main shaft; 12, guide plate; 13, air inlet; 14, frame; 15, vertical partition; 16, fin; 17, through hole; 18, supporting leg; 19, protective door; 20, display screen. DETAILED DESCRIPTION

[0019] In order to make the technical scheme and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical scheme in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0020] Please refer to the drawings of the present application Figure 1 - the drawings of the present application Figure 4The utility model provides an embodiment: an anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct, including the box 6, the side outer wall of box 6 is fixedly connected with motor 1, the output of motor 1 is fixedly connected with main shaft 11, the main shaft 11 is fixedly connected with axial fan blade 2, and axial fan blade 2 sets up in the box 6, the side of axial fan blade 2 is provided with the fairlead 12, and the fairlead 12 is fixedly connected on the inner wall of box 6, the fairlead 12 is fixedly connected with frame 14, the bottom of fairlead 12 is provided with electric heating tube 7, and electric heating tube 7 is fixedly connected on the inner wall of box 6, axial fan blade 2 adopts SUS304 material processing, diameter 450mm, air outlet section is big, can wide range air outlet, forms laminar flow effect, the inner plate of box 6 is the senior SUS304 stainless steel plate processing, and the outer plate adopts cold-rolled steel sheet baking varnish processing and is equipped with the reinforcing framework, fills glass fibre insulation cotton between the inner and outer plate, and the thickness of heat preservation material is 100mm;The side of frame 14 is provided with air outlet louvre 3, the other side of frame 14 is provided with air inlet louvre 5, and air outlet louvre 3 and air inlet louvre 5 are all fixedly connected on the fairlead 12, the side outer wall of fairlead 12 is provided with air inlet 13, and air outlet louvre 3 and air inlet louvre 5 adopt senior SUS304 stainless steel plate processing, can adjust the air volume and the direction of wind, make it can smoothly enter sample layer, guarantee test area air forms horizontal laminar flow;The inner wall of frame 14 is fixedly connected with cross partition 4 and vertical partition 15, and cross partition 4 and vertical partition 15 are used to build sample layer;The side outer wall of box 6 is fixedly connected with main control box 8, and motor 1 sets up in main control box 8, the side outer wall of main control box 8 is fixedly connected with cooling fan 9, and the position of cooling fan 9 is set up on the side outer wall of main control box 8 and is provided with the heat dissipation hole 10, and cooling fan 9 and heat dissipation hole 10 are used for the heat dissipation in main control box 8;Electric heating tube 7 is fixedly connected with fin 16, and the through hole 17 is set up on fin 16, and fin 16 is used to increase the contact area of electric heating tube 7 and airflow, improves heating and heat effect, and the through hole 17 is used for airflow to pass through;The side outer wall of box 6 is hinged with protective door 19, and the lower surface of box 6 is fixedly connected with support leg 18, and protective door 19 is used to seal the internal space, and support leg 18 is used to support box 6;The side outer wall of main control box 8 is fixedly connected with display screen 20, and display screen 20 is used to show equipment operating state and data.

[0021] Working principle: when using the utility model, first, the sample is put into the sample layer, the sample layer is composed of frame 14, transverse partition plate 4 and vertical partition plate 15, then the protective door 19 is closed, the motor 1 in the main control box 8 drives the axial flow fan blade 2 to rotate through the main shaft 11 during the test process, the axial flow fan blade 2 refers to the fan blade whose blade inlet and outlet air flow direction is along the axis, when the motor 1 drives the axial flow fan blade 2 to rotate, the blade on the axial flow fan blade 2 sucks the air flow heated by the bottom end electric heating tube 7 from the air inlet 13 and discharges along the axial direction under the pushing of the blade, the air flow enters the air outlet louver 3 to adjust the air volume and air direction, ensures that the air flow maintains the horizontal laminar flow state, so that it can smoothly enter the sample layer and is discharged from the other end air suction louver 5, along the air duct formed by the guide plate 12 and is heated and circulated through the through hole 17 on the fin 16, the electric heating tube 7 significantly expands the contact area with the air flow through the fin 16 during the process, so as to further improve the uniformity of the air flow temperature, the existence of the fin 16 not only accelerates the heat transfer, but also makes the whole heating process more efficient and uniform, provides a more ideal heat exchange environment for the sample test, wherein the protective door 19 on the box body 6 is used for sealing the internal space, the heat dissipation fan 9 and the heat dissipation hole 10 are used for heat dissipation in the main control box 8, the supporting leg 18 is used for supporting the box body 6, and the display screen 20 is used for displaying the equipment running state and data.

[0022] In the description of the utility model, it is to be explained that, unless there is definite and limited, the term "installation", "connection", "connection" should be broad sense, for example, can be fixed connection, can be detachable connection, or integrally connected, can be mechanical connection, can be electrical connection, can be direct connection, can be indirectly connected through the intermediate medium, can be the communication of two elements inside. For ordinary skilled in the art, the above-mentioned terms can be understood in the specific meaning in the utility model according to the specific circumstances.

[0023] The device embodiments described above are only schematic, wherein the units illustrated as separate components can or can not be physically separate, and the components displayed as units can or can not be physical units, i.e., can be located in one place, or can be distributed on multiple network units. Part or all of the modules can be selected to achieve the purpose of the embodiment scheme according to actual needs. Those skilled in the art can understand and implement without creative labor.

[0024] Finally, it should be noted that: the above examples are used to illustrate the technical solutions of the present application, but not limited to; although the present application is described in detail with reference to the foregoing examples, those skilled in the art should understand that: it can still be modified to the technical solutions recorded in the foregoing examples, or part of the technical features are replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An anaerobic high-temperature atmosphere furnace horizontal laminar flow high-uniformity air duct comprising a box (6), characterized in that: The side outer wall of the box body (6) is fixedly connected with a motor (1), the output end of the motor (1) is fixedly connected with a main shaft (11), the main shaft (11) is fixedly connected with an axial flow fan blade (2), the axial flow fan blade (2) is arranged in the box body (6), one side of the axial flow fan blade (2) is provided with a guide plate (12), the guide plate (12) is fixedly connected to the inner wall of the box body (6), the guide plate (12) is fixedly connected with a frame (14), the bottom end of the guide plate (12) is provided with an electric heating tube (7), and the electric heating tube (7) is fixedly connected to the inner wall of the box body (6).

2. An anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct according to claim 1, characterized in that: One side of the frame (14) is provided with an air outlet louver (3), the other side of the frame (14) is provided with an air inlet louver (5), and the air outlet louver (3) and the air inlet louver (5) are fixedly connected to the guide plate (12), and the side outer wall of the guide plate (12) is provided with an air inlet (13).

3. An anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct according to claim 2, characterized in that: The inner wall of the frame (14) is fixedly connected with a transverse partition plate (4) and a vertical partition plate (15).

4. The horizontal laminar flow high uniformity air duct for an anaerobic high temperature atmosphere furnace according to claim 1, characterized in that: The side outer wall of the box body (6) is fixedly connected with a main control box (8), and the motor (1) is arranged in the main control box (8), the side outer wall of the main control box (8) is fixedly connected with a cooling fan (9), and the side outer wall of the main control box (8) is provided with a cooling hole (10) corresponding to the position of the cooling fan (9).

5. The horizontal laminar flow high uniformity air duct for an anaerobic high temperature atmosphere furnace according to claim 1, characterized in that: The electric heating tube (7) is fixedly connected with a fin (16), and the fin (16) is provided with a through hole (17).

6. An anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct according to claim 4, characterized in that: The side outer wall of the box body (6) is hingedly connected with a protection door (19), and the lower surface of the box body (6) is fixedly connected with a supporting leg (18).

7. An anaerobic high temperature atmosphere furnace horizontal laminar flow high uniformity air duct according to claim 4, characterized in that: The side outer wall of the main control box (8) is fixedly connected with a display screen (20). The side outer wall of the main control box (8) is fixedly connected with a display screen (20).

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