Halbach array magnetic confinement beam measurement device
By using the Hellbeck array magnetic confinement beam measurement device, a high-intensity magnetic field is generated by a ring-shaped Hellbeck array, which solves the problem of insufficient magnetic field strength and achieves effective confinement of secondary electrons and improves detection accuracy.
Patent Information
- Application Number
- CN202520339268.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-02-28
AI Technical Summary
The existing magnetic confinement magnetic field strength is insufficient to effectively confine secondary electrons, resulting in a longer secondary electron travel distance, which increases the length of the receiving cup, occupies space, and reduces detection accuracy and efficiency.
The Hellbeck array magnetic confinement beam measurement device utilizes a ring-shaped Hellbeck array with N permanent magnets evenly distributed around the axis of the receiving cavity to generate a high-intensity magnetic field, shortening the secondary electron path, and ensuring stable beam entry into the receiving cup through grounding shielding and insulation components.
It effectively shortens the secondary electron path, reduces energy loss, improves detection accuracy and efficiency, and achieves a compact device structure that is easy to lay out.
Smart Images
Figure CN223857413U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor material processing equipment especially relates to a halbach array magnetic confinement beam measurement device. BACKGROUND
[0002] In the field of beam detection, magnetic confinement technology has always been a key link, which effectively confines the beam to achieve accurate beam detection. The traditional magnetic confinement method usually relies on conventional magnetic field generating devices, but these devices have significant deficiencies in magnetic field confinement capability.
[0003] Because the existing magnetic confinement magnetic field strength is limited, it cannot effectively confine the secondary electrons. When the beam impacts the receiving device, secondary electrons will be generated, and the weak magnetic field is difficult to control the travel of these secondary electrons, resulting in the lengthening of the travel of the secondary electrons. In order to adapt to this lengthened travel, the length of the receiving cup has to be increased to ensure that these secondary electrons can be effectively received. But the increase of the length of the receiving cup will bring a series of problems, such as the overall structure of the device becomes large, occupies more space, is not conducive to the layout and integration of the equipment; at the same time, the too long receiving cup also increases the energy loss of the beam in the transmission process, reduces the accuracy and efficiency of detection.
[0004] Therefore, there is an urgent need for a technical solution that can improve the magnetic field strength to enhance the confinement capability of the secondary electron travel. By improving the magnetic field strength, the travel of the secondary electrons can be effectively shortened, so that the receiving cup can be designed to be shortened. UTILITY MODEL CONTENT
[0005] The utility model aims at providing a halbach array magnetic confinement beam measurement device, which uses a ring-shaped halbach array to magnetically confine the measured beam to shorten the travel of the secondary electrons, thereby realizing the shortening of the receiving cup and making the overall structure more compact and convenient to layout.
[0006] To achieve this purpose, the utility model adopts the following technical solutions:
[0007] The application discloses a Hall array magnetic confinement beam current measurement device for detecting a to-be-detected beam current, which comprises a receiving cup, a grounding shield, a ring-shaped Hall array, a transmitting source and at least one insulating piece; the receiving cup has a cylindrical accommodating cavity; the grounding shield is provided with an avoiding hole which is communicated with the accommodating cavity; the insulating piece is arranged between the receiving cup and the grounding shield; the ring-shaped Hall array comprises N permanent magnets which are uniformly distributed around the axis of the accommodating cavity, and the magnetizing angle between every two adjacent permanent magnets is (720 / N) degrees, wherein N is an integer greater than or equal to four; the transmitting source is used for transmitting the to-be-detected beam current along the axis of the accommodating cavity, so that the to-be-detected beam current impacts on the bottom of the accommodating cavity after passing through the avoiding hole.
[0008] As an optional technical scheme of the Hall array magnetic confinement beam current measurement device, the grounding shield comprises a shielding plate and a shielding tube arranged at one end of the shielding plate, the avoiding hole is arranged on the shielding plate, the shielding tube is sleeved on the receiving cup, and the permanent magnets are fixedly connected to the inner wall of the shielding tube.
[0009] As an optional technical scheme of the Hall array magnetic confinement beam current measurement device, the axis of the avoiding hole is coincident with the axis of the accommodating cavity.
[0010] As an optional technical scheme of the Hall array magnetic confinement beam current measurement device, in a plane perpendicular to the axis of the accommodating cavity, the projection of the avoiding hole is coincident with the projection of the opening of the accommodating cavity.
[0011] As an optional technical scheme of the Hall array magnetic confinement beam current measurement device, the magnetic field strength formed by the ring-shaped Hall array is 5.0 Oe-2000.0 Oe.
[0012] As an optional technical scheme of the Hall array magnetic confinement beam current measurement device, the distance between the permanent magnet and the receiving cup is 0.1 mm-30.0 mm.
[0013] As an optional technical scheme of the Hall array magnetic confinement beam current measurement device, the Hall array magnetic confinement beam current measurement device further comprises a microammeter, the microammeter is electrically connected with the receiving cup, the microammeter is connected with the grounding shield in common, and the microammeter is used for measuring the current signal in the receiving cup.
[0014] As an optional technical scheme of the Hall array magnetic confinement beam current measurement device, the Hall array magnetic confinement beam current measurement device further comprises insulating fixing pins, the number of the insulating fixing pins is same as that of the insulating pieces and the insulating fixing pins are in one-to-one correspondence, the insulating fixing pins pass through the grounding shield and the insulating pieces and are detachably connected to the receiving cup.
[0015] As an alternative technical solution of the Halbach array magnetic confinement beam measurement device, the material of the insulating piece is ceramic or Teflon.
[0016] As an alternative technical solution of the Halbach array magnetic confinement beam measurement device, the material of the receiving cup is graphite, aluminum or stainless steel.
[0017] The utility model discloses the beneficial effect that:
[0018] The cylindrical accommodating cavity of the Halbach array magnetic confinement beam measurement device provides a stable receiving space for the to-be-measured beam, facilitating the convergence of the beam and subsequent detection. The relief hole of the grounding shielding piece is in communication with the accommodating cavity, allowing the beam to smoothly enter the receiving cup, while the grounding shielding piece can reduce external electromagnetic interference, ensuring the smooth entry of the beam and the stability of the test environment. The insulating piece is clamped between the receiving cup and the grounding shielding piece, which can prevent current interference between the receiving cup and the grounding shielding piece, prevent current leakage, and ensure the accuracy of the test. The annular Halbach array is arranged around the axis of the accommodating cavity by N permanent magnets, and the magnetization direction of adjacent permanent magnets is changed by (720 / N) degrees, which can generate a specific distribution of high-strength magnetic field to magnetically confine the to-be-measured beam, reduce the measurement deviation caused by secondary electrons during the measurement of the to-be-measured beam, and facilitate subsequent detection. The enhancement of the magnetic field strength helps to improve the confinement ability of the secondary electrons, effectively shortens the travel of the secondary electrons, and thus the receiving cup can be designed to be shortened, making the overall structure of the Halbach array magnetic confinement beam measurement device more compact and facilitating the layout. It can also reduce the energy loss of the beam during transmission, improve the accuracy and efficiency of beam detection. The emission source emits the to-be-measured beam along the axis of the accommodating cavity, ensuring that the beam can accurately impact the bottom of the accommodating cavity, providing a stable beam source for testing and realizing effective testing of the to-be-measured beam. The beam can more accurately impact the bottom of the accommodating cavity, facilitating subsequent detection. BRIEF DESCRIPTION OF DRAWINGS
[0019] Figure 1 is the axial cross-sectional view of the Halbach array magnetic confinement beam measurement device provided by the utility model embodiment;
[0020] Figure 2 is the cross-sectional view of the Halbach array magnetic confinement beam measurement device provided by the utility model embodiment.
[0021] In the figure:
[0022] 100, receiving cup; 200, permanent magnet; 300, insulating piece; 400, grounding shielding piece; 410, shielding plate; 420, shielding tube; 600, insulating fixing pin. DETAILED DESCRIPTION
[0023] The technical solutions of the present application will be described clearly and completely in connection with the drawings. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.
[0024] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and moreover, the first feature is "above", "above" and "above" of the second feature, which includes the first feature above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature is "below", "below" and "below" of the second feature, which includes the first feature below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0025] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0026] The embodiments of the present application will be described in detail below, and the examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation on the present application.
[0027] As Figure 1 and Figure 2As shown, the embodiment provides a Halbach array magnetic confinement beam measurement device for detecting a to-be-measured beam flow, the Halbach array magnetic confinement beam measurement device comprising a receiving cup 100, a grounding shield 400, a ring-shaped Halbach array, a transmitting source and at least one insulating piece 300; the receiving cup 100 has a cylindrical accommodating cavity; the grounding shield 400 has a through hole, the through hole being in communication with the accommodating cavity; the insulating piece 300 is clamped between the receiving cup 100 and the grounding shield 400; the ring-shaped Halbach array comprises N permanent magnets 200, all the permanent magnets 200 being uniformly distributed around an axis of the accommodating cavity, and a magnetization angle between every two adjacent permanent magnets 200 being (720 / N) degrees, wherein N is an integer greater than or equal to four; the transmitting source is used for transmitting the to-be-measured beam flow along the axis of the accommodating cavity, so that the to-be-measured beam flow impacts the bottom of the accommodating cavity after passing through the through hole.
[0028] The cylindrical accommodating cavity of the Halbach array magnetic confinement beam measurement device provides a stable receiving space for the to-be-measured beam flow, facilitating the convergence and subsequent detection of the beam flow. The through hole of the grounding shield 400 is in communication with the accommodating cavity, so that the beam flow can smoothly enter the receiving cup 100, while the grounding shield 400 can reduce external electromagnetic interference, ensure the smooth entry of the beam flow, and ensure the stability of the test environment; the insulating piece 300 is clamped between the receiving cup 100 and the grounding shield 400, which can prevent current interference between the receiving cup 100 and the grounding shield 400, prevent current leakage, and ensure the accuracy of the test. The ring-shaped Halbach array is arranged around the axis of the accommodating cavity by N permanent magnets 200, and the magnetization direction of adjacent permanent magnets 200 is changed by (720 / N) degrees, which can generate a specific distribution of high-strength magnetic field, magnetically confine the to-be-measured beam flow, reduce the measurement deviation caused by secondary electrons during the measurement of the to-be-measured beam flow, and facilitate subsequent detection; the enhancement of the magnetic field strength helps to improve the confinement ability of the secondary electrons, effectively shortens the travel of the secondary electrons, and thus the receiving cup 100 can be designed to be shortened, so that the overall structure of the Halbach array magnetic confinement beam measurement device is more compact and convenient for layout, and the energy loss of the beam flow during transmission can be reduced, improving the accuracy and efficiency of the beam flow detection. The transmitting source transmits the to-be-measured beam flow along the axis of the accommodating cavity, ensuring that the beam flow can accurately impact the bottom of the accommodating cavity, providing a stable beam flow source for the test, and realizing effective testing of the to-be-measured beam flow. The beam flow can more accurately impact the bottom of the accommodating cavity, facilitating subsequent detection.
[0029] wherein, Figure 1 the axial cross section is parallel to the axis of the accommodating cavity, Figure 2 the transverse cross section is perpendicular to the axis of the accommodating cavity.
[0030] In this embodiment, the specific structure and working principle of the ring-shaped Halbach array are well known in the art and are familiar to those skilled in the art, and will not be described here.
[0031] The embodiment takes the case of the to-be-measured beam being an ultratomic beam and N being 8 as an example for illustration. By placing the receiving cup 100 in the magnetic field formed by the annular Halbach array, the trajectory of the secondary electrons in the ultratomic beam can be constrained by using the Lorentz force. Due to the low mass and small charge of the secondary electrons, the motion trajectory of the secondary electrons will change significantly under the action of the Lorentz force, so that the secondary electrons impacting the bottom of the containing cavity are deflected and re-impact the cavity wall of the containing cavity, and are finally re-absorbed by the cavity wall. The above constraint effectively reduces the interference of escaped charges on the beam measurement and the current signal deviation caused by the escape of secondary electrons, and improves the accuracy of the to-be-measured beam measurement.
[0032] Exemplarily, the grounding shield 400 includes a shielding plate 410 and a shielding tube 420 arranged at one end of the shielding plate 410, the avoidance hole is arranged on the shielding plate 410, the shielding tube 420 is sleeved on the receiving cup 100, and the permanent magnet 200 is fixedly connected to the inner wall of the shielding tube 420. Specifically, the shielding plate 410 and the shielding tube 420 are detachably connected by bolts.
[0033] The shielding tube 420 of the grounding shield 400 is sleeved on the receiving cup 100, and the permanent magnet 200 is fixedly connected to the inner wall of the shielding tube 420. This structure design makes the whole device structure more compact, and the connection of each component is stable. Meanwhile, the shielding tube 420 can enhance the shielding effect, which can better control the reasonable distribution of the magnetic field, so that the magnetic field can more effectively act on the to-be-measured beam, improve the beam constraint effect, and facilitate the installation and fixation of the permanent magnet 200.
[0034] Exemplarily, the axis of the avoidance hole coincides with the axis of the containing cavity.
[0035] The axis of the avoidance hole coincides with the axis of the containing cavity, so that the to-be-measured beam can smoothly pass through the avoidance hole and enter the containing cavity along a straight line, reducing scattering and deviation in the beam transmission process, and improving the transmission efficiency and detection accuracy of the beam.
[0036] Further, in the plane perpendicular to the axis of the containing cavity, the projection of the avoidance hole coincides with the projection of the opening of the containing cavity.
[0037] In the plane perpendicular to the axis of the containing cavity, the projection of the avoidance hole coincides with the projection of the opening of the containing cavity, which further ensures that the beam can completely enter the containing cavity, avoids the loss of the beam due to the non-coincidence of the projections, and further improves the detection accuracy and beam receiving efficiency.
[0038] In the embodiment, the magnetic field strength formed by the annular Halbach array is 5.0 Oe-2000.0 Oe.
[0039] The magnetic field strength formed by the annular Halbach array is 5.0 Oe-2000.0 Oe. The magnetic field strength range can provide suitable restraint effect for the to-be-measured beam, so that the beam can be kept stable during transmission, while avoiding the influence of too strong or too weak magnetic field on the detection result. Too low magnetic field strength cannot effectively constrain the beam, and too high magnetic field strength can cause abnormal change of the beam trajectory. The range can ensure stable transmission of the beam during detection.
[0040] Exemplarily, the distance between the permanent magnet 200 and the receiving cup 100 is 0.1 mm-30.0 mm.
[0041] The distance range can ensure that the magnetic field generated by the permanent magnet 200 has suitable action strength on the beam in the receiving cup 100, so that the beam is not weakened due to too far distance, and the installation of the Halbach array magnetic confinement beam measurement device and the normal work of other components are not affected due to too close distance.
[0042] In the embodiment, the Halbach array magnetic confinement beam measurement device further comprises a microammeter, the microammeter is electrically connected with the receiving cup 100, and the microammeter is connected with the grounding shield 400 in common. The microammeter is used to measure the current signal in the receiving cup 100.
[0043] The microammeter is electrically connected with the receiving cup 100 and connected with the grounding shield 400 in common, so that the current signal in the receiving cup 100 can be accurately measured. Through analysis of the current signal, the related parameters of the to-be-measured beam can be obtained, which provides data support for detection and analysis of the beam, and helps to understand the characteristics of the beam.
[0044] Exemplarily, the Halbach array magnetic confinement beam measurement device further comprises an insulating fixing pin 600, the number of the insulating fixing pin 600 is the same as that of the insulating piece 300 and one-to-one correspondence, and the insulating fixing pin 600 penetrates through the grounding shield 400 and the insulating piece 300 and is detachably connected to the receiving cup 100.
[0045] The number of the insulating fixing pin 600 is the same as that of the insulating piece 300 and one-to-one correspondence, and the insulating fixing pin 600 penetrates through the grounding shield 400 and the insulating piece 300 and is detachably connected to the receiving cup 100, so that the assembly and disassembly of the Halbach array magnetic confinement beam measurement device are facilitated. When the Halbach array magnetic confinement beam measurement device needs to be maintained or replaced, the maintenance and replacement of each component can be easily completed, thereby improving the maintenance convenience and use flexibility of the Halbach array magnetic confinement beam measurement device. Meanwhile, the insulating fixing pin 600 further enhances the insulation effect, thereby ensuring the safety and stability of the Halbach array magnetic confinement beam measurement device.
[0046] Exemplarily, the Hall-Effect array magnetic confinement beam measurement device further comprises a microammeter, the microammeter is electrically connected with the receiving cup 100, the microammeter is connected with the ground shield 400 in common, and the microammeter is used to measure the current signal in the receiving cup 100. Specifically, the measurement range of the microammeter is 0-2000.0 μA, and the accuracy level is 0.5 level.
[0047] The microammeter is electrically connected with the receiving cup 100 and is connected with the ground shield 400 in common, which can eliminate the measurement error caused by magnetic field interference and measure the current signal in the receiving cup 100 in real time. Through analysis of the current signal, the related parameters of the to-be-measured beam, such as the intensity of the to-be-measured beam, can be obtained, thereby providing data support for the test and research of the to-be-measured beam.
[0048] The receiving cup 100 is directly electrically connected with the microammeter, and the receiving cup 100 is isolated from the shielding plate 410 by the insulating piece 300, which causes the microammeter to only capture the net charge signal after the secondary electron collision in the receiving cup 100, thereby shielding external electromagnetic interference and improving the current measurement accuracy.
[0049] Further, the material of the insulating piece 300 is ceramic or Teflon.
[0050] These two materials have good insulation performance, which can further enhance the electrical isolation effect of the insulating piece 300 and effectively prevent current conduction. In addition, ceramic has good high-temperature resistance and chemical stability, and Teflon has low friction coefficient and corrosion resistance. These two materials can withstand the heat generated by the impact of the to-be-measured beam and will not chemically react with the to-be-measured beam, which can ensure the stable performance of the insulating piece 300 in different working environments and help to prolong the service life of the Hall-Effect array magnetic confinement beam measurement device.
[0051] In this embodiment, the material of the receiving cup 100 is graphite, aluminum or stainless steel.
[0052] Graphite has good electrical conductivity and high-temperature resistance, and can withstand the high temperature generated by the impact of the beam. At the same time, its electrical conductivity helps to collect the charge information generated by the impact of the beam. Aluminum is light in weight, which facilitates the installation and movement of the Hall-Effect array magnetic confinement beam measurement device, and has certain electrical conductivity and corrosion resistance. Stainless steel has high strength and corrosion resistance, which can ensure the stability and reliability of the structure of the receiving cup 100 during long-term use, and is suitable for more complex and harsh working environments. The selection of multiple materials can optimize the performance of the receiving cup 100 according to different detection requirements and beam characteristics, thereby improving the applicability of the Hall-Effect array magnetic confinement beam measurement device.
[0053] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, it is not necessary and also impossible to exhaust all the implementation modes. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application claims.
Claims
1. A Halbach array magnetic confinement current measurement device for detecting a current flow under test, characterized in that, The Halbach array magnetic confinement beam measurement device comprises: a receiving cup (100) having a cylindrical accommodating cavity; a grounding shield (400) having an avoiding hole penetrating through and communicating with the accommodating cavity; at least one insulating piece (300) clamped between the receiving cup (100) and the grounding shield (400); a ring-shaped Halbach array comprising N permanent magnets (200), all of which are uniformly distributed around the axis of the accommodating cavity, and the magnetization angle between every two adjacent permanent magnets (200) is (720 / N) degrees, wherein N is an integer greater than or equal to four; a transmitting source for transmitting the to-be-measured beam along the axis of the accommodating cavity so that the to-be-measured beam impacts the cavity bottom of the accommodating cavity after passing through the avoiding hole.
2. The Halbach array magnetic confinement beam measurement device of claim 1, wherein, The grounding shield (400) comprises a shielding plate (410) and a shielding tube (420) arranged at one end of the shielding plate (410), the avoiding hole is arranged on the shielding plate (410), the shielding tube (420) is sleeved on the receiving cup (100), and the permanent magnets (200) are fixedly connected to the inner wall of the shielding tube (420).
3. The Halbach array magnetic confinement beam measurement device of claim 1, wherein, The axis of the avoiding hole coincides with the axis of the accommodating cavity.
4. The Halbach array magnetic confinement beam measurement device of claim 3, wherein, In a plane perpendicular to the axis of the accommodating cavity, the projection of the avoiding hole coincides with the projection of the opening of the accommodating cavity.
5. The Halbach array magnetic confinement beam measurement device of claim 1, wherein, The magnetic field strength formed by the ring-shaped Halbach array is 5.0 Oe-2000.0 Oe.
6. The Halbach array magnetic confinement beam measurement device of claim 1, wherein, The distance between the permanent magnet (200) and the receiving cup (100) is 0.1 mm-30.0 mm.
7. The Halbach array magnetic confinement beam measurement device of claim 1, wherein, The Halbach array magnetic confinement beam measurement device further comprises a microammeter, the microammeter is electrically connected with the receiving cup (100), the microammeter is connected with the grounding shield (400) in common, and the microammeter is used for measuring the current signal in the receiving cup (100).
8. The Halbach array magnetic confinement beam measurement device of claim 1, wherein, The Halbach array magnetic confinement beam measurement device further comprises an insulating fixing pin (600), the number of the insulating fixing pin (600) is the same as that of the insulating piece (300) and one-to-one correspondence, the insulating fixing pin (600) penetrates through the grounding shield (400) and the insulating piece (300) and is detachably connected to the receiving cup (100).
9. The Halbach array magnetic confinement beam measurement device of claim 8, wherein, The material of the insulating piece (300) is ceramic or Teflon.
10. The Halbach array magnetic confinement beam measurement device of any of claims 1-9, wherein, The material of the receiving cup (100) is graphite, aluminum or stainless steel.