Novel magnetic type nanoimprint structure

Abstract

The utility model relates to a novel magnetic type nanoimprint structure, and aims to solve the problems of high equipment cost, single pressure source and the like in the traditional nanoimprint technology. The core innovation of the structure is that a permanent magnet or strong magnetic material is embedded into the edge of the nanoimprint film, and an electromagnetic coil is arranged below the film. And the magnetic field intensity generated by the electromagnetic coil is controlled by adjusting the current of the electromagnetic coil, so that the accurate adjustment of the imprinting pressure is realized. By means of the design, the imprinting pressure is more flexible and controllable, and the limitation that a traditional method depends on mechanical pressure or a single air pressure source is avoided. And meanwhile, by means of the electromagnetic regulation and control mode, the equipment cost is effectively reduced, the precision and stability in the imprinting process are improved, and wide application prospects are achieved. The technology can be widely applied to the fields of nanometer manufacturing, microelectronic processing and the like.

Description

TECHNICAL FIELD

[0001] The utility model relates to nanometer imprinting technical field more specifically relates to a novel magnetic formula nanometer imprinting structure. BACKGROUND

[0002] With the rapid development of nanotechnology and microelectronic technology, as a kind of high-precision, low-cost nanofabrication technology, nanoimprint technology has been widely used in photolithography, thin film processing, sensor manufacturing and other fields. However, the traditional nanoimprint technology still faces some challenges in practical application, especially in equipment cost and imprint pressure control. The existing nanoimprint technology usually relies on mechanical imprinting, air pressure control or hydraulic system to provide pressure, these traditional ways not only have complex structure, high cost, but also limited pressure regulation accuracy and flexibility, it is difficult to meet the high-precision and diversified nanofabrication needs.

[0003] In order to improve the flexibility and cost-effectiveness of nanoimprint technology, in recent years, some researchers have tried to use magnetic field regulation to improve the traditional imprinting technology. However, the existing magnetic field regulation scheme mostly has the problems of not enough simple design, limited regulation range or not accurate enough control method.

[0004] Therefore, how to provide a new type of magnetic formula nanoimprint structure by innovative magnetic force regulation mechanism to realize more accurate and flexible pressure control, and thus improve the nanoimprint technology is a problem that the skilled in the art needs to solve. UTILITY MODEL CONTENT

[0005] Therefore, the utility model provides a new type of magnetic formula nanoimprint structure, which uses permanent magnet or strong magnetic material combined with electromagnetic coil, adjusts the magnetic field intensity through current, so as to realize accurate control of imprinting pressure, which can effectively reduce the equipment cost, improve the precision and stability in the imprinting process, solve many problems in the traditional nanoimprint technology, and has broad application prospect.

[0006] In order to achieve the above purpose, the utility model provides the following technical scheme,

[0007] A new type of magnetic formula nanoimprint structure, which comprises a nanoimprint film and a permanent magnet embedded at the edge of the nanoimprint film, and an electromagnetic coil is arranged below the nanoimprint film, the electromagnetic coil is provided with current by an adjustable power supply, and the magnetic field intensity of the electromagnetic coil is controlled by adjusting the current, so as to realize the adjustment of the imprinting pressure.

[0008] Preferably, the permanent magnet or strong magnetic material is uniformly embedded in the four corners of the nanoimprint film.

[0009] Preferably, the electromagnetic coil is a current-adjustable coil, the coil is wound by copper wire, the winding form is spiral, the diameter of the coil is preferably 10 cm, and the number of turns of the coil is preferably 500 turns.

[0010] Preferably, the current provided by the adjustable power supply has an adjustment range of 0 to 5 amperes, and by controlling the size of the current, the magnetic field strength can be accurately controlled, thereby adjusting the imprinting pressure of the nano-imprint film on the object to be imprinted.

[0011] Preferably, the adjustment range of the imprinting pressure is 0 to 1000 Newtons.

[0012] Via the technical solution described above, compared with the prior art, the magnetic attraction type nano-imprint structure disclosed in the present application has the following advantages: 1. The current adjustment mode of the electromagnetic coil can achieve high-precision pressure control, meeting the requirements of different nano-manufacturing or micro-electronic processing processes for imprinting force precision and flexibility; 2. The magnetic field adjustment imprinting force mode is more stable and reliable than the traditional mechanical or hydraulic system, and can reduce the wear and maintenance cost of mechanical parts; 3. The adjustment range of the technology is wide, and the adjustable imprinting pressure ranges from 0 to 1000 Newtons, which is suitable for different process requirements. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings described below are only part of the embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative labor on the basis of the provided drawings.

[0014] Figure 1 The accompanying drawings are schematic diagrams of the main structure of the present application. DETAILED DESCRIPTION

[0015] The technical solutions in the embodiments of the present application will be described in detail below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0016] The novel magnetic attraction type nano-imprint structure of the present application comprises a nano-imprint film 1 and a permanent magnetic material 2 embedded and connected to the edge of the nano-imprint film 1, and an electromagnetic coil 3 is arranged below the nano-imprint film 1, the electromagnetic coil 3 is provided with current by an adjustable power supply 4, the electromagnetic coil 3 controls its magnetic field strength by adjusting the current, thereby adjusting the imprinting pressure.

[0017] The nano-imprint film material is preferably a high-transparency, high-temperature-resistant silica gel material, the thickness of the nano-imprint film is about 50 microns, the edge-embedded permanent magnetic material 2 of the nano-imprint film is preferably a neodymium-iron-boron (NdFeB) magnet strip, and further, the size of the magnet strip is preferably 5 mm x 5 mm x 1 mm. The neodymium-iron-boron magnet has a strong magnetic field strength and can provide sufficient magnetic force for the imprinting process.

[0018] The permanent or strong magnetic material is uniformly embedded in the four corners of the nano-imprint film, and the magnetic energy product of each magnet is 300 kJ / m 3 The arrangement of the neodymium-iron-boron magnet enables the magnetic field to form a stable magnetic field distribution at the edge of the imprint film, providing a basis for electromagnetic coil regulation.

[0019] The electromagnetic coil 3 adopts an adjustable current design, the coil is wound with copper wire, the winding form is spiral, the diameter of the coil is preferably 10 cm, and the number of turns of the coil is preferably 500 turns. The electromagnetic coil 3 is arranged below the nano-imprint film 1 and maintains a distance of about 2 mm from the surface of the nano-imprint film 1. The electromagnetic coil 3 can change the magnetic field strength by adjusting the current size, thereby controlling the interaction force between the magnet and the electromagnetic coil.

[0020] The current regulation system adopts an adjustable power supply 4 to provide current for the electromagnetic coil 3, and the adjustment range of the current is 0 to 5 amperes. By controlling the size of the current, the magnetic field strength can be accurately controlled, and then the imprinting pressure of the nano-imprint film on the object to be imprinted can be adjusted. The current regulation system is connected with a computer control system, and automatic control is realized through the computer to adjust the current size in real time, thereby realizing automatic adjustment of the imprinting force.

[0021] Specific imprinting process: when nano-imprinting is performed, the electromagnetic coil 3 controls the strength of the magnetic field by adjusting the current. According to the properties of the object to be imprinted and the required imprinting precision, the current size is adjusted to produce appropriate imprinting force. The adjustment range of the imprinting force is 0 to 1000 Newton, which can meet the needs of different processes.

[0022] Further, the magnetic attraction cost of the present application is relatively low, the edge of the nano-imprint film is directly clamped by the magnet or strong magnetic material, without the need to implant metal particles into the inside of the film through nano technology. The present application mainly provides pressure in the actual nano-imprinting process through magnetic attraction, and in addition, the film in the present application is not affected by other materials, has high light transmittance, and can be normally heat-imprinted and nano-imprinted.

[0023] The novel magnetic suction type nano imprinting structure can accurately control the magnetic field intensity generated by adjusting the current in the electromagnetic coil, so that the imprinting pressure of the imprinting film on the object to be imprinted can be flexibly adjusted.

[0024] The above description of disclosed embodiments enables those skilled in the art to carry out or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A novel magnetic nanoimprint structure, characterized by, The application relates to a nano-imprint film (1) and a permanent magnetic material (2) inlaid and connected to the edges of the nano-imprint film (1), wherein an electromagnetic coil (3) is arranged below the nano-imprint film (1), the electromagnetic coil (3) is provided with current by an adjustable power supply (4), the magnetic field intensity of the electromagnetic coil (3) is controlled by adjusting the current, so that the imprint pressure is adjusted. The permanent magnetic or strong magnetic material (2) is uniformly inlaid in four corners of the nano-imprint film (1).

2. The novel magnetic nanoimprint structure according to claim 1, characterized in that, The electromagnetic coil (3) is a coil with adjustable current, the coil is made of copper wire and is spirally wound, the diameter of the coil is preferably 10 cm, and the number of turns of the coil is preferably 500 turns.

3. The novel magnetic nanoimprint structure according to claim 1, characterized in that, The adjustable power supply (4) provides current with an adjustment range of 0-5 A, the magnetic field intensity can be accurately controlled by controlling the size of the current, and then the imprint pressure of the nano-imprint film on the object to be imprinted is adjusted.

4. The novel magnetic nanoimprint structure according to claim 1, wherein, The adjustment range of the imprint pressure is 0-1000 N.

5. The novel magnetic nanoimprint structure according to claim 4, characterized in that, ​

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