Super-atom beam source magnetic screening device
By using a magnetic array to form an enhanced magnetic field in a superatomic beam source magnetic screening device to screen out monatomic ions, the problem of monatomic ions causing defects on the wafer surface is solved, the proportion of superatomic ions in the superatomic beam is increased, and the process effect of semiconductor processing is improved.
Patent Information
- Application Number
- CN202520337678.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-02-28
AI Technical Summary
In semiconductor processing, the bombardment of wafer surfaces by monatomic ions can cause surface defects, affecting smoothness and lattice quality. Existing technologies are unable to effectively screen out monatomic ions from superatomic beams to improve process performance.
The superatomic beam source magnetic screening device, composed of an outer shell and cylindrical components, uses a magnetic array to form a magnetic field that is enhanced from the center to the edge in the internal channel, thereby screening out monatomic ions and retaining superatomic ions. Specifically, the magnetic field causes monatomic ions to deviate from the center of the channel and hit the wall or disappear after exiting the channel.
This effectively increases the proportion of superatomic ions in the superatomic beam, improves the process effect, and ensures wafer surface quality and processing accuracy.
Smart Images
Figure CN223858130U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor processing especially relates to a super atom beam source magnetic screening device. BACKGROUND
[0002] In the semiconductor processing process, plasma etching can remove or modify the microstructure of the surface of the semiconductor material, and one scheme is to adopt super atom beam polishing and etching wafer, which can better guarantee the processing quality and precision requirement.
[0003] The forming process of super atom beam is as follows: after the adiabatic expansion of gas molecules, the thermal motion sharply reduces, the van der waals force between molecules combines the collided gas molecules together to form gas clusters (i.e. super atom), and not all gas molecules can combine to form super atom, those uncombined gas molecules exist alone and are ionized to form single atom ion. If the single atom ion bombards the surface of the wafer, it will have a significant injection effect on the wafer surface lattice, causing surface defects, affecting the surface smoothness and lattice quality.
[0004] Therefore, it is urgent to provide a super atom beam source magnetic screening device to screen out single atom ions in the super atom beam, to retain and improve the proportion of super atom ions in the super atom beam, and to improve the process effect. UTILITY MODEL CONTENT
[0005] The utility model aims at providing a super atom beam source magnetic screening device to screen out single atom ions in the super atom beam, to retain and improve the proportion of super atom ions in the super atom beam, and to improve the process effect.
[0006] To achieve this purpose, the utility model adopts the following technical scheme:
[0007] The utility model provides a super atom beam source magnetic screening device, which comprises a shell and a cylindrical part located in the shell, the cylindrical part is provided with an internal passage, and the internal passage is used for screening out single atom ions in the ionized beam source.
[0008] A magnetic array is arranged between the shell and the cylindrical part, the magnetic array is arranged around the outer periphery of the cylindrical part, and a magnetic field is formed in the internal passage from the center area of the passage to the edge of the passage, so that the super atom ions in the ionized beam source pass through the internal passage, and the single atom ions deviate from the center of the internal passage and disappear on the wall surface of the internal passage or deviate from the center of the internal passage and disappear after shooting out of the internal passage.
[0009] As an optional technical scheme of the super atom beam source magnetic screening device, the magnetic array comprises a plurality of magnets, and all the magnets are arranged around the outer wall of the cylindrical part.
[0010] As an optional technical scheme of the super atom beam source magnetic screening device, the number of the magnets is not less than four, and the magnetization directions of the adjacent two magnets are different.
[0011] As an optional technical scheme of the super atom beam source magnetic screening device, the magnet extends along the length direction of the internal channel, and the length of the magnet is equal to or less than the length of the internal channel.
[0012] As an optional technical scheme of the super atom beam source magnetic screening device, a cladding layer is arranged between the magnetic array and the shell, and the cladding layer surrounds the outer periphery of the magnetic array.
[0013] As an optional technical scheme of the super atom beam source magnetic screening device, a cooling structure is arranged in the cladding layer for heat dissipation and cooling.
[0014] As an optional technical scheme of the super atom beam source magnetic screening device, the magnetic array is fixed to the outer wall of the cylindrical member or the inner wall of the cladding layer.
[0015] As an optional technical scheme of the super atom beam source magnetic screening device, the length of the internal channel ranges from 20mm to 200mm.
[0016] As an optional technical scheme of the super atom beam source magnetic screening device, the diameter of the internal channel ranges from 10mm to 80mm.
[0017] As an optional technical scheme of the super atom beam source magnetic screening device, the cylindrical member is made of an etching-resistant material.
[0018] Beneficial effects:
[0019] The utility model provides a kind of ultra-atom beam source magnetic screening device, the ultra-atom beam source magnetic screening device includes shell and the cylindrical piece in shell, cylindrical piece is equipped with internal passage, internal passage is used to screen single atom ion in ionized beam source;Shell and cylindrical piece between are equipped with magnetic array, magnetic array is arranged around the outer periphery of cylindrical piece, and form the magnetic field that is enhanced from passage center area to passage edge in internal passage, to make the ultra-atom ion in ionized beam source pass through internal passage, and single atom ion deviates internal passage center and disappears after hitting internal passage wall surface or deviates internal passage center and disappears after shooting internal passage. By being equipped with shell and cylindrical piece, and being equipped with magnetic array between shell and cylindrical piece, it is formed in internal passage that the magnetic field that is gradually enhanced from passage center area to passage edge, and single atom ion in ionized beam source can be screened using the internal passage of cylindrical piece;Specifically, when ionized beam source enters internal passage, under the action of magnetic field, ultra-atom ion passes through internal passage, and single atom ion deviates internal passage center and disappears after hitting internal passage wall surface or deviating passage center and shooting internal passage, so as to screen single atom ion, retain and improve the proportion of ultra-atom ion, effectively improve process effect. BRIEF DESCRIPTION OF DRAWINGS
[0020] Fig. 1 It is the structure schematic diagram of the ultra-atom beam source magnetic screening device provided by the utility model embodiment;
[0021] Fig. 2 It is the sectional view of the ultra-atom beam source magnetic screening device provided by the utility model embodiment;
[0022] Fig. 3 It is the partial sectional view of the ultra-atom beam source magnetic screening device provided by the utility model embodiment.
[0023] In the drawing:
[0024] 10, shell;20, cylindrical piece;21, internal passage;30, magnetic array;31, magnet;40, interlayer;50, support seat. DETAILED DESCRIPTION
[0025] The utility model will be further described in detail in combination with the drawings and embodiments.It can be understood that the specific embodiments described here are only used to explain the utility model, and not limit the utility model.In addition, it needs to be explained that, for convenience of description, only part of the structure related to the utility model is shown in the drawing, not all structures.
[0026] In the description of the utility model, unless another definite provision and limitation, the term "link", "connect", "fix" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication or two element's mutual action relation.For the ordinary skill in the art, the above-mentioned term can be understood in the utility model according to the specific meaning of the specific situation.
[0027] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can include the first and second features direct contact, also can include the first and second features are not direct contact but contact through the additional feature between them.Moreover, the first feature is "on", "above" and "on" the second feature includes the first feature is directly above and obliquely above the second feature, or just indicates that the horizontal height of the first feature is higher than the second feature.The first feature is "under", "below" and "under" the second feature includes the first feature is directly below and obliquely below the second feature, or just indicates that the horizontal height of the first feature is less than the second feature.
[0028] In the description of the embodiment, the orientation or position relationship of the terms "on", "under", "left", "right" and the like is based on the orientation or position relationship shown in the drawing, only for the convenience of description and simplification of operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model.In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.
[0029] As Figs. 1 to 3 As shown in the utility model provides a kind of super atomic beam source magnetic screening device, the super atomic beam source magnetic screening device includes shell 10 and the cylindrical piece 20 located in shell 10, cylindrical piece 20 is equipped with internal passage 21, internal passage 21 is used to screen single atom ion in ionized beam source;Shell 10 and cylindrical piece 20 between being equipped with magnetic array 30, magnetic array 30 is arranged around the outer periphery of cylindrical piece 20, and in internal passage 21 Formed by passage center area to passage edge enhanced magnetic field, to make super atom ion in ionized beam source pass through internal passage 21, and single atom ion deviates internal passage 21 center and disappears on internal passage 21 wall or deviates internal passage 21 center and shoots out internal passage 21 and disappears.
[0030] By setting the shell 10 and the cylinder 20, and setting the magnetic array 30 between the shell 10 and the cylinder 20, a magnetic field enhanced from the center of the channel to the edge of the channel is formed in the internal channel 21, and the single atom ions in the ionized beam source are screened out by the internal channel 21 of the cylinder 20; Specifically, when the ionized beam source enters the internal channel 21, under the action of the magnetic field, the super atom ions pass through the internal channel 21, and the single atom ions deviate from the center of the internal channel 21 and hit the wall of the internal channel 21 and disappear or deviate from the center of the internal channel 21 and shoot out of the internal channel 21 and disappear, thereby screening out the single atom ions, retaining and increasing the proportion of super atom ions, and effectively improving the process effect.
[0031] Assuming that the ion mass is m, the charge is e, the kinetic energy is E, and the uniform magnetic field is B. The ion does a circular motion in the field, and the motion radius is: R=(√2E / eB)*m^(1 / 2). It can be understood that for super atom ions and single atom ions with the same kinetic energy, only the difference in mass, the mass of super atom ions is several hundred to several thousand times that of single atom ions, and the deflection radius will differ by tens to hundreds of times, so the single atom ions with low mass have small motion radius and are more easily deflected and filtered out, and the super atom ions with high mass have large deflection radius and are almost not deflected by the magnetic field, so they can pass through the internal channel 21 of the super atom beam source magnetic screening device.
[0032] Specifically, the shell 10 is in a cylindrical shape, the shell 10 is sleeved outside the cylinder 20, the center of the cylinder 20 has an internal channel 21, and the cross section of the internal channel 21 is circular.
[0033] Further, the cylinder 20 is made of an etching-resistant material. In this embodiment, the cylinder 20 is made of an etching-resistant material with the ability to adsorb or neutralize single atom ions, such as graphite material, aluminum material or stainless steel material. By adopting the etching-resistant material to make the cylinder 20, the cylinder 20 can have good stability and use performance during the working process of the super atom beam source magnetic screening device; by adopting the etching-resistant material with the ability to adsorb or neutralize single atom ions, the single atom ions are deflected and hit the wall of the internal channel 21 under the action of the magnetic field, and the single atom ions are adsorbed or neutralized by the material properties of the cylinder 20, so that the single atom ions disappear, and the screening of the single atom ions is completed.
[0034] If the cylindrical member 20 is made of graphite material, when the monatomic ions hit the wall surface of the internal passage 21, the monatomic ions will interact with the carriers in the graphite, leading to mutual recombination or annihilation of the monatomic ions and the carriers, and releasing energy; if the cylindrical member 20 is made of aluminum material, when the monatomic ions hit the wall surface of the internal passage 21, the monatomic ions will interact with the aluminum oxide film on the surface of the aluminum material, leading to adsorption or neutralization of the monatomic ions by the film, and macroscopically, the monatomic ions disappear; if the cylindrical member 20 is made of stainless steel material, when the monatomic ions hit the wall surface of the internal passage 21, the monatomic ions will interact with the chromium oxide protective layer on the surface of the stainless steel material, leading to adsorption or neutralization of the monatomic ions, and macroscopically, the monatomic ions disappear.
[0035] Optionally, the super-atomic beam source magnetic screening device further comprises a baffle, which is arranged outside the shell 10 and used for screening the monatomic ions in the ionized beam source. By arranging the internal passage 21 and the baffle, part of the monatomic ions are deflected and hit the wall surface of the internal passage 21 and disappear, and the remaining part of the monatomic ions deviate from the center of the internal passage 21 and are emitted from the internal passage 21 to hit the baffle and disappear, thereby completing the screening of the monatomic ions; the baffle and the internal passage 21 are used in cooperation to screen the monatomic ions, which can effectively avoid the temperature of the cylindrical member 20 being too high due to all the monatomic ions hitting the wall surface of the internal passage 21.
[0036] Further, the magnetic array 30 comprises a plurality of magnets 31, which are arranged around the outer wall of the cylindrical member 20; the number of the magnets 31 is not less than four, and the magnetization directions of the adjacent two magnets 31 are different. By arranging the plurality of magnets 31 around the outer wall of the cylindrical member 20, it is helpful to make the magnetic field distribute in the internal passage 21; by arranging at least four magnets 31, the magnetization directions of the adjacent two magnets 31 are different, and by using the superposition of the magnetic field, a magnetic field gradually increasing from the center region of the passage to the edge of the passage is formed in the internal passage 21.
[0037] It can be understood that the screening of the monatomic ions is related to the magnetic field strength and the size of the internal passage 21. Optionally, the length of the internal passage 21 ranges from 20 mm to 200 mm; the diameter of the internal passage 21 ranges from 10 mm to 80 mm. In this embodiment, the magnets 31 extend along the length direction of the internal passage 21, and the length of the magnets 31 is equal to or less than the length of the internal passage 21; the length of the magnets 31 ranges from 20 mm to 160 mm. In other embodiments, the length and the diameter of the internal passage 21 can also be adaptively adjusted according to the magnetic field strength.
[0038] In the embodiment, the magnets 31 are permanent magnets; and the plurality of magnets 31 are arranged in a Halbach array in a circular ring shape. The Halbach array is a special magnet structure, which is obtained by arranging permanent magnets with different magnetization directions in a certain rule, so as to converge magnetic field lines on one side of the magnet and weaken the magnetic field lines on the other side, thereby obtaining a relatively ideal one-sided magnetic field and optimizing the magnetic field distribution.
[0039] Optionally, a cladding layer 40 is arranged between the magnetic array 30 and the shell 10, and the cladding layer 40 surrounds the outer periphery of the magnetic array 30. By arranging the cladding layer 40, the magnetic array 30 and the shell 10 can be separated, and the cladding layer 40 can protect the magnets 31 and improve the service life of the magnets 31.
[0040] Optionally, a cooling structure is arranged in the cladding layer 40 for heat dissipation. By arranging the cooling structure in the cladding layer 40, the cooling structure can be used for cooling by cooling, thereby solving the problem of temperature rise of the cylindrical member 20 due to the impact of the single-atom ions on the inner channel 21 wall.
[0041] The cooling medium used by the cooling structure can be a liquid or a gas. In the embodiment, the cladding layer 40 is provided with a cooling cavity, and the cladding layer 40 is fixed to the shell 10 by a connecting member; the cooling cavity is provided with a coil pipe, and an inlet pipe and an outlet pipe in communication with the coil pipe are arranged, and the inlet pipe and the outlet pipe extend to the outside of the shell 10; and the cooling medium is water. The water flows in the inlet pipe, the coil pipe and the outlet pipe to achieve heat dissipation and cooling of the cylindrical member 20.
[0042] The magnetic array 30 is fixed to the outer wall of the cylindrical member 20 or the inner wall of the cladding layer 40. The magnets 31 can be fixed to the outer wall of the cylindrical member 20 or the inner wall of the cladding layer 40 by gluing or riveting. By using the gluing or riveting fixing mode, the operation is simple and the cost is low, which can adapt to the connection of special-shaped parts or complex parts, and the stress distribution is more uniform and stress concentration is less likely to occur.
[0043] In the embodiment, the inner wall of the cladding layer 40 has a mounting plane, the cross section of the magnet 31 is isosceles trapezoidal, the lower base of the magnet 31 is attached to the mounting plane, and the upper base of the magnet 31 is attached to the outer wall of the cylindrical member 20. The magnet 31 is provided with 12 magnets arranged in pairs, the magnetization directions of the two magnets on the upper base are the same; and the included angle between the magnetization directions of the two adjacent magnets 31 is 30 degrees. It can be understood that the size and shape of the magnet 31 will affect the magnetic field distribution and strength.
[0044] In the embodiment, the super-atom beam source magnetic screening device further comprises a support seat 50, and the shell 10 is fixed to the support seat 50; the super-atom beam source magnetic screening device further comprises an incident end cover and an exit end cover, and the incident end cover and the exit end cover are arranged at two ends of the shell 10 to limit the cylindrical member 20 and the cladding layer 40; and the super-atom beam source magnetic screening device further comprises a cooling fin between the shell 10 and the exit end cover.
[0045] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent substitution and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application claims.
Claims
1. A magnetic screening device for an ultracold atomic beam source, characterized in that The application relates to a device for ion beam filtering, comprising a housing (10) and a cylindrical member (20) located in the housing (10), wherein the cylindrical member (20) is provided with an internal passage (21) for filtering monatomic ions in an ionized beam source. A magnetic array (30) is arranged between the housing (10) and the cylindrical member (20), and surrounds the outer wall of the cylindrical member (20) and forms a magnetic field in the internal passage (21) which is enhanced from the central region of the passage to the edge of the passage, so that hyperatomic ions in the ionized beam source pass through the internal passage (21), and the monatomic ions deviate from the center of the internal passage (21) and hit the wall of the internal passage (21) and disappear or deviate from the center of the internal passage (21) and shoot out of the internal passage (21) and disappear.
2. The ultracold atomic beam source magnetic selection device of claim 1, wherein, The magnetic array (30) comprises a plurality of magnets (31), and all the magnets (31) are arranged around the outer wall of the cylindrical member (20).
3. The ultracold atomic beam source magnetic selection device of claim 2, wherein, The number of the magnets (31) is not less than four, and the magnetization directions of two adjacent magnets (31) are different.
4. The ultracold atomic beam source magnetic selection device of claim 2, wherein, The magnets (31) extend along the length direction of the internal passage (21), and the length of the magnets (31) is equal to or less than the length of the internal passage (21).
5. The ultracold atomic beam source magnetic screening device of claim 1, wherein, A cladding layer (40) is arranged between the magnetic array (30) and the housing (10), and the cladding layer (40) surrounds the outer wall of the magnetic array (30).
6. The ultracold atomic beam source magnetic selection device of claim 5, wherein, The cladding layer (40) is provided with a cooling structure for heat dissipation.
7. The ultracold atomic beam source magnetic selection device of claim 5, wherein, The magnetic array (30) is fixed to the outer wall of the cylindrical member (20) or the inner wall of the cladding layer (40).
8. The ultracold atomic beam source magnetic selection device of any of claims 1-7, wherein, The length of the internal passage (21) ranges from 20 mm to 200 mm.
9. The ultracold atomic beam source magnetic selection device of any of claims 1-7, wherein, The diameter of the internal passage (21) ranges from 10 mm to 80 mm.
10. The ultracold atomic beam source magnetic selection device of any of claims 1-7, wherein, The cylindrical member (20) is made of an etching-resistant material.