Substrate edge detection equipment

Abstract

The utility model provides substrate edge detection equipment, and relates to the technical field of semiconductor processing. Comprising a base station, and a bearing assembly, an illumination unit, a reflector unit and a shooting unit which are arranged on the base station; the bearing assembly is used for placing a substrate and driving the substrate to operate; the lighting unit is arranged close to the bearing assembly, and the lighting unit is used for lighting the substrate; the reflector unit is arranged close to the lighting unit, and the reflector unit is used for reflecting light on the substrate to the shooting unit; the shooting unit is arranged corresponding to the reflecting mirror unit, and the shooting unit is used for carrying out optical imaging on the substrate. The reflecting mirror is a total reflection mirror, light rays are only reflected once through the reflecting mirror, the utilization rate of the reflecting mirror unit to a light source can be improved, and energy waste is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, especially to substrate edge detection equipment. BACKGROUND

[0002] In the manufacturing process of semiconductor devices, in order to realize fine structure processing on the substrate, a process of removing a specific part of the wafer surface film is usually used, such as photolithography. Through the photolithography process, the feature pattern part is finally retained on the substrate. In order to improve product yield, an online process defect detection module is necessary. In the substrate manufacturing process, the online process defect detection module needs to effectively identify common process defects such as dust, process residues, grinding defects, crystal defects, and scratch defects. At the same time, the online process defect detection module can also identify the warping amount of the substrate caused by multiple exposures, which is also an important data concerned in the substrate manufacturing process.

[0003] The existing substrate edge detection equipment has low light source utilization rate, causing energy waste and low space utilization, resulting in large overall occupied space of the equipment. UTILITY MODEL CONTENTS

[0004] The utility model mainly provides a kind of substrate edge detection equipment to solve the technical problems of low light source utilization rate, energy waste and large occupied space in the above background technology.

[0005] The utility model solves the above technical problems by the technical scheme that

[0006] A kind of substrate edge detection equipment, including base and the bearing assembly, illumination unit, reflector unit and shooting unit being set on the base;The bearing assembly is used to place substrate, and drives the substrate to operate;The illumination unit is close to the bearing assembly setting, and the illumination unit is used to illuminate the substrate;The reflector unit is close to the illumination unit setting, and the reflector unit is used to reflect the light on the substrate to the shooting unit;The shooting unit corresponds the reflector unit setting, and the shooting unit is used to carry out optical imaging to the substrate.

[0007] Optionally, the lighting unit comprises a first lighting assembly and a first splicing mirror; the first lighting assembly is arranged on the base and close to the bearing assembly, the first lighting assembly is used for illuminating the bottom surface of the substrate, and the mirror unit can receive the light of the bottom surface of the substrate and reflect the light to the shooting unit; the first splicing mirror is arranged corresponding to the first lighting assembly, the first splicing mirror is used for receiving part of the light of the first lighting assembly, reflecting the light to the side surface of the substrate, receiving the light of the side surface of the substrate, reflecting the light of the side surface of the substrate to the mirror unit, and reflecting the light to the shooting unit through the mirror unit.

[0008] Optionally, the first lighting assembly comprises a first frame provided with an opening, a first scattering plate and a first light source; the first frame is arranged on the base, the height of the first frame is lower than the bearing assembly, the first scattering plate is arranged at the opening of the first frame, and the first light source is arranged in the first frame; the first light source is used for irradiating the first scattering plate, the first scattering plate is used for scattering the light of the first light source to the bottom surface of the substrate, and the first splicing mirror is used for receiving part of the light scattered by the first scattering plate, reflecting the light to the side surface of the substrate, and reflecting the light of the side surface of the substrate to the mirror unit; the mirror unit is used for reflecting the light of the bottom surface of the substrate and the light of the side surface of the substrate to the shooting unit.

[0009] Optionally, the first splicing mirror comprises a first reflecting surface and a second reflecting surface, and the included angle between the first reflecting surface and the second reflecting surface is obtuse; in the working state, the substrate is placed on the bearing assembly, the first reflecting surface and the second reflecting surface are located at the side surface of the substrate, the first reflecting surface and the second reflecting surface are used for reflecting the light of the first light source to the side surface of the substrate, and the second reflecting surface is also used for reflecting the light of the side surface of the substrate to the mirror unit.

[0010] Optionally, the lighting unit further comprises a second lighting assembly and a second splicing mirror; the second lighting assembly is arranged on the base and close to the bearing assembly, the second lighting assembly is used for illuminating the surface of the substrate, and the mirror unit can receive the light of the surface of the substrate and reflect the light to the shooting unit; the second splicing mirror is arranged corresponding to the second lighting assembly, the second splicing mirror is used for receiving part of the light of the second lighting assembly, reflecting the light to the chamfered corner of the side surface of the substrate, the mirror unit can receive the light of the chamfered corner of the side surface of the substrate and reflect the light to the shooting unit.

[0011] Optionally, the second lighting assembly comprises a second frame provided with an opening, a second scattering plate and a second light source, the second frame is arranged on the base, the height of the second frame is higher than the bearing assembly, the second scattering plate is arranged at the opening of the second frame, and the second light source is arranged in the second frame; the second light source is used for irradiating the second scattering plate, the second scattering plate is used for scattering light of the second light source to the surface of the substrate, the second splicing mirror is used for receiving part of the light scattered by the second scattering plate and reflecting the light to the chamfer of the side surface of the substrate, and the mirror assembly reflects the light on the surface of the substrate and the light at the chamfer of the side surface of the substrate to the shooting unit.

[0012] Optionally, the mirror unit comprises a first reflection assembly and a second reflection assembly; the first reflection assembly comprises a first mirror frame and a first mirror, the first mirror frame is mounted on the first frame, the first mirror is mounted on the first mirror frame, and the first mirror is used for reflecting the light on the bottom surface of the substrate and the light on the side surface of the substrate to the shooting unit; the second reflection assembly comprises a second mirror frame and a second mirror, the second mirror frame is mounted on the second frame, the second mirror is mounted on the second mirror frame, and the second mirror is used for reflecting the light on the surface of the substrate to the shooting unit.

[0013] Optionally, the shooting unit comprises a bottom surface shooting assembly, the bottom surface shooting assembly comprises a bottom surface lens and a bottom surface camera, the bottom surface lens covers the bottom surface camera, and the bottom surface lens faces the first frame, so that the bottom surface camera receives the light on the bottom surface of the substrate reflected by the first mirror to perform optical imaging.

[0014] Optionally, the shooting unit further comprises a side surface shooting assembly, the side surface shooting assembly comprises a side surface lens and a side surface camera, the side surface lens covers the side surface camera, and the side surface lens faces the first frame, so that the side surface camera receives the light on the side surface of the substrate reflected by the first mirror to perform optical imaging.

[0015] Optionally, the shooting unit further comprises a surface shooting assembly, the surface shooting assembly comprises a surface lens and a surface camera, the surface lens covers the surface camera, and the surface lens faces the second frame, so that the surface camera receives the light on the surface of the substrate reflected by the second mirror to perform optical imaging.

[0016] Optionally, the first mirror, the second mirror, the first splicing mirror and the second splicing mirror are all full mirrors.

[0017] Optionally, the bearing assembly comprises a mounting base, a motor and a stage; the mounting base is arranged on the base and is used for mounting the stage and the motor; the stage is mounted on the mounting base and is used for bearing the substrate; and the motor is mounted in the mounting base and is used for driving the stage to rotate.

[0018] The application provides a substrate edge detection device, which comprises a bearing assembly, an illumination unit, a mirror unit and a shooting unit. The illumination unit illuminates the substrate on the bearing assembly, the mirror unit reflects the light of the substrate to the shooting unit, and the shooting unit takes an image of the substrate. Through relevant image processing, the substrate defect is accurately identified and the substrate warping amount is analyzed. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the present application, the following will briefly introduce the drawings needed in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0020] Figure 1 It is a structural schematic diagram of the substrate edge detection device of the present application;

[0021] Figure 2 It is a cooperation schematic diagram of the substrate placed by the substrate edge detection device of the present application;

[0022] Figure 3 It is a cooperation schematic diagram of the first illumination unit and the mirror unit of the present application;

[0023] Figure 4 It is a cooperation schematic diagram of the second illumination unit and the mirror unit of the present application;

[0024] Figure 5 It is a structural schematic diagram of the bearing assembly and the shooting unit of the present application;

[0025] Figure 6 It is a light path conduction structure schematic diagram of the bottom surface of the substrate of the present application;

[0026] Figure 7 It is a light path conduction structure schematic diagram of the side surface of the substrate of the present application;

[0027] Figure 8 It is a light path conduction structure schematic diagram of the surface of the substrate of the present application.

[0028] Icon: 100 - base; 200 - bearing assembly; 210 - mounting seat; 220 - object table; 300 - illumination unit; 311 - first frame; 312 - first diffusion plate; 313 - first light source; 320 - first mosaic mirror; 321 - first reflecting surface; 322 - second reflecting surface; 331 - second frame; 332 - second diffusion plate; 333 - second light source; 340 - second mosaic mirror; 400 - mirror unit; 410 - first mirror holder; 420 - first mirror; 430 - second mirror holder; 440 - second mirror; 500 - shooting unit; 510 - bottom lens; 520 - bottom camera; 530 - side lens; 540 - side camera; 550 - surface lens; 560 - surface camera; 600 - base plate;

[0029] The object, technical solutions and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. DETAILED DESCRIPTION

[0030] In order to make the object, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0031] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement condition, etc. between components in a certain posture (as shown in the drawings), and if the certain posture changes, the directional indications also change accordingly.

[0032] In the present application, unless otherwise explicitly specified and limited, the terms "connection", "fixation" and the like should be understood broadly, for example, "fixation" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection; can be direct connection, or indirect connection through an intermediate medium; can be internal connection of two elements or interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0033] In addition, if the description of "first", "second" and the like is involved in the embodiments of the present application, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes, for example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, nor in the protection scope required by the present application.

[0034] The existing substrate edge detection device usually adopts a half-mirror, because the transmittance and reflectivity are 50%, the light received by the camera imaging after passing through the half-mirror makes the light source utilization rate low, causing energy waste. In view of the above problems, the embodiments of the present application provide the following technical solutions to overcome the above problems.

[0035] Please refer to Figures 1 to 5 The present application provides a kind of substrate edge detection equipment, including base 100 and setting on the base 100 bearing assembly 200, illumination unit 300, mirror unit 400 and shooting unit 500;The bearing assembly 200 is used to place substrate 600, and drives the substrate 600 rotation;The illumination unit 300 is close to the bearing assembly 200 setting, the illumination unit 300 is used to illuminate the substrate 600;The mirror unit 400 is close to the illumination unit 300 setting, the mirror unit 400 is used to reflect the light on the substrate 600 to the shooting unit 500;The shooting unit 500 corresponds the mirror unit 400 setting, the shooting unit 500 is used to carry out optical imaging to the substrate 600.

[0036] Specifically, bearing assembly 200 is arranged on base 100, illumination unit 300, mirror unit 400 and shooting unit 500 are arranged on base 100 and surround bearing assembly 200, in working state, substrate 600 is placed on bearing assembly 200, bearing assembly 200 drives substrate 600 rotation, illumination unit 300 illuminates substrate 600, mirror unit 400 reflects the light on substrate 600 to shooting unit 500, shooting unit 500 receives reflected light, and completes imaging to substrate 600.

[0037] It should be noted that, in this embodiment, since the substrate is circular, the bearing assembly 200 is arranged to detect the edge of the substrate in a rotatable manner. In some embodiments, when the substrate is of other shapes, such as square, the bearing assembly 200 can move in a multi-axis combined manner to adapt to the profile of the substrate.

[0038] The present application provides a substrate edge detection device, which comprises a bearing assembly 200, an illumination unit 300, a mirror unit 400, and a shooting unit 500. The illumination unit 300 illuminates the substrate 600 on the bearing assembly 200, and the mirror unit 400 further reflects the light of the substrate 600 to the shooting unit 500, so that the shooting unit 500 photographs and images the substrate 600. The mirror in the present application is a full mirror, and the light is reflected only once through the mirror, which can improve the utilization rate of the light source of the mirror unit, avoid waste of energy, reduce heat generation of the light source, and avoid the use of a condenser to increase the structural space of the light source to improve the illumination concentration of the light source.

[0039] In the embodiment of the present application, the illumination unit 300 comprises a first illumination assembly and a first splicing mirror 320. The first illumination assembly is arranged on the base 100 and close to the bearing assembly 200. The first illumination assembly is used to illuminate the bottom surface of the substrate 600, and the mirror unit 400 can receive the light of the bottom surface of the substrate 600 and reflect it to the shooting unit 500. The first splicing mirror 320 is arranged corresponding to the first illumination assembly. The first splicing mirror 320 is used to receive part of the light of the first illumination assembly, reflect it to the side surface of the substrate 600, receive the light of the side surface of the substrate 600, reflect it to the mirror unit 400, and then reflect it to the shooting unit 500 through the mirror unit 400.

[0040] Specifically, after the first illumination assembly illuminates the bottom surface of the substrate 600, the mirror unit 400 receives the light of the bottom surface of the substrate 600 and reflects it to the shooting unit 500, and the shooting unit 500 images the bottom surface of the substrate. The first splicing mirror 320 receives part of the light of the first illumination assembly, reflects it to the side surface of the substrate 600, further receives the light of the side surface of the substrate 600, reflects it to the mirror unit 400, and then reflects it to the shooting unit 500 after the mirror unit 400 receives the light. After the shooting unit 500 receives the light, it images the side surface of the substrate 600. The above-mentioned form uses the same first illumination assembly to illuminate the light of the bottom surface of the substrate 600 and the light of the side surface of the substrate 600, which can save one way of illumination light source. It can be understood that, in some embodiments, one way of light source can be added to illuminate and light the side surface of the substrate 600.

[0041] Please refer to Figures 1 to 8 In the embodiments of the present application, the first lighting assembly comprises a first frame 311 provided with an opening, a first scattering plate 312 and a first light source 313, the first frame 311 is arranged on the base 100, the height of the first frame is lower than the bearing assembly 200, the first scattering plate 312 is arranged at the opening of the first frame 311, and the first light source 313 is arranged in the first frame 311; the first light source 313 is used for irradiating the first scattering plate 312, the first scattering plate 312 is used for scattering the light of the first light source 313 to the bottom surface of the substrate 600, the first splicing mirror 320 is used for receiving part of the light scattered by the first scattering plate 312, reflecting the light to the side surface of the substrate 600, and reflecting the light on the side surface of the substrate 600 to the mirror unit 400; the mirror unit 400 is used for reflecting the light on the bottom surface of the substrate 600 and the light on the side surface of the substrate 600 to the shooting unit 500.

[0042] Specifically, in use, the substrate 600 is placed on the bearing assembly 200, the opening of the first frame 311 faces the back surface of the substrate 600, the first light source 313 irradiates the first scattering plate 312, the first scattering plate 312 scatters the light of the first light source 313 to the bottom surface of the substrate 600, the mirror unit 400 receives the light on the bottom surface of the substrate 600 and reflects it to the shooting unit 500, so that the shooting unit 500 images the bottom surface of the substrate 600. The first splicing mirror 320 receives part of the light scattered by the first scattering plate 312, reflects the light to the side surface of the substrate 600, further receives the light on the side surface of the substrate 600, reflects the light on the side surface of the substrate 600 to the mirror unit 400, the mirror unit 400 receives the light and reflects it to the shooting unit 500, and the shooting unit 500 receives the light and images the side surface of the substrate 600. It should be noted that the first scattering plate 312 can reduce the volume of the first light source 313, improve the uniformity of the light source, and simplify the spatial structure of the first light source 313.

[0043] Please refer to Figures 1 to 8In the embodiment of the present application, the first splicing mirror 320 comprises a first reflecting surface 321 and a second reflecting surface 322, and the included angle between the first reflecting surface 321 and the second reflecting surface 322 is obtuse; in the working state, the substrate 600 is placed on the bearing assembly 200, the first reflecting surface 321 and the second reflecting surface 322 are located at the side of the substrate 600, the first reflecting surface 321 and the second reflecting surface 322 are used for reflecting the light of the first light source 313 to the side of the substrate 600, and the second reflecting surface 322 is used for reflecting the light at the side of the substrate 600 to the reflecting mirror unit 400.

[0044] Specifically, the first reflecting surface 321 and the second reflecting surface 322 of the first splicing mirror 320 receive part of the light scattered by the first scattering plate 312, reflect the light to the side of the substrate 600, and further, the second reflecting surface 322 of the first splicing mirror 320 receives the light at the side of the substrate 600 and reflects the light at the side of the substrate 600 to the reflecting mirror unit 400. After the reflecting mirror unit 400 receives the light, the light is reflected to the shooting unit 500, and after the shooting unit 500 receives the light, the side of the substrate 600 is imaged. It should be noted that the first reflecting surface 321 and the second reflecting surface 322 are arranged close to the side of the substrate 600, and the included angle between the first reflecting surface 321 and the second reflecting surface 322 is obtuse, which is used to better provide illumination for the side of the substrate 600 and improve the imaging accuracy of the shooting unit 500.

[0045] Please refer to Figures 1 to 5 In the embodiment of the present application, the illumination unit 300 further comprises a second illumination assembly and a second splicing mirror 340; the second illumination assembly is arranged on the base 100 and close to the bearing assembly 200, the second illumination assembly is used for illuminating the surface of the substrate 600, and the reflecting mirror unit 400 can receive the light of the surface of the substrate 600 and reflect the light to the shooting unit 500; the second splicing mirror 340 is arranged corresponding to the second illumination assembly, the second splicing mirror 340 is used for receiving part of the light of the second illumination assembly and reflecting the light to the chamfered corner of the side of the substrate 600, and the reflecting mirror unit 400 can receive the light at the chamfered corner of the side of the substrate 600 and reflect the light to the shooting unit 500.

[0046] Specifically, after the second lighting assembly illuminates the surface of the substrate 600, the mirror unit 400 receives the light on the surface of the substrate 600 and reflects the light to the shooting unit 500, and the shooting unit 500 images the surface of the substrate. The second splicing mirror 340 receives part of the light of the second lighting assembly and reflects the light to the chamfered corner of the side surface of the substrate 600. After the mirror unit 400 receives the light at the chamfered corner of the side surface of the substrate 600, the mirror unit 400 reflects the light to the shooting unit 500. After the shooting unit 500 receives the light, the shooting unit 500 images the chamfered corner of the side surface of the substrate 600.

[0047] Please refer to Figures 1 to 8 In the embodiment of the present application, the second lighting assembly includes a second frame 331 provided with an opening, a second scattering plate 332, and a second light source 333. The second frame 331 is arranged on the base 100, and the height of the second frame 331 is higher than that of the bearing assembly 200. The second scattering plate 332 is arranged at the opening of the second frame 331, and the second light source 333 is arranged in the second frame 331. The second light source 333 is used to irradiate the second scattering plate 332, the second scattering plate 332 is used to scatter the light of the second light source 333 to the surface of the substrate 600, and the second splicing mirror 340 is used to receive part of the light scattered by the second scattering plate 332 and reflect the light to the chamfered corner of the side surface of the substrate 600. The mirror assembly reflects the light on the surface of the substrate 600 and the light at the chamfered corner of the side surface of the substrate 600 to the shooting unit 500.

[0048] Specifically, in use, the substrate 600 is placed on the bearing assembly 200, the opening of the second frame 331 faces the surface of the substrate 600, the second light source 333 irradiates the second scattering plate 332, the second scattering plate 332 scatters the light of the second light source 333 to the surface of the substrate 600, the mirror unit 400 receives the light on the surface of the substrate 600 and reflects the light to the shooting unit 500, so that the shooting unit 500 images the surface of the substrate 600. The second splicing mirror 340 receives part of the light scattered by the second scattering plate 332 and reflects the light to the chamfered corner of the side surface of the substrate 600. After the mirror unit 400 receives the light at the chamfered corner of the side surface of the substrate 600, the mirror unit 400 reflects the light to the shooting unit 500. After the shooting unit 500 receives the light, the shooting unit 500 images the chamfered corner of the side surface of the substrate 600. It should be noted that the second scattering plate 332 can reduce the volume of the second light source 333, improve the uniformity of the light source, and simplify the spatial structure of the second light source 333.

[0049] In the embodiment of the present application, the mirror unit 400 comprises a first reflection assembly and a second reflection assembly; the first reflection assembly comprises a first mirror frame 410 and a first mirror 420, the first mirror frame 410 is mounted on the first frame 311, the first mirror 420 is mounted on the first mirror frame 410, and the first mirror 420 is used for reflecting the light on the bottom surface of the substrate 600 and the light on the side surface of the substrate 600 to the shooting unit 500; the second reflection assembly comprises a second mirror frame 430 and a second mirror 440, the second mirror frame 430 is mounted on the second frame 331, the second mirror 440 is mounted on the second mirror frame 430, and the second mirror 440 is used for reflecting the light on the surface of the substrate 600 to the shooting unit 500.

[0050] Specifically, the first mirror frame 410 is arranged on one side of the first frame 311, the first mirror 420 is mounted on the first mirror frame 410, and it should be noted that the angle of the first mirror 420 needs to be flexibly set according to actual conditions, as long as the light on the bottom surface of the substrate 600 and the light on the side surface of the substrate 600 can be reflected to the shooting unit 500. The second mirror frame 430 is arranged on one side of the second frame 331, the second mirror 440 is mounted on the second mirror frame 430, and it can be understood that the angle of the second mirror 440 needs to be flexibly set according to actual conditions, as long as the light on the surface of the substrate 600 can be reflected to the shooting unit 500.

[0051] By adopting the above setting form, the angles of the first mirror 420 and the second mirror 440 can be flexibly adjusted, and the mirror unit 400 can be conveniently adjusted to the required angle according to actual needs.

[0052] Please refer to Figure 1 , Figure 5 , Figure 6 , Figure 7 and Figure 8In the embodiment of the present application, the photographing unit 500 comprises a bottom photographing assembly, the bottom photographing assembly comprises a bottom lens 510 and a bottom camera 520, the bottom lens 510 is arranged on the bottom camera 520, and the bottom lens 510 is directed to the first frame 311, so that the bottom camera 520 receives the light from the bottom surface of the substrate 600 reflected by the first reflector 420 to perform optical imaging. The photographing unit 500 further comprises a side photographing assembly, the side photographing assembly comprises a side lens 530 and a side camera 540, the side lens 530 is arranged on the side camera 540, and the side lens 530 is directed to the first frame 311, so that the side camera 540 receives the light from the side surface of the substrate 600 reflected by the first reflector 420 to perform optical imaging. The photographing unit 500 further comprises a surface photographing assembly, the surface photographing assembly comprises a surface lens 550 and a surface camera 560, the surface lens 550 is arranged on the surface camera 560, and the surface lens 550 is directed to the second frame 331, so that the surface camera 560 receives the light from the surface of the substrate 600 reflected by the second reflector 440 to perform optical imaging.

[0053] Specifically, the bottom camera 520 is arranged corresponding to the first reflector 420, the bottom lens 510 is arranged on the bottom camera 520 and directed to the first reflector 420, the first reflector 420 reflects the light from the bottom surface of the substrate 600 to the bottom lens 510, and the bottom lens 510 images the bottom surface of the substrate 600 to the bottom camera 520. The side camera 540 is arranged corresponding to the first reflector 420, the side lens 530 is arranged on the side camera 540 and directed to the first reflector 420, the first reflector 420 reflects the light from the side surface of the substrate 600 to the side lens 530, and the side lens 530 images the side surface of the substrate 600 to the side camera 540. The surface camera 560 is arranged corresponding to the second reflector 440, the surface lens 550 is arranged on the surface camera 560 and directed to the second reflector 440, the second reflector 440 reflects the light from the surface of the substrate 600 to the surface lens 550, and the surface lens 550 images the surface of the substrate 600 to the surface camera 560. In the above manner, three photographing positions are imaged separately, mutual interference is avoided, optical design and assembly difficulty are reduced, and a compensation mirror is not used, so that the lens is closer to the target position and the structure is more compact.

[0054] In the embodiment of the present application, the first mirror 420, the second mirror 440, the first splicing mirror 320 and the second splicing mirror 340 are all full reflection mirrors, which can be aluminum mirrors, coated mirrors or other high reflectivity mirrors. The full reflection mirrors in the embodiment only perform single reflection, thereby improving the utilization rate of the light source and avoiding waste of energy. It can be understood that in some embodiments, a single full reflection mirror or multiple full reflection mirrors can be used to perform multiple reflections.

[0055] Please refer to Figures 1 to 5 In the embodiment of the present application, the bearing assembly 200 includes a mounting seat 210, a motor and a stage 220; the mounting seat 210 is arranged on the base 100 and is used to mount the stage 220 and the motor; the stage 220 is mounted on the mounting seat 210 and is used to bear the substrate 600; and the motor is mounted in the mounting seat 210 and is used to drive the stage 220 to rotate.

[0056] Specifically, one end of the mounting seat 210 is connected with the base 100, and the other end is connected with the stage 220; the motor is mounted in the mounting seat 210 and drives the stage 220 to rotate; in the use process, the stage 220 fixes the substrate 600 and drives the substrate 600 to rotate. It can be understood that an encoder can be arranged on the motor, and the encoder can record the rotating position of the motor. When the encoder is used for shooting, the bottom camera 520, the side camera 540 and the surface camera 560 will correspond to the rotating position.

[0057] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited to this. Any change or replacement within the technical scope disclosed in the embodiment of the present application should be covered in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application should be subject to the protection scope of the claims.

Claims

1. A substrate edge detection apparatus characterized by comprising: The base station comprises a base, a bearing assembly, an illumination unit, a mirror unit and a shooting unit; The bearing assembly is used for placing a substrate and driving the substrate to move; The illumination unit is arranged close to the bearing assembly, and is used for illuminating the substrate; The mirror unit is arranged close to the illumination unit, and is used for reflecting light on the substrate to the shooting unit; The shooting unit is arranged corresponding to the mirror unit, and is used for optically imaging the substrate.

2. The substrate edge detection apparatus according to claim 1, characterized by The illumination unit comprises a first illumination assembly and a first splicing mirror; The first illumination assembly is arranged on the base and close to the bearing assembly, and is used for illuminating the bottom surface of the substrate, and the mirror unit can receive light from the bottom surface of the substrate and reflect the light to the shooting unit; The first splicing mirror is arranged corresponding to the first illumination assembly, and is used for receiving part of light from the first illumination assembly, reflecting the light to the side surface of the substrate, receiving light from the side surface of the substrate, reflecting the light from the side surface of the substrate to the mirror unit, and reflecting the light to the shooting unit through the mirror unit.

3. The substrate edge detection apparatus according to claim 2, characterized by The first illumination assembly comprises a first frame provided with an opening, a first scattering plate and a first light source, the first frame is arranged on the base, the height of the first frame is lower than the bearing assembly, the first scattering plate is arranged at the opening of the first frame, and the first light source is arranged in the first frame; The first light source is used for irradiating the first scattering plate, the first scattering plate is used for scattering light from the first light source to the bottom surface of the substrate, and the first splicing mirror is used for receiving part of the light scattered by the first scattering plate, reflecting the light to the side surface of the substrate, and reflecting the light from the side surface of the substrate to the mirror unit; The mirror unit is used for reflecting the light from the bottom surface of the substrate and the light from the side surface of the substrate to the shooting unit.

4. The substrate edge detection apparatus according to claim 3, characterized by The first splicing mirror comprises a first reflecting surface and a second reflecting surface, the included angle between the first reflecting surface and the second reflecting surface is obtuse; in the working state, the substrate is placed on the bearing assembly, the first reflecting surface and the second reflecting surface are located on the side surface of the substrate, the first reflecting surface and the second reflecting surface are used for reflecting light from the first light source to the side surface of the substrate, and the second reflecting surface is used for reflecting the light from the side surface of the substrate to the mirror unit.

5. The substrate edge detection apparatus according to claim 4, characterized by The illumination unit further comprises a second illumination assembly and a second splicing mirror; The second illumination assembly is arranged on the base and close to the bearing assembly, and is used for illuminating the surface of the substrate, and the mirror unit can receive light from the surface of the substrate and reflect the light to the shooting unit; The second splicing mirror corresponds to the second illumination assembly, and is configured to receive part of light of the second illumination assembly, reflect the light to the chamfer of the side surface of the substrate, and receive the light at the chamfer of the side surface of the substrate by the mirror unit and reflect the light to the shooting unit.

6. The substrate edge detection apparatus according to claim 5, characterized by The second illumination assembly comprises a second frame provided with an opening, a second scattering plate and a second light source, the second frame is arranged on the base, the height of the second frame is higher than that of the bearing assembly, the second scattering plate is arranged at the opening of the second frame, and the second light source is arranged in the second frame. The second light source is configured to irradiate the second scattering plate, the second scattering plate is configured to scatter light of the second light source to the surface of the substrate, the second splicing mirror is configured to receive part of the scattered light of the second scattering plate and reflect the light to the chamfer of the side surface of the substrate, and the mirror assembly is configured to reflect the light on the surface of the substrate and the light at the chamfer of the side surface of the substrate to the shooting unit.

7. The substrate edge detection apparatus according to claim 6, characterized by The mirror unit comprises a first reflection assembly and a second reflection assembly. The first reflection assembly comprises a first mirror frame and a first mirror, the first mirror frame is mounted on the first frame, and the first mirror is mounted on the first mirror frame and configured to reflect the light on the bottom surface of the substrate and the light on the side surface of the substrate to the shooting unit. The second reflection assembly comprises a second mirror frame and a second mirror, the second mirror frame is mounted on the second frame, and the second mirror is mounted on the second mirror frame and configured to reflect the light on the surface of the substrate to the shooting unit.

8. The substrate edge detection apparatus according to claim 7, characterized by The shooting unit comprises a bottom surface shooting assembly, the bottom surface shooting assembly comprises a bottom surface lens and a bottom surface camera, the bottom surface lens is arranged on the bottom surface camera, and the bottom surface lens faces the first frame, so that the bottom surface camera receives the light on the bottom surface of the substrate reflected by the first mirror to perform optical imaging.

9. The substrate edge detection apparatus according to claim 8, characterized by The shooting unit further comprises a side surface shooting assembly, the side surface shooting assembly comprises a side surface lens and a side surface camera, the side surface lens is arranged on the side surface camera, and the side surface lens faces the first frame, so that the side surface camera receives the light on the side surface of the substrate reflected by the first mirror to perform optical imaging.

10. The substrate edge detection apparatus according to claim 9, characterized by The shooting unit further comprises a surface shooting assembly, the surface shooting assembly comprises a surface lens and a surface camera, the surface lens is arranged on the surface camera, and the surface lens faces the second frame, so that the surface camera receives the light on the surface of the substrate reflected by the second mirror to perform optical imaging.

11. The substrate edge detection apparatus according to claim 7, characterized by The first mirror, the second mirror, the first splicing mirror and the second splicing mirror are all full mirrors.

12. The substrate edge detection apparatus according to claim 11, characterized by The bearing assembly comprises a mounting seat, a motor and a carrying table. The mounting seat is arranged on the base and configured to mount the carrying table and the motor. The carrying table is mounted on the mounting seat and configured to carry the substrate. The motor is mounted in the mounting seat and configured to drive the carrying table to rotate.

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