Temporary storage mechanism, purification table device and photovoltaic material processing equipment

Abstract

The utility model discloses a temporary storage mechanism, a purification table device and photovoltaic material processing equipment. The temporary storage mechanism comprises a supporting part. And the temporary storage mechanism comprises a supporting part and is rotationally connected with the rack of the purification table. The supporting part is used for bearing a sheet. The supporting part is rotationally connected with the rack of the purification table, so that when the quartz tube in the reaction furnace needs to be maintained, the supporting part is turned over and folded, the supporting part keeps away from the interior of the purification table, the quartz tube is avoided on the premise that the temporary storage mechanism does not need to be disassembled, and the effect of facilitating maintenance is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic material manufacturing equipment, in particular to a temporary storage mechanism, a purification table device and a photovoltaic material processing equipment. BACKGROUND

[0002] In the process of photovoltaic material production, a high-temperature reaction furnace is needed to process the sheet. Generally, the sheet is loaded in the sheet carrier and sent into the furnace pipe of the furnace body for reaction processing through the boat pushing mechanism in the purification table. After the reaction is completed, the boat pushing mechanism is used to move out of the furnace pipe. The boat pushing mechanism includes a sliding rail, which is generally arranged on the inner side frame of the purification table. The sliding rail blocks the side of the purification table, and the side cannot be opened in daily work, making maintenance difficult.

[0003] In the photovoltaic high-temperature reaction furnace, the quartz tube needs to be placed into the reaction furnace by manual handling. Since the furnace opening of the reaction furnace faces the purification table, and the space in the purification table is small, temporary storage racks and boat pushing mechanisms are arranged on both sides of the purification table, so that the operator needs to disassemble the temporary storage rack when installing the quartz tube, further increasing the difficulty of maintaining the machine. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the present application provides a temporary storage mechanism to solve the problem of high maintenance difficulty caused by the need for operators to disassemble the temporary storage rack when installing the quartz tube.

[0005] An embodiment of the present application provides a temporary storage mechanism, which includes a support part rotatably connected with a frame of a purification table. The support part is used to carry a sheet or a carrier carrying the sheet.

[0006] The support part is rotatably connected with the frame of the purification table, so that when maintenance of the quartz tube in the reaction furnace is needed, the support part is flipped and folded by operation, so as to avoid the space in the purification table. Without the need to disassemble the temporary storage mechanism, the quartz tube is avoided, and the effect of facilitating maintenance is achieved.

[0007] In some embodiments, the temporary storage mechanism further includes a connecting assembly, which includes a first connecting piece and a second connecting piece rotatably connected, and the second connecting piece is connected with the support part. The first connecting piece is used to connect with the purification table, and the first connecting piece is also used to support the support part and limit the rotation of the support part.

[0008] In some embodiments, the support part includes two first side plates rotatably connected with the frame of the purification table, and the first side plates are spaced apart along the Y-axis direction. One of the first side plates is provided with a first support structure toward one side of the other first side plate. The two first side plates are used to accommodate the carrier carrying the sheet, and one of the first support structures is used to support one end of the carrier, and the other first support structure is used to support the other end of the carrier.

[0009] In some embodiments, each of the first support structures comprises a first fixing member, a first support member and a first elastic member. The first fixing member is connected with the first side plate. The first support member is in sliding connection with the first fixing member, and is configured to contact the carrier. The first elastic member has two opposite ends, and the two ends of the first elastic member are connected with the first fixing member and the first support member respectively. The first elastic member is configured to buffer the first support member.

[0010] In some embodiments, the support part further comprises a second side plate. The second side plate has two opposite ends, and the two ends of the second side plate are connected with the two first side plates respectively.

[0011] In some embodiments, the temporary storage mechanism further comprises at least one second support structure. The second support structure is arranged on the second side plate, and is located between the two first support structures. The second support structure is configured to support the middle part of the carrier.

[0012] In some embodiments, each of the second support structures comprises a second fixing member, a second support member and a second elastic member. The second fixing member is connected with the second side plate. The second support member is in sliding connection with the second fixing member, and is configured to contact the carrier. The second elastic member has two opposite ends, and the two ends of the second elastic member are connected with the second fixing member and the second support member respectively. The second elastic member is configured to buffer the second support member.

[0013] In some embodiments, the temporary storage mechanism further comprises a cooling assembly. The cooling assembly is arranged on the second side plate, and is configured to cool the sheet on the support part.

[0014] An embodiment of the present application further provides a purification platform device, which comprises a rack and the temporary storage mechanism as described above. The number of the temporary storage mechanisms is at least two. All the temporary storage mechanisms are in rotational connection with the rack, and are arranged at intervals in the rack.

[0015] An embodiment of the present application further provides a photovoltaic material processing equipment, which comprises a reaction device and the purification platform device as described above. The reaction device and the purification platform device are connected. The reaction device comprises at least one reaction furnace, and the reaction furnace is configured to react with the sheet. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 FIG. 1 is a schematic view of a photovoltaic material processing equipment according to an embodiment of the present application.

[0017] Figure 2 FIG. 2 is a schematic view of a purification platform device according to an embodiment of the present application. Figure 1 FIG. 3 is a schematic view of a part of the purification platform device according to an embodiment of the present application.

[0018] Figure 3 FIG. 4 is a schematic view of a temporary storage mechanism according to an embodiment of the present application. Figure 2 FIG. 5 is a schematic view of a part of the temporary storage mechanism according to an embodiment of the present application.

[0019] Figure 4 Fig. 4 is a schematic view of the temporary storage mechanism in the flip state in the cleaning station device of Fig. 1. Figure 2

[0020] Figure 5 Fig. 5 is a side view of the working state of the cleaning station device in Fig. 1. Figure 1

[0021] Figure 6 Fig. 6 is a schematic view of the first support structure in Fig. 1. Figure 2

[0022] Figure 7 Fig. 7 is a schematic view of the second support structure in Fig. 1. Figure 2

[0023] Main element symbol explanation

[0024] 10, photovoltaic material processing equipment; 11, cleaning station device; 111, rack; 112, temporary storage mechanism; 113, support part; 1131, first side plate; 1132, second side plate; 114, connecting assembly; 1141, first connecting piece; 1142, second connecting piece; 115, first support structure; 1151, first fixing piece; 1152, first support piece; 1153, first elastic piece; 116, second support structure; 1161, second fixing piece; 1162, second support piece; 1163, second elastic piece; 117, cooling assembly; 1171, fan; 12, reaction device; 121, reaction furnace. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments of the present application.

[0026] The terms "top", "upper", "lower", "front", "back" and similar expressions used herein are for illustrative purposes only.

[0027] The terms "first", "second", and the like are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implying the number, specific order or primary and secondary relationship of the indicated technical features.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing the specific embodiments of the present application, and are not intended to limit the present application.

[0029] Please refer to Figure 1 ​​​​An embodiment of the present application provides a photovoltaic material processing device 10, which comprises a reaction device 12 and a purification platform device 11. The reaction device 12 and the purification platform device 11 are distributed along the length direction of the purification platform device 11, and the reaction device 12 is provided with a port (not shown) on the side facing the purification platform device 11. Before the reaction device 12 works, a carrier carrying a sheet is placed in the purification platform device 11, and the carrier is moved into the reaction device 12 through the port together with the sheet, so that the reaction device 12 performs reaction processing on the sheet. When the sheet processing is completed, the carrier is moved into the purification platform device 11 together with the sheet for cooling, and finally moved out of the purification platform device 11 to the outside for the next processing procedure of the sheet.

[0030] In some embodiments, the sheet is a photovoltaic material such as a silicon sheet or a cell sheet.

[0031] In some embodiments, referring to Figure 2 The purification platform device 11 comprises a rack 111 and at least two temporary storage mechanisms 112. The rack 111 is connected with the reaction device 12 and used for accommodating the carrier before entering the reaction device 12 or after moving out of the reaction device 12. The temporary storage mechanisms 112 are arranged in the rack 111 and distributed at intervals. When the carrier carrying the sheet is located in the rack 111, the temporary storage mechanisms 112 carry the carrier respectively, so that the sheet is cooled in the rack 111.

[0032] In some embodiments, when a large-volume carrier is used to carry a plurality of small-volume carriers, the purification platform device 11 and the reaction device 12 can accommodate the large-volume carrier, and the temporary storage mechanisms 112 are used to support the large-volume carrier.

[0033] In some embodiments, the carrier is a part of the photovoltaic material processing device 10.

[0034] In some embodiments, the material of the carrier is graphite or quartz.

[0035] In some embodiments, referring to Figure 2 The rack 111 has a length direction and a width direction. The Y axis is parallel to the length direction of the rack 111, the X axis is parallel to the width direction, and the X axis is perpendicular to the Y axis. Both the X axis and the Y axis are parallel to the horizontal plane.

[0036] In some embodiments, the reaction device 12 comprises at least one reaction furnace 121. The reaction furnace 121 is in a tubular shape. The reaction furnace 121 is provided with a furnace port on one side along the Y axis direction. The furnace port extends to the port and is arranged towards the rack 111, so that the sheet in the rack 111 enters the reaction furnace 121 or the sheet in the reaction furnace 121 moves to the rack 111.

[0037] In some embodiments, the temporary storage mechanism 112 also has a length direction and a width direction, and the length direction of the temporary storage mechanism 112 is parallel to the length direction of the rack 111.

[0038] In some embodiments, the rack 111 and the temporary storage mechanism 112 also have a height direction, respectively, and the height direction of the rack 111 and the temporary storage mechanism 112 is perpendicular to the X-axis and the Y-axis, respectively. All the temporary storage mechanisms 112 are spaced apart along the Z-axis direction, and the Z-axis is parallel to the height direction of the rack 111 or the temporary storage mechanism 112.

[0039] In some embodiments, the length of the temporary storage mechanism 112 is greater than the width, and the length-width ratio is greater than 1.5 and less than 10. For example, the length-width ratio of the temporary storage mechanism 112 is 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, 5.5, 6.0, 7.0, 8.0, or 9.0.

[0040] In some embodiments, the ratio of the width of the rack 111 to the width of the temporary storage mechanism 112 is greater than 2 and less than 10. For example, the ratio of the width of the rack 111 to the width of the temporary storage mechanism 112 is 2.5, 2.6, 2.7, 2.8, 2.9, 3.0, 3.5, or 4.0.

[0041] In some embodiments, the length of the rack 111 is greater than the width, and the ratio of the length to the width is greater than 1 and less than 2. The ratio of the width of the rack 111 to the width of the temporary storage mechanism 112 is 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, or 1.9.

[0042] In some embodiments, referring to Figures 3 to 5 , the temporary storage mechanism 112 includes a support part 113 for carrying the sheet, and the support part 113 is rotationally connected to one side of the rack 111 along the X-axis direction. When the reaction furnace 121 needs to be maintained, the support part 113 is flipped along an axis parallel to the Y-axis by operation, and the support part 113 is flipped from bottom to top to one side of the rack 111 along the X-axis direction, so that the temporary storage mechanism 112 avoids the space in the rack 111, thereby reducing the risk of interference between the storage rack and the reaction furnace 121, so that the reaction furnace 121 can be moved into the rack 111 along the Y-axis for maintenance.

[0043] At the same time, by flipping the support part 113 along an axis parallel to the Y-axis, the radius of rotation of the support part 113 is shortened, so that the distance between two adjacent temporary storage mechanisms 112 is reduced, and the functions of mutual avoidance and shortening of the rotation time of the support part 113 are maintained.

[0044] And by reducing the distance between two adjacent temporary storage mechanisms 112, the occupied space of the rack 111 by all the temporary storage mechanisms 112 carrying the sheet is reduced.

[0045] It can be understood that when maintenance is needed for the rack 111 or other components in the reaction device 12, the temporary storage mechanism 112 can achieve the effect of avoiding the space in the rack 111 by the above rotation operation, so as to facilitate the maintenance of other components.

[0046] In other embodiments, please refer to Figure 2 , where S represents the direction of rotation of the support part 113 (S is only used as an illustration for this embodiment), the support part 113 can also be flipped along the axis parallel to the X axis, and when maintenance is needed, the support part 113 is rotated from the negative direction of the Y axis to the positive direction of the Y axis, so that the support part 113 avoids the space in the rack 111, and at the same time, the support part 113 is away from the reaction device 12 along the Y axis direction, thereby reducing the risk of interference between the support part 113 and the quartz tube.

[0047] In other embodiments, please refer to Figure 1 , S represents the direction of rotation of the support part 113 (S is only used as an illustration for this embodiment), the support part 113 can also be flipped along the axis parallel to the Z axis, and when maintenance is needed, the support part 113 is rotated from the negative direction of the Y axis to the positive direction of the Y axis, so that the support part 113 avoids the space in the rack 111, and at the same time, the support part 113 is away from the reaction device 12 along the Y axis direction, thereby reducing the risk of interference between the support part 113 and the quartz tube.

[0048] In some embodiments, please refer to Figure 3 and Figure 4 , the temporary storage mechanism 112 further comprises a connecting assembly 114, the connecting assembly 114 comprises a first connecting piece 1141 and a second connecting piece 1142 which are rotationally connected to each other, so that the connecting assembly 114 forms a hinge structure. The first connecting piece 1141 is connected with the rack 111, and the second connecting piece 1142 is connected with one side of the support part 113 along the X axis direction, so that the support part 113 is rotationally connected with the rack 111 through the connecting assembly 114.

[0049] It can be understood that when the support part 113 is not flipped relative to the rack 111 and carries the sheet in the rack 111, the first connecting piece 1141 and the second connecting piece 1142 side contact each other, the first connecting piece 1141 supports the second connecting piece 1142, and synchronously supports the support part 113, so as to limit the rotation of the support part 113 through the first connecting piece 1141, so that the support part 113 remains in a stationary state, thereby helping to improve the stability of the support part 113 carrying the sheet.

[0050] In other embodiments, the connecting assembly 114 is part of the rack 111.

[0051] In some embodiments, please refer to Figure 3 and Figure 4 The support part 113 includes two first side plates 1131 spaced apart along the Y-axis direction, and each first side plate 1131 is provided with a first support structure 115 on the side facing the other first side plate 1131. When the support part 113 supports the carrier, the carrier is located between the two first side plates 1131, and one of the first support structures 115 supports one end of the carrier, and the other first support structure 115 supports the other end of the carrier, thereby achieving the effect of supporting the carrier carrying the sheet by the support part 113, to meet the needs of storing the sheet.

[0052] It can be understood that one first side plate 1131 is connected with one second connecting piece 1142 to achieve the effect that the two first side plates 1131 rotate relative to the rack 111 respectively.

[0053] Further, please refer to Figure 3 and Figure 4 The support part 113 further includes a second side plate 1132 extending along the Y-axis direction and having opposite ends. The two ends of the second side plate 1132 are connected with the two first side plates 1131 respectively, and the two first side plates 1131 are limited by the second side plate 1132 to achieve the effect that the two first side plates 1131 can move synchronously and keep the stability of the relative position of the two first side plates 1131, which helps to achieve synchronous rotation of the first side plates 1131 or improve the stability of supporting the carrier.

[0054] In other embodiments, the second connecting piece 1142 can also be connected with the second side plate 1132. By driving the two first side plates 1131 to rotate through the second side plate 1132, the effect that the support part 113 rotates relative to the rack 111 can also be achieved.

[0055] In other embodiments, the two first side plates 1131 are oppositely arranged along the X-axis direction, and the two first side plates 1131 are connected with the two ends of the second side plate 1132 along the X-axis direction respectively.

[0056] In other embodiments, the second side plate 1132 can directly carry and support the sheet, the carrier or the carrier.

[0057] In other embodiments, the support part 113 only includes the second side plate 1132.

[0058] In some embodiments, please refer to Figure 3 and Figure 4The temporary storage mechanism 112 further comprises a second support structure 116 disposed on the second side plate 1132 and between the two first side plates 1131. When the first support structure 115 supports the two ends of the carrier, the second support structure 116 is in contact with the middle part of the carrier, and the first support structure 115 and the second support structure 116 jointly support the carrier, which helps the temporary storage mechanism 112 to fully and uniformly bear the carrier, thereby reducing the risk of bending of the middle part of the carrier due to excessive weight.

[0059] In some embodiments, the number of the second support structures 116 is two or more, and all the second support structures 116 are spaced apart along the Y-axis direction to improve the uniformity of the support of the carrier by the second support structures 116.

[0060] In some embodiments, referring to Figure 6 The first support structure 115 comprises a first fixing member 1151, a first support member 1152, and a first elastic member 1153. The first fixing member 1151 is connected with the first side plate 1131, the first support member 1152 is slidingly connected with the first fixing member 1151, and the two ends of the first elastic member 1153 are connected with the first fixing member 1151 and the first support member 1152, respectively. When the carrier is placed on the first side plate 1131, the first support member 1152 is in contact with the carrier, and the first support member 1152 moves relative to the first fixing member 1151 under the gravity of the carrier and compresses the first elastic member 1153. The first elastic member 1153 exerts an elastic force on the first support member 1152 to buffer the first support member 1152 and reduce the impact between the carrier and the first support member 1152, thereby reducing the risk of damage to the carrier caused by collision with the first support structure 115.

[0061] In some embodiments, referring to Figure 7 The second support structure 116 comprises a second fixing member 1161, a second support member 1162, and a second elastic member 1163. The second fixing member 1161 is connected with the second side plate 1132, the second support member 1162 is slidingly connected with the second fixing member 1161, and the two ends of the second elastic member 1163 are connected with the second fixing member 1161 and the second support member 1162, respectively. When the carrier is placed on the second side plate 1132, the second support member 1162 is in contact with the carrier, and the second support member 1162 moves relative to the second fixing member 1161 under the gravity of the carrier and compresses the second elastic member 1163. The second elastic member 1163 exerts an elastic force on the second support member 1162 to buffer the second support member 1162 and reduce the impact between the carrier and the second support member 1162, thereby reducing the risk of damage to the carrier caused by collision with the second support structure 116.

[0062] In some embodiments, the first support structure 115 is identical to the second support structure 116 to reduce the number of production molds and facilitate the mutual replacement of parts between the first support structure 115 and the second support structure 116.

[0063] In some embodiments, referring to Figure 3 and Figure 4 , the purification table device 11 further comprises a cooling assembly 117, which cools the processed wafer to shorten the time for storing the wafer in the rack 111.

[0064] In some embodiments, the cooling assembly 117 is part of the temporary storage mechanism 112.

[0065] In some embodiments, the cooling assembly 117 comprises a fan 1171 connected to the rack 111, which blows the wafer on the temporary storage mechanism 112 to cool the wafer.

[0066] In some embodiments, referring to Figure 3 and Figure 4 , part of the fan 1171 is distributed on the second side plate 1132 and is arranged towards the two first side plates 1131, which can blow the wafer on the carrier to have a gap between the carrier and the second side plate 1132 when the two first side plates 1131 support the carrier, thereby increasing the area of the carrier in contact with the air and improving the blowing of the fan 1171 and the heat dissipation effect of the air on the wafer. In other embodiments, the cooling assembly 117 comprises a cooling pipe (not shown) in which a cooling medium flows to cool the air in the rack 111, thereby improving the cooling efficiency of the wafer by placing the wafer in a lower ambient temperature.

[0067] The cooling pipe can also be arranged on the support portion 113 to directly cool the wafer on the support portion 113.

[0068] In some embodiments, the purification table device 11 further comprises a boat pushing mechanism (not shown) arranged in the rack 111, which is used to push the carrier carrying the wafer to be processed into the reaction device 12 or move the carrier out of the reaction device 12. When the reaction device 12 and the purification table device 11 are arranged along the Y-axis direction, the boat pushing mechanism drives the carrier to move along the Y-axis direction.

[0069] In some embodiments, the boat pushing mechanism and all the temporary storage mechanisms 112 are distributed on both sides of the rack 111 along the X-axis direction.

[0070] In some embodiments, the purification station device 11 further comprises a boat transfer mechanism (not shown) for transferring the boat or boats between different storage racks. Or transferring the boat or boats between the storage racks and the boat pushing mechanism.

[0071] In some embodiments, the number of the temporary storage mechanism 112, the boat pushing mechanism and the reaction furnace 121 are the same, and one temporary storage mechanism 112, one boat pushing mechanism and one reaction furnace 121 are arranged correspondingly.

[0072] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application, and are not used as a limitation to the present application, and any appropriate changes and variations to the above embodiments within the spirit and scope of the present application are within the scope of the present disclosure.

Claims

1. A staging mechanism for buffering a sheet or a carrier carrying the sheet in a cleaning station, characterized in that, The temporary storage mechanism comprises: The support part is rotationally connected with the frame of the purification table, and is used for carrying the sheet or a carrier carrying the sheet.

2. The temporary storage mechanism according to claim 1, characterized in that, The temporary storage mechanism further comprises a connecting assembly, which comprises a first connecting piece and a second connecting piece rotationally connected with each other, and the second connecting piece is connected with the support part. The first connecting piece is used for being connected with the frame of the purification table, and is further used for supporting the support part and limiting rotation of the support part.

3. The temporary storage mechanism according to claim 1, wherein The support part comprises two first side plates rotationally connected with the frame of the purification table, and the two first side plates are spaced apart, and one of the first side plates is provided with a first support structure on a side facing the other first side plate. The two first side plates are used for accommodating a carrier carrying the sheet, one of the first support structures is used for supporting one end of the carrier, and the other first support structure is used for supporting the other end of the carrier.

4. The temporary storage mechanism according to claim 3, wherein The first support structure comprises a first fixing piece, a first support piece and a first elastic piece, the first fixing piece is connected with the first side plate; The first support piece is slidingly connected with the first fixing piece, and is used for being in contact with the carrier; The first elastic piece has opposite two ends, the two ends of the first elastic piece are connected with the first fixing piece and the first support piece respectively, and the first elastic piece is used for buffering the first support piece.

5. The temporary storage mechanism according to claim 3, wherein The support part further comprises a second side plate, the second side plate has opposite two ends, and the two ends of the second side plate are connected with the two first side plates respectively.

6. The temporary storage mechanism according to claim 5, wherein The temporary storage mechanism further comprises at least one second support structure, the second support structure is arranged on the second side plate, the second support structure is located between the two first support structures, and the second support structure is used for supporting a middle part of the carrier.

7. The temporary storage mechanism of claim 6, wherein, The second support structure comprises a second fixing piece, a second support piece and a second elastic piece, the second fixing piece is connected with the second side plate; The second support piece is slidingly connected with the second fixing piece, and is used for being in contact with the carrier; The second elastic piece has opposite two ends, the two ends of the second elastic piece are connected with the second fixing piece and the second support piece respectively, and the second elastic piece is used for buffering the second support piece.

8. The staging mechanism of claim 1, wherein, The temporary storage mechanism further comprises a cooling assembly arranged on the support part, and the cooling assembly is used for cooling the sheet on the support part.

9. A decontamination station apparatus, characterized by, The purification table device comprises a frame and the temporary storage mechanism according to any one of claims 1 to 8; The number of the temporary storage mechanisms is at least two, all the temporary storage mechanisms are rotationally connected with the frame and are spaced apart in the frame.

10. A photovoltaic material processing apparatus, characterized by, The reaction device and the purification table device are connected. The reaction device comprises at least one reaction furnace, and the reaction furnace is used for reacting the sheet.

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