Environment-friendly plasma equipment capable of rapidly exhausting gas and recycling residues

Abstract

The utility model discloses environment-friendly plasma equipment capable of exhausting air quickly and recycling residues, which comprises a bearing rack, a residue collecting box is fixedly mounted in the middle of the bottom of the bearing rack, a plasma processing cavity is preset in the bearing rack, an exhaust fan is fixedly mounted on one side of the upper end of the bearing rack, and a gas outlet is formed in the other side of the upper end of the bearing rack. A plasma processing end is fixedly installed in the middle of the upper end of the interior of the plasma processing cavity, and a carrying net plate is movably installed in the middle of the interior of the plasma processing cavity. According to the utility model, a quick-response exhaust structure is additionally arranged on the basis of carrying out plasma processing on a workpiece, so that external emission of gas generated by synchronous processing work in the plasma processing operation process of the whole workpiece can be realized, and the improvement of the whole processing precision is facilitated; and the influence of the gas on the subsequent processing treatment can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of plasma equipment technology, and in particular to an environmentally friendly plasma equipment with rapid exhaust and residue recovery. Background Technology

[0002] Plasma equipment is a device that uses plasma technology to treat or clean the surface of workpieces, and it is a common application of plasma treatment technology.

[0003] However, most existing plasma equipment has a complex overall exhaust system, resulting in a slow exhaust response during processing, which is difficult to meet the needs of normal processing. The inability to exhaust in a timely manner can easily interfere with subsequent processing, thus reducing the overall efficiency. Furthermore, after the initial processing, the residue needs to be cleaned up before further processing can begin. This can significantly impact the processing progress when processing large batches of workpieces. The cleaning process is also difficult, making it hard to collect and recycle the residue in a centralized manner. Consequently, the overall environmental friendliness of the equipment is relatively poor, limiting its applicability.

[0004] Based on this, this utility model proposes an environmentally friendly plasma device for rapid exhaust and residue recovery to solve the above problems. Utility Model Content

[0005] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of the present invention, to avoid obscuring the purpose of these documents, and such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0006] In view of the problems existing in the design of the above and / or existing plasma processing equipment, this utility model is proposed.

[0007] Therefore, one of the objectives of this utility model is to provide an environmentally friendly plasma device with rapid exhaust and residue recovery. By adding a fast-response exhaust structure to the existing plasma processing capabilities, it can simultaneously exhaust the gases generated during the plasma processing of the workpiece, thereby improving the overall processing accuracy.

[0008] To achieve the above effects, this utility model provides the following technical solution: an environmentally friendly plasma device for rapid exhaust and residue recovery, comprising a support frame, a residue collection box fixedly installed at the middle position of the bottom of the support frame, a plasma processing chamber pre-set inside the support frame, an exhaust fan fixedly installed on one side of the upper end of the support frame, the exhaust fan passing through the upper end of the support frame and communicating with the inside of the plasma processing chamber, a plasma processing end fixedly installed at the middle position of the upper end of the inside of the plasma processing chamber, a material-carrying mesh plate movably installed at the middle position inside the plasma processing chamber, a residue collection fan fixedly installed at the bottom of the residue collection box, and a control panel fixedly installed at the middle position of the outer side of the support frame.

[0009] As a preferred embodiment of the environmentally friendly plasma equipment for rapid exhaust and residue recovery described in this utility model, wherein: sturdy support legs are symmetrically and fixedly installed at the corners of the bottom of the support frame; a sealed door is movably installed on the outside of the plasma processing chamber; a connecting hinge is movably installed between the side of the outer front of the support frame and the sealed door; the sealed door rotates around the connecting hinge as its center of rotation outside the support frame; an observation window is fixedly installed on the outside of the sealed door; and an opening auxiliary handle is fixedly installed at the middle position of the outer side of the sealed door.

[0010] The observation window allows operators to visually and stably observe the internal working conditions of the device from the outside during plasma processing of workpieces. This facilitates the timely detection of unexpected situations and the implementation of corresponding measures, thereby reducing the overall operational risks.

[0011] As a preferred embodiment of the environmentally friendly plasma equipment for rapid exhaust and residue recovery described in this utility model, wherein: a residue collection duct is fixedly installed at the lower end of the plasma processing chamber, the residue collection duct is located directly below the load-bearing mesh plate, the residue collection duct passes through the bottom of the support frame and communicates with the inside of the residue collection box, and a slag discharge pipe is fixedly connected at the middle of the lower end of the outer side of the residue collection box, the slag discharge pipe communicates with the inside of the residue collection box;

[0012] By designing and installing the residue collection duct, the device effectively cleans up residue generated during operation, ensuring it is stably collected in the residue collection box and then discharged externally via a discharge pipe. This facilitates the recycling and cleanup of residue generated during processing.

[0013] As a preferred embodiment of the environmentally friendly plasma equipment for rapid exhaust and residue recovery described in this utility model, wherein: a plasma generating component is fixedly installed on the other side of the upper end of the support frame, the plasma generating component is electrically connected to the control panel, and the residue collecting fan and the exhaust fan are both electrically connected to the control panel; a functional component protective shell is fixedly installed on the upper end of the support frame, the functional component protective shell completely covers the plasma generating component and the exhaust fan on the upper end of the support frame; an exhaust connecting duct is pre-set on the upper end of the exhaust fan, and the exhaust connecting duct penetrates the upper end of the functional component protective shell;

[0014] By establishing electrical connections between the control panel and each component, the overall operation of the device is effectively simplified, making it easier to control and use, thus improving its operability and enhancing its overall applicability.

[0015] As a preferred embodiment of the environmentally friendly plasma device for rapid exhaust and residue recovery described in this utility model, wherein: a slag discharge valve is movably installed on the outside of the slag discharge conduit, and the overall material-carrying mesh plate is a rectangular mesh plate structure;

[0016] By using a carrying mesh plate as the carrier for the workpiece, it is possible to effectively ensure that the residue generated during the processing can pass through the rectangular mesh plate structure of the carrying mesh plate and smoothly enter the residue collection box for centralized collection under the action of suction.

[0017] As a preferred embodiment of the environmentally friendly plasma equipment for rapid exhaust and residue recovery described in this utility model, wherein: positioning sliding blocks are symmetrically fixedly installed on both sides of the middle of the plasma treatment chamber, and directional sliding grooves are symmetrically opened on both sides of the outer side of the material carrier plate. The inner specifications of the directional sliding grooves correspond and match with the outer specifications of the positioning sliding blocks. The material carrier plate is slidably connected to the inner wall of the support frame inside the plasma treatment chamber through the sliding structure between the positioning sliding blocks and the directional sliding grooves.

[0018] By adopting a sliding structure for the loading mesh plate, the smoothness of the feeding and unloading of the workpieces to be processed is effectively improved, which is conducive to improving the overall smoothness of the operation and the overall processing efficiency.

[0019] The beneficial effects of this utility model are as follows: By adding a fast-response exhaust structure to the existing plasma treatment processing capability, this utility model enables the external emission of gases generated during the plasma treatment process, thereby improving the overall processing accuracy and reducing the impact of gases on subsequent processing. Furthermore, the addition of a corresponding residue collection structure ensures stable and continuous collection of residues generated during normal plasma treatment operations, facilitating convenient and smooth subsequent residue recycling. This effectively enriches the overall functionality of the device and improves its overall performance. In addition, the built-in sliding material loading structure effectively improves the smoothness of material feeding and discharging during plasma treatment, enabling continuous processing of large batches of workpieces and saving significant feeding and discharging time, thus improving overall work efficiency. This makes the device more environmentally friendly and efficient, with broader application prospects. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0021] Figure 1 This is a schematic diagram of the disassembled structure of this utility model;

[0022] Figure 2 This is a schematic diagram of the overall right-view structure of this utility model;

[0023] Figure 3 This is a schematic diagram of the overall structure of this utility model from a bottom-view angle;

[0024] Figure 4 This is a schematic diagram of the overall door opening structure of this utility model;

[0025] Figure 5 This is a schematic diagram of the overall load-bearing mesh panel of this utility model in the pull-out state.

[0026] The following components are labeled in the diagram: 1. Support frame; 2. Stable support leg; 3. Residue collection box; 4. Plasma treatment chamber; 5. Protective housing for functional components; 6. Sealed door; 7. Connecting hinge; 8. Positioning sliding block; 9. Plasma treatment end; 10. Loading mesh plate; 11. Residue collection fan; 12. Slag discharge duct; 13. Residue collection air duct; 14. Control panel; 15. Plasma generating assembly; 16. Exhaust fan; 17. Observation window; 18. Door opening auxiliary handle; 19. Directional sliding groove; 20. Inspection cover; 21. Exhaust connection duct; 22. Slag discharge valve. Detailed Implementation

[0027] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0028] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0029] Secondly, this utility model is described in detail with reference to the schematic diagrams. When detailing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0030] Please see Figures 1-5This utility model provides a technical solution: an environmentally friendly plasma device for rapid exhaust and residue recovery, comprising a support frame 1, stable support legs 2, a residue collection box 3, a plasma treatment chamber 4, a functional component protective shell 5, a sealing door 6, a connecting hinge 7, a positioning sliding block 8, a plasma treatment end 9, a carrying mesh plate 10, a residue collection fan 11, a residue discharge duct 12, a residue collection air duct 13, a control panel 14, a plasma generating component 15, an exhaust fan 16, an observation window 17, a door opening auxiliary handle 18, a directional sliding groove 19, a maintenance cover 20, an exhaust docking duct 21, and a residue discharge valve 22. The residue collection box 3 is fixedly installed at the middle position of the bottom of the support frame 1, and the interior of the support frame 1 is pre-installed with a plasma treatment... An exhaust fan 16 is fixedly installed on one side of the upper end of the plasma treatment chamber 4. The exhaust fan 16 passes through the upper end of the support frame 1 and communicates with the interior of the plasma treatment chamber 4. A plasma treatment end head 9 is fixedly installed in the middle of the upper end of the plasma treatment chamber 4. A loading screen plate 10 is movably installed in the middle of the interior of the plasma treatment chamber 4. A residue collection fan 11 is fixedly installed at the bottom of the residue collection box 3. A control panel 14 is fixedly installed in the middle of the outer side of the support frame 1. Stable support legs 2 are symmetrically fixedly installed at the corners of the bottom of the support frame 1. A sealing door 6 is movably installed on the outside of the plasma treatment chamber 4. A connecting hinge 7 is movably installed between the outer side of the support frame 1 and the sealing door 6. The sealing door 6 is located outside the support frame 1, with the connecting hinge 7 as its rotation center. An observation window 17 is fixedly installed on the outside of the sealing door 6. An auxiliary handle 18 is fixedly installed at the middle position of the outer side of the sealing door 6. A residue collection duct 13 is fixedly installed at the lower end of the plasma processing chamber 4, located directly below the carrying mesh plate 10. The residue collection duct 13 passes through the bottom of the support frame 1 and communicates with the interior of the residue collection box 3. A slag discharge pipe 12 is fixedly connected at the middle position of the lower outer side of the residue collection box 3, communicating with the interior of the residue collection box 3. A plasma generating assembly 15 is fixedly installed on the other side of the upper end of the support frame 1. The plasma generating assembly 15 is connected to the control panel. The plasma generating components 15 and the exhaust fan 16 are electrically connected to each other, and the residue collecting fan 11 and the exhaust fan 16 are both electrically connected to the control panel 14. A functional component protective shell 5 is fixedly installed on the upper end of the support frame 1, which completely covers the plasma generating component 15 and the exhaust fan 16 on the upper end of the support frame 1. An exhaust connecting duct 21 is pre-set on the upper end of the exhaust fan 16, which passes through the upper end of the functional component protective shell 5. A slag discharge valve 22 is movably installed on the outside of the slag discharge duct 12. The loading screen plate 10 is a rectangular mesh plate structure. Positioning sliding blocks 8 are symmetrically fixedly installed on both sides of the middle of the plasma processing chamber 4. Orientation sliding grooves 19 are symmetrically opened on both sides of the outside of the loading screen plate 10.The internal dimensions of the directional sliding groove 19 correspond and match with the external dimensions of the positioning sliding block 8. The loading screen 10 is slidably connected to the inner wall of the support frame 1 inside the plasma treatment chamber 4 via a sliding structure between the positioning sliding block 8 and the directional sliding groove 19.

[0031] The observation window 17 allows operators to directly and stably observe the internal working conditions during plasma processing of workpieces, facilitating timely detection of unexpected situations and enabling appropriate countermeasures. This helps reduce overall operational risks. The design and installation of the residue collection duct 13 effectively cleans residue generated during processing, ensuring it is collected stably in the residue collection box 3 and then discharged externally via the discharge pipe 12. This facilitates the recycling and cleaning of processing residue. (The last sentence appears to be incomplete and possibly refers to a control surface.) The electrical connection between plate 14 and each component effectively simplifies the overall operation of the device, making it easier to control and use, effectively improving the overall operability, and enhancing the overall applicability of the device. By using the carrying mesh plate 10 as the carrier for the workpiece, it can effectively ensure that the residue generated during the processing can pass through the rectangular mesh plate structure of the carrying mesh plate 10 and smoothly enter the residue collection box 3 for centralized collection under the action of suction. By adopting a sliding structure for the carrying mesh plate 10, the smoothness of the feeding and discharging of the workpiece to be processed is effectively improved, which is conducive to improving the overall smoothness of the operation and the overall processing efficiency.

[0032] Working principle:

[0033] When using this device to perform plasma treatment on a designated workpiece, the door opening auxiliary handle 18 should be pulled first. Supported by the structural characteristics of the connecting hinge 7, the sealing door 6 should be opened. Using the sliding connection structure between the positioning sliding block 8 and the directional sliding groove 19, the carrying mesh plate 10 should be pulled from inside the plasma treatment chamber 4 to the outside. This allows the workpiece to be stably placed on the upper end of the carrying mesh plate 10 and can be stably clamped with corresponding external tooling. Then, using the sliding connection structure between the positioning sliding block 8 and the directional sliding groove 19, the carrying mesh plate 10 carrying the workpiece should be stably and smoothly pushed back into the plasma treatment chamber 4. The sealing door 6 should be closed. The plasma generating component 15 should be started via the control panel 14, outputting plasma from the plasma treatment end 9 to perform plasma treatment on the workpiece below. Simultaneously, under the control of the control panel 14, the exhaust fan 16 should be started to quickly exhaust the harmful gases generated in the plasma treatment chamber 4 during the plasma treatment, achieving rapid exhaust operation synchronized with the treatment process. During continuous plasma treatment of the workpiece at the plasma treatment end 9, the control panel 14 activates the residue collection fan 11, which, through the residue collection duct 13, suction-collects the residue generated by the workpiece on the upper end of the carrying mesh plate 10 from directly below. Under the suction of the residue collection fan 11, the residue passes through the carrying mesh plate 10 and stably enters the residue collection box 3, achieving the effect of simultaneously collecting residue during the plasma treatment process. After the work is completed, [the system can be used to collect the residue]. By opening the slag discharge valve 22, the working residue collected inside the residue collection box 3 is discharged and recycled to the outside through the slag discharge pipe 12, which facilitates a smoother and more stable subsequent residue recycling operation. Finally, by opening the sealing door 6 and sliding and pulling out the carrying mesh plate 10, the processed workpiece at the top of the carrying mesh plate 10 can be taken out. The device's structure, which features synchronous response, rapid exhaust, and simultaneous residue collection during the processing, greatly enriches the overall functionality and improves the overall comprehensive performance.

[0034] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. An environmentally friendly plasma device for rapid exhaust and residue recovery, comprising a support frame (1), characterized in that: A residue collection box (3) is fixedly installed at the middle position of the bottom of the support frame (1). A plasma treatment chamber (4) is preset inside the support frame (1). An exhaust fan (16) is fixedly installed on one side of the upper end of the support frame (1). The exhaust fan (16) passes through the upper end of the support frame (1) and communicates with the inside of the plasma treatment chamber (4). A plasma treatment end head (9) is fixedly installed at the middle position of the upper end of the inside of the plasma treatment chamber (4). A loading mesh plate (10) is movably installed at the middle position inside the plasma treatment chamber (4). A residue collection fan (11) is fixedly installed at the bottom of the residue collection box (3). A control panel (14) is fixedly installed at the middle position of the outer side of the support frame (1).

2. The environmentally friendly plasma equipment for rapid exhaust and residue recovery as described in claim 1, characterized in that: The support frame (1) is symmetrically fixed with sturdy support legs (2) at the bottom corners. The plasma treatment chamber (4) is movably installed with a sealing door (6). A connecting hinge (7) is movably installed between the side of the front of the support frame (1) and the sealing door (6). The sealing door (6) is outside the support frame (1) with the connecting hinge (7) as the rotation center. An observation window (17) is fixedly installed outside the sealing door (6). An opening auxiliary handle (18) is fixedly installed at the middle position of the outer side of the sealing door (6).

3. The environmentally friendly plasma equipment for rapid exhaust and residue recovery as described in claim 2, characterized in that: A residue collection duct (13) is fixedly installed at the lower end of the plasma processing chamber (4). The residue collection duct (13) is located directly below the load-bearing mesh plate (10). The residue collection duct (13) passes through the bottom of the support frame (1) and communicates with the inside of the residue collection box (3). A slag discharge pipe (12) is fixedly connected at the middle position of the lower end of the outer side of the residue collection box (3). The slag discharge pipe (12) communicates with the inside of the residue collection box (3).

4. The environmentally friendly plasma equipment for rapid exhaust and residue recovery as described in claim 3, characterized in that: A plasma generating assembly (15) is fixedly installed on the other side of the upper end of the support frame (1). The plasma generating assembly (15) is electrically connected to the control panel (14). The residue collecting fan (11) and the exhaust fan (16) are also electrically connected to the control panel (14). A functional component protective shell (5) is fixedly installed on the upper end of the support frame (1). The functional component protective shell (5) completely covers the plasma generating assembly (15) and the exhaust fan (16) on the upper end of the support frame (1). An exhaust connecting duct (21) is pre-set on the upper end of the exhaust fan (16). The exhaust connecting duct (21) penetrates the upper end of the functional component protective shell (5).

5. The environmentally friendly plasma equipment for rapid exhaust and residue recovery as described in claim 4, characterized in that: The slag discharge conduit (12) is externally equipped with a slag discharge valve (22), and the load-bearing mesh plate (10) is an overall rectangular mesh plate structure.

6. The environmentally friendly plasma equipment for rapid exhaust and residue recovery as described in claim 5, characterized in that: Positioning sliding blocks (8) are symmetrically fixedly installed on both sides of the middle of the plasma processing chamber (4). Orientation sliding grooves (19) are symmetrically opened on both sides of the outer side of the material carrier plate (10). The inner specifications of the orientation sliding groove (19) correspond to and match the outer specifications of the positioning sliding block (8). The material carrier plate (10) is slidably connected to the inner wall of the support frame (1) inside the plasma processing chamber (4) through the sliding structure between the positioning sliding block (8) and the orientation sliding groove (19).

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