Expansion screw pulling-out device

Abstract

An expansion screw pulling-out device comprises a supporting frame; a hydraulic cylinder; a hydraulic pressure source; and a screw elevator. The hydraulic cylinder includes: a piston rod fixed to the support frame; and a barrel located on the piston rod and movably receiving the piston rod. The hydraulic source is in fluid communication with a fluid chamber within the hydraulic cylinder. The screw lifter comprises: a top plate positioned above the barrel of the hydraulic cylinder; and the lifting fork is positioned below the piston rod of the hydraulic cylinder.

Description

Technical Field

[0001] This disclosure relates to an expansion screw removal device, and more particularly to an expansion screw removal device for semiconductor devices. Background Technology

[0002] In the semiconductor manufacturing industry, the production of integrated circuits involves a series of complex processes that utilize precise control over various environmental conditions. These processes include deposition, etching, doping, and lithography, each performed under specific process conditions to ensure the integrity and performance of the semiconductor device. To achieve these conditions, semiconductor manufacturing facilities rely on a range of auxiliary equipment, such as pumps, to maintain target pressure levels within the processing chambers. Utility Model Content

[0003] In some embodiments, an expansion screw removal device includes a support frame, a hydraulic cylinder, a hydraulic power source, and a screw lifter. The hydraulic cylinder includes a piston rod fixed to the support frame and a cylinder located on the piston rod and movably receiving the piston rod. The hydraulic power source is in fluid communication with a fluid chamber within the hydraulic cylinder. The screw lifter includes a top plate located above the cylinder of the hydraulic cylinder and a lifting fork located below the piston rod of the hydraulic cylinder.

[0004] In some embodiments, an expansion screw removal device includes a hydraulic source, a hydraulic cylinder, and a screw lifter. The hydraulic cylinder is connected to the hydraulic source and includes a piston rod and a cylinder positioned above the piston rod. The screw lifter includes a lifting fork connected to the cylinder of the hydraulic cylinder, wherein the lifting fork includes two fingers and a groove separating the two fingers, wherein the groove is positioned below the piston rod.

[0005] In some embodiments, an expansion screw removal device includes a hydraulic source, a hydraulic cylinder, a screw jack, and a conduit. The hydraulic cylinder is connected to the hydraulic source and includes a piston rod and a cylinder positioned above the piston rod. The screw jack includes a lifting fork connected to the cylinder of the hydraulic cylinder, wherein the lifting fork includes two fingers and a slot separating the two fingers, wherein the slot is positioned below the piston rod. The conduit fluidly connects the hydraulic source and the hydraulic cylinder. Attached Figure Description

[0006] The various features of this disclosure can be best understood by reading the following detailed description in conjunction with the accompanying drawings. It should be noted that, in accordance with industry standard practice, the features are not drawn to scale. In fact, the dimensions of the features may be arbitrarily increased or decreased for clarity of explanation.

[0007] Figure 1A side view of a semiconductor processing chamber and auxiliary semiconductor processing apparatus placed on an RC floor within a semiconductor manufacturing facility (FAB) according to some embodiments of the present disclosure is illustrated.

[0008] Figures 2 to 6 A side view illustrating the sequential stages involved in securing a vibration isolation base to an RC floor according to some embodiments of this disclosure;

[0009] Figures 7 to 14 The illustration depicts the sequential stages involved in removing the vibration isolation base and expansion bolts and restoring the RC floor according to some embodiments of this disclosure;

[0010] Figures 15 to 16 The illustration depicts the sequential stages involved in removing the vibration isolation base and expansion bolts and restoring the RC floor according to some other embodiments of this disclosure;

[0011] Figure 17 A perspective view illustrating an example hydraulic expansion screw removal device according to some embodiments of this disclosure;

[0012] Figure 18A Perspective views of example hydraulic sources and example fluid conduits according to some embodiments of this disclosure are shown;

[0013] Figure 18B An exploded view of an example hydraulic cylinder and an example ground support frame according to some embodiments of the present disclosure is shown;

[0014] Figure 18C A perspective view of an example screw jack according to some embodiments of the present disclosure is shown.

[0015] [Symbol Explanation]

[0016] 100: Reinforced concrete floor

[0017] 110: Auxiliary semiconductor processing device / pump

[0018] 112: Vibration isolation base

[0019] 113: Through hole

[0020] 120: Semiconductor processing chamber

[0021] 202: Kong

[0022] 210: Expansion bolt

[0023] 212: Threaded rod

[0024] 213: Anchor Cone

[0025] 214: Expandable sleeve

[0026] 215: Slit

[0027] 216: Washer

[0028] 216B: Horizontal bottom surface

[0029] 218: Nut

[0030] 300: Hydraulic expansion screw removal device

[0031] 310: Ground support frame

[0032] 312:Substrate

[0033] 312O, 320O: Slender opening

[0034] 314, 336: Support legs

[0035] 316, 332: Top plate

[0036] 318: Cylindrical platform

[0037] 320: Hydraulic cylinder

[0038] 322: Tube

[0039] 323: Fluid inlet port

[0040] 324: Piston rod

[0041] 325: Fluid Chamber

[0042] 326: Top rod

[0043] 327: Ring Ridge

[0044] 330: Screw Lifting Machine

[0045] 332O: Opening

[0046] 334: Lifting Fork

[0047] 334F: Finger-like structure

[0048] 334S, 348S: slot

[0049] 334S1: Entrance Section

[0050] 334S2: Rear section

[0051] 340: Hydraulic source

[0052] 342: Handle

[0053] 344: Cylindrical storage container

[0054] 346: Bracket

[0055] 348: Display Module

[0056] 350: Fluid conduit

[0057] 400: Sealing material

[0058] A1, A2, A3, A4, A5: Arrows

[0059] D1, D6, D13, D17: Length

[0060] D2, D8, D9, D16: Altitude

[0061] D3, D5, D7, D11, D14, D18: Width

[0062] D4: Outer Diameter

[0063] D12, D15: Distance

[0064] R1: Partial Area Detailed Implementation

[0065] The following disclosure provides numerous different embodiments or instances for implementing various features of the provided subject matter. Specific examples of elements and configurations are described below to simplify this disclosure. Of course, these are merely examples and are not intended to be limiting. For example, in the following description, forming a first feature above or on a second feature may include embodiments where the first and second features are formed in direct contact, and may also include embodiments where an additional feature may be formed between the first and second features so that the first and second features do not directly contact each other. Furthermore, reference numerals and / or letters may be repeated in various instances in this disclosure. This repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.

[0066] Furthermore, for ease of description, spatial relative terms such as “beneath,” “below,” “lower,” “above,” “upper,” and similar terms are used herein to describe the relationship between one component or feature and another illustrated in the figures. In addition to the orientations depicted in the figures, spatial relative terms are also intended to cover different orientations of the device in use or operation. The device may be oriented in other ways (rotated 230 degrees or in other orientations), and the spatial relative descriptors used herein shall be interpreted accordingly. As used herein, “around,” “about,” “approximately,” or “substantially” generally mean within 20%, 10%, or 5% of a given value or range. The values ​​given herein are approximate, meaning that unless explicitly stated otherwise, the terms “around,” “about,” “approximately,” or “substantially” can be inferred. However, those skilled in this art will recognize that the values ​​or ranges described throughout the description are merely examples and may decrease as integrated circuits are scaled down.

[0067] In semiconductor manufacturing facilities, expansion bolts are used to secure semiconductor machinery and auxiliary equipment, such as pumps, to reinforced concrete (RC) floors. This method ensures stability and prevents unnecessary movement during seismic activity. However, when these machines are relocated, the expansion bolts must be removed from the RC floor. Current methods for manually removing these expansion bolts can be cumbersome and inefficient, posing challenges for facility operators.

[0068] To address these challenges, this disclosure provides a hydraulic expansion screw removal device in various embodiments, designed to improve the screw removal process. This device utilizes a hydraulic cylinder to generate pulling force, effectively removing expansion screws from RC floors with greater efficiency and ease. By employing hydraulic technology, the device provides a more reliable and time-saving solution compared to traditional manual methods, thereby enhancing operational flexibility and reducing downtime during semiconductor manufacturing facility relocation.

[0069] Figure 1A side view of a semiconductor processing chamber 120 and an auxiliary semiconductor processing apparatus 110 placed on an RC floor 100 within a semiconductor fabrication facility (FAB). In some embodiments, the semiconductor processing chamber 120 is the location where semiconductor manufacturing processes such as etching, deposition, photolithography, or doping occur. The chamber 120 operates under controlled conditions to ensure the quality and performance of the resulting semiconductor devices. To support the controlled conditions of the semiconductor processing chamber 120, the auxiliary semiconductor processing apparatus 110 (such as a pump) can pump the pressure within the semiconductor processing chamber 120 down to a target pressure level and maintain the pressure within the semiconductor processing chamber 120 at the target pressure level. The pump 110 can be used to remove gases and contaminants from the processing environment within the semiconductor processing chamber 120, thereby allowing semiconductor wafers to be processed in a controlled environment. However, both the auxiliary semiconductor processing apparatus 110 and the processing chamber 120 are susceptible to external disturbances, such as vibration and shockwave activity, which can compromise the integrity of the manufacturing process.

[0070] To address these issues, the auxiliary semiconductor processing device 110 is equipped with vibration isolation bases 112 on its bottom surface. These vibration isolation bases 112 are securely anchored to the reinforced concrete (RC) floor 100. These vibration isolation bases 112 absorb and suppress vibrations, thereby effectively shielding the auxiliary semiconductor processing device 110 and the processing chamber 120 from adverse effects such as seismic waves. By isolating the auxiliary semiconductor processing device 110 from ground motion, the vibration isolation bases 112 allow for the maintenance of stability and accuracy in semiconductor processing operations. In some embodiments, the processing chamber 120 is also equipped with vibration isolation bases 112.

[0071] Figures 2 to 6 yes Figure 1 An enlarged side view of a portion of region R1, wherein the vibration isolation base 112 is fixed to the RC floor 100. Figures 2 to 6 The illustration depicts the sequential stages involved in securing the vibration isolation base 112 to the RC floor 100. In the initial step, holes 202 are formed in the RC floor 100 to serve as bases for the secure installation of expansion bolts, which then anchor the vibration isolation base 112 to the RC floor 100. Figure 2The initial steps in forming hole 202 include selecting a suitable location on the RC floor 100. Once the location is determined, a drill press equipped with, for example, a diamond-tipped drill bit can be used to drill hole 202 into the RC floor 100. Using a diamond-tipped drill bit allows for efficient penetration of the dense and robust structure of the reinforced concrete material within the RC floor 100 without causing cracks or structural damage to the floor 100. Careful attention is paid to the depth and diameter specifications during the drilling process to ensure that the hole 202 is large enough to accommodate expansion bolts in subsequent steps. In some embodiments, water or a suitable coolant is applied to the drill bit throughout the drilling operation to minimize heat generation and reduce wear, thereby improving the accuracy and lifespan of the drilling equipment. After drilling hole 202 to the desired specifications, it can be cleaned to remove any debris or dust, ensuring a clean and unobstructed path for subsequent insertion of expansion bolts. This careful preparation allows for the safe and stable installation of the vibration isolation base 112, thereby mitigating the effects of vibration and shockwave activity on auxiliary equipment and the semiconductor processing chamber 120.

[0072] After the initial preparation of drilling 202 in the RC floor 100, as Figure 3 As described, the next step involves placing the vibration isolation base 112 of the auxiliary semiconductor processing device 110, which is placed on the RC floor 100, such that the through-hole 113 extending through the vibration isolation base 112 is aligned with the drilled hole 202 in the RC floor 100. To achieve this alignment, the operator can use an alignment tool or guide to move the vibration isolation base 112 so that the through-hole 113 in the isolation base 112 is directly above the drilled hole 202 in the RC floor 100.

[0073] In some embodiments, the diameter of the through-hole 113 in the vibration isolation base 112 is strategically designed to allow for different installation scenarios. This configuration allows for precise engagement of expansion screws when the through-hole 113 has a diameter substantially the same as the diameter of the drilled hole 202 in the RC floor 100. This configuration facilitates a direct and secure connection, minimizes any possibility of lateral movement of the auxiliary semiconductor processing device 110, and ensures that the vibration isolation base 112 remains firmly anchored to the RC floor 100.

[0074] Alternatively, in some embodiments, the through-hole 113 of the vibration isolation base 112 is designed to have a diameter larger than that of the drilled hole 202 in the RC floor 100. This configuration provides additional clearance, allowing for easier alignment and installation of expansion bolts. The increased diameter of the through-hole 113 accommodates slight positional adjustments, which is advantageous when aligning the vibration isolation base 112 with other structural components or when compensating for minor surface irregularities on the RC floor 100. This flexibility simplifies the installation process and reduces the likelihood of misalignment during expansion bolt insertion.

[0075] Alternatively, in some embodiments, the diameter of the through-hole 113 in the vibration isolation base 112 is smaller than the diameter of the drilled hole 202 in the RC floor 100. This design produces a more constrained fit, where expansion bolts will be tightly guided through the vibration isolation base 112. This configuration enhances installation stability by providing a more rigid connection, which is particularly useful in high-vibration environments. By minimizing any potential movement of the vibration isolation base 112 relative to the RC floor 100, this approach helps maintain the integrity of the auxiliary equipment 110 and the semiconductor processing chamber 120.

[0076] like Figure 4 As depicted, the process continues, with the expansion bolt 210 inserted into a drilled hole 202 in the RC floor 100 via a through hole 113 in the vibration isolation base 112. The expansion bolt 210 includes a threaded rod 212 and an expandable sleeve 214 fitted onto the threaded rod 212. The expandable sleeve 214 is used to ensure that the expansion bolt 210 is anchored within the drilled hole 202 in subsequent steps.

[0077] In some embodiments, the expandable sleeve 214 is fitted onto the threaded rod 212 from the top end of the threaded rod 212 and slides downward until the bottom edge of the expandable sleeve 214 contacts the anchor cone 213 located at the bottom end of the threaded rod 212. The anchor cone 213 provides an inclined surface against which the sleeve 214 can expand. The expandable sleeve 214 may include one or more slits 215 that allow controlled expansion of the sleeve 214. When an upward force is applied by the anchor cone 213, these slits 215 allow the expandable sleeve 214 to bend outward, thereby effectively increasing the diameter of the expandable sleeve 214. The expansion process ensures that the expandable sleeve 214 is firmly pressed against the inner wall of the drilled hole 202 in the RC floor 100, thereby creating a safe and stable connection that anchors the vibration isolation base 112 to the RC floor 100.

[0078] In such Figure 5 In the subsequent steps described, assembly of the expansion bolt 210 continues, with washer 216 placed onto the threaded rod 212. This washer 216, positioned directly above the expandable sleeve 214, serves to evenly distribute the load and protect the sleeve 214 during tightening. Washer 216 helps to evenly transmit the force applied by the nut 218 to the sleeve 214. After placing washer 216, the nut 218 is screwed onto the threaded rod 212, resting on top of washer 216. The nut 218 applies an upward force to the threaded rod 212.

[0079] In the next stage of the fastening process, such as Figure 6As depicted, tightening and rotating the nut 218 helps to secure the expansion bolt 210 into the drilled hole 202 in the RC floor 100. When the nut 218 is rotated, it pulls the threaded rod 212 upward in a vertical direction, as indicated by arrow A1. This upward movement causes the anchor cone 213 at the bottom of the threaded rod to engage with the expandable sleeve 214, thereby initiating the expansion process of the expandable sleeve 214.

[0080] As the threaded rod 212 continues to move upward, the inclined sidewalls of the anchor cone 213 exert upward and horizontal forces on the expandable sleeve 214. These forces cause the sleeve 214 to expand outward in the horizontal direction, as indicated by arrows A2 and A3. This outward expansion results in the sleeve 214 being firmly pressed against the inner wall of the borehole 202 in the RC floor 100. This expansion creates a tight and secure engagement between the sleeve 214 and the RC floor 100, thereby effectively anchoring the vibration isolation base 112. This mechanism ensures that the vibration isolation base 112 is firmly anchored, thus providing resistance to vibration and shock wave forces.

[0081] Figures 7 to 14 yes Figure 1 An enlarged side view of a portion of region R1, wherein the vibration isolation base 112 is fixed to the RC floor 100. Figures 7 to 14 The illustration depicts the sequential stages involved in removing the vibration isolation base 112 and expansion bolts 210 and restoring the RC floor 100 according to some embodiments of this disclosure. Figure 7 The initial steps include removing the washer 216 and nut 218 from the threaded rod 212. This action removes the vertical constraint previously applied to the vibration isolation base 112, thereby releasing the vibration isolation base 112 for removal.

[0082] After that, as Figure 8 As described, the vibration isolation base 112 is raised and removed from the threaded rod 212. This step is facilitated by the absence of the washer 216 and nut 218, which previously secured the vibration isolation base 112 in place. Removal of the vibration isolation base 112 exposes the expansion screw 210, particularly the threaded rod 212 and the expandable sleeve 214, thereby allowing for further disassembly and ultimately removal of the expansion screw 210 from the drilled hole 202 in the RC floor 100.

[0083] exist Figure 9 In the process of removing the expansion bolt 210 from the drilled hole 202 in the RC floor 100, the washer 216 and nut 218 are strategically reinstalled onto the threaded rod 212. In some embodiments, the washer 216 is placed back onto the threaded rod 212, and then the nut 218 is screwed back onto the threaded rod 212. This setup facilitates the use of a hydraulic expansion bolt removal device 300 (such as...). Figure 10(As shown) Remove expansion screw 210.

[0084] In some embodiments, the washer 216 has an outer diameter exceeding both the diameter of the threaded rod 212 and the diameter of the top edge of the expandable sleeve 214. This allows the washer 216 to extend laterally beyond the circumferential surfaces of both the threaded rod 212 and the expandable sleeve 214. This extension allows the washer 216 to provide a horizontal bottom surface 216B that extends laterally beyond the threaded rod 212 and the expandable sleeve 214, serving as the contact area of ​​the hydraulic removal device 300.

[0085] Then, in Figure 10 In this embodiment, a hydraulic expansion screw removal device 300 is strategically positioned on the RC floor 100 to facilitate the removal of expansion screws 210. This hydraulic expansion screw removal device 300 is designed to engage with the horizontal bottom surface 216B of a washer 216, thereby applying an upward force for the removal process. The device 300 includes: a ground support frame 310; a hydraulic cylinder 320 mounted on the ground support frame 310; a screw lift 330, which can be raised by the hydraulic cylinder 320; a hydraulic source 340; and a fluid conduit 350 fluidly connecting the hydraulic source 340 to the hydraulic cylinder 320.

[0086] In some embodiments, the hydraulic cylinder 320 has an extendable length that allows it to extend vertically (e.g., upward) to provide a lifting force for the screw jack 330. The screw jack 330 includes a top plate 332 supported by the top surface of the cylinder 322 of the hydraulic cylinder 320. A lifting fork 334 of the screw jack 330 extends below the washer 216 and is used to raise the expansion screw 210. This lifting fork 334 includes two fingers 334F that press upward against opposing regions (such as left and right regions) of the bottom surface 216B of the washer; and a groove 334S located between the fingers 334F. The groove 334S is designed to receive the expansion screw 210, thereby allowing the screw jack 330 to move horizontally at a low height until the expansion screw 210 is received within the groove 334S.

[0087] The initial steps of operating the hydraulic expansion bolt removal device 300 include lowering the device until the ground support frame 310 reaches the RC floor 100. Once in place, the device moves horizontally, aligning the lifting fork 334 below the washer 216. This horizontal movement continues until the expansion bolt 210 is received into the slot 334S in the lifting fork 334, ensuring that the expansion bolt 210 is properly positioned for removal.

[0088] exist Figure 11AThe following step of operating the hydraulic expansion screw removal device 300 is depicted to illustrate the mechanism of removing the expansion screw 210 from the drilled hole 202 in the RC floor 100. The process begins with the operator operating the hydraulic source 340 by repeatedly pressing down the handle 342 of the hydraulic source 340, as indicated by arrow A4. This action pressurizes the hydraulic fluid within the hydraulic source 340, generating hydraulic pressure within the hydraulic source 340, which is transmitted via the fluid conduit 350 to the hydraulic cylinder 320, thereby pressurizing the hydraulic fluid within the hydraulic cylinder 320.

[0089] The resulting hydraulic pressure causes the cylinder 322 of the hydraulic cylinder 320 to move upward, performing an upward linear motion relative to the piston rod 324, as indicated by arrow A5. This upward motion is facilitated by the fixed positioning of the piston rod 324, which is mounted on a ground support frame 310. The ground support frame 310, resting on the RC floor 100, prevents any downward movement of the piston rod 324, ensuring that the hydraulic pressure is directed upward. Additionally, the horizontal movement of the cylinder 322 is constrained by the presence of a push rod 326 of the hydraulic cylinder 320, which extends upward from the cylinder 322. This push rod 326 inserts into an opening 332O in the top plate 332 of the screw jack 330. The engagement of the push rod 326 within the opening 332O restricts the horizontal movement of the cylinder 322, thereby ensuring that the hydraulic pressure is directed upward. This configuration allows the hydraulic cylinder 320 to apply a controlled upward force to the screw jack 330, which in turn applies this upward force to the bottom surface 216B of the washer 216.

[0090] The upward movement of the screw lifter 330 is converted into an upward force applied to the bottom surface 216B of the washer 216. This upward force effectively pulls the washer 216, along with the nut 218 and threaded rod 212, away from the drilled hole 202 in the RC floor 100. The coordinated action of the hydraulic expansion screw removal device 300 ensures the smooth and controlled removal of the expansion screw 210, thereby minimizing the risk of damage to the surrounding concrete and facilitating the restoration or reconfiguration of the RC floor 100.

[0091] Figure 11B This is an enlarged schematic cross-sectional view of a hydraulic expansion screw removal device 300 according to some embodiments of the present disclosure. In some embodiments, the cylinder 322 has a fluid inlet port 323, which serves as a connection to a fluid conduit 350. This conduit 350 fluidly connects the hydraulic cylinder 320 to a hydraulic source 340, thereby allowing hydraulic fluid to flow into the hydraulic cylinder 320.

[0092] In some embodiments, the hydraulic cylinder 320 includes a fluid chamber 325 located within the cylinder 322. The fluid chamber 325 is in direct fluid communication with a fluid inlet port 323, which is connected to a hydraulic source 340 via a fluid conduit 350. In some embodiments, the fluid chamber 325 is located directly above the piston rod 324 and is used to contain hydraulic fluid, thereby facilitating upward movement of the cylinder 322 when hydraulic pressure is applied and increased.

[0093] Operation begins with the operator pressing down on the handle 342 of the hydraulic source 340, which generates hydraulic pressure. This pressure forces hydraulic fluid into the fluid chamber 325 through the fluid inlet port 323. As the fluid chamber 325 fills, the incompressible nature of the hydraulic fluid (such as oil or another suitable incompressible fluid) allows pressure to be effectively transmitted to the cylinder 322. This pressure causes the cylinder 322 to rise, while the piston rod 324 remains stationary, fixedly mounted on the ground support frame 310.

[0094] In some embodiments, the fluid chamber 325 is designed as a cylindrical chamber with a diameter substantially equal to or smaller than the diameter of the piston rod 324. These dimensions allow the fluid chamber 325 to confine the hydraulic fluid to the area directly above the piston rod 324, thereby concentrating the upward force on the cylinder 322. By concentrating the hydraulic pressure in this way, the efficiency of the lifting operation is improved, allowing for the smooth and efficient raising of the screw jack 330. This precise control of the hydraulic force allows for the effective removal of the expansion screw 210, thereby minimizing potential damage to the RC floor 100 and facilitating easy restoration of the RC floor 100.

[0095] In some embodiments, the hydraulic expansion screw removal device 300 is operated until the washer 216, nut 218, and threaded rod 212 are removed from the drilled hole 202 in the RC floor 100, while the expandable sleeve 214 remains in the drilled hole 202, such as Figure 12 This is because, as explained above. Figure 6 During the described steps, the lateral expansion applied causes the expandable sleeve 214 to engage tightly with the inner wall of the borehole 202. Specifically, during the removal process, the hydraulic expansion screw removal device 300 applies an upward force to the washer 216, which is transmitted via the nut 218 and the threaded rod 212. As the hydraulic pressure causes the sleeve 322 to rise, the screw jack 330 raises these components away from the borehole 202. However, the expandable sleeve 214 remains locked within the borehole 202. This is because the sleeve 214 has expanded outward to press firmly against the inner wall of the borehole 202, creating a tight fit that resists the upward forces applied to other components such as the washer 216, the nut 218, and the threaded rod 212 of the expansion screw 210.

[0096] exist Figure 13 The process continues, handling the expandable sleeve 214, which remains engaged within the borehole 202 after the washer 216, nut 218, and threaded rod 212 have been removed. To ensure the expandable sleeve 214 does not protrude above the surface of the RC floor 100, it is carefully displaced and pushed further downward into the borehole 202. This is achieved by applying a downward force to the expandable sleeve 214, such as knocking it out of its tight engagement with the inner wall of the borehole 202. The force is applied in a controlled manner to ensure that the expandable sleeve 214 is removed without damaging the surrounding concrete of the RC floor 100. As the sleeve 214 is knocked downward, it falls completely into the borehole 202, settling below the surface level of the RC floor 100. By displacing the expandable sleeve 214 so that it is completely confined within the borehole 202, the surface of the RC floor 100 remains unobstructed.

[0097] exist Figure 14 In this process, the final stage involves restoring the RC floor 100 by sealing the drilled holes 202 with a sealant 400. This allows the RC floor 100 to return to its original state, ensuring a smooth and continuous surface free of any structural weaknesses or irregularities. In some embodiments, by way of example and not limitation, the restoration process includes filling the drilled holes 202 with a suitable sealant 400, such as a high-strength concrete mixture or epoxy resin. The sealant 400 can be selected to match the properties of the existing RC floor 100, providing a seamless integration that maintains the structural integrity of the floor. The sealant 400 is initially applied in its liquid or flowable phase, allowing it to flow into the drilled holes 202 in the RC floor 100 and fill any voids left by the removal of the expansion screw elements and the downward displacement of the expandable sleeve 214. After the sealant 400 is applied, it undergoes a curing process. This curing transforms the sealant 400 from its liquid phase to a solid phase, thereby effectively restoring the integrity of the RC floor 100. The cured sealant 400 allows it to withstand subsequent semiconductor manufacturing processes, ensuring the floor remains safe and functional.

[0098] In some embodiments, after curing, the sealant 400 is planarized to ensure a smooth and uniform surface aligned with the surrounding RC floor 100. This planarization can be achieved via various techniques, such as grinding or other suitable methods, that remove any excess sealant 400 from the RC floor 100 beyond the drilled holes 202 and create a seamless transfer between the repaired area and the existing RC floor 100. This floor restoration not only enhances the aesthetic appearance of the RC floor 100 but also strengthens its ability to support future installations and withstand further semiconductor manufacturing operations. By sealing the drilled holes 202, the RC floor 100 is ready for continued use in semiconductor manufacturing facilities.

[0099] Figure 15 and Figure 16 yes Figure 1 An enlarged side view of a portion of region R1, wherein the vibration isolation base 112 is fixed to the RC floor 100. Figure 15 and Figure 16 The illustration depicts the sequential stages involved in removing the vibration isolation base 112 and expansion screws 210 and restoring the RC floor 100 according to some other embodiments of this disclosure. Figure 15 Drawing in Figure 11A Another scenario following the operation of the hydraulic expansion screw removal device 300 described above. For example... Figure 15 As described, the hydraulic expansion screw removal device 300 not only removes the washer 216, nut 218, and threaded rod 212 from the drilled hole 202 in the RC floor 100, but also removes the expandable sleeve 214. This complete removal is achieved by applying sufficient upward force via the hydraulic expansion screw removal device 300, thereby ensuring that all components of the expansion screw 210 are removed from the drilled hole 202 in the RC floor 100. This method is useful in scenarios where it is desirable to completely remove any residue of the expansion screw 210 from the drilled hole 202, thus contributing to the clean restoration of the RC floor 100.

[0100] Subsequently, Figure 16 In this process, a sealant 400 (such as a high-strength concrete mixture or epoxy resin) is used to seal the drilled holes 202. In some embodiments, the sealant 400 is first applied in liquid phase to the drilled holes 202 in the RC floor 100, filling the voids left by the removed elements of the expansion screws 210. After application, the sealant 400 is cured to form a strong and durable patch that effectively restores the integrity of the RC floor 100. In some embodiments, the sealant 400 is then planarized with the surrounding floor surface by, for example, grinding or other suitable planarization techniques.

[0101] Figure 17 A perspective view of an example hydraulic expansion screw removal device 300 according to some embodiments of the present disclosure is shown. Figure 18A A perspective view of an example hydraulic source 340 and an example fluid conduit 350 according to some embodiments of the present disclosure is shown. Figure 18B An exploded view of an example hydraulic cylinder 320 and an example ground support frame 310 according to some embodiments of the present disclosure is shown. Figure 18C A perspective view of an example screw jack 330 according to some embodiments of the present disclosure is shown.

[0102] like Figure 17 and Figure 18BAs described, the ground support frame 310 serves as the base for the hydraulic expansion screw removal device 300. The ground support frame 310 is designed to provide stability and alignment for other components such as the hydraulic cylinder 320 and the screw lift 330 during operation. In some embodiments, the ground support frame 310 includes a base plate 312, flush against an RC floor 100, with two vertical legs 314 extending upward from opposite sides of the base plate 312. These vertical legs 314 are parallel to each other and symmetrically spaced along the length of the base plate 312 to provide stability. The legs 314 are connected at their apexes by a top plate 316, which bridges the two legs 314, forming a rigid structure for the ground support frame 310. This top plate 316 extends horizontally, its flat surface extending perpendicular to the vertical axes of the two legs 314. In some embodiments, the ground support frame 310 further includes a cylindrical platform 318 located on top of the top plate 316. A piston rod 324 is concentrically mounted on the cylindrical platform 318.

[0103] In some embodiments, such as Figure 18B As described, the substrate 312 has a length D6 ranging from about 100 mm to about 110 mm (e.g., about 108 mm), a width D7 ranging from about 75 mm to about 85 mm (e.g., about 80 mm), and a thickness ranging from about 8 mm to about 12 mm (e.g., about 10 mm). In some embodiments, the legs 314 each extend vertically to a height D8 ranging from about 115 mm to about 125 mm (e.g., about 120 mm) and a width ranging from about 25 mm to about 35 mm (e.g., about 30 mm). In some embodiments, the substrate 312 has an elongated opening 312O, which has a length ranging from about 50 mm to about 70 mm (e.g., about 60 mm) and a width ranging from about 20 mm to about 30 mm (e.g., about 26 mm). In some embodiments, the cylindrical platform 318 has a thickness ranging from about 15 mm to about 25 mm (e.g., about 20 mm) and an outer diameter ranging from about 20 mm to about 30 mm (e.g., about 28 mm).

[0104] In some embodiments, the hydraulic cylinder 320 is mounted on a ground support frame 310 and has a vertical axis aligned with the vertical axis of the ground support frame 310. The hydraulic cylinder 320 includes: a piston rod 324 fixed to a cylindrical platform 318; and a cylinder 322 positioned above the piston rod 324 and movable vertically relative to the piston rod 324 upon application of hydraulic pressure. The cylinder 322 is a cylindrical structure with one end capped to contain hydraulic fluid, and the opposite end open to allow the piston rod 324 to extend outward from the bottom edge of the cylinder 322. The hydraulic cylinder 320 includes: a fluid inlet port 323 located on the side wall of the cylinder 322. The fluid inlet port 323 fluidly connects a fluid chamber within the hydraulic cylinder 320 to a hydraulic source 340 via a fluid conduit 350, allowing hydraulic fluid to enter the fluid chamber of the hydraulic cylinder 320.

[0105] In some embodiments, the piston rod 324 extends vertically to a height D9 ranging from about 210 mm to about 230 mm (e.g., about 220 mm) and has an outer diameter ranging from about 5 mm to about 10 mm (e.g., about 8 mm). In some embodiments, the cylinder 322 extends vertically to a width D11 ranging from about 50 mm to about 60 mm (e.g., about 58 mm) and from about 130 mm to about 140 mm (e.g., about 134 mm). In some embodiments, the cylinder 322 has an outer diameter ranging from about 25 mm to about 35 mm (e.g., about 30 mm). In some embodiments, the cylinder 322 includes an annular ridge 327 extending upward from the top surface of the cylinder 322 by a distance D12 ranging from about 10 mm to about 20 mm (e.g., about 16 mm). In some embodiments, the annular ridge 327 has an outer diameter ranging from about 15 mm to about 20 mm (e.g., about 19 mm) and an inner outer diameter ranging from about 7 mm to about 12 mm (e.g., about 9 mm).

[0106] In some embodiments, such as Figure 17 and Figure 18CAs described, the screw jack 330 includes: a top plate 332; a lifting fork 334; and two vertical legs 336 extending downward from opposite sides of the top plate 332 to opposite sides of the lifting fork 334. The lifting fork 334 includes: two fingers 334F separated by a slot 334S. In some embodiments, the slot 334S includes: an inlet portion 334S1 extending from the tip of the lifting fingers 334F into the lifting fork 334; and a rear portion 334S2 located directly below and perpendicularly aligned with the opening 332O in the top plate 332. In some embodiments, the lifting fork 334 has a length D13 ranging from about 100 mm to about 110 mm (e.g., about 108 mm), a width D14 ranging from about 70 mm to about 90 mm (e.g., about 80 mm), and a thickness ranging from about 8 mm to about 12 mm (e.g., about 10 mm). In some embodiments, the raised fingers 334F are separated by a distance D15 ranging from about 25 mm to about 35 mm (e.g., about 30 mm). In some embodiments, the inlet portion 334S1 of the groove 334S has an outer diameter ranging from about 10 mm to about 15 mm (e.g., about 13 mm), and the rear portion 334S2 of the groove 3334 has an outer diameter ranging from about 7 mm to about 9 mm (e.g., about 8 mm). In some embodiments, each vertical leg 336 extends a height D16 ranging from about 275 mm to about 280 mm (e.g., about 277 mm). In some embodiments, the top plate 332 has a length D17 ranging from about 84 mm to about 86 mm (e.g., about 85 mm), a width D18 ranging from about 75 mm to about 81 mm (e.g., about 80 mm), and a thickness ranging from about 8 mm to about 12 mm (e.g., about 10 mm).

[0107] In some embodiments, such as Figure 17 and Figure 18A As described, the hydraulic source 340 has a cylindrical container 344 for storing hydraulic fluid and a manual pump mechanism operated by a handle 342 to pressurize the hydraulic fluid. The cylindrical container 344 has a longitudinal axis extending horizontally on the RC floor 100. Adjacent to the handle 342 is a display module 348, which houses electronic and mechanical components for monitoring the operation of the hydraulic source 340. This display module 348 has: sensors for monitoring the pressure and flow rate of the hydraulic fluid; and a display panel 348S facing the handle 342 to display real-time monitored data, such as the real-time pressure and flow rate of the hydraulic fluid, to the operator. The hydraulic source 340 further includes: a bracket 346 located below the cylindrical container 344 for securing the cylindrical container 344 to the RC floor 100. A fluid conduit 350 is a flexible conduit extending from the longitudinal end of the cylindrical container 344 to the fluid inlet port 323 of the hydraulic cylinder 320.

[0108] In some embodiments, the cylindrical container 344 has a length D1 ranging from about 330 mm to about 350 mm (e.g., about 345 mm) and a height D2 ranging from about 80 mm to about 90 mm (e.g., about 87 mm). In some embodiments, each bracket 346 has a hole with a width D3 ranging from about 20 mm to about 30 mm (e.g., about 25 mm) and an outer diameter D4 ranging from about 3 mm to about 6 mm (e.g., about 5 mm). In some embodiments, the display module 348 has a width D5 ranging from about 70 mm to about 80 mm (e.g., about 75 mm).

[0109] Based on the above discussion, it is evident that this disclosure provides advantages in various embodiments. However, it should be understood that other embodiments may offer additional advantages, and not all advantages need to be disclosed herein, nor are specific advantages required for all embodiments. One advantage is that expansion bolts can be removed from RC floors more efficiently and easily. Another advantage is that the hydraulic expansion bolt removal device is user-friendly and can be operated with minimal training. Another advantage is that the hydraulic expansion bolt removal device can remove expansion bolts from a variety of locations, including floors and walls. Another advantage is that the hydraulic expansion bolt removal device is lightweight, weighing approximately 3 kg, facilitating transportation. Another advantage is that the hydraulic expansion bolt removal device operates quietly, with reduced noise and vibration, making it ideal for use in FABs.

[0110] In some embodiments, a method includes the following steps: removing a washer and a nut from a threaded rod of an expansion screw fixed to a drilled hole; removing a base of a semiconductor processing device from the threaded rod after removing the washer and the nut; placing the washer and the nut back onto the threaded rod of the expansion screw; moving a lifting fork of a screw jack such that a plurality of fingers of the lifting fork are directly below the washer; and raising the lifting fork by a hydraulic cylinder to remove the washer, the nut, and the threaded rod of the expansion screw from the drilled hole. In some embodiments, raising the lifting fork includes manually pressurizing a hydraulic fluid within the hydraulic cylinder. In some embodiments, manually pressurizing the hydraulic fluid within the hydraulic cylinder includes pressing down a handle of a hydraulic source. In some embodiments, the hydraulic source is fluidly connected to the hydraulic cylinder via a fluid conduit. In some embodiments, the fluid conduit is flexible. In some embodiments, raising the lifting fork further removes an expandable sleeve of the expansion screw from the drilled hole. In some embodiments, the method further includes the step of: after removing the washer, the nut, and the threaded rod of the expansion screw from the drill hole, applying a downward force to an expandable sleeve such that the expandable sleeve falls completely into the drill hole. In some embodiments, the method further includes the step of: after the expandable sleeve falls completely into the drill hole, sealing the drill hole with a sealing material. In some embodiments, the step of raising the lifting fork is performed such that the plurality of fingers of the lifting fork press upward against a bottom surface of the washer. In some embodiments, the step of raising the lifting fork includes raising a top plate of the screw jack by means of a hydraulic cylinder, wherein the screw jack includes a plurality of legs extending vertically from a plurality of opposite sides of the top plate to a plurality of opposite sides of the lifting fork.

[0111] In some embodiments, a method includes the steps of: removing a base of a semiconductor processing device from an expansion screw fixed to a hole in a floor; and, after removing the base of the semiconductor processing device, pulling a threaded rod of the expansion screw out of the hole in the floor. The pulling includes the steps of: positioning a lifting fork of a screw jack to engage the expansion screw in a groove on the lifting fork; and pressurizing a hydraulic cylinder located between the lifting fork and a top plate of the screw jack, causing the lifting fork to move upward to pull out the threaded rod of the expansion screw. In some embodiments, the hydraulic cylinder is pressurized by a hydraulic source fluidly connected to a fluid inlet port of the hydraulic cylinder. In some embodiments, the fluid inlet port is located on a side wall of a cylinder of the hydraulic cylinder. In some embodiments, the hydraulic source is fluidly connected to the fluid inlet port of the hydraulic cylinder via a flexible conduit. In some embodiments, the step of pressurizing the hydraulic cylinder includes pressing downward on a handle of the hydraulic source disposed above a container of the hydraulic source. In some embodiments, the step of pressurizing the hydraulic cylinder is performed such that the lifting fork presses upward against a bottom surface of a washer fitted to the threaded rod. In some embodiments, the step of pressurizing the hydraulic cylinder is performed, causing the lifting fork to further remove an expandable sleeve of the expansion bolt.

[0112] In some embodiments, an apparatus includes: a support frame; a hydraulic cylinder; a hydraulic source; and a screw jack. The hydraulic cylinder includes: a piston rod fixed to the support frame; and a cylinder located on the piston rod and movably receiving the piston rod. The hydraulic source is in fluid communication with a fluid chamber within the hydraulic cylinder. The screw jack includes: a top plate located above the cylinder of the hydraulic cylinder; and a lifting fork located below the piston rod of the hydraulic cylinder, wherein the lifting fork can be raised and lowered by a linear movement of the cylinder relative to the piston rod. In some embodiments, the hydraulic source includes: a container; and a handle operable to pressurize a hydraulic fluid in the container. In some embodiments, the apparatus further includes a flexible conduit fluidly connecting the hydraulic source to the hydraulic cylinder. In some embodiments, the hydraulic cylinder has a fluid inlet port located on a side wall of the cylinder. In some embodiments, the fluid chamber is disposed above the piston rod. In some embodiments, the lifting fork has two fingers separated by a groove located directly below the cylinder.

[0113] In some embodiments, an apparatus includes: a hydraulic source; a hydraulic cylinder; and a screw jack. The hydraulic cylinder is connected to and pressurized by the hydraulic source. The hydraulic cylinder includes: a piston rod; and a cylinder positioned above the piston rod. The cylinder is elevable in response to a hydraulic pressure generated by the hydraulic source. The screw jack includes a lifting fork elevable from the cylinder of the hydraulic cylinder. The lifting fork includes: two fingers; and a groove separating the two fingers. The groove is positioned below the piston rod. In some embodiments, the apparatus further includes a support frame to which the piston rod is fixed. In some embodiments, the apparatus further includes: a conduit fluidly connecting the hydraulic source to the hydraulic cylinder. In some embodiments, the conduit is a flexible conduit.

[0114] In some embodiments, an expansion screw removal device includes a hydraulic source, a hydraulic cylinder, a screw jack, and a conduit. The hydraulic cylinder is connected to the hydraulic source and includes a piston rod and a cylinder positioned above the piston rod. The screw jack includes a lifting fork connected to the cylinder of the hydraulic cylinder, wherein the lifting fork includes two fingers and a groove separating the two fingers, wherein the groove is positioned below the piston rod. The conduit fluidly connects the hydraulic source and the hydraulic cylinder. In some embodiments, the hydraulic cylinder has a fluid inlet port located on a side wall of the cylinder.

[0115] The foregoing summary outlines the features of several embodiments to enable those skilled in the art to better understand the nature of this disclosure. Those skilled in the art should understand that they can readily use this disclosure as a basis for designing or modifying other processes and structures to achieve the same purposes and / or advantages of the embodiments introduced herein. Those skilled in the art should also recognize that such equivalent constructions do not depart from the spirit and scope of this disclosure, and that various changes, substitutions, and modifications can be made herein without departing from the spirit and scope of this disclosure.

Claims

1. A device for removing expansion screws, characterized in that, Include: A supporting framework; A hydraulic cylinder includes a piston rod fixed to the support frame and a cylinder located on the piston rod and movably receiving the piston rod; A hydraulic power source is in fluid communication with a fluid chamber within the hydraulic cylinder; and A screw jack includes a top plate located above the cylinder of the hydraulic cylinder and a lifting fork located below the piston rod of the hydraulic cylinder.

2. The expansion screw removal device as described in claim 1, characterized in that, The hydraulic source includes a container and a handle capable of pressurizing a hydraulic fluid in the container.

3. The expansion screw removal device as described in claim 1, characterized in that, Further includes: A flexible conduit fluidly connects the hydraulic source to the hydraulic cylinder.

4. The expansion screw removal device as described in claim 1, characterized in that, The hydraulic cylinder has a fluid inlet port located on one side wall of the cylinder.

5. The expansion screw removal device as described in claim 1, characterized in that, The fluid chamber is located above the piston rod.

6. The expansion screw removal device as described in claim 1, characterized in that, The lifting fork has two fingers separated by a groove located directly below the cylinder.

7. A device for removing expansion screws, characterized in that, Include: A hydraulic power source; A hydraulic cylinder, connected to the hydraulic power source, the hydraulic cylinder comprising a piston rod and a cylinder positioned above the piston rod; and A screw jack includes a lifting fork connected to the cylinder of the hydraulic cylinder, wherein the lifting fork includes two fingers and a groove separating the two fingers, wherein the groove is positioned below the piston rod.

8. The expansion screw removal device as described in claim 7, characterized in that, Further includes: A support frame on which the piston rod is fixed.

9. A device for removing expansion screws, characterized in that, Include: A hydraulic power source; A hydraulic cylinder connected to the hydraulic power source, the hydraulic cylinder comprising a piston rod and a cylinder positioned above the piston rod; A screw jack, comprising a lifting fork connected to the cylinder of the hydraulic cylinder, wherein the lifting fork includes two fingers and a groove separating the two fingers, wherein the groove is positioned below the piston rod; and A conduit fluidly connects the hydraulic power source and the hydraulic cylinder.

10. The expansion screw removal device as described in claim 9, characterized in that, The hydraulic cylinder has a fluid inlet port located on one side wall of the cylinder.

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