Table capable of preventing wafer box from falling off

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a table capable of preventing a wafer box from falling, which comprises a table top and a plurality of separation blades, the edge of the table top is detachably connected with assembly parts, the separation blades are detachably connected with the assembly parts, adsorption parts are filled between the adjacent assembly parts, and the separation blades are detachably connected with the adsorption parts. The blocking pieces are higher than the table top to form a surrounding area, the adjacent blocking pieces are sequentially connected to form the surrounding area, and the table top is further provided with an operation area without the blocking pieces. According to the utility model, the separation blade is additionally arranged on the existing table, so that the wafer cassette on the table can be effectively prevented from accidentally slipping off in the detection process, and the separation blade can be quickly disassembled when the separation blade is not needed. The device is simple in structure, adjustable in height and low in cost, can be directly integrated on an existing table, and is suitable for wafer detection, electroplating, scanning and other links in semiconductor manufacturing.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a table that prevents wafer cassettes from falling. Background Technology

[0002] In semiconductor manufacturing, wafers undergo processes such as sputtering, photoresist coating, exposure, electroplating, and etching before being subjected to automated optical inspection (AOI). During inspection, wafer cassettes containing the wafers are placed on a table. Existing tables lack a fixed structure, making it easy for operators to accidentally knock the cassettes, causing wafer damage or contamination. Custom designs to address this issue are costly; therefore, improving the structure of existing tables to meet the needs of wafer inspection is a technical problem that needs to be solved. Utility Model Content

[0003] This invention proposes a table to prevent wafer cassettes from falling. By optimizing the structure of existing tables and adding baffles, it ensures that the wafer cassettes on the table will not slip during the testing process.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a table for preventing wafer cassettes from falling, including a tabletop, an assembly detachably connected to the edge of the tabletop, and several baffles, which are detachably connected to the assemblies. Adhesive elements are filled between adjacent assemblies, and the baffles are detachably connected to the adhesive elements. The height of the baffles is greater than the height of the tabletop, forming a barrier area. Adjacent baffles are connected in sequence to form a barrier area. The tabletop also has an operating area without baffles.

[0005] Preferably, the accessory is an L-shaped hook, and the baffle is installed on the hook and keeps it adsorbed by the adsorption element.

[0006] Preferably, the adsorption element is a magnetic strip with the same thickness as the hook element, and the baffle is magnetically connected to the magnetic strip.

[0007] Preferably, the adsorption element is an adhesive strip and the thickness of the adhesive strip is the same as the thickness of the hook element, and the baffle is bonded to the adhesive strip.

[0008] Preferably, the bottom of the hook component is also provided with a slot structure, and the baffle can be engaged with the slot structure at the bottom of the hook component.

[0009] Preferably, the assembly is a snap-fit ​​component with a slot structure, and the baffle snaps into the snap-fit ​​component.

[0010] Preferably, if the tabletop is a square or rectangular table, the baffle is long and narrow and is located in three directions of the tabletop as a barrier area, with the remaining direction serving as the operating area.

[0011] Preferably, if the tabletop is a round table, the baffle is arc-shaped and its angle range of not less than 270° on the tabletop is used as the enclosure area, and the remaining angle range is used as the operating area.

[0012] Preferably, if the tabletop is not a square table, rectangular table, or round table, the enclosure area formed by the baffle should retain a gap of at least 50 cm in width as the operating area.

[0013] Preferably, if the desktop is made of non-metallic material, the assembly is screwed to the desktop; if the desktop is made of metallic material, the assembly is bonded to the desktop with adhesive.

[0014] Compared with existing technologies, this utility model provides a table to prevent wafer cassettes from falling, which has the following advantages: by adding a baffle to an existing table, the wafer cassettes on the table are effectively prevented from accidentally slipping off during the inspection process. When the baffle is not needed, it can be quickly removed. This structure is simple, height-adjustable, and low-cost, and can be directly integrated into existing tables. It is suitable for wafer inspection, electroplating, scanning, and other processes in semiconductor manufacturing. Attached Figure Description

[0015] Figure 1 This is the front view of the present invention;

[0016] Figure 2 This is the left view of the present invention;

[0017] Figure 3 This is a top view of the present invention.

[0018] Explanation of reference numerals in the attached diagram: 1. Desktop; 2. Assembly parts; 3. Baffle; 4. Adsorption components; 5. Enclosure area; 6. Operating area; 11. Table legs. Detailed Implementation

[0019] The technical solutions of the present utility model will now be described with reference to the accompanying drawings in the embodiments of the present utility model:

[0020] like Figure 1-3As shown, the table for preventing wafer cassettes from falling according to this utility model includes a tabletop 1 and table legs 11. The tabletop 1 has detachable fittings 2 connected to its edge, and also includes several baffles 3. The baffles 3 are detachably connected to the fittings 2. Adhesive elements 4 fill the gaps between adjacent fittings 2, filling the gaps between the baffles 3 and the tabletop 1. The fittings 2 can be L-shaped hooks with a slotted structure at the bottom. The baffles 3 can engage with the slotted structure at the bottom of the hook, being installed on the hook and held adsorbed by the suction elements 4. The baffles 3 and suction elements 4 are detachably connected. Alternatively, the fittings 2 can be snap-fit ​​elements with a slotted structure, whereby the baffles 3 snap-fit ​​with the snap-fit ​​element. The adsorption component 4 can be a magnetic strip with the same thickness as the hook component. The baffle 3 is magnetically connected to the magnetic strip, allowing it to adhere more firmly to the tabletop 1. Alternatively, the adsorption component 4 can be an adhesive strip with the same thickness as the hook component, perfectly filling the gap between the baffle 3 and the tabletop 1. The baffle 3 is bonded to the adhesive strip. The height of the baffle 3 is greater than the height of the tabletop 1, forming a barrier area 5. This height meets the requirements of the wafer inspection process. Adjacent baffles 3 are connected sequentially to form the barrier area 5. The tabletop 1 also has an operating area 6 without baffles 3, which is used by operators to inspect wafers. If the tabletop 1 is a square or rectangular table, the baffle 3 is elongated and located in three directions of the tabletop 1 as the enclosure area 5, with the remaining direction serving as the operating area 6. If the tabletop 1 is a round table, the baffle 3 is curved and located within an angle range of at least 270° of the tabletop 1 as the enclosure area 5, ensuring sufficient enclosure area. The remaining angle range serves as the operating area 6, ensuring that the operator can stand and work within this range. If the tabletop 1 is not a square, rectangular, or round table, the enclosure area 5 formed by the baffle 3 must retain a gap of at least 50 cm in width as the operating area 6 for wafer inspection personnel. If the tabletop 1 is made of non-metallic material, the assembly 2 is screwed to the tabletop 1 for a more secure connection. If the tabletop 1 is made of metallic material, the assembly 2 is bonded to the tabletop 1 using adhesive.

[0021] In use, when the baffle 3 needs to be installed, the assembly 2 is fixed to the edge of the tabletop 1 with bolts through the threaded holes, or the assembly 2 is glued to the tabletop 1 with adhesive. The baffle 3 is placed in the slot structure, and the adsorption element 4 is filled between adjacent assemblies 2. The baffle 3 and the adsorption element 4 are adsorbed. The enclosure area 5 formed by the baffle 3 ensures that the wafer cassette on the table will not accidentally slip during the inspection process. The remaining operating area 6 ensures the normal operation of the operator. If the height of the baffle 3 is adjusted, the assembly 2 can be fixed by bolts through the threaded holes of different heights. When the baffle 3 is not needed, it can be quickly removed. This structure is simple, height-adjustable, and low-cost. It can be directly integrated into existing tables and is suitable for wafer inspection, electroplating, scanning and other processes in semiconductor manufacturing.

[0022] The above embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

Claims

1. A table for preventing wafer cassettes from falling, comprising a tabletop (1), characterized in that: The desktop (1) is detachably connected to the edge of the fitting (2) and also includes several baffles (3). The baffles (3) are detachably connected to the fitting (2). Adhesive elements (4) are filled between adjacent fittings (2). The baffles (3) are detachably connected to the adhesive elements (4). The height of the baffles (3) is greater than the height of the desktop (1) to form a barrier area (5). Adjacent baffles (3) are connected in sequence to form a barrier area (5). The desktop (1) is also provided with an operating area (6) without baffles (3).

2. The table for preventing wafer cassettes from falling according to claim 1, characterized in that: The accessory (2) is an L-shaped hook, and the baffle (3) is installed on the hook and keeps adsorbed with the adsorption component (4).

3. The table for preventing wafer cassettes from falling according to claim 2, characterized in that: The adsorption element (4) is a magnetic strip and the thickness of the magnetic strip is the same as the thickness of the hook element. The baffle (3) is magnetically connected to the magnetic strip.

4. The table for preventing wafer cassettes from falling according to claim 2, characterized in that: The adsorption element (4) is an adhesive strip and the thickness of the adhesive strip is the same as the thickness of the hook element. The baffle (3) is bonded to the adhesive strip.

5. The table for preventing wafer cassettes from falling according to claim 2, characterized in that: The bottom of the hook is also provided with a slot structure, and the baffle (3) can be engaged with the slot structure at the bottom of the hook.

6. The table for preventing wafer cassettes from falling according to claim 1, characterized in that: The assembly (2) is a snap-fit ​​component with a slot structure, and the baffle (3) snaps into the snap-fit ​​component.

7. The table for preventing wafer cassettes from falling according to claim 1, characterized in that: If the tabletop (1) is a square table or a long table, the baffle (3) is long and is located in three directions of the tabletop (1) as the enclosure area (5), and the remaining direction is the operating area (6).

8. The table for preventing wafer cassettes from falling according to claim 1, characterized in that: If the tabletop (1) is a round table, then the baffle (3) is arc-shaped and the angle range of at least 270° on the tabletop (1) is used as the enclosure area (5), and the remaining angle range is used as the operating area (6).

9. The table for preventing wafer cassettes from falling according to claim 1, characterized in that: If the tabletop (1) is not a square table, a long table or a round table, the enclosure area (5) formed by the baffle (3) shall retain a gap of at least 50 cm in width as the operating area (6).

10. The table for preventing wafer cassettes from falling according to claim 1, characterized in that: If the desktop (1) is made of non-metallic material, the fitting (2) is screwed to the desktop (1). If the desktop (1) is made of metallic material, the fitting (2) is bonded to the desktop (1) with adhesive.

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