Pick-and-place arm for detecting front and back surfaces of primary and secondary rings

Abstract

The utility model discloses a pick-and-place arm for detecting the front and back surfaces of a primary and secondary ring, which comprises an arm upper pressing plate and an arm lower pressing plate, a pair of opposite end surfaces of the arm upper pressing plate are connected with adsorption structures, air passages are arranged on multiple side end surfaces of the arm upper pressing plate, the air passages are communicated with the adsorption structures, and the adsorption structures are communicated with the adsorption structures. A pair of fixed arms are integrally formed on the lower side end face of the arm upper pressing plate, and the upper side end faces of the fixed arms protrude out of the lower side end face; the arm lower pressing plate is fixedly connected to the end face of the lower side of the arm upper pressing plate, part of the end face of the arm lower pressing plate coincides with part of the end face of the arm upper pressing plate, the adsorption structure comprises first vacuum silica gel suction nozzles and second vacuum silica gel suction nozzles, the first vacuum silica gel suction nozzles are arranged on the end faces of the upper sides of the pair of fixed arms, and the second vacuum silica gel suction nozzles are arranged on the end faces of the lower sides of the pair of fixed arms. And second vacuum silica gel suction nozzles are arranged on the bottom end surfaces of the pair of fixed arms. According to the iron ring taking and placing device, 6-inch or 8-inch iron rings can be taken and placed, the situation that the iron rings fall is not prone to occurring, and safety is high.

Description

Technical Field

[0001] This utility model belongs to the field of wafer technology, specifically relating to a pick-and-place arm for detecting the front and back sides of a mother-daughter ring. Background Technology

[0002] With the rapid development of modern integrated circuit technology and the diversification of wafer products on production lines, the application of mother and daughter rings is becoming more and more widespread based on the requirements of wafer dicing processes, especially for compound wafers. This requires the AOI (Automated Optical Inspection) machine in the subsequent process to be able to correctly and stably pick up and place the mother and daughter rings on the iron rings. Currently, the iron rings are picked up and placed by a pick-and-place arm with a fixed end of the conveying robot on the wafer inspection machine.

[0003] However, there is currently no specialized pick-and-place arm for the iron rings that support 6-inch or 8-inch mother and daughter rings. Using the commonly available arms on the market makes it difficult to properly pick up and place the iron rings, which can easily lead to the iron rings falling off the arms during transportation, resulting in wafer damage and low safety.

[0004] Therefore, in order to address the above-mentioned technical problems, it is necessary to provide a pick-and-place arm for detecting the front and back sides of the mother and daughter rings.

[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0006] The purpose of this invention is to provide a pick-and-place arm for detecting the front and back sides of a ring, which can pick up and place 6-inch or 8-inch iron rings without the risk of the iron rings falling off, thus ensuring high safety.

[0007] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0008] A pick-and-place arm for detecting the front and back sides of a mother-daughter ring includes an upper arm pressure plate and a lower arm pressure plate. An adsorption structure is connected to a pair of opposite end faces of the upper arm pressure plate. Air passages are formed on multiple end faces of the upper arm pressure plate and are connected to the adsorption structures. A pair of fixing arms are integrally formed on the lower end face of the upper arm pressure plate, with the upper end face of each fixing arm protruding from the lower end face. The lower arm pressure plate is fixedly connected to the lower end face of the upper arm pressure plate, and a portion of the end faces of the lower arm pressure plate overlap with those of the upper arm pressure plate.

[0009] In one or more embodiments of this utility model, the adsorption structure includes a first vacuum silicone nozzle and a second vacuum silicone nozzle. The upper end face of each pair of fixed arms is provided with a first vacuum silicone nozzle, and the bottom end face of each pair of fixed arms is provided with a second vacuum silicone nozzle.

[0010] In one or more embodiments of this utility model, a first scale line is provided on the end face of the pair of fixed arms near the first vacuum silicone nozzle.

[0011] In one or more embodiments of this utility model, an auxiliary plate is integrally formed on one end face of the upper arm pressure plate, the auxiliary plate protrudes from the outer end face of the lower arm pressure plate, and an auxiliary groove is formed on the auxiliary plate.

[0012] In one or more embodiments of this utility model, a snap-fit ​​plate is snapped onto one side end face of the upper arm pressure plate and the lower arm pressure plate, an air passage is provided on a pair of opposite end faces of the upper arm pressure plate, and an air passage cover plate is snapped onto the end face of the upper arm pressure plate located in the air passage.

[0013] In one or more embodiments of this utility model, a support block is fixedly connected to each pair of fixed arms.

[0014] In one or more embodiments of this utility model, a label groove is provided on the upper pressure plate of the arm.

[0015] In one or more embodiments of this utility model, the lower arm pressure plate is provided with a plurality of second threaded holes, and the upper arm pressure plate and the snap-fit ​​plate are provided with first threaded holes that match the second threaded holes. The second threaded holes and the first threaded holes are both threadedly connected to a first fastening bolt.

[0016] In one or more embodiments of this utility model, the adsorption structure includes a third vacuum silicone nozzle and a groove, and the third vacuum silicone nozzle is provided on a pair of opposite end faces of the fixing arm.

[0017] In one or more embodiments of this utility model, a pair of grooves are provided on the outer end face of the third vacuum silicone nozzle for the first scale line, and the grooves are semi-circular.

[0018] Compared with the prior art, the new utility model provides a pick-and-place arm for detecting the front and back sides of a mother-daughter ring, which can pick up and place 6-inch or 8-inch iron rings without the risk of the iron rings falling off, thus ensuring higher safety. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to Embodiment 1 of this utility model;

[0021] Figure 2 This is a rear view of a pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to Embodiment 1 of this utility model;

[0022] Figure 3 This is a schematic diagram of the structure of a pick-and-place arm for detecting the front and back sides of a mother-daughter ring in Embodiment 2 of this utility model.

[0023] Explanation of key figure labels:

[0024] 1-Arm upper pressure plate, 101-Support block, 102-First vacuum silicone nozzle, 103-First scale line, 104-Auxiliary plate, 105-Auxiliary groove, 106-Fixed arm, 107-Second vacuum silicone nozzle, 2-Arm lower pressure plate, 201-Snap-fit ​​plate, 202-Label groove, 203-Limiting hole, 204-First fastening bolt, 205-Airway cover plate, 3-Third vacuum silicone nozzle, 301-Groove, 302-Second fastening bolt. Detailed Implementation

[0025] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0026] Example 1

[0027] like Figure 1As shown, an embodiment of the present invention provides a pick-and-place arm for detecting the front and back sides of a mother-daughter ring, comprising an upper arm pressure plate 1 and a lower arm pressure plate 2. The lower arm pressure plate 2 is fixedly connected to the lower end face of the upper arm pressure plate 1, and the lower arm pressure plate 2 and the upper arm pressure plate 1 have a portion of their end faces completely overlapping. The lower arm pressure plate 2 and the upper arm pressure plate 1 are matched with the iron ring, and the size of the upper arm pressure plate 1 and the lower arm pressure plate 2 is adapted to the 6-inch iron ring. The entire arm can fully bear its weight and is fixed by adsorption structure.

[0028] The lower end face of the upper pressure plate 1 of the arm is integrally formed with a pair of fixing arms 106. The upper end face of the fixing arms 106 protrudes from the lower end face. Existing arms commonly used in the market cannot fully support the bottom end face of the iron ring, and the contact area with the iron ring is small, resulting in unstable fixing of the iron ring. However, this application uses a pair of fixing arms 106 and an auxiliary plate 104, which can fully fit the bottom end face of the iron ring, making the contact area with the bottom of the iron ring larger. Moreover, its special shape design can adapt to multiple end faces of the iron ring, making it more stably fixed to the top end face of the arms 106 and the auxiliary plate 104.

[0029] An auxiliary plate 104 is integrally formed on one end face of the upper pressure plate 1 of the arm. The auxiliary plate 104 protrudes from the outer end face of the lower pressure plate 2 of the arm, and an auxiliary groove 105 is formed on the auxiliary plate 104. When adsorbing the iron ring, the auxiliary plate 104 and a pair of fixing arms 106 can well support the bottom of the iron ring. Under the premise that the iron ring is placed in a proper manner, the overall weight distribution is even, which can largely avoid the deformation of the whole due to uneven weight distribution.

[0030] The upper pressure plate 1 of the arm is connected to an adsorption structure on a pair of opposite end faces. Multiple end faces of the upper pressure plate 1 of the arm are provided with air channels. The air channels are connected to the adsorption structure and are used to conduct vacuum. The air channels are connected to the vacuum transmission end.

[0031] like Figures 1-2 As shown, further, air passages are provided on a pair of opposite end faces of the upper arm pressure plate 1, and air passage cover plates 205 are snapped onto the end faces of the upper arm pressure plate 1 located in the air passages. One of the air passages is located on the bottom end face of the snapping plate 201, and an air groove is provided on the end face of the snapping plate 201 located in the air passage. The air groove snaps onto the air passage cover plate 205, thereby sealing the air passage.

[0032] The adsorption structure includes a first vacuum silicone nozzle 102 and a second vacuum silicone nozzle 107. The first vacuum silicone nozzle 102 is provided on the upper end face of each pair of fixed arms 106, and the second vacuum silicone nozzle 107 is provided on the bottom end face of each pair of fixed arms 106. The second vacuum silicone nozzle 107 covers part of the end face of the lower pressure plate 2 and the fixed arms 106. The first vacuum silicone nozzle 102 and the second vacuum silicone nozzle 107 are connected to the air passage. The first vacuum silicone nozzle 102 can stably adsorb the iron ring and transport it.

[0033] Preferably, the first vacuum silicone nozzle 102 and the second vacuum silicone nozzle 107 are disposed on one end face near the auxiliary plate 104, and both the first vacuum silicone nozzle 102 and the second vacuum silicone nozzle 107 are "racetrack shaped".

[0034] Support blocks 101 are attached to each of the pair of fixed arms 106. Furthermore, the support blocks 101 are used to support the iron ring, providing a certain support height while ensuring that the protective film is not damaged by soft contact, reducing the contact area between the iron ring and the arm, and avoiding friction and other effects on the wafer caused by a large contact area.

[0035] Each of the two fixed arms 106 has a first scale line 103 on one end face near the first vacuum silicone nozzle 102. The first scale line 103 is arc-shaped and matches the size of the 6-inch iron ring to confirm the position on the iron ring arm.

[0036] One end face of the upper arm pressure plate 1 and the lower arm pressure plate 2 is fitted with a snap-fit ​​plate 201, that is, the outer end face of the lower arm pressure plate 2 and the upper arm pressure plate 1 are both attached to the inner end face of the snap-fit ​​plate 201, and the upper arm pressure plate 1 and the lower arm pressure plate 2 are fixed by the snap-fit ​​plate 201.

[0037] Furthermore, the lower pressure plate 2 of the arm has multiple second threaded holes. The upper pressure plate 1 of the arm and the snap-fit ​​plate 201 both have first threaded holes that match the second threaded holes. First fastening bolts 204 are threadedly connected to both the second and first threaded holes, passing through both. Multiple first fastening bolts 204 connect the arm to the end effector of the conveying robot on the wafer inspection machine, facilitating the secure installation of the arm.

[0038] The upper pressure plate 1 of the arm has a label slot 202. The label slot 202 makes it easy to attach stickers with the specifications, internal number and name of the wafer to the label slot 202, which is convenient for verification and reduces the chance of errors in production.

[0039] Example 2

[0040] like Figure 2As shown, the adsorption structure includes a third vacuum silicone nozzle 3 and a groove 301. The third vacuum silicone nozzle 3 is provided on a pair of opposite end faces of the fixed arm 106. The third vacuum silicone nozzle 3 is connected to the air passage and the negative pressure is delivered through the air passage to adsorb the iron ring.

[0041] The first scale line 103 is located on the outer end face of the third vacuum silicone nozzle 3. A pair of grooves 301 are provided. The grooves 301 are semi-circular. The pair of grooves 301 fit against the outer end face of the third vacuum silicone nozzle 3. The grooves 301 can fit against the bottom of the iron ring, better adsorb the iron ring, transport it, and prevent it from falling off.

[0042] It should also be noted that the lower arm pressure plate 2 is located on the top end face of the fixed arm 106. Both the lower arm pressure plate 2 and the upper arm pressure plate 1 are provided with a fourth threaded hole. A second fastening bolt 302 is threaded into the fourth threaded hole. The second fastening bolt 302 passes through the fourth threaded hole and connects and fixes the upper arm pressure plate 1 and the lower arm pressure plate 2 through the second fastening bolt 302. At the same time, multiple second fastening bolts 302 are used to connect the arm to the end of the conveying robot on the wafer inspection machine, which facilitates the secure installation of the arm.

[0043] Furthermore, the outer end face of the auxiliary plate 104 is multi-segment arc-shaped.

[0044] It is worth noting that the upper arm pressure plate 1 and the lower arm pressure plate 2 are sized to fit an 8-inch iron ring, fully supporting its weight for conveying 8-inch iron rings. Although both Embodiment 2 and Embodiment 1 use the upper arm pressure plate 1, the fixed arm 106, the auxiliary plate 104, and the lower arm pressure plate 2, their shapes differ to accommodate 8-inch or 6-inch iron rings. The area where the lower arm pressure plate 2 overlaps with the upper arm pressure plate 1 in Embodiment 2 is larger than that in Embodiment 1, and the width of the fixed arm 106 is greater than the width of the fixed arm 106 in the upper arm pressure plate 1 of Embodiment 2.

[0045] Example 2 and Example 1 have largely the same structure, but the following differences exist;

[0046] 1. The difference lies in their shapes.

[0047] 2. The adsorption structures used in Example 2 and Example 1 are different. Example 2 uses a third vacuum silicone nozzle 3 and a groove 301, while Example 1 uses a first vacuum silicone nozzle 102.

[0048] 3. The lower arm pressure plate 2 is located on the top end face of the upper arm pressure plate 1. In embodiment 2, the snap-fit ​​plate 201 is not used for connection, and the air passage is set on the bottom end face of the upper arm pressure plate 1. The upper arm pressure plate 1 and the lower arm pressure plate 2 are connected by a second fastening bolt 302. Although the structures are somewhat different, the functions are the same, which is to adsorb 8-inch iron rings or 6-inch iron rings.

[0049] In use, move the arm to the bottom of the iron ring, and use the first vacuum silicone nozzle 102 or the third vacuum silicone nozzle 3 to adsorb and fix the iron ring, and then transport it.

[0050] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0051] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A pick-and-place arm for detecting the front and back sides of a mother-daughter ring, characterized in that, Including: The upper pressure plate of the arm has an adsorption structure connected to a pair of opposite end faces. The upper pressure plate of the arm has air passages on multiple end faces, which are connected to the adsorption structure. The lower end face of the upper pressure plate of the arm has a pair of fixed arms integrally formed thereon, and the upper end face of the fixed arms protrudes from the lower end face. The lower arm pressure plate is fixedly connected to the lower end face of the upper arm pressure plate, and the lower arm pressure plate and the upper arm pressure plate partially overlap.

2. The pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 1, characterized in that, The adsorption structure includes a first vacuum silicone nozzle and a second vacuum silicone nozzle. The first vacuum silicone nozzle is provided on the upper end face of each pair of fixed arms, and the second vacuum silicone nozzle is provided on the bottom end face of each pair of fixed arms.

3. The pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 2, characterized in that, Each of the two fixed arms has a first scale line on the end face near the first vacuum silicone nozzle.

4. The pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 3, characterized in that, An auxiliary plate is integrally formed on one side end face of the upper pressure plate of the arm. The auxiliary plate protrudes from the outer end face of the lower pressure plate of the arm, and an auxiliary groove is formed on the auxiliary plate.

5. The pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 4, characterized in that, Both the upper and lower arm pressure plates have snap-fit ​​plates attached to one side end face. Both opposite end faces of the upper arm pressure plate have air passages, and the end faces of the upper arm pressure plate located in the air passages are snap-fitted with air passage covers.

6. The pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 5, characterized in that, Each of the two fixed arms is fixedly connected to a support block.

7. A pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 1 or 6, characterized in that, The upper pressure plate of the arm has a label slot.

8. The pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 6, characterized in that, The lower arm pressure plate is provided with multiple second threaded holes, and the upper arm pressure plate and the snap-fit ​​plate are provided with first threaded holes that match the second threaded holes. The second threaded holes and the first threaded holes are both threadedly connected with first fastening bolts.

9. A pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 3, characterized in that, The adsorption structure includes a third vacuum silicone nozzle and a groove. The third vacuum silicone nozzle is provided on a pair of opposite end faces of the fixed arm. The first scale line is located on the outer end face of the third vacuum silicone nozzle and a pair of grooves are provided. The grooves are semi-circular.

10. A pick-and-place arm for detecting the front and back sides of a mother-daughter ring according to claim 9, characterized in that, Both the lower arm pressure plate and the upper arm pressure plate are provided with a fourth threaded hole, and the fourth threaded hole is threadedly connected to a second fastening bolt.

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