Plasma high-temperature treatment device

Abstract

The utility model discloses a plasma high-temperature processing device which comprises a combustion cavity formed by a top cover part, a middle surrounding part and a lower extending part which are sequentially butted to form a limiting space, the top of the combustion cavity is provided with an air inlet and a plasma torch, and the bottom of the combustion cavity is provided with an air outlet; an annular cyclone box communicating with the air inlet is arranged at the inner top of the combustion cavity, a plurality of air nozzles are arranged at the bottom of the annular cyclone box in the circumferential direction of the contour of the annular structure in an array mode, and nozzles of the air nozzles are arranged downwards in an inclined mode. Tail gas injected into the annular cyclone box through the gas inlet is sprayed out from the gas nozzles to form cyclone flow surrounding plasma flames. The annular cyclone box is arranged in the combustion cavity to distribute tail gas to form cyclone flow surrounding plasma flames, and therefore the problem that high-temperature treatment is not thorough due to the fact that the tail gas is disordered in the combustion cavity is solved.

Description

Technical Field

[0001] This utility model belongs to the field of exhaust gas plasma combustion treatment technology, and in particular relates to a plasma high-temperature treatment device. Background Technology

[0002] Exhaust gases generated in semiconductor manufacturing can be decomposed by current, bombardment, and high temperature through plasma combustion treatment, followed by water washing to achieve environmentally friendly emissions. However, existing plasma combustion treatments suffer from disordered gas flow after the exhaust gas is introduced into the combustion chamber. Even with current measures to conicate the combustion chamber, the gas flow shaping becomes unsustainable under the impact of the plasma flame, resulting in incomplete high-temperature treatment. Summary of the Invention

[0003] Purpose of the invention: In order to overcome the shortcomings of the existing technology, this utility model provides a plasma high-temperature treatment device. By setting an annular cyclone box in the combustion chamber to distribute the exhaust gas and form a cyclone flow around the plasma flame, the problem of incomplete high-temperature treatment caused by the disorder of the exhaust gas in the combustion chamber is solved.

[0004] Technical solution: To achieve the above objectives, the present invention provides a plasma high-temperature treatment device, comprising a combustion chamber formed by a top cover, a middle enclosure, and a lower extension sequentially connected to limit the space. An air inlet and a plasma torch are provided at the top of the combustion chamber, and an air outlet is provided at the bottom of the combustion chamber.

[0005] The combustion chamber has an annular cyclone box connected to the air inlet at its inner top. The bottom of the annular cyclone box has several jet nozzles arranged in a circumferential array along its annular structural outline. The nozzles are inclined downwards. The exhaust gas injected into the annular cyclone box through the air inlet is ejected from each jet nozzle to form a cyclone flow surrounding the plasma flame.

[0006] Furthermore, the plasma torch, the annular cyclone box, and the air outlet are all located on the central axis of the combustion chamber.

[0007] Furthermore, the combustion chamber includes a cylindrical cavity corresponding to the middle surrounding portion and an inverted conical cavity corresponding to the lower extension portion, the annular cyclone box is located inside the cylindrical cavity, and the nozzle of the jet nozzle extends to the large port position of the inverted conical cavity.

[0008] Furthermore, the top of the annular cyclone box is an opening, through which the annular cyclone box covers each of the air inlets, so that the air inlets are connected to the annular cyclone box.

[0009] Furthermore, the annular cyclone box is a heat-conducting box structure made of heat-conducting material to preheat the exhaust gas entering the annular cyclone box.

[0010] Furthermore, it includes a first connector, through which the annular cyclone box is relatively fixedly mounted on the bottom surface of the top cover.

[0011] Furthermore, a second connector is included, through which the top cover, the middle enclosure, and the lower extension are relatively fixedly assembled to form an outer shell whose internal space is the combustion chamber.

[0012] Furthermore, the outer shell is a heat-insulating shell.

[0013] Beneficial effects: This utility model sets up an annular cyclone box in the combustion chamber to form a cyclone flow around the plasma flame, thereby shaping the exhaust gas flow. The resulting cyclone flow has strong resistance to flame impact and a long duration of its shape, thus ensuring that the exhaust gas can be guided in an orderly manner in the combustion chamber. The high-temperature treatment by the plasma flame is more thorough and efficient, ensuring more environmentally friendly exhaust. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a half-sectional structural diagram of the present invention. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings.

[0017] like Figure 1 and Figure 2 As shown, a plasma high-temperature treatment device includes a combustion chamber 4 formed by a top cover 1, a middle enclosure 2, and a lower extension 3 sequentially connected to limit the space. An air inlet 5 and a plasma torch 6 are provided at the top of the combustion chamber 4, and an air outlet 7 is provided at the bottom of the combustion chamber 4. An annular cyclone box 8 connected to the air inlet 5 is provided at the top inner part of the combustion chamber 4. The plasma torch 6, the annular cyclone box 8, and the air outlet 7 are all located on the central axis of the combustion chamber 4. Several jet nozzles 9 are arranged in a circumferential array along the annular structure outline at the bottom of the annular cyclone box 8. The nozzles of the jet nozzles 9 are inclined downward. The exhaust gas injected into the annular cyclone box 8 through the air inlet 5 is ejected from each jet nozzle 9 to form a cyclone flow 11 surrounding the plasma flame 10. This invention achieves the shaping of exhaust gas flow by setting an annular cyclone box 8 in the combustion chamber 4 to distribute exhaust gas and form a cyclone flow 11 surrounding the plasma flame 10. The resulting cyclone flow 11 has strong resistance to flame impact and a long duration of shape, thus ensuring that the exhaust gas can be guided in an orderly manner in the combustion chamber. After being treated at high temperature by the plasma flame 10, the exhaust gas is treated more thoroughly and efficiently, ensuring more environmentally friendly exhaust.

[0018] More specifically, the combustion chamber 4 includes a cylindrical cavity 41 corresponding to the central surrounding portion 2 and an inverted conical cavity 42 corresponding to the lower extension portion 3. The annular cyclone box 8 is located within the cylindrical cavity 41, and the nozzle of the jet nozzle 9 extends to the large end of the inverted conical cavity 42. As the kinetic energy of the cyclone flow 11 gradually decreases, its shape weakens. To counteract this phenomenon, the space of the combustion chamber 4 is gradually reduced, i.e., an inverted conical cavity 42 is provided to maintain the continuity of the cyclone flow 11's shape and improve the processing effect.

[0019] The top of the annular cyclone box 8 is open, and the annular cyclone box 8 covers each of the air inlets 5 through the opening, so that the air inlets 5 are connected to the annular cyclone box 8. This utility model includes a first connector 12, through which the annular cyclone box 8 is relatively fixedly installed on the bottom surface of the top cover 1. The first connector is preferably an internal hex screw.

[0020] The annular cyclone box 8 is a heat-conducting box structure made of heat-conducting material, which preheats the exhaust gas entering the annular cyclone box 8, makes reasonable use of energy, and increases the initial temperature of the exhaust gas, which is more conducive to its high-temperature treatment.

[0021] This utility model includes a second connector 13, through which the top cover 1, the middle surrounding part 2 and the lower extension part 3 are relatively fixedly assembled to form an outer shell with the internal space of the combustion chamber 4. The second connector 13 is preferably a bolt and nut assembly.

[0022] To reduce heat loss, the outer shell is an insulated shell, achieving heat insulation and heat preservation.

[0023] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A plasma high-temperature treatment device, comprising a combustion chamber (4) formed by a top cover (1), a middle enclosure (2) and a lower extension (3) sequentially connected to limit the space, wherein an air inlet (5) and a plasma torch (6) are provided at the top of the combustion chamber (4) and an air outlet (7) is provided at the bottom of the combustion chamber (4). Its features are: The combustion chamber (4) is provided with an annular cyclone box (8) connected to the air inlet (5) at the top. The bottom of the annular cyclone box (8) is provided with a number of jet nozzles (9) arranged in a circumferential array along its annular structure outline. The nozzles of the jet nozzles (9) are inclined downward. The exhaust gas injected into the annular cyclone box (8) through the air inlet (5) is ejected from each jet nozzle (9) to form a cyclone flow (11) surrounding the plasma flame (10).

2. The plasma high-temperature treatment device according to claim 1, characterized in that: The plasma torch (6), the annular cyclone box (8), and the air outlet (7) are all located on the central axis of the combustion chamber (4).

3. The plasma high-temperature treatment device according to claim 1, characterized in that: The combustion chamber (4) includes a cylindrical cavity (41) corresponding to the middle surrounding part (2) and an inverted conical cavity (42) corresponding to the lower extension part (3). The annular cyclone box (8) is located inside the cylindrical cavity (41), and the nozzle of the jet nozzle (9) extends to the large port position of the inverted conical cavity (42).

4. The plasma high-temperature treatment device according to claim 1, characterized in that: The top of the annular cyclone box (8) is open, and the annular cyclone box (8) covers each of the air inlets (5) through the opening so that the air inlets (5) are connected to the annular cyclone box (8).

5. The plasma high-temperature treatment apparatus according to claim 1, characterized in that: The annular cyclone box (8) is a heat-conducting box structure made of heat-conducting material to preheat the exhaust gas entering the annular cyclone box (8).

6. The plasma high-temperature treatment apparatus according to claim 1, characterized in that: Includes a first connector (12), through which the annular cyclone box (8) is relatively fixedly installed on the bottom surface of the top cover (1).

7. The plasma high-temperature treatment apparatus according to claim 1, characterized in that: The top cover (1), the middle enclosure (2) and the lower extension (3) are fixedly assembled relative to each other through the second connector (13) to form an outer shell with the internal space of the combustion chamber (4).

8. The plasma high-temperature treatment apparatus according to claim 7, characterized in that: The outer shell is a heat-insulating shell.

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