Vacuum tube furnace

Abstract

The utility model discloses a vacuum tube furnace, which belongs to the technical field of vacuum heating furnaces and comprises a furnace body and a cooling chamber, the furnace body is communicated with the cooling chamber and is connected with the cooling chamber through a water cooling flange, a material pushing component is arranged in the cooling chamber in a sliding manner and comprises a material pushing part and a heat insulation part arranged on the material pushing part, and the heat insulation part is arranged on the material pushing part. The heat insulation piece is arranged at the communicating opening of the furnace body and the cooling chamber in a sliding mode. The water cooling flange is arranged between the cooling chamber and the furnace body, high temperature in the furnace body can be effectively prevented from being transmitted into the cooling chamber, the cooling effect in the cooling chamber is guaranteed, the heat insulation piece on the material pushing assembly can block the through opening between the furnace body and the cooling chamber in the heating process, and therefore it can be guaranteed that heat in the furnace body is not dissipated into the cooling chamber; therefore, the heating effect in the heating furnace body is improved, the cooling efficiency and the heating efficiency of the vacuum tube furnace can be improved, and the sample treatment time is shortened.

Description

Technical Field

[0001] This utility model relates to a vacuum furnace, and more specifically, to a vacuum tube furnace. Background Technology

[0002] In many fields such as materials science, metallurgy, and chemical engineering, high-temperature treatment of samples is a common process requirement. Traditional vacuum tube furnaces have many limitations in the heating and cooling process. Typical vacuum tube furnaces rely mainly on traditional resistance wire heating elements, which have a relatively slow heating rate. Raising from room temperature to high temperatures (such as above 1000°C) often takes a long time. This not only reduces experimental or production efficiency but may also lead to unnecessary microstructural changes or surface oxidation of the sample during the heating phase due to prolonged heating.

[0003] For example, Chinese Patent Publication No. CN203231642U, published on October 9, 2013, describes a utility model entitled "A Sliding Rail Type Rapid Heating and Cooling Furnace." It includes a support frame and a furnace body. A heating control panel is mounted on the furnace body, and a horizontal guide rail is mounted on the support frame. The furnace body is slidably connected to the guide rail. An outer tube passes through the cavity of the furnace body, and an inner tube is installed inside the outer tube. The two ends of the outer and inner tubes are connected to the side walls of the support frame via flanges. One side of the support frame has an air inlet, and the other side has an air outlet. A cooling fan is located on one side of the furnace body, and a control box is located on the other side. This design is simple in structure, convenient to operate, and reduces energy consumption. However, the heating and cooling effects of this design are not ideal, and the heating and cooling time is relatively long. Utility Model Content

[0004] This invention overcomes the problem of long heating and cooling times in existing vacuum tube furnaces and provides a vacuum tube furnace solution that can improve the heating effect of the tube furnace, achieve faster heating and cooling, and reduce sample processing time.

[0005] To solve the above-mentioned technical problems, this utility model adopts the following technical solution: a vacuum tube furnace, including a furnace body and a cooling chamber, wherein the furnace body and the cooling chamber are connected by a water-cooled flange. A pusher assembly is slidably disposed in the cooling chamber, the pusher assembly including a pusher and a heat insulation component disposed on the pusher, the heat insulation component being slidably disposed at the communication port between the furnace body and the cooling chamber. The water-cooled flange is arranged between the cooling chamber and the furnace body, which can effectively prevent the high temperature inside the furnace body from being transferred to the cooling chamber, ensuring the cooling effect inside the cooling chamber. The heat insulation component on the pusher assembly can seal the communication port between the furnace body and the cooling chamber during the heating process, thus ensuring that the heat inside the furnace body does not dissipate into the cooling chamber, thereby improving the heating effect inside the furnace body. This can improve the cooling efficiency and heating efficiency of the vacuum tube furnace. Furthermore, since the cooling chamber and the furnace body are connected together, the heated sample can immediately enter the cooling chamber for cooling, further reducing the sample processing time.

[0006] Preferably, a quartz tube is provided inside the furnace body, and the quartz tube is connected to the cooling chamber. A heating element is provided on the inner side of the furnace body and the outer side of the quartz tube. Using a quartz tube as the heating element has the effect of rapid heating and improves the heating efficiency of the furnace body. The heating element can use a resistance element for heating.

[0007] Preferably, the cooling chamber has a pusher assembly compartment on the side away from the furnace body. The pusher assembly is housed within the pusher assembly compartment, and the pusher assembly also includes a slide table. A slider is slidably connected to the slide table, and the slider is fixedly connected to the pusher component. The pusher assembly compartment and the cooling chamber are sealed together, which allows the pusher assembly to be placed while maintaining a vacuum environment within the cooling chamber. The slide table provides a sliding platform for the slider and pusher component, which are fixed together. When the slider slides back and forth, it drives the pusher component to move back and forth.

[0008] Preferably, the cooling chamber is equipped with a cooling platform and a sample pad placed on the cooling platform. The end of the pusher away from the slider is fixedly connected to the sample pad, and the heat insulation component is disposed between the slider and the sample pad. The pusher and the sample pad are fixedly connected. When the pusher moves back and forth, it can drive the sample pad to move back and forth, that is, it can move back and forth in the cooling chamber and the furnace body to heat and cool the sample.

[0009] Preferably, a drive device is provided at the end of the slide table away from the cooling chamber, and the drive device is sealed to the pusher assembly chamber. The drive device can drive the slider on the slide table to move, thereby driving the sample in and out of the cooling chamber and the furnace. The seal between the drive device and the pusher assembly chamber can ensure the vacuum environment inside the cooling chamber and the furnace.

[0010] Preferably, the cooling platform is further provided with a water-cooling device, which includes cooling water pipes arranged in a curved manner within the cooling platform. The water-cooling device can cool the cooling platform, and the curved arrangement of the cooling water pipes can improve the cooling efficiency of the water-cooling device.

[0011] Preferably, the furnace body and the cooling chamber are equipped with guide supports. One end of the guide support abuts against the cooling platform, and the other end of the guide support extends to the end of the furnace body away from the cooling chamber. The guide support is provided with a sliding groove adapted to the sample pad. The guide support can provide guidance for the sample pad, enabling the sample pad to move smoothly within the furnace body and on the cooling platform.

[0012] Preferably, the water-cooled flange has an annular water channel inside, and the annular water channel inside the water-cooled flange is connected to an inlet pipe and an outlet pipe. Circulating cooling water can flow into the water-cooled flange, which prevents heat transfer between the quartz tube and the cooling chamber and prevents a reduction in the cooling effect inside the cooling chamber.

[0013] Preferably, both the cooling chamber and the furnace body are equipped with thermometers. The thermometers can monitor the temperature inside the cooling chamber and the furnace body in real time, providing real-time feedback on the sample's condition.

[0014] Preferably, the cooling chamber is also connected to a vacuum pump. The vacuum pump can create a vacuum environment in the cooling chamber and inside the furnace, providing the necessary conditions for heating and cooling.

[0015] Compared with the prior art, the beneficial effects of this utility model are: (1) the sample is heated and cooled in two adjacent chambers, avoiding the sample transfer through multiple steps and shortening the sample processing time; (2) it can improve the heating efficiency and cooling efficiency of the sample and reduce the heating and cooling time; (3) it has good sealing performance and can ensure the vacuum environment required for sample heating and cooling. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the present invention.

[0017] Figure 2 This is a schematic diagram of the water-cooled flange of this utility model.

[0018] In the diagram: 1. Furnace body, 2. Cooling chamber, 3. Water-cooled flange, 4. Pusher component, 5. Insulation component, 6. Quartz tube, 7. Heating assembly, 8. Pusher assembly chamber, 9. Slide table, 10. Slider, 12. Cooling platform, 13. Sample pad, 14. Drive device, 15. Water cooling device, 16. Cooling water pipe, 17. Guide bracket, 18. Annular water channel, 19. Inlet pipe, 20. Outlet pipe, 21. First thermometer, 22. Second thermometer, 23. Vacuum device, 23.1. Vacuum pump, 23.2. Gas pipe, 24. Water-cooled box, 25. Sample container. Detailed Implementation

[0019] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] Example 1: As Figure 1 The vacuum tube furnace shown includes a furnace body 1 and a cooling chamber 2, which are connected. A water-cooled flange 3 is installed at the connection between the furnace body 1 and the cooling chamber 2. The furnace body 1 can heat the sample, while the cooling chamber 2 can cool the sample after heating in the furnace body 1. Since the furnace body 1 and the cooling chamber 2 are arranged together, the sample can be immediately transferred to the cooling chamber 2 for cooling after heating in the furnace body 1. The water-cooled flange 3 also isolates the heat transfer between the furnace body 1 and the cooling chamber 2, preventing heat from the furnace body 1 from being transferred to the cooling chamber 2 during sample cooling. In addition, when the furnace body 1 is heating, a heat insulation component 5 separates the two chambers at the opening between the cooling chamber 2 and the furnace body 1. The heat insulation component 5 reduces the heat transfer from the furnace body 1 to the cooling chamber 2 through the opening and also prevents heat radiation from the furnace body 1 from being transferred to the cooling chamber 2. This improves the heating and cooling effect of the sample and reduces the heating and cooling time.

[0021] Specifically, a quartz tube 6 is installed inside the furnace body 1. One end of the quartz tube 6 is open, and the other end is closed. The opening of the quartz tube 6 faces the location of the cooling chamber 2, and it is fixedly connected to the cooling chamber 2 by a water-cooled flange 3. It should be noted that a sealing measure is required between the quartz tube 6, the water-cooled flange 3, and the cooling chamber 2 to ensure the vacuum level inside the cooling chamber 2 and the furnace body 1. A heating element 7 is also installed inside the furnace body 1 and outside the quartz tube 6. The heating element 7 is arranged in a ring around the outside of the quartz tube 6 and can heat the quartz tube 6. The quartz tube 6 has the advantage of rapid heating, which allows for rapid heating of the sample inside the quartz tube 6 and improves heating efficiency. Preferably, the heating element 7 can be an electric heating element.

[0022] A cooling platform 12 is installed inside the cooling chamber 2, located in the center of the chamber. A water-cooling device 15 is also installed within the cooling chamber 2. The water-cooling device 15 includes a water-cooling box 24 and cooling water pipes 16. The water-cooling box 24 is located outside the cooling chamber 2, and the cooling water pipes 16 connect to the water-cooling box 24 and enter the cooling platform 12 inside the cooling chamber 2. Specifically, one end of the cooling water pipe 16 is connected to the water-cooling box 24, then passes into the cooling chamber 2, and is further arranged on the cooling platform 12. The other end exits from the cooling chamber 2 and connects to the water-cooling box 24. In this way, the water-cooling box 24, through a water pump or other driving components, provides circulating cooling water to the cooling water pipes 16. It should be noted that the cooling water pipes 16 arranged on the cooling platform 12 are curved, which greatly increases the coverage area of ​​the cooling water pipes 16 on the cooling platform 12, improves the cooling effect of the cooling platform 12, and thus reduces the cooling time of the sample.

[0023] A feeding assembly compartment 8 is provided on the side of the cooling chamber 2 away from the furnace body 1. The feeding assembly compartment 8 is also connected to the cooling chamber 2. In addition, the connection between the cooling chamber 2 and the feeding assembly compartment 8 is also sealed to ensure a vacuum environment in the cooling chamber 2 and the furnace body 1. A feeding assembly is also provided inside the feeding assembly compartment 8. The feeding assembly includes a drive device 14, a slide table 9, a slider 10, and a feeding component 4. Specifically, the drive device 14 is arranged on the side of the feeding assembly compartment 8 away from the cooling chamber 2. Preferably, the drive device 14 can be a rotary motor with a lead screw at the output end of the rotary motor. The slide table 9 is arranged at the position of the feeding assembly compartment 8 and the cooling chamber 2. Specifically, one end of the slide table 9 is arranged near the side of the feeding assembly compartment 8 away from the cooling chamber 2, and the other end of the slide table 9 is arranged on the side of the cooling chamber 2 near the furnace body 1. That is to say, the length of the slide table 9 is close to the overall length of the feeding assembly compartment 8 and the cooling chamber 2. A slider 10 is slidably connected to the slide table 9. The slider 10 is connected to the lead screw at the output end of the drive device 14. When the drive device 14 is started, the lead screw rotates, thereby driving the slider 10 to slide on the slide table 9. A pusher 4 is provided on the side of the slider 10 near the furnace body 1. Specifically, the pusher 4 can be a rod or a plate. One end of the pusher 4 is fixedly connected to the slider 10, and the other end of the pusher 4 is fixedly connected to a sample pad 13. The sample pad 13 can be arranged on the cooling platform 12. That is, the position of the pusher 4 is slightly higher than the cooling platform 12, so that when the pusher 4 moves, it will not rub against or interfere with the cooling platform 12. A groove is provided on the cooling platform 12 to accommodate the sample pad 13. When the pusher 4 moves, it can also drive the sample pad 13 to move, ensuring the smooth movement of the sample pad 13. It should be noted that the sample pad 13 is used to place the sample container 25, and the sample container 25 contains the sample. It should be noted that the drive device 14 is located outside the pusher assembly chamber 8, so a sealing design is also required between the drive device 14 and the pusher assembly chamber 8. Specifically, a magnetic fluid seal can be used.

[0024] A guide bracket 17 is also provided on the side of the cooling platform 12 near the furnace body 1. The height of the guide bracket 17 is adapted to the height of the cooling platform 12, and a sliding groove adapted to the sample pad 13 is also provided on the guide bracket 17. One end of the guide bracket 17 is connected to the cooling platform 12, and the other end of the guide bracket 17 extends into the innermost position of the furnace body 1 (quartz tube 6). When the drive device 14 is started, it drives the slider 10 and the pusher 4 to move on the slide table 9, and then pushes the sample on the sample pad 13 from the cooling chamber 2 into the furnace body 1 for heating. When the heating is completed, the drive device 14 is started again, driving the slider 10 and the pusher 4 to move in the opposite direction, thereby pulling the heated sample on the sample pad 13 from the furnace body 1 back into the cooling chamber 2 for cooling.

[0025] A heat insulation component 5 is also provided on the pusher component 4. The heat insulation component 5 is a heat insulation screen, which can not only isolate heat transfer, but also isolate heat radiation. The pusher component 4 is arranged between the slider 10 and the sample pad 13. In this way, when the pusher component 4 pushes the sample pad 13 into the inside of the furnace body 1, the heat insulation component 5 can be positioned at the opening between the cooling chamber 2 and the furnace body 1, ensuring that the heat in the furnace body 1 will not be lost to the cooling chamber 2, thus ensuring the heating effect in the furnace body 1, and also isolating heat radiation.

[0026] Example 2: As Figure 1 and Figure 2 The vacuum tube furnace shown includes a furnace body 1 and a cooling chamber 2, which are connected. A water-cooled flange 3 is installed at the connection between the furnace body 1 and the cooling chamber 2. The furnace body 1 can heat the sample, while the cooling chamber 2 can cool the sample after heating in the furnace body 1. Since the furnace body 1 and the cooling chamber 2 are arranged together, the sample can be immediately transferred to the cooling chamber 2 for cooling after heating in the furnace body 1. The water-cooled flange 3 also isolates the heat transfer between the furnace body 1 and the cooling chamber 2, preventing heat from the furnace body 1 from being transferred to the cooling chamber 2 during sample cooling. In addition, when the furnace body 1 is heating, a heat insulation component 5 separates the two chambers at the opening between the cooling chamber 2 and the furnace body 1. The heat insulation component 5 reduces the heat transfer from the furnace body 1 to the cooling chamber 2 through the opening and also prevents heat radiation from the furnace body 1 from being transferred to the cooling chamber 2. This improves the heating and cooling effect of the sample and reduces the heating and cooling time.

[0027] Specifically, a quartz tube 6 is installed inside the furnace body 1. One end of the quartz tube 6 is open, and the other end is closed. The opening of the quartz tube 6 faces the location of the cooling chamber 2, and it is fixedly connected to the cooling chamber 2 by a water-cooled flange 3. It should be noted that a sealing measure is required between the quartz tube 6, the water-cooled flange 3, and the cooling chamber 2 to ensure the vacuum level inside the cooling chamber 2 and the furnace body 1. A heating element 7 is also installed inside the furnace body 1 and outside the quartz tube 6. The heating element 7 is arranged in a ring around the outside of the quartz tube 6 and can heat the quartz tube 6. The quartz tube 6 has the advantage of rapid heating, which allows for rapid heating of the sample inside the quartz tube 6 and improves heating efficiency. Preferably, the heating element 7 can be an electric heating element.

[0028] A cooling platform 12 is installed inside the cooling chamber 2, located in the center of the chamber. A water-cooling device 15 is also installed within the cooling chamber 2. The water-cooling device 15 includes a water-cooling box 24 and cooling water pipes 16. The water-cooling box 24 is located outside the cooling chamber 2, and the cooling water pipes 16 connect to the water-cooling box 24 and enter the cooling platform 12 inside the cooling chamber 2. Specifically, one end of the cooling water pipe 16 is connected to the water-cooling box 24, then passes into the cooling chamber 2, and is further arranged on the cooling platform 12. The other end exits from the cooling chamber 2 and connects to the water-cooling box 24. In this way, the water-cooling box 24, through a water pump or other driving components, provides circulating cooling water to the cooling water pipes 16. It should be noted that the cooling water pipes 16 arranged on the cooling platform 12 are curved, which greatly increases the coverage area of ​​the cooling water pipes 16 on the cooling platform 12, improves the cooling effect of the cooling platform 12, and thus reduces the cooling time of the sample.

[0029] A feeding assembly compartment 8 is provided on the side of the cooling chamber 2 away from the furnace body 1. The feeding assembly compartment 8 is also connected to the cooling chamber 2. In addition, the connection between the cooling chamber 2 and the feeding assembly compartment 8 is also sealed to ensure a vacuum environment in the cooling chamber 2 and the furnace body 1. A feeding assembly is also provided inside the feeding assembly compartment 8. The feeding assembly includes a drive device 14, a slide table 9, a slider 10, and a feeding component 4. Specifically, the drive device 14 is arranged on the side of the feeding assembly compartment 8 away from the cooling chamber 2. Preferably, the drive device 14 can be a rotary motor with a lead screw at the output end of the rotary motor. The slide table 9 is arranged at the position of the feeding assembly compartment 8 and the cooling chamber 2. Specifically, one end of the slide table 9 is arranged near the side of the feeding assembly compartment 8 away from the cooling chamber 2, and the other end of the slide table 9 is arranged on the side of the cooling chamber 2 near the furnace body 1. That is to say, the length of the slide table 9 is close to the overall length of the feeding assembly compartment 8 and the cooling chamber 2. A slider 10 is slidably connected to the slide table 9. The slider 10 is connected to the lead screw at the output end of the drive device 14. When the drive device 14 is started, the lead screw rotates, thereby driving the slider 10 to slide on the slide table 9. A pusher 4 is provided on the side of the slider 10 near the furnace body 1. Specifically, the pusher 4 can be a rod or a plate. One end of the pusher 4 is fixedly connected to the slider 10, and the other end of the pusher 4 is fixedly connected to a sample pad 13. The sample pad 13 can be arranged on the cooling platform 12. That is, the position of the pusher 4 is slightly higher than the cooling platform 12, so that when the pusher 4 moves, it will not rub against or interfere with the cooling platform 12. A groove is provided on the cooling platform 12 to accommodate the sample pad 13. When the pusher 4 moves, it can also drive the sample pad 13 to move, ensuring the smooth movement of the sample pad 13. It should be noted that the sample pad 13 is used to place the sample container 25, and the sample container 25 contains the sample. It should be noted that the drive device 14 is located outside the pusher assembly chamber 8, so a sealing design is also required between the drive device 14 and the pusher assembly chamber 8. Specifically, a magnetic fluid seal can be used.

[0030] A guide bracket 17 is also provided on the side of the cooling platform 12 near the furnace body 1. The height of the guide bracket 17 is adapted to the height of the cooling platform 12, and a sliding groove adapted to the sample pad 13 is also provided on the guide bracket 17. One end of the guide bracket 17 is connected to the cooling platform 12, and the other end of the guide bracket 17 extends into the innermost position of the furnace body 1 (quartz tube 6). When the drive device 14 is started, it drives the slider 10 and the pusher 4 to move on the slide table 9, and then pushes the sample on the sample pad 13 from the cooling chamber 2 into the furnace body 1 for heating. When the heating is completed, the drive device 14 is started again, driving the slider 10 and the pusher 4 to move in the opposite direction, thereby pulling the heated sample on the sample pad 13 from the furnace body 1 back into the cooling chamber 2 for cooling.

[0031] A heat insulation component 5 is also provided on the pusher component 4. The heat insulation component 5 is a heat insulation screen, which can not only isolate heat transfer, but also isolate heat radiation. The pusher component 4 is arranged between the slider 10 and the sample pad 13. In this way, when the pusher component 4 pushes the sample pad 13 into the inside of the furnace body 1, the heat insulation component 5 can be positioned at the opening between the cooling chamber 2 and the furnace body 1, ensuring that the heat in the furnace body 1 will not be lost to the cooling chamber 2, thus ensuring the heating effect in the furnace body 1, and also isolating heat radiation.

[0032] It should be noted that the water-cooled flange 3 has an annular water channel 18 inside, and a water inlet pipe 19 is provided at the lower radial end of the water-cooled flange 3, while a water outlet pipe 20 is provided at the upper radial end of the water-cooled flange 3. Cooling water is circulated inside the water-cooled flange 3 to improve its cooling effect, effectively preventing heat transfer from the quartz tube 6 inside the furnace body 1 to the cooling chamber 2. A first thermometer 21 is also installed inside the furnace body 1, and a second thermometer 22 is installed in the cooling chamber 2. The first thermometer 21 can detect the heating temperature inside the furnace body 1 in real time, ensuring that the sample is heated and dried at a suitable temperature; while the second thermometer 21 can monitor the temperature inside the cooling chamber 2 in real time, providing timely feedback on the sample's cooling temperature. Finally, the cooled sample can be removed from the cooling chamber 2.

[0033] A vacuum pumping device 23 is also installed outside the cooling chamber 2. The vacuum pumping device 23 includes a vacuum pump 23.1 and a gas pipe 23.2. The vacuum pump 23.1 creates a vacuum environment in the furnace body 1 and the cooling chamber 2 to provide the vacuum environment required for heating and cooling the sample.

Claims

1. A vacuum tube furnace, characterized in that, The furnace includes a furnace body and a cooling chamber. The furnace body and the cooling chamber are connected by a water-cooled flange. A pusher assembly is slidably provided in the cooling chamber. The pusher assembly includes a pusher and a heat insulation component on the pusher. The heat insulation component is slidably provided at the connection between the furnace body and the cooling chamber.

2. The vacuum tube furnace according to claim 1, characterized in that, The furnace body is equipped with a quartz tube, which is connected to the cooling chamber. Heating components are provided on the inner side of the furnace body and the outer side of the quartz tube.

3. A vacuum tube furnace according to claim 2, characterized in that, The cooling chamber is provided with a material pushing component compartment on the side away from the furnace body. The material pushing component compartment is provided with the material pushing component. The material pushing component also includes a slide table. A slider is slidably connected to the slide table. The slider is fixedly connected to the material pushing component.

4. A vacuum tube furnace according to claim 3, characterized in that, The cooling chamber is provided with a cooling platform and a sample pad on the cooling platform. The end of the pusher away from the slider is fixedly connected to the sample pad. The heat insulation component is located between the slider and the sample pad.

5. A vacuum tube furnace according to claim 3, characterized in that, The slide table is equipped with a drive device at the end away from the cooling chamber, and the drive device is sealed and connected to the pusher assembly chamber.

6. A vacuum tube furnace according to claim 4, characterized in that, The cooling platform is also equipped with a water cooling device, which includes cooling water pipes that are bent and arranged within the cooling platform.

7. A vacuum tube furnace according to claim 4, characterized in that, The furnace body and the cooling chamber are provided with guide brackets. One end of the guide bracket abuts against the cooling platform, and the other end of the guide bracket extends to the end of the furnace body away from the cooling chamber. The guide bracket is provided with a sliding groove that matches the sample pad.

8. A vacuum tube furnace according to any one of claims 1 to 7, characterized in that, The water-cooled flange has an annular water channel inside, and the annular water channel inside the water-cooled flange is connected to an inlet pipe and an outlet pipe.

9. A vacuum tube furnace according to any one of claims 1 to 7, characterized in that, Both the cooling chamber and the furnace body are equipped with temperature measuring devices.

10. A vacuum tube furnace according to any one of claims 1 to 7, characterized in that, The cooling chamber is also connected to a vacuum pumping device.

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