Magnetic field monitoring device for dry etching

Abstract

The utility model discloses a magnetic field monitoring device for dry etching, which comprises a rectangular frame, leveling assemblies are uniformly arranged at the bottom of the rectangular frame, the leveling assemblies are connected with a leveling plate, the top of the leveling plate is connected with a magnetic field monitoring main body, and the top of the magnetic field monitoring main body is adaptively provided with a top cover. A bubble level is mounted at the top of the top cover; the leveling assembly comprises vertically-arranged screw rods and sleeve blocks, the screw rods are rotationally installed at the four corners of the rectangular frame, the sleeve blocks are connected to the screw rods in a threaded mode, hinge seats are arranged on the inner sides of the sleeve blocks, and the four corners of the leveling plate are correspondingly hinged to the hinge seats of the sleeve blocks. The utility model belongs to the technical field of magnetic field monitoring of etching machines, and particularly relates to a magnetic field monitoring device for dry etching.

Description

Technical Field

[0001] This utility model belongs to the field of magnetic field monitoring technology for etching machines, specifically referring to a magnetic field monitoring device for dry etching. Background Technology

[0002] Dry etching is a key process in semiconductor manufacturing and microelectromechanical systems (MEMS) fabrication, which uses plasma to precisely etch materials. Due to the influence of magnetic fields on plasma distribution and behavior, the need for precise control and real-time monitoring of magnetic fields is increasingly prominent.

[0003] Existing magnetic field monitoring devices typically lack leveling components. When the mechanical device is placed on an uneven surface, it cannot be ensured that the magnetic field monitoring body is in a horizontal position. This can lead to uneven force on the magnetic field sensor module, which in turn affects the accuracy of magnetic field direction detection, increases the risk of signal interference, and ultimately reduces the accuracy and stability of magnetic field distribution detection. Utility Model Content

[0004] To address the problem that existing magnetic field monitoring devices typically lack leveling components, this invention provides a magnetic field monitoring device for dry etching.

[0005] To achieve the above functions, the technical solution adopted by this utility model is as follows: a magnetic field monitoring device for dry etching includes a rectangular frame, a leveling component is evenly arranged at the bottom of the rectangular frame, the leveling component is connected to an adjusting plate, the top of the adjusting plate is connected to a magnetic field monitoring body, a top cover is adapted to be provided on the top of the magnetic field monitoring body, and a bubble level is installed on the top of the top cover.

[0006] The leveling assembly includes a vertically arranged screw and a sleeve. The screw is rotatably installed at the four corners of a rectangular frame. The sleeve is threadedly connected to the screw. A hinge seat is provided on the inner side of the sleeve. The four corners of the leveling plate are hinged to the hinge seats of the sleeve.

[0007] As a preferred embodiment of this utility model, a throttle is fixedly installed on the top of the screw, and a support round seat is fixedly installed on the bottom of the screw.

[0008] As a preferred embodiment of this utility model, a limiting rod parallel to the screw is installed between the supporting round base and the rectangular frame, and the sleeve block is slidably sleeved on the limiting rod.

[0009] As a preferred embodiment of this utility model, a handle is installed on the top of the top cover, and the handle is located on both sides of the bubble level.

[0010] As a preferred technical solution of this utility model, a sealing strip is provided between the bottom of the top cover and the top of the magnetic field monitoring body.

[0011] As a preferred embodiment of this utility model, the magnetic field monitoring body is installed at the top center of the adjustment plate, and the magnetic field monitoring body extends through the rectangular frame to its top.

[0012] Compared with the prior art, the present invention achieves the following beneficial effects by adopting the above structure:

[0013] By using a combination of leveling components, a leveling plate, and a bubble level, operators can visually adjust the screw using the bubble level. Through the threaded transmission between the screw and the sleeve block, the height of each corner of the leveling plate can be precisely adjusted, ensuring that the magnetic field monitoring unit is always in a horizontal position. This effectively avoids problems such as uneven force on the magnetic field sensor module, magnetic field direction detection deviation, and signal interference caused by the device not being level. It significantly improves the accuracy and stability of magnetic field distribution detection, thereby reducing etching defects and product defect rates caused by magnetic field monitoring deviations. Attached Figure Description

[0014] Figure 1 This invention provides a schematic diagram of the overall structure of a magnetic field monitoring device for dry etching. Figure 1 ;

[0015] Figure 2 This invention provides a schematic diagram of the overall structure of a magnetic field monitoring device for dry etching. Figure 2 ;

[0016] Figure 3 This is a partial structural schematic diagram of a magnetic field monitoring device for dry etching proposed in this utility model.

[0017] Figure 4 This is a schematic diagram of the adjusting plate proposed in this utility model.

[0018] The components include: 1. Rectangular frame; 2. Leveling assembly; 3. Adjusting plate; 4. Magnetic field monitoring body; 5. Top cover; 6. Bubble level; 7. Screw; 8. Sleeve block; 9. Hinge seat; 10. Turning handle; 11. Support round seat; 12. Limiting rod; and 13. Handle. Detailed Implementation

[0019] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0020] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The utility model will be further described in detail below with reference to the accompanying drawings.

[0021] like Figure 1-4 As shown, this utility model provides a magnetic field monitoring device for dry etching, including a rectangular frame 1. Leveling components 2 are evenly arranged at the bottom of the rectangular frame 1 to adjust the horizontal state of the device, ensuring that the magnetic field monitoring body 4 is in a horizontal position, thereby guaranteeing the uniformity of magnetic field distribution and detection accuracy. The leveling components 2 are connected to an adjusting plate 3, and the magnetic field monitoring body 4 is connected to the top of the adjusting plate 3 for monitoring magnetic field strength and distribution. The magnetic field monitoring body 4 is installed at the top center of the adjusting plate 3, placing it in the central area of ​​the device for easy leveling. The magnetic field monitoring body 4 extends through the rectangular frame 1 and above it for easy connection to external... For device connection and data transmission, the top of the magnetic field monitoring body 4 is fitted with a top cover 5 to seal the magnetic field monitoring body 4 and protect the internal components. A bubble level 6 is installed on the top of the top cover 5 to visually display the horizontal status of the device and ensure that the magnetic field monitoring body 4 is in a horizontal position. A handle 13 is installed on the top of the top cover 5 to facilitate the operator to carry and move the device. The handle 13 is located on both sides of the bubble level 6 to avoid interfering with the observation of the level. A sealing strip is set between the bottom of the top cover 5 and the top of the magnetic field monitoring body 4 to enhance the sealing and prevent external dust or impurities from entering the magnetic field monitoring body 4 and affecting the detection accuracy.

[0022] The leveling assembly 2 includes a vertically arranged screw 7 and a sleeve block 8. The screw 7 is rotatably installed at the four corners of the rectangular frame 1. The sleeve block 8 is threadedly connected to the screw 7. A hinge seat 9 is provided on the inner side of the sleeve block 8. The four corners of the leveling plate 3 are correspondingly hinged to the hinge seat 9 of the sleeve block 8. The screw 7 rotates to drive the sleeve block 8 to move up and down, thereby adjusting the height of each corner of the leveling plate 3. A throttle handle 10 is fixedly installed on the top of the screw 7 for manual rotation of the screw 7, which is convenient for operation. A support round seat 11 is fixedly installed on the bottom of the screw 7 to support the device and increase stability.

[0023] like Figure 1-3As shown, a limiting rod 12 parallel to the screw 7 is installed between the supporting round base 11 and the rectangular frame 1 to limit the movement range of the sleeve block 8 and prevent the sleeve block 8 from shifting or tilting during the adjustment process. The sleeve block 8 is slidably sleeved on the limiting rod 12 to ensure that it moves smoothly in the vertical direction.

[0024] In practical use, first place the device at the location where the magnetic field needs to be monitored. Adjust the height of each corner block 8 by rotating the handle 10 at the top of the screw 7. Use the bubble level 6 to observe the horizontal state until the adjustment plate 3 is completely horizontal, ensuring that the magnetic field monitoring body 4 is in a horizontal position.

[0025] Next, ensure that the top cover 5 is tightly closed to the top of the magnetic field monitoring body 4, and enhance the sealing performance with a sealing strip to protect the internal components from dust and impurities;

[0026] Subsequently, the magnetic field monitoring unit 4 was activated to monitor the magnetic field strength and distribution in real time, ensuring that the data was accurately transmitted to external devices;

[0027] If the device needs to be moved or transported, it can be operated through the handle 13 on the top cover 5. During the transport process, the device should be kept stable to avoid collisions or tilting, and care should be taken to protect the bubble level 6.

[0028] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A magnetic field monitoring device for dry etching, comprising a rectangular frame (1), characterized in that: The rectangular frame (1) is uniformly provided with leveling components (2) at the bottom. The leveling components (2) are connected to a leveling plate (3). The leveling plate (3) is connected to a magnetic field monitoring body (4) at the top. The magnetic field monitoring body (4) is fitted with a top cover (5) at the top. A bubble level (6) is installed on the top of the top cover (5). The leveling assembly (2) includes a vertically arranged screw (7) and a sleeve (8). The screw (7) is rotatably installed at the four corners of the rectangular frame (1). The sleeve (8) is threadedly connected to the screw (7). The inner side of the sleeve (8) is provided with a hinge seat (9). The four corners of the leveling plate (3) are correspondingly hinged to the hinge seat (9) of the sleeve (8).

2. The magnetic field monitoring device for dry etching according to claim 1, characterized in that: A throttle (10) is fixedly installed on the top of the screw (7), and a support round seat (11) is fixedly installed on the bottom of the screw (7).

3. The magnetic field monitoring device for dry etching according to claim 2, characterized in that: A limiting rod (12) parallel to the screw (7) is installed between the supporting round base (11) and the rectangular frame (1), and the sleeve (8) is slidably sleeved on the limiting rod (12).

4. The magnetic field monitoring device for dry etching according to claim 1, characterized in that: The top cover (5) is equipped with a handle (13), which is located on both sides of the bubble level (6).

5. A magnetic field monitoring device for dry etching according to claim 1, characterized in that: A sealing strip is provided between the bottom of the top cover (5) and the top of the magnetic field monitoring body (4).

6. A magnetic field monitoring device for dry etching according to claim 1, characterized in that: The magnetic field monitoring body (4) is installed at the top center of the adjustment plate (3), and the magnetic field monitoring body (4) extends through the rectangular frame (1) to its top.

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