Basket for quartz wafer processing
By introducing a limiting device into the basket used for quartz wafer processing, the problem of collision damage caused by the quartz wafers shaking in the slot is solved, resulting in better performance.
Patent Information
- Application Number
- CN202520088776.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-15
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-01-15
AI Technical Summary
Quartz crystals can wobble and come into contact with each other in the basket's slots, which can easily cause collisions and damage, affecting the basket's performance.
A basket for quartz wafer processing has been designed, equipped with a limiting device, including a placement plate, a threaded rod and an operating block. The limiting plate separates and limits the quartz wafer to prevent shaking.
This effectively prevents the quartz crystals from colliding with each other during movement, thus improving the usability of the basket.
Smart Images
Figure CN223872717U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of baskets, and in particular to a basket for processing quartz wafers. Background Technology
[0002] Quartz wafer processing baskets are carrier tools specifically designed for quartz wafers. They are used to protect and support wafers during processing, storage, and transportation. They are typically made of high-purity quartz or other materials suitable for the semiconductor industry to ensure that the wafers are not contaminated or damaged.
[0003] When using a semiconductor basket, quartz wafers are placed in slots inside the basket for support. The operator then moves the wafers using the handle. During movement, the wafers can wobble within the slots, causing the wafers closest to the handle to come into contact with each other. This can lead to damage from the impact, affecting the basket's usability. Utility Model Content
[0004] The technical problem this invention aims to solve is that when the basket is moved, the quartz crystals tend to wobble in the slots of the basket, causing the sides of the quartz crystals near the handle to come into contact with each other, which can lead to collision damage and affect the effectiveness of the basket.
[0005] The technical solution adopted by this utility model to solve its technical problem is: a basket for processing quartz wafers, including a basket body, a handle on one side of the basket body, and a limiting device on one side of the handle, the limiting device limiting and separating the upper end of the quartz wafer inside the basket body.
[0006] The effect achieved by the above-mentioned components is as follows: when used in a semiconductor basket, the quartz wafer is placed in the slot inside the basket for support, and then the upper end of the quartz wafer inside the basket is limited and separated using a limiting device. Then, the operator moves the quartz wafer inside the basket by using the handle.
[0007] Preferably, the limiting device includes a placement plate, which is slidably connected to the handle. Through holes are provided at both ends of the placement plate, and the size of the through holes on both sides of the placement plate is adapted to the size of the handle. Threaded rods are threadedly inserted into both sides of the placement plate, one side of the threaded rod abuts against the handle, and an operating block is fixedly connected to one side of the threaded rod.
[0008] The effect achieved by the above components is as follows: When using the limiting device, the placement plate can be moved so that the through holes at both ends of the placement plate slide on the handle. Then, the placement plate drives the limiting plate to the gap of the quartz crystal. Then, the operating block is rotated so that the threaded rod abuts and is fixed to the handle. Then, the position of the limiting plate is fixed, so that the limiting plate separates and limits the quartz crystal. By using the limiting device, the upper end of the quartz crystal inside the basket is limited and separated, so as to prevent the quartz crystal from easily shaking in the slot of the basket when the basket is moved, which would cause the side of the quartz crystal near the handle to come into contact with each other, resulting in the quartz crystal being easily damaged by collision. This improves the use effect of the basket.
[0009] Preferably, the threaded rod is fixedly connected to a rubber pad on the side near the handle, and the size of the rubber pad is adapted to the size of the threaded rod.
[0010] The effect achieved by the above components is that by using a rubber pad, the friction between the threaded rod and the handle is increased, thereby improving the performance of the threaded rod.
[0011] Preferably, a plurality of anti-slip blocks are fixedly connected to one side of the operating block, and the plurality of anti-slip blocks are arranged at equal intervals on one side of the operating block.
[0012] The effect achieved by the above components is to increase the friction between the operating block and the operator by using anti-slip blocks, making the operating block easier to rotate.
[0013] Preferably, a control frame is fixedly connected to both sides of the placement plate, and the cross-section of the control frame is annular.
[0014] The effect achieved by the above components is to increase the contact area between the placement plate and the operator by using the control frame, making it easier for the operator to move the placement plate.
[0015] Preferably, an auxiliary component is provided on one side of the placement plate. The auxiliary component includes a fixing block, one side of which is fixedly connected to the placement plate. A locking block is inserted into one side of the fixing block. An auxiliary block is slidably connected inside the fixing block. A plurality of fixing slots are opened on one side of the auxiliary block, and the locking block engages with the fixing slots on one side of the auxiliary block.
[0016] The effect achieved by the above components is as follows: before moving the placement plate upwards, the auxiliary block can be moved to slide inside the fixed block, thereby changing the overall length of the auxiliary block and the fixed block. The changed length controls the distance between the placement plate and the upper part of the handle. After the placement plate moves upwards, the distance between it and the handle is adapted to the operator's palm size. Then, the locking block is moved so that it passes through the fixed block and enters the fixing groove of the auxiliary block to fix the auxiliary block. By using the auxiliary components, the placement plate can be moved upwards to adapt to the operator's palm size, allowing the operator to better grip the handle for use.
[0017] Preferably, a magnet is fixedly connected to one side of the fixing block, and an iron sheet is fixedly connected to one side of the card block, with the magnet and the iron sheet being magnetically attracted to each other.
[0018] The effect achieved by the above components is to use a magnet to attract the iron sheet on the card block, so that the card block is more firmly fixed in the fixing groove of the auxiliary block.
[0019] Preferably, a connecting rope is fixedly connected to one side of the card block, and one side of the connecting rope is fixedly connected to the fixing block.
[0020] The effect achieved by the above components is to fix the card block and the fixed block by using the connecting rope, so as to prevent the card block from being lost and thus affecting its use.
[0021] In summary, the beneficial effects of this utility model are as follows:
[0022] By using a limiting device, the upper end of the quartz crystal inside the basket is limited and separated, preventing the quartz crystal from easily shaking in the slot of the basket when the basket is moved, which would cause the side of the quartz crystal near the handle to come into contact with each other, resulting in easy collision damage to the quartz crystal, thereby improving the use effect of the basket. Attached Figure Description
[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0024] Figure 1 This is a three-dimensional structural diagram of the present invention;
[0025] Figure 2 This is a three-dimensional structural diagram of the limiting device of this utility model;
[0026] Figure 3 This utility model Figure 2 Enlarged view of point A;
[0027] Figure 4 This utility model Figure 2 Enlarged view of point B.
[0028] Legend: 1. Basket body; 2. Limiting device; 21. Placement plate; 22. Threaded rod; 23. Through hole; 24. Limiting plate; 25. Operating block; 26. Rubber pad; 27. Anti-slip block; 28. Control frame; 3. Auxiliary components; 31. Fixing block; 32. Locking block; 33. Auxiliary block; 34. Fixing groove; 35. Magnet; 36. Iron sheet; 37. Connecting rope; 4. Handle; 5. Locking groove. Detailed Implementation
[0029] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.
[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0031] Figures 1 to 4 The illustrated basket for quartz wafer processing includes a basket body 1, a handle 4 on one side of the basket body 1, and a limiting device 2 on the other side of the handle 4. The limiting device 2 limits and separates the upper end of the quartz wafer inside the basket body 1. When using the basket for semiconductor processing, the quartz wafer is placed in a slot 5 inside the basket body 1 for support. Then, the limiting device 2 is used to limit and separate the upper end of the quartz wafer inside the basket body 1. Subsequently, the operator moves the quartz wafer inside the basket body 1 using the handle 4.
[0032] Figures 1 to 4The limiting device 2 shown includes a placement plate 21, which is slidably connected to the handle 4. Through holes 23 are provided at both ends of the placement plate 21. The size of the through holes 23 on both sides of the placement plate 21 is adapted to the size of the handle 4. Threaded rods 22 are threadedly inserted on both sides of the placement plate 21. One side of the threaded rod 22 abuts against the handle 4. An operating block 25 is fixedly connected to one side of the threaded rod 22. When using the limiting device 2, the placement plate 21 can be moved so that the through holes 23 at both ends of the placement plate 21 slide on the handle 4. Then, the placement plate 21 drives the limiting plate 24 to the gap of the quartz wafer. Then, the operating block 25 is rotated so that the threaded rod 22 abuts and is fixed with the handle 4. Then, the position of the limiting plate 24 is fixed, so that the limiting plate 24 separates and limits the quartz wafer. By using the limiting device 2, the upper end of the quartz wafer inside the basket 1 is limited and separated, so as to avoid the quartz wafer from easily shaking in the slot 5 of the basket 1 when the basket 1 is moved, which would cause the side of the quartz wafer close to the handle 4 to come into contact with each other, resulting in the quartz wafer being easily damaged by collision. This improves the use effect of the basket.
[0033] Figures 1 to 4 The threaded rod 22 shown is fixedly connected to a rubber pad 26 on the side near the handle 4. The size of the rubber pad 26 is adapted to the size of the threaded rod 22. By using the rubber pad 26, the friction between the threaded rod 22 and the handle 4 is increased, thereby improving the performance of the threaded rod 22. Several anti-slip blocks 27 are fixedly connected to one side of the operating block 25, and the anti-slip blocks 27 are arranged at equal intervals on one side of the operating block 25. By using the anti-slip blocks 27, the friction between the operating block 25 and the operator is increased, making the operating block 25 easier to rotate. Control frames 28 are fixedly connected to both sides of the placement plate 21. The cross-section of the control frames 28 is annular. By using the control frames 28, the contact area between the placement plate 21 and the operator is increased, making it easier for the operator to move the placement plate 21.
[0034] Figures 1 to 4The placement plate 21 shown has an auxiliary component 3 on one side. The auxiliary component 3 includes a fixing block 31. One side of the fixing block 31 is fixedly connected to the placement plate 21. A locking block 32 is inserted into one side of the fixing block 31. An auxiliary block 33 is slidably connected inside the fixing block 31. A plurality of fixing slots 34 are opened on one side of the auxiliary block 33. The locking block 32 engages with the fixing slots 34 on one side of the auxiliary block 33. Before moving the placement plate 21 upwards without using it, the auxiliary block 33 can be moved to slide inside the fixed block 31, thereby changing the overall length of the auxiliary block 33 and the fixed block 31. The changed length is used to control the distance between the placement plate 21 and the upper end of the handle 4. After the placement plate 21 is moved upwards, the distance between it and the handle 4 is adapted to the size of the operator's palm. Then, the locking block 32 is moved so that it passes through the fixed block 31 and reaches the fixing groove 34 of the auxiliary block 33 to fix the auxiliary block 33. By using the auxiliary component 3, the distance between the placement plate 21 and the handle 4 can be adapted to the size of the operator's palm, allowing the operator to better grip the handle 4 for use.
[0035] Figures 1 to 4 A magnet 35 is fixedly connected to one side of the fixing block 31, and an iron piece 36 is fixedly connected to one side of the locking block 32. The magnet 35 and the iron piece 36 are magnetically attracted. By using the magnet 35, the iron piece 36 on the locking block 32 is attracted, making the locking block 32 more firmly fixed in the fixing groove 34 of the auxiliary block 33. A connecting rope 37 is fixedly connected to one side of the locking block 32, and one side of the connecting rope 37 is fixedly connected to the fixing block 31. By using the connecting rope 37, the locking block 32 is fixed to the fixing block 31, preventing the locking block 32 from being lost and affecting its use.
[0036] Working principle: When using the limiting device 2, the placement plate 21 can be moved so that the through holes 23 at both ends of the placement plate 21 slide on the handle 4. Then, the placement plate 21 drives the limiting plate 24 to the gap of the quartz crystal. Then, the operating block 25 is rotated so that the threaded rod 22 abuts and is fixed with the handle 4. Then, the position of the limiting plate 24 is fixed, so that the limiting plate 24 separates and limits the quartz crystal. By using the limiting device 2, the upper end of the quartz crystal inside the basket 1 is limited and separated, so as to avoid the quartz crystal from easily shaking in the slot 5 of the basket 1 when the basket 1 is moved, which would cause the side of the quartz crystal close to the handle 4 to come into contact with each other, resulting in the quartz crystal being easily damaged by collision. This improves the use effect of the basket.
[0037] Before moving the placement plate 21 upwards without using it, the auxiliary block 33 can be moved to slide inside the fixed block 31, thereby changing the overall length of the auxiliary block 33 and the fixed block 31. The changed length is used to control the distance between the placement plate 21 and the upper end of the handle 4. After the placement plate 21 is moved upwards, the distance between it and the handle 4 is adapted to the size of the operator's palm. Then, the locking block 32 is moved so that it passes through the fixed block 31 and reaches the fixing groove 34 of the auxiliary block 33 to fix the auxiliary block 33. By using the auxiliary component 3, the distance between the placement plate 21 and the handle 4 can be adapted to the size of the operator's palm, allowing the operator to better grip the handle 4 for use.
[0038] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A basket for processing a quartz wafer, comprising a basket body (1), characterized in that: One side of the basket (1) is provided with a handle (4), one side of the handle (4) is provided with a limiting device (2), the limiting device (2) limits the upper end of the quartz crystal inside the basket (1).
2. The quartz wafer processing basket of claim 1 wherein: The limiting device (2) includes a placement plate (21), the placement plate (21) and the handle (4) are slidably connected, both ends of the placement plate (21) are provided with through holes (23), the size of the through holes (23) on both sides of the placement plate (21) is matched with the size of the handle (4), threaded rods (22) are inserted into both sides of the placement plate (21), one side of the threaded rod (22) abuts against the handle (4), and operation blocks (25) are fixedly connected to one side of the threaded rod (22).
3. The quartz wafer processing basket of claim 2 wherein: The side of the threaded rod (22) close to the handle (4) is fixedly connected with a rubber pad (26), and the size of the rubber pad (26) is matched with the size of the threaded rod (22).
4. The quartz wafer processing basket of claim 3 wherein: One side of the operation block (25) is fixedly connected with a plurality of anti-skid blocks (27), and the plurality of anti-skid blocks (27) are equidistantly arranged on one side of the operation block (25).
5. The quartz wafer processing basket of claim 4 wherein: Both sides of the placement plate (21) are fixedly connected with control frames (28), and the control frames (28) are circular in cross section.
6. The quartz wafer processing basket of claim 5 wherein: One side of the placement plate (21) is provided with an auxiliary assembly (3), the auxiliary assembly (3) includes a fixed block (31), one side of the fixed block (31) is fixedly connected with the placement plate (21), a clamping block (32) is inserted into one side of the fixed block (31), an auxiliary block (33) is slidably connected into the fixed block (31), a plurality of fixed grooves (34) are formed in one side of the auxiliary block (33), and the clamping block (32) is clamped with the fixed grooves (34) on one side of the auxiliary block (33).
7. The quartz wafer processing basket of claim 6 wherein: One side of the fixed block (31) is fixedly connected with a magnet (35), one side of the clamping block (32) is fixedly connected with an iron sheet (36), and the magnet (35) and the iron sheet (36) are magnetically attracted.
8. The quartz wafer processing basket of claim 7 wherein: One side of the clamping block (32) is fixedly connected with a connecting rope (37), and one side of the connecting rope (37) is fixedly connected with the fixed block (31).