Water tank assembly for tail gas treatment system and tail gas treatment system

Abstract

The utility model is suitable for the technical field of tail gas treatment systems, and provides a water tank assembly for a tail gas treatment system and the tail gas treatment system.The water tank assembly comprises a tank body and a partition assembly arranged in the tank body, and the partition assembly divides the interior of the tank body into a deposition cavity and an overflow cavity; the separation assembly comprises a baffle arranged on the bottom wall of the box body and a filter screen arranged above the baffle, the filter screen is used for preventing dust in the deposition cavity from flowing to the overflow cavity, the deposition cavity is used for settling the dust, and the overflow cavity is used for recycling water overflowing from the deposition cavity for cyclic utilization; a filter screen in the separation assembly is used for preventing dust in the deposition cavity from flowing to the overflow cavity, so that the dust in the deposition cavity cannot enter the overflow cavity along with overflowing water flow, the cleanness of water in the overflow cavity is maintained, the cleanness of water in a circulating pipeline is ensured, the nozzle blockage probability is reduced, and the washing efficiency of the tail gas treatment system is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of tail gas treatment system, and particularly relates to a water tank assembly for a tail gas treatment system and the tail gas treatment system. BACKGROUND

[0002] The tail gas treatment system in the prior art usually adopts a water tank type absorption cleaning method. The water tank type cleaning is one of the technologies applied to semiconductor tail gas treatment, and the basic principle thereof is to use water as an absorbent to capture and dissolve harmful components in tail gas. The tail gas treated by the tail gas treatment system contains dust particles, which are in block and granular shapes. After falling down from the nozzle, the dust particles do not immediately precipitate, but float on the water surface of the water tank. With the water pump, the dust particles re-enter the circulating pipeline for spraying, and over time, the precipitates block the nozzles, the water flow of the nozzles is reduced, and the efficiency of the tail gas water washing treatment is greatly reduced. CONTENT OF THE UTILITY MODEL

[0003] The application provides a water tank assembly for a tail gas treatment system, and aims to solve the problem that the dust particles float on the water surface of the water tank, re-enter the circulating pipeline for spraying with the water pump, over time, the precipitates block the nozzles, the water flow of the nozzles is reduced, and the efficiency of the tail gas water washing treatment is greatly reduced.

[0004] The application is implemented in the following manner. A water tank assembly for a tail gas treatment system includes a tank body and a separation assembly arranged in the tank body. The separation assembly divides the inside of the tank body into a deposition cavity and an overflow cavity. The separation assembly includes a baffle arranged on the bottom wall of the tank body and a filter screen arranged above the baffle. The filter screen is used to block the flow of dust in the deposition cavity to the overflow cavity.

[0005] Optionally, the water tank assembly further includes a first liquid level sensor and a second liquid level sensor arranged in the tank body. The first liquid level sensor and the second liquid level sensor are arranged at intervals in the height direction of the tank body. The first liquid level sensor is away from the bottom wall of the tank body relative to the second liquid level sensor.

[0006] Optionally, in the height direction of the tank body, the top end of the filter screen and the first liquid level sensor are located in the same plane.

[0007] Optionally, the water tank assembly further includes a third liquid level sensor arranged in the tank body. In the height direction of the tank body, the third liquid level sensor is close to the bottom wall of the tank body relative to the second liquid level sensor.

[0008] Optionally, in the height direction of the tank body, the top end of the baffle and the second liquid level sensor are located in the same plane.

[0009] Optionally, a spraying pipeline, a water supplement pipeline and a water supply pipeline are further included, a water inlet of the spraying pipeline and a water inlet of the water supplement pipeline are in common communication with a water outlet of the water supply pipeline, a water outlet of the spraying pipeline extends into a top of the sedimentation cavity, a water outlet of the water supplement pipeline extends into a top of the overflow cavity, and a water inlet of the water supply pipeline is configured to communicate with an external water pipe.

[0010] Optionally, the water outlet of the spraying pipeline is provided with a first nozzle, and the water outlet of the water supplement pipeline is provided with a second nozzle.

[0011] Optionally, a circulating pipeline is further included, a water inlet of the circulating pipeline extends into a bottom of the overflow cavity, and a water outlet of the circulating pipeline is in communication with the spraying pipeline.

[0012] Optionally, a water pumping pipeline is further included, a water inlet of the water pumping pipeline extends into a bottom of the sedimentation cavity, and a water outlet of the water pumping pipeline extends out of a side of the box.

[0013] Optionally, a first water pump arranged on the water pumping pipeline and a second water pump arranged on the circulating pipeline are further included.

[0014] The present application sets a separation assembly in the box, the separation assembly separates an inner part of the box into a sedimentation cavity and an overflow cavity, the sedimentation cavity is used for sedimentation of dust, and the overflow cavity is used for recycling of water overflow in the sedimentation cavity, and a filter screen in the separation assembly is used for blocking the dust in the sedimentation cavity from flowing to the overflow cavity, so that the dust in the sedimentation cavity cannot flow into the overflow cavity with the water overflow, the water quality in the overflow cavity is maintained clean, the water quality of the circulating pipeline is ensured clean, the probability of nozzle blockage is reduced, and the water washing efficiency of the tail gas treatment system is improved.

[0015] A tail gas treatment system includes the water tank assembly for the tail gas treatment system. The technical effects of the present application are the same as those of the water tank assembly for the tail gas treatment system, and will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a structural schematic view of the water tank assembly for the tail gas treatment system provided in the present application.

[0017] BRIEF DESCRIPTION OF DRAWINGS

[0018] 100, box; 101, deposition cavity; 102, overflow cavity; 200, separation assembly; 201, baffle; 202, filter screen; 300, first liquid level sensor; 400, second liquid level sensor; 500, third liquid level sensor; 600, spraying pipeline; 601, first valve; 602, first nozzle; 700, water supplement pipeline; 701, second valve; 702, second nozzle; 800, water supply pipeline; 900, circulating pipeline; 901, water pumping pipeline; 902, second water pump; 903, first water pump. DETAILED DESCRIPTION

[0019] In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. The examples of the embodiments are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation to the present application. In addition, it should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0020] In the description of the present application, it should be understood that the terms "length", "width", "upper", "lower", "left", "right", "horizontal", "top", "bottom" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation to the present application.

[0021] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0022] In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected or can communicate with each other; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0023] In this application, unless otherwise explicitly specified and limited, "on", "under" and "above" or "lower" and "upper" of a first feature from a second feature can include that the first and second features are directly in contact, or that the first and second features are not directly in contact but are in contact through another feature between them. Also, "on", "over" and "above" of a first feature from a second feature include that the first feature is directly above and obliquely above the second feature, or only means that the first feature is horizontally higher than the second feature. "Under", "below" and "underneath" of a first feature from a second feature include that the first feature is directly below and obliquely below the second feature, or only means that the first feature is horizontally lower than the second feature.

[0024] The following disclosure provides many different embodiments, or examples, for implementing different structures of the present application. For purposes of simplicity of the present application, the following description is broken into sections. Of course, these sections are merely provided for ease of description and are not intended to limit the application. Furthermore, the various examples set forth in the following description are not intended to be mutually exclusive. That is, the various examples can be combined in different combinations and / or used in different examples. Moreover, the following description provides examples of various specific processes and materials, but one skilled in the art will recognize that other processes and / or materials can be used.

[0025] As Figure 1As shown, a water tank assembly for a tail gas treatment system includes a tank body 100 and a separation assembly 200 disposed within the tank body 100, the separation assembly 200 separates the interior of the tank body 100 into a settling chamber 101 and an overflow chamber 102. The settling chamber 101 is used for settling dust after spraying, and the overflow chamber 102 is used for collecting water overflowing from the settling chamber 101 for recycling for secondary spraying. The separation assembly 200 includes a baffle 201 disposed on the bottom wall of the tank body 100 and a filter screen 202 disposed above the baffle 201, the filter screen 202 is used to block the flow of dust in the settling chamber 101 to the overflow chamber 102. Specifically, the baffle 201 is usually fixed at the bottom of the tank body 100 to form a physical barrier. Its main function is to prevent dust or particulate matter in the settling chamber 101 from flowing directly to the overflow chamber 102, thereby avoiding contamination of the overflow chamber 102, the filter screen 202 is disposed above the baffle 201, specifically, the bottom of the filter screen 202 is connected to the top of the baffle 201 to ensure that dust or particulate matter can be effectively blocked when moving with the overflow water flow on the top of the baffle 201. Exemplarily, the filter screen 202 is made of fiber material and has good filtering performance, which can block a certain size of particulate matter, the main function of the filter screen 202 is to block the flow of dust in the settling chamber 101 to the overflow chamber 102. When dust particles try to pass through the filter screen 202, most of the particles will be captured by the filter screen 202 and remain in the settling chamber 101 due to the size and shape of the filter screen 202, which ensures that the water quality in the overflow chamber 102 remains clean and is not contaminated by dust. Therefore, the presence of the separation assembly 200 allows the settling chamber 101 and the overflow chamber 102 to perform different processing operations. For example, dust collection and treatment can be performed in the settling chamber 101, while liquid filtration and recovery can be performed in the overflow chamber 102.

[0026] The present application provides a water tank assembly for a tail gas treatment system, which includes a tank body 100 and a separation assembly 200 disposed within the tank body 100, the separation assembly 200 separates the interior of the tank body 100 into a settling chamber 101 and an overflow chamber 102, the settling chamber 101 is used for settling dust, the overflow chamber 102 is used for recycling water overflowing from the settling chamber 101, the filter screen 202 in the separation assembly 200 is used to block the flow of dust in the settling chamber 101 to the overflow chamber 102, thereby ensuring that dust in the settling chamber 101 does not flow into the overflow chamber 102 with the overflowing water flow, maintaining the cleanliness of the water quality in the overflow chamber 102, ensuring the cleanliness of the water quality in the circulation pipeline 900, reducing the probability of nozzle blockage, and improving the efficiency of the water washing of the tail gas treatment system.

[0027] The water tank assembly for the tail gas treatment system further comprises a first liquid level sensor 300 and a second liquid level sensor 400 arranged in the water tank, the first liquid level sensor 300 and the second liquid level sensor 400 are arranged at intervals in the height direction of the tank body 100, and the first liquid level sensor 300 is away from the bottom wall of the tank body 100 relative to the second liquid level sensor 400. When the liquid level in the tank body 100 reaches the position of the first liquid level sensor 300, the liquid level in the tank body 100 reaches the high water level warning line, and the tank body 100 starts to drain water outward. When the liquid level in the tank body 100 reaches the position of the second liquid level sensor 400, the liquid level in the tank body 100 reaches the low water level warning line, and the tank body 100 stops draining water. Exemplarily, the tank body 100 is further connected with a drainage system to control the liquid level in the tank body 100 and ensure the normal operation of the water tank assembly.

[0028] Further, in the height direction of the tank body 100, the top end of the filter screen 202 and the first liquid level sensor 300 are located in the same plane. That is, the highest liquid level in the tank body 100 cannot exceed the blocking range of the filter screen 202, so as to avoid the dust floating on the water surface in the sedimentation chamber 101 from drifting into the overflow chamber 102 and ensure the water quality in the overflow chamber 102. In another embodiment, in the height direction of the tank body 100, the top end of the baffle 201 and the second liquid level sensor 400 are located in the same plane. That is, the position of the second liquid level sensor 400 is the low water level warning line, and the liquid level in the tank body 100 needs to be maintained at the position of the second liquid level sensor 400, so as to ensure that the water in the sedimentation chamber 101 can continuously overflow into the overflow chamber 102, achieve the dynamic balance of the water in the tank body 100, and further achieve efficient water washing of the dust.

[0029] In some embodiments, the water tank assembly for the tail gas treatment system further comprises a third liquid level sensor 500 arranged in the tank body 100, and in the height direction of the tank body 100, the third liquid level sensor 400 is close to the bottom wall of the tank body 100 relative to the second liquid level sensor 400. The position of the third liquid level sensor is the basic water level in the tank body 100, and when the liquid level in the tank body 100 reaches the third liquid level sensor 500, the tank body 100 needs to be replenished with water in time.

[0030] The water tank assembly for the exhaust gas treatment system further comprises a spraying pipeline 600, a water supplement pipeline 700, and a water supply pipeline 800. The water inlet of the spraying pipeline 600 and the water inlet of the water supplement pipeline 700 are in common communication with the water outlet of the water supply pipeline 800. The water outlet of the spraying pipeline 600 extends into the top of the sediment cavity 101, and the water outlet of the water supplement pipeline 700 extends into the top of the overflow cavity 102. The water inlet of the water supply pipeline 800 is used to communicate with an external water pipe. Exemplarily, the external water pipe can be a municipal water pipe. The water supply pipeline 800 serves as a water source input part of the whole system and is responsible for introducing a required amount of water from an external water source such as a municipal water pipe. The water supplement pipeline 700 and the spraying pipeline 600 are in common communication with the water supply pipeline 800, which means that the water introduced from the municipal water pipe flows to the spraying pipeline 600 and the water supplement pipeline 700 at the same time. The water in the spraying pipeline 600 is sprayed downward from the top of the sediment cavity 101 and can be used for dust settling. The water supplement pipeline 700 is used to supplement the amount of water lost in the tank 100 due to evaporation, leakage or other reasons, so as to keep the water level or amount of the system stable. Preferably, the water outlet of the spraying pipeline 600 is provided with a first nozzle 602, and the water outlet of the water supplement pipeline 700 is provided with a second nozzle 702. The first nozzle 602 is arranged at the water outlet of the spraying pipeline 600, and its main function is to spray the water in the spraying pipeline 600 out at a specific angle and speed to form water mist or droplets, so as to achieve dust settling in a larger range. The second nozzle 702 arranged at the water outlet of the water supplement pipeline 700 is convenient for controlling the flow of water supplement. Understandably, a first valve 601 can be arranged on the spraying pipeline 600, and a second valve 701 can also be arranged on the water supplement pipeline 700, so as to control the opening and closing of the spraying pipeline 600 and the water supplement pipeline 700 respectively by arranging the first valve 601 and the second valve 701.

[0031] The water tank assembly for the exhaust gas treatment system further comprises a circulating pipeline 900. A second water pump 902 is arranged on the circulating pipeline 900. The water inlet of the circulating pipeline 900 extends into the bottom of the overflow cavity 102, and the water outlet of the circulating pipeline 900 is in communication with the spraying pipeline 600. In the embodiment of the present application, the circulating pipeline 900 is in a working state at all times. Clean water is transported into the spraying pipeline 600 by the second water pump 902. The water sprayed by the spraying pipeline 600 carries away the dust and water pollution gas in the exhaust gas.

[0032] In some embodiments, the water tank assembly for the exhaust gas treatment system further comprises a water pumping pipeline 901. A first water pump 903 is arranged on the water pumping pipeline 901. The water inlet of the water pumping pipeline 901 extends into the bottom of the sediment cavity 101, and the water outlet of the water pumping pipeline 901 extends out of the tank 100. The first water pump 903 pumps the water in the sediment cavity 101 out of the tank 100. The sediment in the tank 100 can be discharged together with the pumped water, so as to avoid excessive accumulation of dust in the sediment cavity.

[0033] In other embodiments, a tail gas treatment system includes the water tank assembly for a tail gas treatment system described above. The technical effects of the present application are the same as those of the water tank assembly for a tail gas treatment system described above, which will not be repeated here.

[0034] In the description of the present specification, the description of the terms "some embodiments", "exemplary embodiments", "examples", "specific examples", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A water tank assembly for an exhaust gas treatment system, characterized by, The water tank assembly comprises a tank body and a partition assembly arranged in the tank body, the partition assembly separates the inside of the tank body into a deposition chamber and an overflow chamber, the partition assembly comprises a baffle arranged on the bottom wall of the tank body and a filter screen arranged above the baffle, the filter screen is used to block the flow of dust in the deposition chamber to the overflow chamber.

2. The water box assembly for an exhaust treatment system of claim 1, wherein, The water tank assembly further comprises a first liquid level sensor and a second liquid level sensor arranged in the tank body, the first liquid level sensor and the second liquid level sensor are arranged at intervals in the height direction of the tank body, and the first liquid level sensor is away from the bottom wall of the tank body relative to the second liquid level sensor.

3. The water box assembly for an exhaust treatment system of claim 2, wherein, In the height direction of the tank body, the top end of the filter screen and the first liquid level sensor are located in the same plane.

4. The water box assembly for an exhaust treatment system of claim 2, wherein, The water tank assembly further comprises a third liquid level sensor arranged in the tank body, and in the height direction of the tank body, the third liquid level sensor is closer to the bottom wall of the tank body relative to the second liquid level sensor.

5. The water box assembly for an exhaust treatment system of claim 2, wherein, In the height direction of the tank body, the top end of the baffle and the second liquid level sensor are located in the same plane.

6. The water box assembly for an exhaust treatment system of claim 1, wherein, The water tank assembly further comprises a spray pipeline, a water supplement pipeline and a water supply pipeline, the water inlet of the spray pipeline and the water inlet of the water supplement pipeline are connected to the water outlet of the water supply pipeline, the water outlet of the spray pipeline extends into the top of the deposition chamber, the water outlet of the water supplement pipeline extends into the top of the overflow chamber, and the water inlet of the water supply pipeline is used to connect an external water pipe.

7. The water box assembly for an exhaust treatment system of claim 6, wherein, The water outlet of the spray pipeline is provided with a first nozzle, and the water outlet of the water supplement pipeline is provided with a second nozzle.

8. The water box assembly for an exhaust treatment system of claim 6, wherein, The water tank assembly further comprises a circulation pipeline, the water inlet of the circulation pipeline extends into the bottom of the overflow chamber, and the water outlet of the circulation pipeline is connected to the spray pipeline.

9. The water box assembly for an exhaust treatment system of claim 8, wherein, The water tank assembly further comprises a water pumping pipeline, the water inlet of the water pumping pipeline extends into the bottom of the deposition chamber, and the water outlet of the water pumping pipeline extends out of the tank body.

10. The water box assembly for an exhaust treatment system of claim 9, wherein, The water tank assembly further comprises a first water pump arranged on the water pumping pipeline and a second water pump arranged on the circulation pipeline.

11. A tail gas treatment system comprising the water tank assembly for tail gas treatment system according to any one of claims 1-10.

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