Target cleaning device

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a target material cleaning device. The utility model provides a target material cleaning device which comprises a cleaning chamber, a cleaning fixing mechanism and a conveying mechanism, a cleaning mechanism used for cleaning target materials is arranged in the cleaning chamber, the cleaning fixing mechanism can fix the target materials so that the target materials can be evenly cleaned, and the conveying mechanism can drive the cleaning fixing mechanism to go in and out of the cleaning chamber. The cleaning and fixing mechanism is driven by the conveying mechanism to transport the target material, so that cost and labor force are saved, and meanwhile, conveying and cleaning efficiency is improved; the first adjusting assemblies are correspondingly arranged on the two sides of the fixing frame correspondingly, a worker can adjust the distance between the two first adjusting assemblies so as to adapt to target materials with different outer diameters, high compatibility and adaptability are achieved, and the production cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, especially to a target material cleaning device. BACKGROUND

[0002] The cleanliness of the target material is crucial to the quality of the film formed in the sputtering process and the product quality, so the target material needs to be transported to a cleaning machine for cleaning before entering the processing stage. During the transportation of the target material, cleanliness control and physical damage need to be avoided. The prior art usually transports the target material by using a rack vehicle. The staff installs the target material on the rack vehicle, then pushes or pulls the rack vehicle to the vicinity of the cleaning machine and carries the target material into the cleaning machine. After the cleaning is completed, the staff carries the target material back to the rack vehicle and pushes it away. This process requires a lot of time and labor, and the transportation efficiency is very low. In addition, the existing rack vehicle generally directly uses a groove to clamp the target material to complete the installation. Such a rack vehicle can only fix one size of target material, and the compatibility is low. SUMMARY

[0003] The utility model aims at providing a target material cleaning device with high automation and high compatibility.

[0004] To achieve this purpose, the utility model adopts the following technical scheme:

[0005] A target material cleaning device comprises:

[0006] A cleaning chamber is provided with a cleaning mechanism for cleaning the target material.

[0007] A cleaning fixing mechanism can fix the target material. The cleaning fixing mechanism comprises a fixing frame, and first adjusting assemblies are arranged on both sides of the fixing frame. The two first adjusting assemblies can move on the fixing frame to approach or move away from each other to adapt to target materials of different outer diameters.

[0008] A conveying mechanism can drive the cleaning fixing mechanism to enter or exit the cleaning chamber.

[0009] Preferably, the first adjusting assembly comprises a fixing block and an adjusting rod. The fixing block is provided with a first connecting hole, and the adjusting rod is arranged in the first connecting hole. The adjusting rod can drive the fixing block to move in the horizontal direction, and the side surface of the fixing block can abut against the edge of the target material.

[0010] Preferably, the fixing frame is provided with an adjusting track extending in the horizontal direction, and the adjusting rod is slidingly arranged in the adjusting track.

[0011] Preferably, the fixing block is further provided with a fixing groove, and the edge of the target material is arranged in the fixing groove.

[0012] Preferably, the cleaning fixing mechanism further comprises a fixing base, the fixing frame is arranged on the fixing base, and the conveying mechanism comprises a guide vehicle capable of being connected with the fixing base.

[0013] Preferably, the fixing base comprises a support plate and a plurality of supporting legs, the fixing frame is arranged above the support plate, the plurality of supporting legs are arranged below the support plate, and the guide vehicle is arranged between the plurality of supporting legs and jacks up the support plate.

[0014] Preferably, the support plate is further provided with a protection plate arranged between two adjacent supporting legs.

[0015] Preferably, the fixing frame is further provided with a second adjusting assembly, the second adjusting assembly is detachably arranged on the lower side of the fixing frame, and the second adjusting assembly is used for supporting the target material.

[0016] Preferably, the second adjusting assembly comprises a support block and a connecting rod, the connecting rod is arranged on the fixing frame, the connecting rod selectively penetrates the support block, and the upper surface of the support block is abutted with the edge of the target material.

[0017] Preferably, a plurality of support blocks are arranged, and the heights of different support blocks are different, and the plurality of support blocks are selectively connected with the connecting rod.

[0018] The target material cleaning device has the advantages that:

[0019] The utility model discloses a kind of target material cleaning devices, target material cleaning device includes cleaning chamber, cleaning fixing mechanism and conveying mechanism, cleaning mechanism for cleaning target material is arranged in cleaning chamber, cleaning fixing mechanism can fix target material so that target material can be evenly cleaned, conveying mechanism can drive cleaning fixing mechanism to enter and exit cleaning chamber, the transportation of target material is realized by conveying mechanism driving cleaning fixing mechanism, replace manual transportation, save cost and labor, simultaneously improve conveying and cleaning efficiency;First adjusting assembly is correspondingly arranged on the two sides of fixing frame, two first adjusting assemblies are used for fixing target material along radial, two first adjusting assemblies can be moved on fixing frame to realize mutual close or away, and staff can adjust the distance between two first adjusting assemblies, to adapt to target material of different outer diameters, that is to say, this cleaning fixing mechanism can fix target material of multiple outer diameter sizes by moving first adjusting assembly, with higher compatibility and adaptability, reduce production cost. DRAWINGS

[0020] Figure 1is a structure schematic view of the target material cleaning device provided by the utility model;

[0021] Figure 2 is Figure 1 is a partial enlarged view of A in the middle;

[0022] Figure 3 is a structure schematic view of the fixed block provided by the utility model;

[0023] Figure 4 is a structure schematic view of the adjusting rod provided by the utility model;

[0024] Figure 5 is Figure 1 is a partial enlarged view of B in the middle;

[0025] Figure 6 is a structure schematic view of the supporting block provided by the utility model.

[0026] In the figure,

[0027] 1, cleaning fixing mechanism;11, fixed frame;111, adjusting track;112, third connecting hole;12, fixed seat;121, supporting plate;122, supporting leg;123, protection plate;13, supporting frame;3, first adjusting assembly;31, fixed block;311, first connecting hole;312, fixed groove;32, adjusting rod;321, free part;322, bending part;4, second adjusting assembly;41, supporting block;411, second connecting hole;412, supporting groove;42, connecting rod;2, conveying mechanism;21, guide vehicle;10, target material. DETAILED DESCRIPTION

[0028] The utility model will be further explained in detail below in combination with the drawings and examples. It can be understood that the specific examples described here are only used to explain the utility model, and not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0029] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated;It can be mechanical connection, or electrical connection;It can be directly connected, or indirectly connected through intermediate media, it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0030] In the utility model, unless another definite provision and limitation, first feature is in second feature "on" or "under" can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them. Moreover, first feature "on", "above" and "upper surface" of second feature includes that first feature is directly above and obliquely above second feature, or only indicates that horizontal height of first feature is higher than second feature. First feature "under", "below" and "under surface" of second feature includes that first feature is directly below and obliquely below second feature, or only indicates that horizontal height of first feature is less than second feature.

[0031] In the description of the embodiment, the terms "upper", "lower", "right", "left", "horizontal", "vertical", and "radial" are terms that refer to the orientation and / or position of the device or element shown in the drawings, and are used only to facilitate the description and simplify the operation, and do not indicate or imply that the device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first" and "second" are only used to distinguish in the description, and have no special meaning.

[0032] The utility model provides a target material cleaning device, target material cleaning device includes cleaning room, cleaning fixed establishment 1 and conveying mechanism 2, be provided with cleaning mechanism in the cleaning room, and cleaning mechanism is used for carrying out cleaning to target material 10, and cleaning fixed establishment 1 can fix target material 10 so that target material 10 can be washed evenly, and conveying mechanism 2 can drive cleaning fixed establishment 1 to enter and exit the cleaning room. Before carrying out cleaning to target material 10, fix target material 10 on cleaning fixed establishment 1, and conveying mechanism 2 drives cleaning fixed establishment 1 to enter the cleaning room, and cleaning mechanism carries out surface cleaning to target material 10, and after target material 10 is cleaned, conveying mechanism 2 drives cleaning fixed establishment 1 to exit the cleaning room again. The transportation of target material 10 is realized by setting up conveying mechanism 2 to drive cleaning fixed establishment 1, replaces manual transportation, saves cost and labor, and improves conveying and cleaning efficiency simultaneously.

[0033] Reference Figure 1The cleaning and fixing mechanism 1 includes a fixing frame 11 and a fixing seat 12. The fixing frame 11 is used to fix the target material 10 and is set on the fixing seat 12. The conveying mechanism 2 includes a guide vehicle 21, which can be connected to the fixing seat 12 and then drive the entire cleaning and fixing mechanism 1 in and out of the cleaning chamber. Specifically, the guide vehicle 21 can be an AGV (Automated Guided Vehicle), which is a transport vehicle with magnetic navigation or laser navigation and other guiding devices. The guide vehicle 21 adopts an automated guide vehicle and can automatically deliver the cleaning and fixing mechanism 1 to the corresponding location through control commands. It has a very high level of automation and does not require manual intervention, thereby shortening the manual turnaround time. Moreover, the driving path and speed of the automated guide vehicle are controllable and the positioning and parking are accurate, which greatly improves the accuracy of transporting the target material 10.

[0034] Furthermore, the fixed base 12 includes a support plate 121 and multiple support legs 122. The fixed frame 11 is positioned above the support plate 121, and the multiple support legs 122 are positioned below the support plate 121. The guide cart 21 can be placed between the multiple support legs 122 and lift the support plate 121. When the cleaning and fixing mechanism 1 is located in the cleaning chamber and the cleaning mechanism is cleaning the target material 10, the fixed base 12 is placed in the cleaning chamber and near the cleaning mechanism. That is, at this time, the multiple support legs 122 support the entire cleaning and fixing mechanism 1. After the target material 10 is cleaned, before the conveying mechanism 2 drives the cleaning and fixing mechanism 1 out of the cleaning chamber, the guide cart 21 is placed between the multiple support legs 122 and lifts the support plate 121, suspending the multiple support legs 122 and then driving the fixed base 12 out of the cleaning chamber. That is, at this time, the guide cart 21 supports and transports the entire cleaning and fixing mechanism 1. By setting the guide cart 21 to realize the transportation of the cleaning and fixing mechanism 1, labor is reduced and work efficiency is improved.

[0035] The outriggers 122 are distributed below the support plate 121, which can effectively distribute the weight of the cleaning fixing mechanism 1 pressing on the support plate 121, making the cleaning fixing mechanism 1 more stable during operation and less prone to tilting or tipping over, thus avoiding affecting the cleaning of the target material 10. On the other hand, when the conveying mechanism 2 drives the cleaning fixing mechanism 1 to transport, the outriggers 122 are distributed below the support plate 121, which can leave gaps and provide placement space for the guide vehicle 21.

[0036] Further, the support plate 121 is further provided with a protection plate 123 below, the protection plate 123 is arranged between two adjacent supporting legs 122, during the transportation of the cleaning fixed mechanism 1 by the conveying mechanism 2, the protection plate 123 can protect the conveying mechanism 2, reduce the force brought by air flow during the running of the conveying mechanism 2, and prevent dust and soil from splashing. It should be noted that at least one gap between the two adjacent supporting legs 122 is not provided with the protection plate 123, and the conveying mechanism 2 can run from the gap to the lower side of the support plate 121 and lift the support plate 121.

[0037] In addition, the cleaning mechanism can adopt a dry ice cleaning machine. The dry ice cleaning machine can receive compressed air and spray dry ice particles in the form of sand blasting on the surface of the target material 10 for cleaning. The impurities are separated from the target material 10 by using the physical reaction of temperature difference. The process is simple and easy to operate, which can improve the cleanliness of the surface of the target material 10, effectively improve the product quality of the target material 10, and will not cause great influence on the surface roughness of the target material 10, avoiding affecting the film coating quality and efficiency of the subsequent target material 10.

[0038] Referring to Figures 1 to 6 In the cleaning fixed structure, the two sides of the fixed frame 11 are respectively provided with a first adjusting assembly 3, and the two first adjusting assemblies 3 can move on the fixed frame 11 to realize mutual approach or away from each other to adapt to target materials 10 with different outer diameters. Specifically, the two first adjusting assemblies 3 are used to fix the target material 10 in the radial direction, and the distance between the two first adjusting assemblies 3 can be adjusted by the workers to adapt to target materials 10 with different outer diameters, so that the cleaning fixed structure has high compatibility and adaptability, and the production cost is reduced.

[0039] The first adjusting assembly 3 includes a fixed block 31 and an adjusting rod 32, the fixed block 31 is provided with a first connecting hole 311, and the adjusting rod 32 is arranged in the first connecting hole 311. The adjusting rod 32 can drive the fixed block 31 to move in the horizontal direction, and the side surface of the fixed block 31 can abut against the edge of the target material 10. The target material 10 is placed on the fixed frame 11, and the two sides of the fixed frame 11 are provided with the fixed block 31 and the adjusting rod 32. The workers move the adjusting rod 32 to drive the fixed block 31 to move in the horizontal direction, so as to adjust the distance between the two fixed blocks 31 and abut against the edges of target materials 10 with different outer diameters.

[0040] Specifically, referring to Figures 2 to 4The fixing block 31 is provided with two first connecting holes 311. The two first connecting holes 311 can ensure the stability of the movement of the fixing block 31, and avoid that the fixing block 31 rotates around the adjusting rod 32 during the horizontal movement of the fixing block 31, thereby affecting the subsequent fixing of the target material 10, when only one first connecting hole 311 is used. Preferably, the two first connecting holes 311 are in the same vertical direction. In addition, the adjusting rod 32 is an integrally arranged U-shaped rod, two free parts 321 of the U-shaped rod are respectively arranged in the two first connecting holes 311 of the fixing block 31, and a curved part 322 of the U-shaped rod is used to connect the two free parts 321. After the U-shaped rod is arranged in the first connecting hole 311, the curved part 322 can be held by the worker to facilitate the subsequent movement of the adjusting rod 32, and the adjusting convenience is high. Correspondingly, the fixing frame 11 is provided with two adjusting rails 111 extending in the horizontal direction, and the two free parts 321 of the adjusting rod 32 are slidingly arranged in the adjusting rails 111. The adjusting rails 111 can limit the movement direction of the adjusting rod 32, thereby providing guidance for the movement of the fixing block 31.

[0041] In order to ensure the stability of the target material 10, the fixing block 31 is further provided with a fixing groove 312. When the target material 10 is fixed on the cleaning fixing device, the edge of the target material 10 is arranged in the fixing groove 312. The fixing groove 312 is a rectangular groove, and the groove width of the fixing groove 312 is slightly greater than the thickness of the target material 10, so that the target material 10 can be just clamped into the fixing groove 312, and the target material 10 will not move axially.

[0042] In addition, in order to adapt to target materials 10 with different outer diameters by the first adjusting assembly 3, the fixing frame 11 is further provided with a second adjusting assembly 4 for adjusting the height of the target material 10. Specifically, the second adjusting assembly 4 includes a support block 41 and a connecting rod 42. The connecting rod 42 is arranged on the fixing frame 11, and the connecting rod 42 selectively penetrates the support block 41. When the connecting rod 42 penetrates the support block 41 and the fixing frame 11, the support block 41 is connected with the fixing frame 11, and the upper surface of the support block 41 can abut against the edge of the target material 10. When the cleaning fixing mechanism 1 fixes the target material 10, the side surface of the fixing block 31 in the first adjusting assembly 3 abuts against the edge of the target material 10, and the upper surface of the support block 41 in the second adjusting assembly 4 abuts against the lower edge of the target material 10. The support block 41 is provided with a plurality of support blocks 41, and the heights of different support blocks 41 are different. A plurality of support blocks 41 are selectively connected with the fixing frame 11. The worker can adjust the installation height of the target material 10 by replacing the support blocks 41 with different heights, so as to adapt to the outer diameter of the target material 10.

[0043] Specifically, referring to Figures 5 to 6The support block 41 is provided with a second connecting hole 411, the fixed frame 11 is provided with a third connecting hole 112, and the connecting rod 42 connects the support block 41 to the fixed frame 11 by penetrating the second connecting hole 411 and the third connecting hole 112. In order to improve the connection stability of the support block 41, the support block 41 is provided with two second connecting holes 411, and the fixed frame 11 is correspondingly provided with two third connecting holes 112. The connecting rod 42 is also a U-shaped rod as the adjusting rod 32.

[0044] In order to improve the support stability of the target material 10, the support block 41 is provided with a support groove 412, and the lower edge of the target material 10 can be located in the support groove 412. The support groove 412 can be a trapezoidal groove, and the groove bottom width of the trapezoidal groove is smaller than the groove top width, so that the trapezoidal groove can facilitate the rapid positioning and installation of the target material 10. In addition, different support blocks 41 have different heights, and the trapezoidal grooves have the same depth, so that the replacement of different support blocks 41 can adjust the installation height of the target material 10.

[0045] In addition, the cleaning fixing mechanism 1 further comprises a support frame 13, the support frame 13 is arranged above the fixed seat 12, the fixed frame 11 is fixed between the support frame 13 and the fixed seat 12, and the support frame 13 can improve the strength and rigidity of the whole cleaning fixing mechanism 1, thereby ensuring the stability of the target material 10 in the cleaning process.

[0046] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be carried out without departing from the protection scope of the utility model. Here, it is not necessary and impossible to exhaust all the embodiments. Any modification, equivalent replacement and improvement made in the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A target cleaning apparatus, characterized by, The utility model relates to a target cleaning device, which comprises: a cleaning chamber, a cleaning mechanism arranged in the cleaning chamber, the cleaning mechanism being used for cleaning a target (10); a cleaning fixing mechanism (1) capable of fixing the target (10), the cleaning fixing mechanism (1) comprising a fixing frame (11), the fixing frame (11) being provided with a first adjusting assembly (3) on both sides respectively, the two first adjusting assemblies (3) being capable of moving on the fixing frame (11) to realize mutual approaching or moving away, so as to adapt to the target (10) with different outer diameters; a conveying mechanism (2) capable of driving the cleaning fixing mechanism (1) to enter or exit the cleaning chamber.

2. The target cleaning apparatus of claim 1, wherein The first adjusting assembly (3) comprises a fixing block (31) and an adjusting rod (32), the fixing block (31) being provided with a first connecting hole (311), the adjusting rod (32) being arranged in the first connecting hole (311), the adjusting rod (32) being capable of driving the fixing block (31) to move in the horizontal direction, and the side surface of the fixing block (31) being capable of abutting against the edge of the target (10).

3. The target cleaning apparatus of claim 2, wherein The fixing frame (11) is provided with an adjusting track (111) extending in the horizontal direction, and the adjusting rod (32) is slidingly arranged in the adjusting track (111).

4. The target cleaning apparatus of claim 2, wherein The fixing block (31) is further provided with a fixing groove (312), and the edge of the target (10) can be arranged in the fixing groove (312).

5. The target cleaning apparatus of claim 1, wherein The cleaning fixing mechanism (1) further comprises a fixing seat (12), the fixing frame (11) is arranged on the fixing seat (12), and the conveying mechanism (2) comprises a guide vehicle (21), and the guide vehicle (21) is capable of being connected with the fixing seat (12).

6. The target cleaning apparatus of claim 5, wherein The fixing seat (12) comprises a support plate (121) and a plurality of supporting legs (122), the fixing frame (11) is arranged above the support plate (121), the plurality of supporting legs (122) are arranged below the support plate (121), the guide vehicle (21) can be arranged between the plurality of supporting legs (122) and jack up the support plate (121).

7. The target cleaning apparatus of claim 6, wherein The support plate (121) is further provided with a protection plate (123) below, and the protection plate (123) is arranged between two adjacent supporting legs (122).

8. The target cleaning apparatus of claim 1, wherein The fixing frame (11) is further provided with a second adjusting assembly (4), the second adjusting assembly (4) is detachably arranged on the lower side of the fixing frame (11) and is used for supporting the target (10).

9. The target cleaning apparatus of claim 8, wherein The second adjusting assembly (4) comprises a support block (41) and a connecting rod (42), the connecting rod (42) is arranged on the fixing frame (11), the connecting rod (42) selectively penetrates the support block (41), and the upper surface of the support block (41) can abut against the edge of the target (10).

10. The target cleaning apparatus of claim 9, wherein A plurality of support blocks (41) are arranged, the heights of different support blocks (41) are different, and a plurality of support blocks (41) are selectively connected with the connecting rod (42).

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