Photoresist sampling bottle cleaning device

Abstract

The utility model provides a photoresist sampling bottle cleaning device, which relates to the technical field of photoresist and comprises a rotor pump, a circulating pipeline and a cleaning box, the cleaning box comprises a cover plate, a partition plate, a cleaning column and a box body, the partition plate is arranged at the lower end of the interior of the box body, and the interior of the cleaning box is divided into a first isolation cavity and a second isolation cavity by the partition plate and the box body; the cleaning column is a hollow pipe; the cleaning column is arranged on the partition plate and penetrates through the partition plate to be communicated with the first isolation cavity and the second isolation cavity; the number of the cleaning column is at least one; according to the photoresist sampling bottle cleaning device, various types of photoresist sampling bottles can be cleaned, and the large-scale cleaning and full-automatic cleaning process is realized; the cyclic utilization of the cleaning liquid is realized, and the supplement and replacement of the cleaning liquid are simple and more convenient in use; closed cleaning is achieved, waste liquid cannot be splashed around during cleaning, and the trouble that a site needs to be cleaned after cleaning is omitted.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of photoresist, specifically relates to a photoresist sampling bottle cleaning device. BACKGROUND

[0002] Photoresist is an indispensable core material in the photoetching process, plays an important role in the semiconductor manufacturing link, and is particularly important to repeatedly sample and detect photoresist in the quality control of the production link, so the use of photoresist sampling bottles is extremely frequent, the use amount is large, and cleaning is complicated, the sampling bottles used by various companies are not unified, and there is no effective solution device on the market.

[0003] The prior art CN113102415A discloses a three-dimensional cleaning device for bottle bodies, cup bodies and irregular objects, which uses a cleaning column and a pressure pump, but the cleaning column of the device is arranged on a platform and directly exposed to the air without being shielded by a box, when the cleaning liquid is pumped out of the cleaning column to clean the object to be cleaned, the cleaning liquid is easy to splash out of the equipment platform, and after cleaning, the waste liquid splashed around the equipment needs to be cleaned, the device does not realize closed cleaning, and cleaning the splashed waste liquid needs additional manpower, the operation of cleaning a large number of bottle bodies is complicated, the workload of the operator is large, and it is inconvenient. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a photoresist sampling bottle cleaning device, which realizes cleaning of different styles of sampling bottles and full-automatic cleaning of a large number of sampling bottles, realizes recycling of the cleaning liquid and simple and convenient replenishment and replacement of the cleaning liquid.

[0005] To achieve the above object, the utility model realizes the following technical scheme: a photoresist sampling bottle cleaning device, comprising a rotor pump, a circulating pipeline and a cleaning box.

[0006] The cleaning box comprises a cover plate, a partition plate, a cleaning column and a box body, the partition plate is arranged at the lower end of the box body, and the partition plate and the box body divide the interior of the cleaning box into a first isolated cavity and a second isolated cavity; the cleaning column is a hollow pipe; the cleaning column is arranged on the partition plate and communicates the first isolated cavity and the second isolated cavity through the partition plate; the number of the cleaning columns is at least one; and the cover plate is arranged at the top end of the box body.

[0007] The rotor pump is provided with a liquid inlet and a liquid outlet at the first end, the liquid inlet and the liquid outlet are respectively connected with the circulating pipeline in communication; and the rotor pump is provided with a liquid storage tank at the second end.

[0008] The side of the box where the first isolation chamber is located is provided with an inlet, and the liquid outlet and the inlet are communicated through the circulating pipeline; the side of the box where the second isolation chamber is located is provided with an outlet, and the outlet and the liquid inlet are communicated through the circulating pipeline, and the circulating pipeline is provided with a liquid supplement valve, a liquid discharge valve and a liquid taking and discharging valve; the first end of the liquid taking and discharging valve is connected with the circulating pipeline, and the second end is connected with the infusion pipeline.

[0009] Further, the liquid supplement valve is arranged on the circulating pipeline close to the outlet side.

[0010] Further, the liquid discharge valve is arranged on the circulating pipeline close to the liquid inlet side.

[0011] Further, the liquid taking and discharging valve is arranged on the circulating pipeline between the liquid supplement valve and the liquid discharge valve.

[0012] Further, the cover plate is provided with a cover plate handle.

[0013] Further, the number of the cleaning columns is multiple, and the sizes of the hollow pipe diameters of the cleaning columns are inconsistent.

[0014] Further, the cleaning column, the cover plate and the box are made of Teflon material.

[0015] Further, the liquid storage tank is made of Teflon material.

[0016] Further, the distance between the lower end of the cleaning column and the bottom surface of the box is 5mm-2cm.

[0017] Compared with the prior art, the utility model has the following beneficial effects:

[0018] First, the device adopts the technical scheme of inverting the sampling bottle on the cleaning column, realizes cleaning of different types of photoresist sampling bottles, sets multiple cleaning columns on the internal partition plate of the box, realizes cleaning of a large number of photoresist sampling bottles at one time, sets the rotor pump and the circulating pipeline, cooperates with the cleaning box to work, realizes full automation of the sampling bottle cleaning process and recycling of the cleaning liquid, greatly improves the work efficiency and reduces the personnel workload.

[0019] Second, the device sets the liquid supplement valve, the liquid discharge valve and the liquid taking and discharging valve on the circulating pipeline, realizes simple operation of supplementing and replacing the cleaning liquid during use, and is more convenient.

[0020] Third, the device sets the cleaning column in the box, and the box is provided with a cover plate on the top, realizes closed cleaning of the photoresist sampling bottle, and the waste liquid during cleaning will not splash around, so that the trouble of cleaning the scene after cleaning is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0021] Fig. 1 It is a perspective view schematic diagram of a photoresist sampling bottle cleaning device of the utility model;

[0022] Fig. 2 It is a side view schematic diagram of a photoresist sampling bottle cleaning device of the utility model;

[0023] Fig. 3 It is a cleaning tank section view schematic diagram of a photoresist sampling bottle cleaning device of the utility model;

[0024] In the drawing,

[0025] 1, rotor pump;2, circulating pipeline;3, cleaning tank;4, cover plate;5, partition;6, cleaning column;7, tank;8, first isolation chamber;9, second isolation chamber;10, liquid inlet;11, liquid outlet;12, liquid storage tank;13, inlet;14, outlet;15, liquid discharge valve;16, liquid supplement valve;17, liquid taking and discharging valve;18, cover plate handle;19, liquid conveying pipeline. Specific implementation

[0026] The technical scheme of the utility model will be described clearly and completely in combination with the drawings, obviously, the described embodiments are a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor belong to the protection scope of the utility model.

[0027] In the description of the utility model, it is necessary to explain that the orientation or position relation indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is the orientation or position relation based on the drawing shown, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as the limitation of the utility model. In addition, the terms "first", "second", "third" are only for the description purpose, and cannot be understood as indicating or implying relative importance.

[0028] The specific implementation of the utility model will be described in detail below. Figs. 1-3 The specific implementation of the utility model will be described in detail below.

[0029] The utility model provides a photoresist sampling bottle cleaning device, including rotor pump 1, circulating pipeline 2, cleaning tank 3;

[0030] The cleaning tank 3 comprises a cover plate 4, a partition plate 5, a cleaning column 6 and a tank body 7, the tank body 7 is internally provided with the partition plate 5 at a lower end, the partition plate 5 and the tank body 7 divide the cleaning tank 3 into a first isolated cavity 8 and a second isolated cavity 9; the cleaning column 6 is a hollow pipe; the cleaning column 6 is arranged on the partition plate 5 and penetrates the partition plate 5 to communicate the first isolated cavity 8 and the second isolated cavity 9; the number of the cleaning column 6 is at least one; the cover plate 4 is arranged at a top end of the tank body 7;

[0031] The first end of the rotor pump 1 is provided with a liquid inlet 10 and a liquid outlet 11, the liquid inlet 10 and the liquid outlet 11 are respectively communicated with the circulating pipeline 2; the second end of the rotor pump 1 is provided with a liquid storage tank 12;

[0032] One side of the tank body 7 where the first isolated cavity 8 is located is provided with an inlet 13, the liquid outlet 11 and the inlet 13 are communicated through the circulating pipeline 2; one side of the tank body 7 where the second isolated cavity 9 is located is provided with an outlet 14, the outlet 14 and the liquid inlet 10 are communicated through the circulating pipeline 2, the circulating pipeline 2 is provided with a liquid supplementing valve 16, a liquid discharging valve 15 and a liquid taking and discharging valve 17; the first end of the liquid taking and discharging valve 17 is connected with the circulating pipeline 2, and the second end is connected with a liquid conveying pipeline 19.

[0033] According to one specific implementation scheme of the utility model, the liquid supplementing valve 16 is arranged on the circulating pipeline 2 close to the side of the outlet 14, the liquid discharging valve 15 is arranged on the circulating pipeline 2 close to the side of the liquid inlet 10, and the liquid taking and discharging valve 17 is arranged on the circulating pipeline 2 between the liquid supplementing valve 16 and the liquid discharging valve 15.

[0034] According to one specific implementation scheme of the utility model, the cover plate 4 is provided with a cover plate handle 18.

[0035] According to one specific implementation scheme of the utility model, the number of the cleaning column 6 is multiple, and the diameters of the hollow pipes of the cleaning column 6 are inconsistent.

[0036] According to one specific implementation scheme of the utility model, the cleaning column 6, the cover plate 4 and the tank body 7 are all made of Teflon material, and the liquid storage tank 12 is also made of Teflon material.

[0037] According to one specific implementation scheme of the utility model, the distance between the lower end of the cleaning column 6 and the bottom surface of the tank body 7 is 5mm-2cm.

[0038] The working principle of the utility model is as follows:

[0039] When the photoresist sampling bottle is cleaned, the take-out valve 17 is closed, the drain valve 15 and the liquid supplement valve 16 are opened, the photoresist sampling bottle is inverted on the cleaning column 6, the cover plate 4 is closed, and the rotor pump 1 is started. The rotor pump 1 pumps the cleaning liquid in the liquid storage tank 12 from the liquid outlet 11 to the inlet 13 through the circulating pipeline 2, and the cleaning liquid in the first isolation chamber 8 moves upward along the hollow pipeline in the cleaning column 6 under the action of pressure and flows out of the upper end of the cleaning column 6 to clean the photoresist sampling bottle. After cleaning, the cleaning liquid is gathered at the lower end of the second isolation chamber 9 under the action of gravity, enters the circulating pipeline 2 through the outlet 14, is transported to the liquid inlet 10 through the circulating pipeline 2, and enters the liquid storage tank 12 in the rotor pump 1 through the liquid inlet 10. Thus, the cleaning operation of the photoresist sampling bottle is realized.

[0040] When the cleaning liquid in the circulating pipeline 2 needs to be replaced and drained, the take-out valve 17 and the drain valve 15 are opened, the liquid supplement valve 16 is closed, and the rotor pump 1 is started. The rotor pump 1 pumps the cleaning liquid in the liquid storage tank 12 from the liquid outlet 11 to the inlet 13 through the circulating pipeline 2, and the cleaning liquid in the first isolation chamber 8 moves upward along the hollow pipeline in the cleaning column 6 under the action of pressure and flows out of the upper end of the cleaning column 6. Then, the cleaning liquid is gathered at the lower end of the second isolation chamber 9 under the action of gravity, enters the circulating pipeline 2 through the outlet 14, and is transported to the take-out valve 17 through the circulating pipeline 2, and is drained through the liquid delivery pipeline 19.

[0041] When the cleaning liquid needs to be injected, the take-out valve 17 and the liquid supplement valve 16 are opened, the drain valve 15 is closed, and the cleaning liquid is injected from the liquid delivery pipeline 19 of the take-out valve 17. The cleaning liquid enters the circulating pipeline 2 through the take-out valve 17 along the liquid delivery pipeline 19, is transported to the liquid inlet 10 through the liquid supplement valve 16, enters the liquid storage tank 12 of the rotor pump 1, and is pumped by the rotor pump 1 from the liquid outlet 11 to the inlet 13 through the circulating pipeline 2. The cleaning liquid in the first isolation chamber 8 moves upward along the hollow pipeline in the cleaning column 6 under the action of pressure and flows out of the upper end of the cleaning column 6. Then, the cleaning liquid is gathered at the lower end of the second isolation chamber 9 under the action of gravity, enters the circulating pipeline 2 through the outlet 14, and is gradually accumulated in the circulating pipeline 2 due to the closed drain valve 15, thereby achieving the effect of storing the cleaning liquid.

[0042] It should be noted that the liquid taking valve and the liquid discharging valve 15 in the present application also have the function of controlling the internal circulation flow size, the liquid taking valve and the liquid discharging valve 15 of the present application allow the cleaning liquid to pass when opened, and do not allow the cleaning liquid to pass when closed. By controlling the rotation amplitude of the valve opening and closing of the liquid taking valve and the liquid discharging valve 15, the size of the flow of the cleaning liquid passing through the valve inside the circulation pipeline 2 can be controlled, thereby realizing the control of the internal circulation flow size. In actual operation, the valve is adjusted according to the size of the photoresist sampling bottle, so as to achieve better cleaning effect on different types of photoresist sampling bottles.

[0043] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent transformation or modification according to the spirit and essence of the present application should be covered within the protection scope of the present application.

Claims

1. A photoresist sampling bottle cleaning apparatus, characterized by: The cleaning box comprises a cover plate, a partition plate, a cleaning column and a box body, the partition plate is arranged at the lower end of the inside of the box body, and the partition plate and the box body divide the inside of the cleaning box into a first isolated cavity and a second isolated cavity. The cleaning column is a hollow pipe, the cleaning column is arranged on the partition plate and penetrates the partition plate to communicate the first isolated cavity and the second isolated cavity, the number of the cleaning column is at least one, and the cover plate is arranged at the top end of the box body. The first end of the rotor pump is provided with a liquid inlet and a liquid outlet, the liquid inlet and the liquid outlet are respectively connected with the circulating pipeline, and the second end of the rotor pump is provided with a liquid storage tank. The side of the box body where the first isolated cavity is arranged is provided with an inlet, the liquid outlet and the inlet are communicated through the circulating pipeline, the side of the box body where the second isolated cavity is arranged is provided with an outlet, the outlet and the liquid inlet are connected through the circulating pipeline, and the circulating pipeline is provided with a liquid supplement valve, a liquid discharge valve and a liquid taking and discharging valve. The liquid supplement valve is arranged on the circulating pipeline close to the outlet side.

2. The photoresist sampling bottle cleaning apparatus of claim 1, wherein: The liquid discharge valve is arranged on the circulating pipeline close to the liquid inlet side.

3. The photoresist sampling bottle cleaning apparatus of claim 1, wherein: The liquid taking and discharging valve is arranged on the circulating pipeline between the liquid supplement valve and the liquid discharge valve.

4. A photoresist sampling bottle cleaning apparatus according to any one of claims 1-3, wherein: The cover plate is provided with a cover plate handle.

5. The photoresist sampling bottle cleaning apparatus of claim 1, wherein: The number of the cleaning column is multiple, and the diameters of the hollow pipes of the cleaning column are inconsistent.

6. The photoresist sampling bottle cleaning apparatus of claim 1, wherein: The cleaning column, the cover plate and the box body are made of Teflon material.

7. The photoresist sampling bottle cleaning apparatus of claim 1, wherein: The liquid storage tank is made of Teflon material.

8. The photoresist sampling bottle cleaning apparatus of claim 1, wherein: The distance between the lower end of the cleaning column and the bottom surface of the box body is 5mm-2cm.

9. The photoresist sampling bottle cleaning apparatus of claim 1, wherein: ​

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