Vacuum coating device with cavity cooling mechanism

Abstract

The utility model discloses a vacuum coating device with a cavity cooling mechanism. Comprising an outer bin body, a vacuum coating bin arranged in the outer bin body, a plurality of heat dissipation plates arranged on the outer walls of the multiple sides of the vacuum coating bin in an attached mode, a plurality of air guiding fans arranged on the inner wall of the outer bin body, a heat conduction frame arranged between the air guiding fans and the heat dissipation plates, heat conduction fins arranged in the heat conduction frame and heat conduction transverse rods. The utility model discloses a vacuum coating device with a cavity cooling mechanism, which comprises an outer bin body, a heat conduction frame arranged in the outer bin body, a loopback water pipe connected in the heat conduction frame, an external cooling liquid circulating system connected with the loopback water pipe, a vibration mechanism arranged in the outer bin body and an air exhaust mechanism arranged at the top of the outer bin body. And the effect of optimizing the cooling efficiency is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field especially relates to a vacuum coating device with cavity cooling mechanism. BACKGROUND

[0002] Vacuum coating machine mainly refers to a kind of coating that needs to be carried out under higher vacuum degree, specifically includes many kinds, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many kinds.

[0003] Vacuum coating machine will generate a lot of heat when working, need to be cooled in time and effectively, to ensure its normal work, the cooling device for welding round pipe on the outer surface of vacuum coating machine cavity at present, cooling water or cooling liquid is passed in the round pipe to cool.But with the continuous heat exchange of cooling water or cooling liquid in the round pipe, internal cooling water and cooling liquid will gradually heat, leading to the cooling effect of vacuum coating machine at different positions is inconsistent. UTILITY MODEL CONTENTS

[0004] The utility model discloses a vacuum coating device with cavity cooling mechanism, to solve with the continuous heat exchange of cooling water or cooling liquid in the round pipe, internal cooling water and cooling liquid will gradually heat, leading to the cooling effect of vacuum coating machine at different positions is inconsistent technical problem.

[0005] In order to realize the above-mentioned purpose, the utility model has adopted the following technical scheme:

[0006] A vacuum coating device with cavity cooling mechanism, including outer storehouse, the vacuum coating storehouse that is set in the outer storehouse, the multiple radiating plates that are set in the multiple sides outer wall of the vacuum coating storehouse, multiple air guide fans that are set in the inner wall of the outer storehouse, the heat conduction frame that is set between the air guide fan and radiating plate, the heat conduction fin and heat conduction cross bar that are set in the heat conduction frame, the back ring water pipe that is connected in the heat conduction frame, the external cooling liquid circulation system that is connected with the back ring water pipe, the vibration mechanism that is set in the outer storehouse and the air extraction mechanism that is set in the top of the outer storehouse;

[0007] The heat conduction fin in the heat conduction frame is provided with multiple, and multiple heat conduction cross bars are staggered connected on multiple heat conduction fins, the heat conduction frame is provided with the accommodation groove, and the back ring water pipe is arranged in the accommodation groove, and the heat conduction fin and heat conduction cross bar are wrapped in the outer wall of back ring water pipe;

[0008] The multiple sides inner wall of the outer storehouse is fixedly connected with side support, and the air guide fan is installed on the side support, one side outer wall of the vacuum coating storehouse is fixedly connected with multiple first partition plates, and the other side outer wall of the first partition plate is fixedly connected to the inner wall of the outer storehouse.

[0009] By setting the heat dissipation plate, the air guide fan and the heat conduction frame, the heat inside the vacuum coating chamber is guided outward between the vacuum coating chamber and the outer chamber body through the multiple heat dissipation plates, when the air outside is introduced into the outer chamber body by the air guide fan, the air temperature is reduced by passing between the multiple heat conduction fins, and the low-temperature air contacts the heat dissipation plate, which can quickly take away the heat on the heat dissipation plate and reduce the temperature inside the vacuum coating chamber through heat exchange of the heat dissipation plate. This structure can avoid the uneven temperature inside the recirculating water pipe caused by direct contact and heat exchange with the recirculating water pipe, realize the full use of the cooling liquid, and at the same time, based on the fact that the thermal conductivity of gas is higher than that of liquid, the cooling efficiency is optimized to a certain extent.

[0010] In a preferred scheme, the vibration mechanism comprises a plurality of inner support chambers, a high-frequency vibrator arranged in the inner support chambers, and a plurality of transmission heads arranged on the high-frequency vibrator.

[0011] The plurality of inner support chambers are arranged at two inner corners of the outer chamber body, and the inner support chambers are fixedly connected between the adjacent two heat conduction frames, and the two sides of the inner support chambers are respectively provided with a plurality of perforations.

[0012] The plurality of transmission heads pass through the plurality of perforations, and the ends of the plurality of transmission heads respectively abut against one side of the heat dissipation plate.

[0013] By arranging the vibration mechanism, the inner support chamber in the vibration mechanism can be used as a partition of a plurality of heat exchange spaces, so as to ensure uniform air intake of cool air in different directions and balance the heat exchange effect of multiple surfaces. At the same time, the high-frequency vibrator drives the plurality of heat dissipation plates to vibrate, and the heat dissipation plates in the vibration process can better exchange heat with cool air, so as to optimize the cooling efficiency.

[0014] In a preferred scheme, the air extraction mechanism comprises a rotating disc, a motor connected to the top end of the rotating disc, an outer support ring and an inner support body connected to the outside of the rotating disc, and an air extractor connected to the top of the inner support body.

[0015] The top end of the outer chamber body is provided with a plurality of air outlets, and the plurality of air outlets correspond to the plurality of heat conduction frames, respectively. A plurality of slots are arranged equidistantly on the rotating disc.

[0016] The top end of the inner support body is provided with a groove, and the motor is installed in the groove. A plurality of second partitions are fixedly connected between the inner support body and the outer support ring, and the plurality of second partitions correspond to the plurality of air outlets, respectively.

[0017] The top outer wall of the inner support body is fixedly connected with a plurality of outer support frames, and the air extractor is fixed to the top end of the outer support frame. The air extractor is tightly connected with a plurality of air extraction pipes, and the air extraction pipes are connected to the plurality of second partitions, respectively.

[0018] By setting up the air extraction mechanism, the air extraction mechanism extracts the hot air generated after the cool air contacts the heat dissipation plate by the air extractor from the upper through the air extraction pipe, and the rotating disc is driven to rotate by the motor, and the positions of the multiple slots are switched, when the slot corresponds to the air outlet, the whole ventilation channel can be connected, the hot air is extracted through the air extraction pipe, and when the rotating disc covers the air outlet, the air outlet is temporarily closed, the suction of the air extractor is avoided to affect the contact between the cool air and the heat dissipation plate, so that the sufficient heat conduction is guaranteed.

[0019] As can be seen from the above, the vacuum coating device with the cavity cooling mechanism comprises an outer warehouse body, a vacuum coating warehouse arranged in the outer warehouse body, a plurality of heat dissipation plates arranged on the outer walls of the vacuum coating warehouse, a plurality of air guide fans arranged on the inner wall of the outer warehouse body, a heat conduction frame arranged between the air guide fan and the heat dissipation plate, a heat conduction fin and a heat conduction cross rod arranged in the heat conduction frame, a circulating water pipe connected to the heat conduction frame, an external cooling liquid circulating system connected to the circulating water pipe, a vibration mechanism arranged in the outer warehouse body and an air extraction mechanism arranged on the top of the outer warehouse body. The vacuum coating device with the cavity cooling mechanism provided by the utility model has the technical effects of guaranteeing uniform heat conduction and optimizing cooling efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 The utility model provides a kind of overall structure schematic diagram of vacuum coating device with cavity cooling mechanism proposed by the utility model.

[0021] Figure 2 The utility model provides a kind of overall split schematic diagram of vacuum coating device with cavity cooling mechanism proposed by the utility model.

[0022] Figure 3 The utility model provides a kind of heat conduction structure split schematic diagram of vacuum coating device with cavity cooling mechanism proposed by the utility model.

[0023] Figure 4 The utility model provides a kind of air extraction mechanism split schematic diagram of vacuum coating device with cavity cooling mechanism proposed by the utility model.

[0024] Figure 5 The utility model provides a kind of vibration mechanism split schematic diagram of vacuum coating device with cavity cooling mechanism proposed by the utility model.

[0025] In the drawing: 1, vacuum coating chamber; 2, first partition; 3, outer chamber body; 4, air extractor; 5, side support; 6, air guide fan; 7, air outlet; 8, heat dissipation plate; 9, inner support chamber; 10, loop water pipe; 11, installation groove; 12, heat conduction frame; 13, heat conduction cross bar; 14, heat conduction fin; 15, outer support ring; 16, second partition; 17, inner support body; 18, outer support frame; 19, slot; 20, rotating disc; 21, motor; 22, groove; 23, high-frequency vibrator; 24, transmission head; 25, perforation; 26, air extraction pipe. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0027] The utility model discloses a vacuum coating device with cavity cooling mechanism mainly applies to the scene of vacuum coating device cooling.

[0028] Referring to Figures 1-3 A vacuum coating device with cavity cooling mechanism, including outer chamber body 3, set up in the vacuum coating chamber 1 of outer chamber body 3, the multiple heat dissipation plates 8 of vacuum coating chamber 1 multiple side outer wall are attached and set up, multiple air guide fans 6 are set up in the inner wall of outer chamber body 3, the heat conduction frame 12 of setting between air guide fan 6 and heat dissipation plate 8, the heat conduction fin 14 and heat conduction cross bar 13 of setting in heat conduction frame 12, the loop water pipe 10 connected in heat conduction frame 12, with the external cooling liquid circulating system connected with loop water pipe 10, vibration mechanism and setting in the outer chamber body 3 of air extraction mechanism are set up in the outer chamber body 3, the heat of vacuum coating chamber 1 inside is guided to vacuum coating chamber 1 and outer chamber body 3 between by the multiple heat dissipation plates 8 set up, then by the flow of cooling liquid in the loop water pipe 10 connected with external cooling liquid circulating system, low temperature is conducted through heat conduction fin 14 and heat conduction cross bar 13, thus, when air guide fan 6 guides external air into outer chamber body 3, the air temperature is reduced by passing through between multiple heat conduction fins 14, and low-temperature air contacts heat dissipation plate 8, can quickly take away the heat on heat dissipation plate 8, and the temperature inside vacuum coating chamber 1 is reduced by heat exchange of heat dissipation plate 8, this structure can avoid the temperature inhomogeneity caused by directly contacting heat exchange with loop water pipe 10, realize the full use of cooling liquid, and based on the heat conductivity of gas is higher than the heat conductivity of liquid, so that the optimization of cooling efficiency is realized to a certain extent.

[0029] Referring to Figure 3In a preferred embodiment, a plurality of heat-conducting fins 14 are arranged in the heat-conducting frame 12, and a plurality of heat-conducting horizontal rods 13 are connected to the plurality of heat-conducting fins 14 in a staggered manner. The heat-conducting frame 12 is provided with a mounting groove 11, and the loop water pipe 10 is arranged in the mounting groove 11. The heat-conducting fins 14 and the heat-conducting horizontal rods 13 are wrapped around the outer wall of the loop water pipe 10.

[0030] Referring to Figure 2 In a preferred embodiment, the plurality of side walls of the outer warehouse body 3 are fixedly connected with side supports 5, and the air guide fan 6 is installed on the side supports 5. The outer wall of one side of the vacuum-coated film warehouse 1 is fixedly connected with a plurality of first partition plates 2, and the outer wall of the other side of the first partition plates 2 is fixedly connected to the inner wall of the outer warehouse body 3.

[0031] Referring to Figure 5 In a preferred embodiment, the vibration mechanism includes a plurality of inner support warehouses 9, a high-frequency vibrator 23 arranged in the inner support warehouse 9, and a plurality of transmission heads 24 arranged on the high-frequency vibrator 23.

[0032] Referring to Figure 5 In a preferred embodiment, the plurality of inner support warehouses 9 are arranged at two inner corners of the outer warehouse body 3, and the inner support warehouses 9 are fixedly connected between the adjacent two heat-conducting frames 12. The two sides of the inner support warehouse 9 are respectively provided with a plurality of perforations 25.

[0033] Referring to Figure 5 In a preferred embodiment, the plurality of transmission heads 24 pass through the plurality of perforations 25, and the ends of the plurality of transmission heads 24 respectively correspond to one side of the plurality of heat dissipation plates 8. The arrangement of the inner support warehouse 9 in the vibration mechanism serves as a partition of the plurality of heat exchange spaces, thereby ensuring uniform air intake of cool air in different directions and balancing the heat exchange effect of multiple surfaces. At the same time, the high-frequency vibrator 23 is started, and the plurality of heat dissipation plates 8 are simultaneously vibrated by the plurality of transmission heads 24. The heat dissipation plates 8 in the vibration process can better exchange heat with cool air, thereby optimizing the cooling efficiency.

[0034] Referring to Figure 4 In a preferred embodiment, the air extraction mechanism includes a rotating disc 20, a motor 21 connected to the top end of the rotating disc 20, an outer support ring 15 and an inner support body 17 connected to the outside of the rotating disc 20, and an air extractor 4 connected to the top of the inner support body 17.

[0035] Referring to Figure 4 In a preferred embodiment, a plurality of air outlets 7 are arranged at the top end of the outer warehouse body 3, and the plurality of air outlets 7 respectively correspond to the plurality of heat-conducting frames 12. A plurality of slots 19 are arranged at equal intervals on the rotating disc 20.

[0036] Referring to Figure 4In a preferred embodiment, the top end of the inner support body 17 is provided with a recess 22, and the motor 21 is installed in the recess 22, a plurality of second partitions 16 are fixedly connected between the inner support body 17 and the outer support ring 15, and the plurality of second partitions 16 correspond to the plurality of air outlets 7 respectively.

[0037] With reference to Figure 4 In a preferred embodiment, the top end of the inner support body 17 is provided with a recess 22, and the motor 21 is installed in the recess 22, a plurality of second partitions 16 are fixedly connected between the inner support body 17 and the outer support ring 15, and the plurality of second partitions 16 correspond to the plurality of air outlets 7 respectively.

[0038] Working principle: The heat inside the vacuum coating chamber 1 is guided outward between the vacuum coating chamber 1 and the outer chamber body 3 through the plurality of heat dissipation plates 8, and the low temperature is conducted through the cooling liquid flowing in the circulating water pipe 10 connected with the external cooling liquid circulating system, the heat dissipation fins 14 and the heat conduction cross bars 13, so that when the air is introduced into the outer chamber body 3 by the air guide fan 6, the temperature of the air is reduced by passing between the plurality of heat dissipation fins 14, and the low temperature air contacts the heat dissipation plates 8 to quickly take away the heat on the heat dissipation plates 8, and the temperature inside the vacuum coating chamber 1 is reduced by heat exchange of the heat dissipation plates 8. This structure can avoid the temperature inside the circulating water pipe 10 being not uniform caused by directly contacting and exchanging heat with the circulating water pipe 10, realize full use of the cooling liquid, and at the same time, based on the fact that the thermal conductivity of gas is higher than that of liquid, the cooling efficiency is optimized to a certain extent.

[0039] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto. The substitution can be substitution of part of the structure, device, method step, or complete technical solution. According to the technical solution and the inventive concept of the present application, equivalent substitution or change should be covered in the protection scope of the present application.

Claims

1. A vacuum coating apparatus having a cavity cooling mechanism, characterized by, The utility model provides a vacuum coating device, including outer storehouse (3), set up in vacuum coating storehouse (1) in outer storehouse (3), fit set up in the multiple heat dissipation plate (8) of vacuum coating storehouse (1) many side outer wall, set up in the multiple air guide fan (6) of outer storehouse (3) inner wall, set up in the heat conduction frame (12) between air guide fan (6) and heat dissipation plate (8), set up in the heat conduction fin (14) and heat conduction cross bar (13) of heat conduction frame (12), be connected in the loop water pipe (10) of heat conduction frame (12), with loop water pipe (10) link's external cooling liquid circulation system, set up in the vibration mechanism of outer storehouse (3) and set up in the air extraction mechanism of outer storehouse (3) top.

2. The vacuum coating device with a cavity cooling mechanism according to claim 1, wherein, The heat conduction fin (14) in the heat conduction frame (12) is provided with a plurality of heat conduction cross bars (13) which are connected to the plurality of heat conduction fins (14) in a staggered manner. The heat conduction frame (12) is provided with a mounting groove (11), and the loop water pipe (10) is arranged in the mounting groove (11). The heat conduction fin (14) and the heat conduction cross bar (13) are wrapped around the outer wall of the loop water pipe (10).

3. The vacuum coating device with a cavity cooling mechanism according to claim 1, wherein, The outer storehouse (3) is fixedly connected with a plurality of side supports (5) on the inner walls of multiple sides, and the air guide fan (6) is installed on the side supports (5). One side of the vacuum coating storehouse (1) is fixedly connected with a plurality of first partition plates (2), and the other side of the first partition plate (2) is fixedly connected to the inner wall of the outer storehouse (3).

4. The vacuum coating device with a cavity cooling mechanism according to claim 1, wherein, The vibration mechanism includes a plurality of inner support warehouses (9), a high-frequency vibrator (23) arranged in the inner support warehouse (9), and a plurality of transmission heads (24) arranged on the high-frequency vibrator (23).

5. The vacuum coating device with a cavity cooling mechanism according to claim 4, wherein, The plurality of inner support warehouses (9) are arranged at two inner corners of the outer storehouse (3), and the inner support warehouses (9) are fixedly connected between the adjacent two heat conduction frames (12). The two sides of the inner support warehouse (9) are respectively provided with a plurality of perforations (25).

6. The vacuum coating device with a cavity cooling mechanism according to claim 5, wherein, The plurality of transmission heads (24) pass through the plurality of perforations (25), and the ends of the plurality of transmission heads (24) respectively correspond to one side of the heat dissipation plate (8).

7. The vacuum coating device with a cavity cooling mechanism according to claim 1, wherein, The air extraction mechanism includes a rotating disc (20), a motor (21) connected to the top end of the rotating disc (20), an outer support ring (15) and an inner support body (17) connected to the outside of the rotating disc (20), and an air extractor (4) connected to the top of the inner support body (17).

8. The vacuum coating device with a cavity cooling mechanism according to claim 7, characterized in that, The top end of the outer storehouse (3) is provided with a plurality of air outlets (7), and the plurality of air outlets (7) respectively correspond to the plurality of heat conduction frames (12). The rotating disc (20) is provided with a plurality of slots (19) at equal intervals.

9. The vacuum coating device with a cavity cooling mechanism according to claim 8, wherein, The top end of the inner support body (17) is provided with a groove (22), and the motor (21) is installed in the groove (22). The inner support body (17) and the outer support ring (15) are fixedly connected with a plurality of second partition plates (16), and the plurality of second partition plates (16) respectively correspond to the plurality of air outlets (7).

10. The vacuum coating device with a cavity cooling mechanism according to claim 9, wherein, The top outer wall of the inner support body (17) is fixedly connected with a plurality of outer support frames (18), and an air extractor (4) is fixed to the top end of the outer support frame (18), the air extractor (4) is tightly connected with a plurality of air extraction pipes (26), and the air extraction pipes (26) are respectively connected to the plurality of groups of second partition plates (16).

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