Connecting structure of water-cooled heat shield and single crystal furnace

Abstract

The utility model relates to a connecting structure of a water-cooled heat shield and a single crystal furnace, the connecting structure of the water-cooled heat shield is applied to the water-cooled heat shield, and the connecting structure comprises a fixed seat, a first connecting piece and a second connecting piece, the second seat is arranged on one side of the first seat, and the second seat can move relative to the first seat, so that a size-adjustable moving space is formed between the second seat and the first seat; the movable seat is used for being connected with a connecting rod of the water-cooled heat shield, the movable seat and the connecting rod are relatively fixed, the movable seat is located in the movable space, and the movable seat at least forms a first state and a second state through adjustment of the fixed seat: in the first state, the first seat and the second seat are close to each other to clamp the movable seat so as to fix the movable seat; and in the second state, the first seat and the second seat are far away from each other, so that the movable seat can move in the movable space. The technical problem that the water-cooled heat shield is difficult to center is solved, and the technical effect of improving the centering performance of the water-cooled heat shield is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of single crystal pulling, in particular to a connection structure of a water-cooled heat shield and a single crystal furnace. BACKGROUND

[0002] In the process of pulling a single crystal silicon rod, the ideal temperature field should be able to change accordingly according to the different growth stages to optimize the growth quality and speed of the single crystal silicon rod. In recent years, the industry has begun to explore the use of water-cooled heat shield technology to replace the traditional water-cooled jacket. The water-cooled heat shield not only has more flexible cooling capacity, but also can adjust the temperature gradient in the furnace as needed, and also has a lifting function, which can make real-time position adjustment according to the growth needs of the single crystal silicon rod.

[0003] In the prior art, the water-cooled heat shield is usually directly hung by a connecting rod in the traditional hoisting mode. This mode often cannot guarantee the accurate centering of the water-cooled heat shield with the key structures such as the main furnace chamber and the crucible of the single crystal furnace. The deviation of the centering not only affects the growth quality of the single crystal silicon rod, but also may lead to the reduction of production efficiency and the increase of cost.

[0004] Therefore, the technical problem of the prior art is that the water-cooled heat shield is difficult to center. CONTENT OF THE INVENTION

[0005] The present application provides a connection structure of a water-cooled heat shield and a single crystal furnace, which solves the technical problem that the water-cooled heat shield is difficult to center, and achieves the technical effect of improving the centering of the water-cooled heat shield.

[0006] On the one hand, the present application provides a connection structure of a water-cooled heat shield, which adopts the following technical scheme:

[0007] A connection structure of a water-cooled heat shield applied to a water-cooled heat shield, comprising: a fixed seat, the fixed seat comprising: a first seat; a second seat, the second seat being arranged on one side of the first seat, the second seat being movable relative to the first seat to form an adjustable activity space between the second seat and the first seat; an activity seat, the activity seat being used for connecting a connecting rod of the water-cooled heat shield, the activity seat being fixed relative to the connecting rod, the activity seat being located in the activity space, the activity seat being adjusted by the fixed seat to form at least a first state and a second state: in the first state, the first seat and the second seat are close to each other to clamp the activity seat to fix the activity seat; in the second state, the first seat and the second seat are away from each other to make the activity seat movable in the activity space.

[0008] As preferred, the first seat and the second seat are stacked, the first seat is below the second seat, the first seat has a supporting surface for supporting the movable seat, the supporting surface is a horizontal surface, so that the movable seat and the water-cooled heat shield can be adjusted in the horizontal direction.

[0009] As preferred, an adjusting member is connected between the first seat and the second seat, the adjusting member is used to lock the movable seat between the first seat and the second seat to fix the movable seat, or is used to release the movable seat to allow the movable seat to move.

[0010] As preferred, a plurality of adjusting members are uniformly arranged around the connecting rod.

[0011] As preferred, the movable seat is used to wrap the connecting rod, and a first sealing member is arranged between the movable seat and the connecting rod.

[0012] As preferred, the movable seat and the connecting rod are integrally formed.

[0013] As preferred, a second sealing member is arranged between the movable seat and the fixed seat.

[0014] On the other hand, the application provides a single crystal furnace, which adopts the following technical scheme:

[0015] A single crystal furnace comprises: a furnace cover; a water-cooled heat shield, which comprises: a body arranged below the furnace cover; a connecting rod connected to the body, the connecting rod at least partially penetrating through the furnace cover; and a driving mechanism connected to the furnace cover; wherein the water-cooled heat shield and the driving mechanism have the connecting structure, the movable seat is connected to the connecting rod, and the fixed seat is connected to the driving mechanism to drive the water-cooled heat shield to rise and fall.

[0016] As preferred, the connecting rod has at least three groups.

[0017] As preferred, the connecting rod is uniformly connected to the periphery of the body.

[0018] In summary, the application has at least one of the following beneficial technical effects:

[0019] 1. The water-cooled heat shield connecting structure provided by the application can control the movable seat through the first seat and the second seat, so that the movable seat and the water-cooled heat shield can move in the horizontal direction as a whole, i.e., the position of the water-cooled heat shield can be adjusted during the assembly of the water-cooled heat shield, and the centering effect of the water-cooled heat shield is achieved.

[0020] 2、The single crystal furnace provided by the application, the water-cooled heat shield has at least three groups of connecting rods, which is conducive to keeping the stability and lifting consistency of the water-cooled heat shield during the lifting of the water-cooled heat shield, and further keeps the centering effect of the water-cooled heat shield. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is the application described in the connection structure application diagram;

[0022] Figure 2 is the application described in the connection mechanism sectional view;

[0023] Figure 3 is Figure 2 the enlarged view of A in the figure;

[0024] Figure 4 is the application described in the single crystal furnace schematic diagram (furnace body is not shown).

[0025] BRIEF DESCRIPTION OF DRAWINGS: 100, water-cooled heat shield; 110, body; 120, connecting rod; 200, connecting structure; 210, fixed seat; 211, first seat; 2111, support surface; 212, second seat; 213, activity space; 220, movable seat; 230, adjusting piece; 240, first sealing piece; 250, second sealing piece; 300, furnace cover; 400, driving mechanism. DETAILED DESCRIPTION

[0026] The serial numbers of components in this paper, such as "first", "second", etc., are only used to distinguish the described objects, and have no technical meaning. Unless otherwise specified, the terms "connection" and "coupling" in this application include direct and indirect connection (coupling). In the description of the application, it should be understood that the orientation or positional relationship indicated by the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the application.

[0027] In the present application, unless specifically defined and limited otherwise, a first feature is "on" or "under" a second feature can mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "over", "above" and "on top of" the second feature can mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature. The first feature "under", "below" and "underneath" the second feature can mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is horizontally lower than the second feature.

[0028] The application provides a connecting structure 200 of a water-cooled heat shield 100 and a single crystal furnace, which solves the technical problem that the water-cooled heat shield 100 is difficult to center, and achieves the technical effect of improving the centering of the water-cooled heat shield 100.

[0029] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in combination with the drawings of the specification and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0030] In the production process of single crystal silicon, the single crystal furnace as the core equipment, the accurate control of the internal temperature gradient is crucial for the growth of single crystal silicon rod. In order to achieve this goal, the prior art adopts a two-bar heat shield design, which adjusts the temperature gradient in the furnace by lifting the heat shield through two slender rods to adapt to different stages in the process of single crystal silicon rod drawing.

[0031] However, due to the structural characteristics of the slender rod itself, its stability and consistency need to be additionally guaranteed. Usually, this is achieved by installing a guide sleeve, which can ensure that the heat shield maintains the correct position and direction during lifting. Due to the precision error in the manufacturing and installation process, the guide sleeve sometimes cannot smoothly fit into the slender rod of the heat shield, resulting in the heat shield may deviate or sway during lifting, thereby affecting its stability and consistency.

[0032] In addition, even if the guide sleeve can be smoothly fitted, due to various factors such as thermal expansion, mechanical wear, etc., the heat shield may not be completely centered with the crystal rod during the crystal pulling process. In this case, additional heat shield adjustment is needed to ensure that the heat shield can accurately rotate and lift around the crystal rod, thereby maintaining the stability and consistency of the temperature gradient in the furnace. However, this adjustment process not only consumes time and effort, but also may reduce the production efficiency of the factory and increase the production cost.

[0033] For the existing water-cooled heat shield 100, both the adjustment of the centering between the water-cooled heat shield 100 and the single crystal furnace and the stability and consistency of the lifting of the water-cooled heat shield 100 itself are required, therefore, the structure of the water-cooled heat shield 100 and related connection, auxiliary adjustment and the like in the prior art are urgently to be solved.

[0034] The application provides a connecting structure 200 applied to the water-cooled heat shield 100, as shown in Figure 1 、 2 , the centering adjustment of the water-cooled heat shield 100 can be realized through the connecting mechanism, the water-cooled heat shield 100 comprises a body 110 and a connecting rod 120, the connecting rod 120 is connected to the top of the body 110 and is used for hoisting the water-cooled heat shield 100.

[0035] As shown in Figure 2 、 3 , the connecting structure 200 comprises a fixed seat 210 and a movable seat 220; the fixed seat 210 comprises a first seat 211 and a second seat 212; the second seat 212 is movable relative to the first seat 211 to form an adjustable movable space 213 between the first seat 211 and the second seat 212; the movable seat 220 is connected to the connecting rod 120, the movable seat 220 is fixed relative to the connecting rod 120, the movable seat 220 is located in the movable space 213, and the movable seat 220 is adjusted by the fixed seat 210 to form at least a first state and a second state: in the first state, the first seat 211 and the second seat 212 are close to each other to clamp the movable seat 220 to fix the movable seat 220; in the second state, the first seat 211 and the second seat 212 are away from each other to make the movable seat 220 movable in the movable space 213.

[0036] Specifically, as shown in Figure 3 , the first seat 211 and the second seat 212 are arranged in a stack, and the movable space 213 is formed between the first seat 211 and the second seat 212, the movable seat 220 is located in the movable space 213, the first seat 211 and the second seat 212 are close to each other to clamp the movable seat 220 to fix the position of the movable seat 220, or the first seat 211 and the second seat 212 are away from each other to cancel the clamping of the movable seat 220 to make the movable seat 220 movable; in this way, the movable seat 220 forms the first state and the second state under the adjustment of the first seat 211 and the second seat 212, in the first state, the movable seat 220 is clamped between the first seat 211 and the second seat 212, and since the movable seat 220 is connected to the water-cooled heat shield 100, the position of the water-cooled heat shield 100 is fixed; in the second state, the movable seat 220 is movable in the movable space 213 between the first seat 211 and the second seat 212, so that the position of the water-cooled heat shield 100 can be adjusted.

[0037] It should be noted that the connecting relationship between the movable seat 220 and the water-cooled heat shield 100 is that the movable seat 220 and the connecting rod 120 of the water-cooled heat shield 100 are connected, and the connection here refers to fixed connection, integral molding or detachable connection; specifically, the movable seat 220 is annularly arranged on the connecting rod 120, and the connecting rod 120 (and the water-cooled heat shield 100) can be erected on the first seat 211 through the movable seat 220; or, the movable seat 220 can be integrally formed with the connecting rod 120, and the connecting rod 120 (and the water-cooled heat shield 100) can be erected on the first seat 211 through the movable seat 220; or, the movable seat 220 and the connecting rod 120 can be detachably connected, and the movable seat 220 is sleeved on the connecting rod 120, and the upper and lower parts of the movable seat 220 can be fixed by nuts, so that the connecting rod 120 (and the water-cooled heat shield 100) can also be erected on the first seat 211 through the movable seat 220.

[0038] In addition, when the movable seat 220 and the connecting rod 120 are integrally formed, in order to facilitate the installation between the water-cooled heat shield 100 (connecting rod 120) and the fixed seat 210, the fixed seat 210 can be in a spliced and detachable manner.

[0039] As shown in Figure 2 , 3 , the second seat 212 is located on one side of the first seat 211, and specifically, in the case of stacking of the first seat 211 and the second seat 212, the first seat 211 is located below the second seat 212, the first seat 211 is fixed, and the second seat 212 is movable relative to the first seat 211, that is, the movable seat 220 is carried on the first seat 211, and the movable seat 220 is fixed between the first seat 211 and the second seat 212 by the second seat 212 located above the movable seat 220 pressing down. Among them, a supporting surface 2111 is arranged on the first seat 211, and the supporting surface 2111 is used to support the movable seat 220, and the supporting surface 2111 is horizontally arranged, so that in the second state, the movable seat 220 and the water-cooled heat shield 100 can be adjusted in position along the horizontal direction on the supporting surface 2111.

[0040] Further, as shown in Figure 2 , 3As shown, the first seat 211 and the second seat 212 are connected through the adjusting member 230, and the locking state of the movable seat 220 is adjusted through the adjusting member 230, in other words, the locking or releasing state between the first seat 211 and the second seat 212 is adjusted through the adjusting member 230, so that the movable seat 220 can be switched between the first state and the second state; in this way, the adjusting member 230 can lock the movable seat 220 and the first seat 211 and the second seat 212, so that the movable seat 220 is in the first state, at this time, the movable seat 220 and the water-cooled heat shield 100 are fixed in position; the adjusting member 230 can also release the movable seat 220, so that the movable seat 220 is allowed to move horizontally in the movable space 213, thereby realizing the position adjustment of the movable seat 220 and the water-cooled heat shield 100. In an embodiment, the adjusting member 230 is provided in multiple groups, and the multiple groups of adjusting members 230 are annularly arranged on the side of the connecting rod 120, thereby improving the stability of the adjusting member 230 to the movable seat 220 in the first state.

[0041] In order to increase the sealing performance, as shown, Figure 3 The movable seat 220 is sleeved on the connecting rod 120, and the first sealing member 240 is arranged between the movable seat 220 and the connecting rod 120; in an embodiment, the first sealing member 240 is an X-shaped sealing ring. At the same time, the second sealing member 250 is arranged between the movable seat 220 and the fixed seat 210, so as to prevent the gas in the single crystal furnace from leaking; in an embodiment, the second sealing member 250 is an O-shaped sealing ring. It can be understood that when the movable seat 220 and the connecting rod 120 are integrally formed, no sealing member is needed between the movable seat 220 and the connecting rod 120.

[0042] The embodiment also provides a single crystal furnace, as shown, Figure 4 The single crystal furnace comprises a furnace cover 300, a water-cooled heat shield 100 and a driving mechanism 400. The water-cooled heat shield 100 is arranged below the furnace cover 300, and the connecting rod 120 at least partially penetrates through the furnace cover 300 to support and hoist the water-cooled heat shield 100.

[0043] The driving mechanism 400 is connected to the furnace cover 300 and is used to drive the water-cooled heat shield 100 to ascend and descend; in the embodiment, the driving mechanism 400 is a lifting cylinder or an electric lifting device.

[0044] The water-cooled heat shield 100 and the driving mechanism 400 have the above-mentioned connecting structure 200; the movable seat 220 is connected to the connecting rod 120, and the fixed seat 210 is connected to the driving mechanism 400; since the movable seat 220 can move in the movable space 213 of the fixed seat 210, the movable seat 220 can be adjusted to be centered; the driving mechanism 400 is fixedly connected to the first seat 211; when it is needed to adjust the position of the water-cooled heat shield 100, the driving mechanism 400 drives the movable seat 220 and the water-cooled heat shield 100 to ascend and descend together through the first seat 211.

[0045] It should be noted that the connecting relationship between the movable seat 220 and the water-cooled heat shield 100 is that the movable seat 220 is connected with the connecting rod 120 of the water-cooled heat shield 100, and the connection here refers to fixed connection, integral molding or detachable connection; specifically, the movable seat 220 is annularly arranged on the connecting rod 120, and the connecting rod 120 (and the water-cooled heat shield 100) can be erected on the first seat 211 through the movable seat 220; or, the movable seat 220 can be integrally formed with the connecting rod 120, and the connecting rod 120 (and the water-cooled heat shield 100) can be erected on the first seat 211 through the movable seat 220; or, the movable seat 220 and the connecting rod 120 are detachably connected, the movable seat 220 is sleeved on the connecting rod 120, and the upper and lower parts of the movable seat 220 can be fixed by using nuts, so that the connecting rod 120 (and the water-cooled heat shield 100) can also be erected on the first seat 211 through the movable seat 220.

[0046] In order to maintain the stability and lifting consistency of the water-cooled heat shield 100 during lifting, the connecting rod 120 has at least three groups and is uniformly connected to the circumferential side of the body 110, so that the stability and centering effect can be maintained even if the water-cooled heat shield 100 is disturbed by external force during lifting.

[0047] Further, at least one connecting rod 120 serves as a water inlet of the water-cooled heat shield 100, and at least one connecting rod 120 serves as a water outlet of the water-cooled heat shield 100, so that the cooling water in the water-cooled heat shield 100 can be circulated and replaced.

[0048] Working principle / steps:

[0049] The connecting structure 200 is composed of the fixed seat 210 (including the first seat 211 and the second seat 212) and the movable seat 220. The first seat 211 and the second seat 212 of the fixed seat 210 are arranged in a stacked manner, and the second seat 212 can move relative to the first seat 211 in the horizontal direction to form an adjustable movable space 213; the movable seat 220 is connected to the connecting rod 120 of the water-cooled heat shield 100 and located in the movable space 213. By adjusting the plurality of adjusting members 230 (such as bolts) between the first seat 211 and the second seat 212, the locking or releasing of the movable seat 220 can be realized. In the first state, the first seat 211 and the second seat 212 are close to each other and clamp the movable seat 220 to fix it; in the second state, the first seat 211 and the second seat 212 are away from each other to release the movable seat 220, so that the movable seat 220 can freely move in the movable space 213, which facilitates the centering adjustment of the water-cooled heat shield 100.

[0050] Although the preferred embodiments of the present application have been described, those skilled in the art can make further changes and modifications to the embodiments once they understand the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0051] Obviously, numerous modifications and variations of the present application are possible in light of the above teachings. It is therefore to be understood that within the scope of the appended claims, the application can be practiced otherwise than as specifically described herein.

Claims

1. A connection structure of a water-cooled heat shield, applied to a water-cooled heat shield, characterized by, include: The fixing base includes: The first one; The second seat is located on one side of the first seat and is movable relative to the first seat so that an adjustable space is formed between the second seat and the first seat. The movable seat is used to connect the connecting rod of the water-cooled heatsink. The movable seat and the connecting rod of the water-cooled heatsink are fixed relative to each other. The movable seat is located within the movable space. The movable seat is adjusted by the fixed seat to form at least a first state and a second state. In the first state, the first seat and the second seat move close to each other to clamp the movable seat and fix the movable seat in place; In the second state, the first seat and the second seat are moved away from each other so that the movable seat can move within the movable space.

2. A water-cooled heat shield attachment structure according to claim 1, wherein The first seat and the second seat are stacked, with the first seat located below the second seat. The first seat has a support surface on its upper part for supporting the movable seat. The support surface is a horizontal plane, so that the movable seat and the water-cooled heat shield can be adjusted in the horizontal direction.

3. A water cooled heat shield attachment structure according to claim 1 or 2, wherein An adjusting member is connected between the first seat and the second seat. The adjusting member is used to lock the movable seat between the first seat and the second seat to fix the movable seat, or to release the movable seat to allow the movable seat to move.

4. A water cooled heat shield attachment structure according to claim 3, wherein Multiple adjusting components are provided, and the multiple adjusting components are evenly arranged around the periphery of the connecting rod of the water-cooled heat shield.

5. The water-cooled heat shield attachment structure of claim 1, wherein The movable seat is used to mount the connecting rod of the water-cooled heat shield, and a first sealing element is provided between the movable seat and the connecting rod of the water-cooled heat shield.

6. The water-cooled heat shield attachment structure of claim 1, wherein The movable seat and the connecting rod of the water-cooled heat shield are integrally formed.

7. A water cooled heat shield attachment structure according to claim 5 or 6, wherein A second sealing element is provided between the movable seat and the fixed seat.

8. A single crystal furnace characterized by comprising: include: Stove lid; Water-cooled heat shield, the water-cooled heat shield comprising: The main body is located below the furnace cover; A connecting rod, the connecting rod being connected to the body, the connecting rod at least partially passing through the furnace cover; and A drive mechanism connected to the furnace cover; The water-cooled hot screen and the driving mechanism are connected by a connection structure as described in any one of claims 1-7, the movable seat is connected to the connecting rod, and the fixed seat is connected to the driving mechanism to drive the water-cooled hot screen to rise and fall.

9. A single crystal furnace as defined in claim 8, wherein The connecting rod has at least three sets.

10. A single crystal furnace as defined in claim 9, wherein The connecting rods are evenly wrapped around the periphery of the body.

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