Wafer carrier positioning detection device

Abstract

The utility model discloses a wafer carrier positioning detection device which comprises a supporting plate, one end of the supporting plate is connected with a first limiting block, and two sides of the other end of the supporting plate are respectively provided with a first limiting detection mechanism and a second limiting detection mechanism. The first limiting detection mechanism and the second limiting detection mechanism each comprise a first limiting block, a bearing plate and a blocking piece fixedly connected to the end of the first limiting block, and a rotatable induction piece and a sensor corresponding to the induction piece are installed in the bearing plate. The sensor is used for detecting the state that the sensing piece extends out of the bearing plate or is located in the bearing plate. According to the device, the wafer carrying frame can be positioned and detected by placing the wafer carrying frame on the supporting plate and the bearing plate, strict matching with the boundary dimension of the wafer carrying frame is not needed, the detection reliability cannot be influenced by slight deviation or vibration of the placing position of the wafer carrying frame, and the detection precision is high; moreover, the device can adapt to diversified wafer carrier sizes, is high in adjustment flexibility, is convenient to operate, and is rapid in adjustment.

Description

TECHNICAL FIELD

[0001] The utility model relates to a wafer carrier positioning detection device and belongs to the wafer carrier positioning detection technical field. BACKGROUND

[0002] The existing wafer carrier positioning detection device usually adopts a proximity switch as a core detection means, and its principle relies on the specific cooperation of the wafer carrier's outer shape structure to realize signal triggering. However, such technology has significant limitations:

[0003] 1. Limited application scope: The installation position of the proximity switch and the trigger logic need to strictly match the outer dimensions of the wafer carrier, resulting in the device being able to adapt only to wafer carriers of specific specifications and being unable to accommodate products with large size differences.

[0004] 2. Insufficient adjustment flexibility: When the size of the wafer carrier changes, complex adjustments need to be made to the mechanical structure of the detection device, which is tedious to operate and difficult to ensure detection accuracy, affecting the universality of the equipment and production efficiency.

[0005] 3. Detection stability problems: When the wafer carrier placement position is slightly offset or vibrates, the proximity switch is prone to false positives due to signal interference, affecting detection reliability.

[0006] Therefore, there is an urgent need for a positioning detection device that can adapt to various wafer carrier sizes, is convenient to adjust, and has high detection accuracy to address the shortcomings of existing technology. UTILITY MODEL CONTENT

[0007] The utility model aims to provide a wafer carrier positioning detection device that can adapt to various wafer carrier sizes, is convenient to adjust, and has high detection accuracy.

[0008] To achieve this purpose, the utility model adopts the following technical solutions:

[0009] A wafer carrier positioning detection device includes a support plate, one end of which is connected to a first limiting block, and the other end of the support plate is provided with a first limiting detection mechanism and a second limiting detection mechanism arranged symmetrically on both sides. The first limiting detection mechanism and the second limiting detection mechanism each include a first limiting block, a bearing plate arranged on one side of the first limiting block, and a baffle fixedly connected to the end of the first limiting block. The bearing plate is installed with a rotatable sensing sheet and a sensor corresponding to the sensing sheet. The sensor is used to detect the state of the sensing sheet being outside the bearing plate or inside the bearing plate.

[0010] In an embodiment of the utility model, the first limit detection mechanism and the second limit detection mechanism are same in structure, the bearing plate is internally provided with a containing groove, the inductive sheet and the sensor are installed in the containing groove, the containing groove is provided with a pin hole, a pin is arranged in the pin hole, and one end of the inductive sheet is rotationally connected with the pin.

[0011] In an embodiment of the utility model, the other end of the inductive sheet is arranged with a limiting shaft, the limiting shaft is located in the containing groove and is fixedly connected with the bearing plate, the end of the limiting shaft is provided with a head, the outer periphery of the limiting shaft is sleeved with a check ring, and the check ring is abutted below the inductive sheet.

[0012] In an embodiment of the utility model, the outer periphery of the limiting shaft between the check ring and the head is sleeved with a spring, and the spring is abutted between the check ring and the head.

[0013] In an embodiment of the utility model, the inductive sheet is of a bending structure, and the spring is used for ejecting the inductive sheet out of the bearing plate.

[0014] In an embodiment of the utility model, the bearing plate is flush with the support plate.

[0015] In an embodiment of the utility model, the first limiting block and the check sheet are higher than the bearing plate and the support plate.

[0016] In an embodiment of the utility model, the sensor is a fiber sensor.

[0017] In an embodiment of the utility model, the first limit detection mechanism and the second limit detection mechanism further comprise a base, the base is provided with a second sliding groove, the first limiting block is slidably connected to the second sliding groove, and a second adjusting screw is arranged between the first limiting block and the second sliding groove, and the second adjusting screw is used for adjusting the position of the first limiting block on the second sliding groove.

[0018] In an embodiment of the utility model, one end of the support plate is provided with a first sliding groove, the first limiting block is slidably connected to the first sliding groove, and a first adjusting screw is arranged between the first limiting block and the first sliding groove, and the first adjusting screw is used for adjusting the position of the first limiting block on the first sliding groove.

[0019] The utility model has the advantages of:

[0020] The utility model provides a wafer carrier positioning detection device, the front -back direction of wafer carrier is by first limit piece and baffle and is limited, the left -right direction of wafer carrier is by first limit detection mechanism and second limit detection mechanism and is limited. Through adjusting first adjusting screw, it can adapt to the wafer carrier of different size in front -back direction, through adjusting the second adjusting screw of first limit detection mechanism and second limit detection mechanism, it can adapt to the wafer carrier of different size in left -right direction. Therefore, the wafer carrier positioning detection device can complete the positioning detection of wafer carrier by placing wafer carrier on support plate and bearing plate, does not need to match the appearance size of wafer carrier strictly, also can not because wafer carrier placement position has a little deviation or vibration and influences detection reliability, and detection precision is high. And the device can adapt to the size of diversified wafer carrier through adjustable first limit piece, baffle, first limit detection mechanism and second limit detection mechanism, can be compatible with the product of larger size difference, and the regulation flexibility is high, and it is convenient to operate, and the regulation is quick. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the perspective view of wafer carrier positioning detection device provided by the utility model.

[0022] Figure 2 It is the perspective view of wafer carrier positioning detection device provided by the utility model. Figure 1

[0023] Figure 3 It is the perspective view of wafer carrier positioning detection device provided by the utility model.

[0024] Figure 4 It is the perspective view of wafer carrier positioning detection device provided by the utility model.

[0025] Figure 5 It is the perspective view of wafer carrier positioning detection device provided by the utility model.

[0026] Figure 6 It is the perspective view of wafer carrier positioning detection device provided by the utility model.

[0027] Figure 7 It is the perspective view of wafer carrier positioning detection device provided by the utility model. Figure 6

[0028] In the drawing: 1, support plate;2, first limit piece;21, first sliding slot;22, first adjusting screw;3, first limit detection mechanism;31, first limit piece;311, second adjusting screw;32, base;321, second sliding slot;33, accommodating groove;34, inductive sheet;35, sensor;36, limit shaft;361, end;362, baffle ring;37, pin;38, pin hole;39, bearing plate;4, second limit detection mechanism;5, baffle. DETAILED DESCRIPTION ​​

[0029] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0030] In the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0031] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0032] As shown in Figures 1-7 The wafer carrier positioning detection device provided by the present application includes a support plate 1, one end of the support plate 1 is slidably connected with a first limiting block 2, the other end of the support plate 1 is provided with a first limiting detection mechanism 3 and a second limiting detection mechanism 4 arranged symmetrically on both sides, respectively, the first limiting detection mechanism 3 and the second limiting detection mechanism 4 each include a first limiting block 31, a bearing plate 39 arranged on one side of the first limiting block 31, and a baffle 5 fixedly connected to the end of the first limiting block 31, the bearing plate 39 is provided with a rotatable sensing sheet 34 and a sensor 35 corresponding to the sensing sheet 34, the sensor 35 is used for detecting the state that the sensing sheet 34 is located outside the bearing plate 39 or in the bearing plate 39.

[0033] In some embodiments, the first and second limit detection mechanisms 3 and 4 have the same structure, and the bearing plate 39 is provided with a receiving groove 33, the sensing sheet 34 and the sensor 35 are installed in the receiving groove 33, the receiving groove 33 is provided with a pin hole 38, a pin 37 is arranged in the pin hole 38, and one end of the sensing sheet 34 is rotationally connected with the pin 37.

[0034] In some embodiments, the other end of the sensing sheet 34 is provided with a limiting shaft 36, the limiting shaft 36 is located in the receiving groove 33 and fixedly connected with the bearing plate 39, the end of the limiting shaft 36 is provided with an end head 361, the outer periphery of the limiting shaft 36 is sleeved with a check ring 362, the check ring 362 abuts against the lower side of the sensing sheet 34, and the outer periphery of the limiting shaft 36 between the check ring 362 and the end head 361 is sleeved with a spring (not shown in the figure), and the spring abuts against the check ring 362 and the end head 361.

[0035] Further, the sensing sheet 34 is of a bent structure, and the spring is used to push the sensing sheet 34 out of the bearing plate 39. The sensing sheet 34 can adopt different shapes, including rectangular, circular, customized contour or multi-segment structure, which can better adapt to various detection requirements, improve detection accuracy, optimize space utilization, and enhance compatibility with different types of carriers, thereby realizing higher applicability and efficiency.

[0036] Further, the bearing plate 39 is flush with the support plate 1. In addition, the bearing plate 39 and the support plate 1 can be diversified according to actual application requirements, for example, different materials, sizes, shapes or structure designs can be adopted, and special functional components such as shockproof structure, weight sensing, rotation function or others can be added to improve the stability and practicability of the whole system.

[0037] In the embodiment, the wafer carrier is placed on the bearing plate 39 and the support plate 1, the weight of the wafer carrier is applied to the sensing sheet 34 of the bent structure, and the elastic force of the spring is overcome to make the sensing sheet 34 rotate around the pin 37, and then the sensing sheet 34 is lowered into the bearing plate 39, and the lowered sensing sheet 34 is detected by the sensor 35 on one side of the sensing sheet 34, so as to realize detection of whether the sensing sheet 34 is in the state of extending out of the bearing plate 39 or in the state of being located in the bearing plate 39, thereby realizing positioning detection of the wafer carrier.

[0038] Optionally, the first limiting block 2 and the baffle 5 are higher than the bearing plate 39 and the support plate 1.

[0039] When the sensing sheet 34 in the first limit detection mechanism 3 and the second limit detection mechanism 4 is detected, the wafer carrier is placed in position. When the wafer carrier is placed on the first limit block 2 or the baffle 5, the wafer carrier is supported by the first limit block 2 or the baffle 5, so that it will not press on the sensing sheet 34 of the bearing plate 39. The elastic force of the spring will push the sensing sheet 34 out of the bearing plate 39, so that the sensing sheet 34 will not be pressed down, and the sensing sheet 34 will not be detected by the sensor 35.

[0040] Optionally, the sensor 35 is an optical fiber sensor. The optical fiber sensor has high sensitivity and precise detection capability, and can realize millimeter-level or even higher precision measurement. In addition, other types of sensors can also be used in the detection system of the present application, such as small spot sensors, infrared sensors, ultrasonic sensors or laser sensors, etc. Such high-precision detection capability enables the sensor to achieve accurate detection and real-time monitoring in complex industrial environments, ensuring the stability and reliability of the equipment operation.

[0041] In some embodiments, the first limit detection mechanism 3 and the second limit detection mechanism 4 further comprise a base 32 provided with a second sliding groove 321, and the first limit block 31 is slidably connected to the second sliding groove 321 and provided with a second adjusting screw 311 between the first limit block 31 and the second sliding groove 321. The second adjusting screw 311 is used to adjust the position of the first limit block 31 on the second sliding groove 321.

[0042] In some embodiments, one end of the support plate 1 is provided with a first sliding groove 21, and the first limit block 2 is slidably connected to the first sliding groove 21 and provided with a first adjusting screw 22 between the first limit block 2 and the first sliding groove 21. The first adjusting screw 22 is used to adjust the position of the first limit block 2 on the first sliding groove 21.

[0043] In the embodiment, the front-rear direction of the wafer carrier is limited by the first limiting block 2 and the stopper 5, and the left-right direction of the wafer carrier is limited by the first limiting detection mechanism 3 and the second limiting detection mechanism 4. By adjusting the first adjusting screw 22, wafer carriers of different sizes in the front-rear direction can be adapted, and by adjusting the second adjusting screw 311 of the first limiting detection mechanism 3 and the second limiting detection mechanism 4, wafer carriers of different sizes in the left-right direction can be adapted. Thus, the wafer carrier positioning detection device can complete the positioning detection of the wafer carrier by placing the wafer carrier on the support plate and the bearing plate, without the need to strictly match the size of the wafer carrier, and without affecting the detection reliability when the wafer carrier is slightly offset or vibrates, and the detection precision is high. Moreover, the device can adapt to diversified wafer carrier sizes through the adjustable first limiting block 2, stopper 5, first limiting detection mechanism 3, and second limiting detection mechanism 4, and is suitable for wafer sizes of 6 inches to 18 inches, thereby having wide compatibility, being able to adapt to products with large size differences, and having high adjustment flexibility, easy operation, and fast adjustment.

[0044] In the embodiment, a machine adjustment mechanism is provided, through flexible adjustment of the first adjusting screw 22 and the second adjusting screw 311, wafer carriers of different sizes can be accurately positioned and stably fixed in the device. The adjustment mechanism has high adaptability and can be quickly adjusted according to wafer carriers of different specifications without the need to replace additional parts, thereby significantly improving the convenience and efficiency of operation, reducing the time required for equipment adjustment, and improving the overall production efficiency. In particular, in a production environment where wafer sizes need to be frequently changed, the design can quickly adapt to wafer carriers of 6 inches to 18 inches, providing an efficient, flexible, and easy-to-operate solution for users. The adjustment process is fast and efficient, and the running parameters can be accurately modified. The design does not require disassembly or opening of the machine, thereby reducing downtime and simplifying the adjustment process.

[0045] When an operator needs to adjust machine parameters, only simple operations need to be performed on the external adjustment interface, such as rotating a screw, sliding an adjusting rod, inputting a set value, or touching a screen, and the system responds immediately and adjusts the corresponding internal components. For example, in precision manufacturing or semiconductor packaging processes, micron-level errors can affect the quality of the final product, and the high-precision detection and adjustment system provided by the utility model can calibrate parameters in real time, avoid error accumulation, and ensure production consistency. The utility model maximizes the simplification of the operation process while ensuring high-performance operation of the equipment, providing a more efficient and reliable solution for industrial production and equipment maintenance.

[0046] The principle and implementation mode of the present application are described by using specific embodiments, and the above embodiment is only used for helping to understand the method and core idea of the present application. It should be pointed out that, for ordinary skilled persons in the technical field, without departing from the principle of the present application, the present application can be improved and modified in several ways, and these improvements and modifications also fall within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A wafer carrier positioning detection apparatus, comprising: The application relates to a support plate, one end of which is slidably connected with a first limiting block, and the other end of the support plate is provided with symmetrically arranged first limiting detection mechanisms and second limiting detection mechanisms on the two sides, respectively; the first limiting detection mechanisms and the second limiting detection mechanisms both comprise the first limiting block, a bearing plate arranged on one side of the first limiting block, and a baffle fixedly connected to the end of the first limiting block; a rotatable sensing sheet is arranged in the bearing plate; and a sensor corresponding to the sensing sheet is arranged in the bearing plate; the sensor is used for detecting the state of the sensing sheet being stretched out of the bearing plate or being located in the bearing plate.

2. A wafer carrier positioning detection apparatus as set forth in claim 1, wherein The first limiting detection mechanisms and the second limiting detection mechanisms are the same in structure, the bearing plate is provided with a containing groove, the sensing sheet and the sensor are arranged in the containing groove, the containing groove is provided with a pin hole, a pin is arranged in the pin hole, and one end of the sensing sheet is rotatably connected with the pin.

3. A wafer carrier position detection apparatus as set forth in claim 2, wherein The other end of the sensing sheet is provided with a limiting shaft, the limiting shaft is located in the containing groove and is fixedly connected with the bearing plate, the end of the limiting shaft is provided with an end head, the outer periphery of the limiting shaft is provided with a stop ring, and the stop ring abuts against the lower side of the sensing sheet.

4. The wafer carrier position detection apparatus of claim 3, wherein The outer periphery of the limiting shaft between the stop ring and the end head is provided with a spring, and the spring abuts against the stop ring and the end head.

5. A wafer carrier position detection apparatus as set forth in claim 4, wherein The sensing sheet is of a bending structure, and the spring is used for pushing the sensing sheet out of the bearing plate.

6. A wafer carrier position detection apparatus as set forth in claim 5, wherein The bearing plate is flush with the support plate.

7. A wafer carrier position detection apparatus as set forth in claim 6, wherein The first limiting block and the baffle are higher than the bearing plate and the support plate.

8. The wafer carrier position detection apparatus of claim 1, wherein The sensor is an optical fiber sensor.

9. The wafer carrier position detection apparatus of claim 5, wherein The first limiting detection mechanisms and the second limiting detection mechanisms further comprise a base, the base is provided with a second sliding groove, the first limiting block is slidably connected with the second sliding groove, and a second adjusting screw is arranged between the first limiting block and the second sliding groove, and the second adjusting screw is used for adjusting the position of the first limiting block on the second sliding groove.

10. The wafer carrier position detection apparatus of claim 1, wherein One end of the support plate is provided with a first sliding groove, the first limiting block is slidably connected with the first sliding groove, and a first adjusting screw is arranged between the first limiting block and the first sliding groove, and the first adjusting screw is used for adjusting the position of the first limiting block on the first sliding groove.

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