Conductive performance testing equipment for copper-interconnected nano-film

Abstract

The utility model discloses a conductive performance testing device for a copper interconnection nano film, which comprises a four-probe tester, a control panel is arranged at the front end of the four-probe tester, a testing mechanism is arranged at the top of the four-probe tester, a connecting mechanism is arranged on the testing mechanism, the testing mechanism comprises a testing table, and a testing device is arranged on the testing table. One side of the top of the detection table is fixedly connected with a vertical frame, and the vertical frame is fixedly connected with an electric push rod. According to the conductive performance test equipment for the copper-interconnected nano-film, the nano-film is placed on the placement table, an electromagnet generates attractive force on a magnet block after being electrified, so that a movable base can synchronously move with a second sliding seat, and then the nano-film is moved by a first motor and a second motor; the conductive performance of multiple positions on the nano-film can be tested, the nano-film can be conveniently replaced, the test range is expanded, and the test effect is effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to conductive performance test technical field, concretely is a kind of copper interconnection nanometer film's conductive performance test equipment. BACKGROUND

[0002] When copper interconnection nanometer film carries out conductive performance test, generally uses four-probe tester to test, in prior art, four-probe tester is limited to the test position and range of nanometer film when using, and it is not convenient to replace nanometer film, so that test effect is not ideal.

[0003] For example patent announcement No. CN212433224U, specifically a kind of four-probe tester for semiconductor material test, the four-probe tester for semiconductor material test includes: detector placement table, the placement table is fixedly installed on the top of detector;Detection table, the detection table is rotatably installed on the top of placement table;Lifter, the lifter is fixedly installed on placement table;Detector, the detector is fixedly installed on lifter;First rotating groove, the first rotating groove is opened in the side of placement table;Internal thread pipe, the internal thread pipe is rotatably installed in first rotating groove, one end of the internal thread pipe extends to the outside of first rotating groove;Adjusting wheel, the adjusting wheel is fixedly installed on one end of internal thread pipe;Slide groove, the slide groove is opened on the inner wall of the side of first rotating groove, the four-probe tester for semiconductor material test provided by the utility model has the advantages of convenient use, and the detected body is moved to the bottom of probe, there is the problem that the test position and range of nanometer film are limited, and nanometer film is not replaced conveniently, so that test effect is not ideal. UTILITY MODEL CONTENTS

[0004] In view of the deficiencies of the prior art, the utility model provides a kind of copper interconnection nanometer film's conductive performance test equipment, solve the test position and range of nanometer film are limited, and nanometer film is not replaced conveniently, so that test effect is not ideal.

[0005] To achieve the above object, the utility model is realized by the following technical scheme: a kind of copper interconnection nanometer film's conductive performance test equipment, including four-probe tester, the control panel is equipped in the front end of four-probe tester, test mechanism is equipped in the top of four-probe tester, connection mechanism is equipped on test mechanism;

[0006] The test mechanism comprises a detection table, a stand fixedly connected to one side of the top of the detection table, an electric push rod fixedly connected to the stand, a four-probe probe head mounted at the output shaft end of the electric push rod, a movable base placed on the detection table, a slot provided on the movable base, a plurality of universal wheels mounted on the bottom of the movable base, a magnet block fixedly connected to the center of the bottom of the movable base, a placing table inserted into the top of the movable base, a guide slide rail fixedly connected to the inside of the detection table, a first sliding seat slidingly connected to the guide slide rail, a first screw rod threadedly connected to the inside of the first sliding seat, a first motor fixedly connected to the end of the first screw rod, a guide frame fixedly connected to the top of the first sliding seat, a second screw rod rotatably connected to the inside of the guide frame, a second motor fixedly connected to the end of the second screw rod, a second sliding seat threadedly connected to the second screw rod, and an electromagnet fixedly connected to the second sliding seat.

[0007] Preferably, mounting screw holes are formed in the detection table, and a threaded block is fixedly connected to the bottom end of the stand, so that the stand is detachably connected to the detection table through the threaded block and the mounting screw holes, thereby facilitating disassembly and replacement of the stand.

[0008] Preferably, the magnet block is matched with the electromagnet, and the magnetic poles at the opposite ends of the magnet block and the electromagnet are opposite, so that the electromagnet can generate an attractive force to the magnet block.

[0009] Preferably, the first screw rod is rotatably connected to the inner wall of the detection table, and the first motor is fixedly mounted on the detection table, so that the first motor can drive the first screw rod to rotate.

[0010] Preferably, the second motor is fixedly mounted on the guide frame, and the output shaft end of the second motor is connected to the second screw rod, so that the second motor can drive the second screw rod to rotate.

[0011] Preferably, the second sliding seat is slidingly connected to the inner wall of the guide frame, and the electromagnet is detachably connected to the second sliding seat through bolts, so that the electromagnet can be conveniently replaced and disassembled.

[0012] Preferably, the connecting mechanism comprises a fixed L-shaped frame and a connecting plate, the fixed L-shaped frame and the connecting plate are respectively fixedly connected to the surfaces on both sides of the detection table, a guide rod is slidingly connected to the inside of the connecting plate, a locking plate is fixedly connected to the end of the guide rod, a locking screw rod is rotatably connected to the locking plate, and the end of the locking screw rod is threadedly connected to the connecting plate, so that the detection table can be conveniently disassembled and assembled.

[0013] The utility model provides a kind of conductive performance test equipment of copper interconnection nanometer film.Compared with prior art, it has the following beneficial effects:

[0014] 1. The copper interconnection nanometer film conductive performance test equipment, through the nanometer film is placed on the placement platform, the electromagnet is electrified and generates the attraction to the magnet block, so that the movable base can move synchronously with the second sliding seat, and then the first motor and the second motor move the nanometer film, so that the conductive performance of multiple positions on the nanometer film can be tested, and the nanometer film can be conveniently replaced, the test range is expanded, and the test effect is effectively improved.

[0015] 2. The copper interconnection nanometer film conductive performance test equipment, by placing the fixed L-shaped frame on the four-probe tester, then rotating the locking screw, the locking screw rotates into the connecting plate, the locking screw moves to drive the locking plate to move, so that the locking plate is tightly pressed on the four-probe tester, so that the detection table can be conveniently disassembled. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the overall structure schematic view of the utility model;

[0017] Figure 2 It is the test mechanism structure schematic view of the utility model;

[0018] Figure 3 It is the detection table internal structure schematic view of the utility model;

[0019] Figure 4 It is the connecting mechanism structure schematic view of the utility model.

[0020] In the drawing: 1, four-probe tester; 2, test mechanism; 201, detection table; 202, stand; 203, electric push rod; 204, four-probe probe; 205, movable base; 206, universal wheel; 207, slot; 208, magnet block; 209, placement platform; 210, guide rail; 211, first sliding seat; 212, first screw; 213, first motor; 214, guide frame; 215, second screw; 216, second motor; 217, second sliding seat; 218, electromagnet; 3, control panel; 4, connecting mechanism; 401, fixed L-shaped frame; 402, connecting plate; 403, locking plate; 404, locking screw; 405, guide rod. DETAILED DESCRIPTION

[0021] The technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0022] Please refer to Figures 1-3The utility model provides a technical scheme: a kind of copper interconnect nanometer film's conductivity testing equipment, equipped with four-probe software test system, the system runs on computer, has friendly test interface, can assist user to carry out each test simply, and the test data is statistically analyzed, four-probe tester 1 front end is equipped with control panel 3, four-probe tester 1 top is equipped with testing mechanism 2, testing mechanism 2 is equipped with connecting mechanism 4, can be moved by testing mechanism 2 to drive nanometer film, so that the conductivity of multiple positions on nanometer film can be tested, and it is convenient to replace nanometer film, expand test range, effectively improve test effect.

[0023] The testing mechanism 2 comprises a detection table 201, one side of the top of the detection table 201 is fixedly connected with a stand 202, the detection table 201 is provided with mounting screw holes, the bottom end of the stand 202 is fixedly connected with a threaded block, the stand 202 is detachably connected with the detection table 201 through the threaded block and the mounting screw holes, so that the stand 202 can be conveniently disassembled and replaced, the stand 202 is fixedly connected with an electric push rod 203, the output shaft end of the electric push rod 203 is provided with four-probe probes 204, the electric push rod 203 can drive the four-probe probes 204 to ascend and descend, the four-probe probes 204 are connected with the interface on the control panel 3 through a connecting line, the four probes on the four-probe probes 204 can effectively test the resistivity of the nanometer film, so as to test the conductivity, the detection table 201 is provided with a movable base 205, the movable base 205 is provided with a slot 207, a plurality of universal wheels 206 are mounted on the bottom of the movable base 205, so that the movable base 205 can be conveniently moved, a magnet block 208 is fixedly connected to the central part of the bottom of the movable base 205, a placing table 209 is inserted on the top of the movable base 205, so that the placing table 209 can be conveniently replaced, and the nanometer film can be conveniently replaced, a guide sliding rail 210 is fixedly connected in the detection table 201, a first sliding seat 211 is slidably connected on the guide sliding rail 210, a first screw rod 212 is threadedly connected in the first sliding seat 211, a first motor 213 is fixedly connected to the end of the first screw rod 212, the first screw rod 212 is rotatably connected with the inner wall of the detection table 201, the first motor 213 is fixedly mounted on the detection table 201, so that the first motor 213 can drive the first screw rod 212 to rotate, a guide frame 214 is fixedly connected to the top of the first sliding seat 211, a second screw rod 215 is rotatably connected in the guide frame 214, a second motor 216 is fixedly connected to the end of the second screw rod 215, the second motor 216 is fixedly mounted on the guide frame 214, the output shaft end of the second motor 216 is connected with the second screw rod 215, so that the second motor 216 can drive the second screw rod 215 to rotate, a second sliding seat 217 is threadedly connected on the second screw rod 215, the second sliding seat 217 is slidably connected with the inner wall of the guide frame 214, an electromagnet 218 is detachably connected with the second sliding seat 217 through bolts, so that the electromagnet 218 can be conveniently replaced and disassembled, the electromagnet 218 is fixedly connected on the second sliding seat 217, the magnet block 208 is matched with the electromagnet 218, the magnetic poles of the electromagnet 218 and the magnet block 208 are opposite to each other, so that the electromagnet 218 can generate an attractive force to the magnet block 208.

[0024] See Figure 1 and Figure 4The connecting mechanism 4 comprises a fixed L-shaped frame 401 and a connecting plate 402, the fixed L-shaped frame 401 and the connecting plate 402 are fixedly connected with the surfaces on both sides of the detection table 201 respectively, a guide rod 405 is slidably connected in the connecting plate 402, the end of the guide rod 405 is fixedly connected with a locking plate 403, the locking plate 403 is rotatably connected with a locking screw 404, the end of the locking screw 404 is threadedly connected with the connecting plate 402, the fixed L-shaped frame 401 can be placed on the four-probe tester 1, then the locking screw 404 is rotated, the locking screw 404 is rotated into the connecting plate 402, the locking screw 404 moves to drive the locking plate 403 to move, so that the locking plate 403 is tightly pressed on the four-probe tester 1, so that the detection table 201 can be conveniently disassembled and assembled.

[0025] In work, the nano film is placed on the placing table 209, then the placing table 209 is inserted into the movable base 205, the electromagnet 218 is powered on, the electromagnet 218 generates an attractive force on the magnet block 208 after being powered on, so that the movable base 205 can move synchronously with the second sliding seat 217, then the first motor 213 drives the first screw rod 212 to rotate, the first screw rod 212 drives the first sliding seat 211 to move, the second motor 216 drives the second screw rod 215 to rotate, the second screw rod 215 drives the second sliding seat 217 to move, so that the second sliding seat 217 can drive the electromagnet 218 to move at any position in the detection table 201, so that the nano film can be moved, the conductive performance of multiple positions on the nano film can be tested, the nano film can be conveniently replaced, the test range is expanded, and the test effect is effectively improved.

[0026] Meanwhile, the contents not described in detail in the specification all belong to the prior art known by those skilled in the art.

Claims

1. A device for testing the electrical conductivity of a copper interconnect nanofilm, comprising a four-probe tester (1), characterized in that: The four-probe tester (1) is provided with a control panel (3) at the front end, and a testing mechanism (2) is arranged on the top of the four-probe tester (1), and a connecting mechanism (4) is arranged on the testing mechanism (2); The testing mechanism (2) comprises a detection table (201), a stand (202) is fixedly connected to one side of the top of the detection table (201), an electric push rod (203) is fixedly connected to the stand (202), a four-probe probe (204) is mounted at the output shaft end of the electric push rod (203), a movable base (205) is placed on the detection table (201), a slot (207) is arranged on the movable base (205), a plurality of universal wheels (206) are mounted on the bottom of the movable base (205), a magnet block (208) is fixedly connected to the central part of the bottom of the movable base (205), a placing table (209) is inserted into the top of the movable base (205), a guide slide rail (210) is fixedly connected inside the detection table (201), a first sliding seat (211) is slidably connected to the guide slide rail (210), a first screw rod (212) is threadedly connected inside the first sliding seat (211), a first motor (213) is fixedly connected to the end of the first screw rod (212), a guide frame (214) is fixedly connected to the top of the first sliding seat (211), a second screw rod (215) is rotatably connected inside the guide frame (214), a second motor (216) is fixedly connected to the end of the second screw rod (215), and a second sliding seat (217) is threadedly connected to the second screw rod (215), and an electromagnet (218) is fixedly connected to the second sliding seat (217).

2. The apparatus for testing the conductive performance of a copper interconnection nanofilm according to claim 1, wherein: A mounting screw hole is formed in the detection table (201), a threaded block is fixedly connected to the bottom end of the stand (202), and the stand (202) is detachably connected with the detection table (201) through the threaded block and the mounting screw hole.

3. The apparatus for testing the conductive performance of a copper interconnection nanofilm according to claim 1, wherein: The magnet block (208) is matched with the electromagnet (218), and the magnetic poles of the electromagnet (218) and the magnet block (208) are opposite.

4. The apparatus for testing the conductive performance of a copper interconnection nanofilm according to claim 1, wherein: The first screw rod (212) is rotatably connected with the inner wall of the detection table (201), and the first motor (213) is fixedly mounted on the detection table (201).

5. The apparatus for testing the conductive performance of a copper interconnection nanofilm according to claim 1, wherein: The second motor (216) is fixedly mounted on the guide frame (214), and the output shaft end of the second motor (216) is connected with the second screw rod (215).

6. The apparatus for testing the conductive performance of a copper interconnection nanofilm according to claim 1, wherein: The second sliding seat (217) is slidably connected with the inner wall of the guide frame (214), and the electromagnet (218) is detachably connected with the second sliding seat (217) through bolts.

7. The apparatus for testing the conductive performance of a copper interconnection nanofilm according to claim 1, wherein: The connecting mechanism (4) comprises a fixed L-shaped frame (401) and a connecting plate (402), and the fixed L-shaped frame (401) and the connecting plate (402) are respectively fixedly connected with the surfaces on both sides of the detection table (201).

8. The apparatus for testing the conductive performance of a copper interconnection nanofilm according to claim 7, wherein: The connecting plate (402) is internally slidably connected with a guide rod (405), the end of the guide rod (405) is fixedly connected with a locking plate (403), the locking plate (403) is rotatably connected with a locking screw (404), and the end of the locking screw (404) is threadedly connected with the connecting plate (402).

Images